Chip test probe platform

Abstract

The utility model discloses a chip test probe platform. The chip test probe platform comprises a fixed connection part; wherein the connecting part is provided with a driving track and a rotary fixing part; and the middle of the lever type rotation control piece is rotationally connected with the rotation fixing part, and the lever type rotation control piece is used for rotating on the rotation fixing part. Wherein the lever type rotation control piece is provided with a first end and a second end, the rotation path of the first end corresponds to the driving track, the first end is in sliding connection with the driving track, and the second end is provided with a probe; the radius of rotation of the first end exceeds the radius of rotation of the second end. The rotation radius of the first end of the lever type rotation control piece exceeds the rotation radius of the second end of the lever type rotation control piece, so that the action range of the control end is reduced to improve the precision and the stability. In addition, the control precision and stability can be improved through a track driving mode.

Description

Technical Field

[0001] The utility model belongs to the technical field of chip testing, and particularly relates to a chip testing probe platform. Background Art

[0002] The chip test probe station adjusts the position of the probe needle or adjusts the platform carrying the chip to be tested through a control system so that it contacts the electrode of the chip to be tested to complete the test. The probe platform usually used to fix the probe 3 does not have the function of rotating and adjusting the angle, so it is usually difficult to realize that the probe forms a certain angle with the chip to be tested. In the prior art, such as (CN212180864U), a scheme for adjusting the angle of the probe 3 by a ball-bar structure is disclosed, but since the precision requirement for the movement of the probe during the chip detection process is very high, the ball-bar type connection structure is difficult to meet the precision and stability requirements of the probe adjustment. Utility Model Content

[0003] Aiming at the problem that the precision of adjusting the probe angle in the existing chip test probe station is poor due to the unstable rotation structure, the utility model discloses a chip test probe platform, which is arranged in a chip detection device and includes:

[0004] A fixing component, one end of which is used to be fixed on the chip detection device, and the other end of which extends out of a connecting portion;

[0005] Wherein, a driving track and a rotating fixed part are provided on the connecting part, the driving track is an arc-shaped track, and the rotating fixed part is located at the center of the arc-shaped track;

[0006] A lever-type rotation control member, wherein the middle portion of the lever-type rotation control member is rotationally connected to the rotation fixing portion, and the lever-type rotation control member is used to rotate on the rotation fixing portion;

[0007] Wherein, the lever-type rotation control member has a first end and a second end, the rotation path of the first end corresponds to the driving track, the first end is slidably connected to the driving track, and a probe is arranged on the second end;

[0008] Wherein, the rotation radius of the first end exceeds the rotation radius of the second end.

[0009] Furthermore, the fixing component has a base with one side fixedly connected to the chip detection device, and a bending body extends from the other side of the base, and the end of the bending body has the connecting portion;

[0010] The connecting part is a boss body with a slot, and the driving track and the rotating fixing part are arranged in the slot.

[0011] Furthermore, the connecting portion is perpendicular to the chip detection platform, and the probe arranged at the end of the connecting portion is directly opposite to the chip detection platform in an initial state.

[0012] Furthermore, a driven component is slidably disposed in the driving track, one end of the driven component is disposed in the driving track and is driven, and the other end is fixedly connected to the first end, and the first end moves along the driving track driven by the driven component 204 .

[0013] Furthermore, the driving track and the driven member include a first driven member and a second driven member that are symmetrically arranged, and the first driven member and the second driven member are respectively arranged on both sides of the first end to drive the first end.

[0014] Furthermore, the second end is also connected to a probe fixing part, and the probe fixing part is a rectangular block connected to the second end, and the probe is disposed through the probe fixing part.

[0015] Furthermore, the lever-type rotation control member is divided into a controlled section and a driven section by the rotation connection position;

[0016] The end of the driven section is the second end, the end of the controlled section is the first end, and the length of the controlled section does not exceed half of the length of the driven section.

[0017] The beneficial effect of the utility model is that by setting a lever-type rotating control member, the probe can be precisely controlled during the rotation process. By setting an arc-shaped driving track and a rotating fixed part located at the center of the circle, and a lever-type rotating control member connected to the probe, and the rotation radius of the first end exceeds the rotation radius of the second end, the movement amplitude of the control end is reduced to improve the adjustment accuracy and stability. In addition, the control accuracy and stability can also be improved by track driving.

[0018] Other features and advantages of the utility model will be described in the following description, and partly become apparent from the description, or understood by implementing the utility model. The purpose and other advantages of the utility model can be realized and obtained by the structures indicated in the description, claims and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 A chip test needle platform structure diagram according to an embodiment of the utility model is shown;

[0021] Figure 2 A chip test needle platform structure diagram according to an embodiment of the utility model is shown;

[0022] Figure 3 A chip test needle platform structure diagram according to an embodiment of the utility model is shown;

[0023] Figure 4 An exploded structural diagram of a chip test needle platform according to an embodiment of the utility model is shown;

[0024] Figure 5 A partial cross-sectional view of a chip testing needle platform according to an embodiment of the utility model is shown.

[0025] In the attached figure:

[0026] 1-fixed part, 2-lever type rotary control part 2, 3-probe;

[0027] 101-base, 102-bending body, 103-connecting part, 104-slot, 105-rotating fixing part;

[0028] 201 - first end, 202 - second end, 203 - driving track, 204 - driven member, 205 - first driven member, 206 - second driven member;

[0029] 207-driven section, 208-controlled section;

[0030] 209 - probe fixing part 209 . DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0032] Example 1

[0033] In the process of chip testing, the precise positioning and stable contact of the probe 3 are crucial. Due to the physical limitations and operational complexity at the microscopic scale, the rotation control of the probe 3 is particularly difficult, especially when the probe 3 needs to be finely adjusted to achieve precise docking with the chip electrode. This embodiment discloses a chip test probe platform, which is arranged in a chip detection device, including a fixed component 1 fixed on the chip detection device, and the fixed component 1 extends a connecting portion 103 connected to a lever-type rotation control member 2. The connecting portion 103 is provided with a driving track 203 and a rotation fixing portion 105, the driving track 203 is a circular arc track, the rotation fixing portion 105 is located at the center of the circular arc track, and the lever-type rotation control member 2 has a first end 201 and a second end 202. The middle section of the lever-type rotation control member 2 is rotatably connected to the rotation fixing portion 105, the first end 201 is slidably connected to the driving track 203, and the second end 202 is connected to the probe 3. When the lever-type rotating control member 2 rotates with the rotating fixed portion 105, the rotation radius of the first end 201 exceeds the rotation radius of the second end 202. In combination with the above content, it can be known that by setting the arc-shaped driving track 203 and the rotating fixed portion 105 located at the center of the circle, and the lever-type rotating control member 2 connected with the probe 3, the movement of the probe 3 during rotation is made more stable and precise. The arc-shaped design of the driving track 203 not only ensures the smoothness of the rotation movement, but also provides precise guidance for the positioning of the probe 3. In addition, the rotation radius of the first end 201 is larger than that of the second end 202. Therefore, when rotating with the rotating fixed portion 105 as the center, the first end 201 will experience a larger trajectory, while the second end 202 is relatively smaller. The fine displacement of the second end 202 (i.e., the end connected to the probe 3) is achieved by adjusting the reduced rotation angle.

[0034] Example 2

[0035] In an example based on the aforementioned embodiment, the probe platform is used to clamp or fix the probe 3. In some cases, the chip to be tested can be fixed in a chip detection device, and the probe platform in the chip detection device can finely adjust the position of the probe 3 needle head so that it contacts the electrode of the chip to be tested. In this process, the probe 3 needle head needs to be precisely moved along a predetermined path to ensure stable contact with the electrode. After the contact is completed, the electrical performance tester will perform electrical performance tests on the device to be tested, such as voltage-current characteristics, capacitance-voltage characteristics, etc. For example, the axial movement of the probe 3 in the XYZ direction can be adjusted by the XYZ manual platform, and the tilt angle to be tested can be adjusted by the αβ tilt platform.

[0036] The probe platform described in this example can be found in Figure 1It is understood that it includes a fixing component 1 fixed on the chip detection device, the fixing component 1 has a base 101 fixedly connected to the chip detection device on one side, and a bent body 102 extends from the other side of the base 101, and the end of the bent body 102 has a connecting portion 103. The boss body is perpendicular to the chip detection platform in the chip detection device, and the connecting portion 103 is also perpendicular to the chip detection platform after being turned by the bent body 102, so that the probe 3 is directly opposite to the chip detection platform in the initial state.

[0037] refer to Figure 1-2 In the structure shown, the connecting portion 103 in this example is a boss body with a cutout groove 104, and the lever-type rotation control member 2 is arranged in the cutout groove 104. The lever-type rotation control member 2 includes a first end 201 arranged in the cutout groove 104 and a second end 202 protruding out of the cutout groove 104, the middle section of the lever-type rotation control member 2 is arranged in the cutout groove 104, and the second end 202 is connected to the probe 3.

[0038] Specifically, the inner wall surface of the cutout 104 is provided with a first end 201 fixing part fixedly connected to the first end 201, and the first end 201 fixing part is controlled to move along the track in the cutout 104. During operation, the first end 201 is driven to move along the track, and the first end 201 and the second end 202 rotate around the rotating fixing part 105. As mentioned above, the distance from the first end 201 to the rotating fixing part 105 is greater than the distance from the second end 202 to the rotating fixing part 105.

[0039] As described in the above-mentioned embodiment, the rotation radius of the first end 201 in this embodiment exceeds the rotation radius of the second end 202, and the method of driving the first end 201 to control the rotation action of the second end 202 can improve the accuracy and stability of the motion trajectory of the second end 202. It can be understood that the rod body part that is controlled and driven in the lever-type rotation control member 2 is longer, while the rod body connected to one side of the probe 3 is shorter, so that the control action of the first end 201 is more stable when it is transmitted to the second end 202, and because of the different rotation radii, the amplitude of the rotation action of the first end 201 when it is converted into the action of the second end 202 becomes smaller, so that the action control can be more accurate.

[0040] Example 3

[0041] Based on the above embodiments, in a specific example, the structure of the cutout groove 104 and the lever-type rotating control member 2 is as follows: Figure 3As shown, a driving track 203 is provided inside the dissecting groove 104, and a driven part 204 is slidably provided inside the driving track 203. In different situations, the driving track 203 and the driven part 204 can be any pair of driving components. For example, a hidden driving motor is provided in the driving track 203, and the driving motor drives the driven part 204 through a driving chain; or the driving track 203 is an electromagnetic coil, and the driven part 204 contains magnetic material, and the movement of the driven part 204 is controlled by adjusting the direction and size of the current.

[0042] One end of the driven member 204 is driven in the driving track 203, and the other end is fixedly connected to the first end 201. The first end 201 moves along the driving track 203 driven by the driven member 204, thereby realizing the rotation of the entire control member. The specific structure can be referred to Figure 4 The exploded structure diagram of the embodiment of the present invention can be understood. In the example shown in the figure, the driven component 204 includes a first driven component 205 and a second driven component 206 which are symmetrically arranged. The first driven component 205 and the second driven component 206 are respectively arranged on both sides of the first end 201 to drive the first end 201. The control structure in this example has better stability because the two driven components 204 act on the first end 201 from both sides, reducing the vibration or offset caused by the unbalanced force, thereby improving the control accuracy. Secondly, even if one of the driven components 204 fails, the other can continue to work, thereby reducing the downtime of the entire system caused by a single point failure, and ensuring the continuity and efficiency of the test process.

[0043] In the illustrated case, the second end 202 is further connected to a probe fixing member 209, which is a rectangular block connected to the second end 202, and the probe 3 is disposed through the probe fixing member 209. The probe fixing member 209 in this example separates the fixed position of the probe 3 from the fixing component 1 and other devices to avoid interference between the probe 3 and other devices when the probe 3 moves or the probe fixing member 209.

[0044] Example 4

[0045] In one example based on the above embodiment, the probe platform is used to detect the chip, and the chip to be tested is fixed on a special tray of the chip detection equipment to start the test. The chip to be tested is positioned on the detection platform by a precise mechanical arm to ensure that the electrode area of ​​the chip is facing the probe platform.

[0046] Before starting the test, the operator starts the test process through the control interface, which is connected to the control system of the probe platform. The control system dynamically adjusts the XYZ axial position and αβ tilt angle of probe 3 according to the requirements of the test program to ensure the precise docking of the probe 3 needle tip with the chip electrode.

[0047] After the position is initially positioned, fine adjustments are made through the lever-type rotary control member 2 to accurately control the position and angle of the probe 3. Figure 5 It is understood that the lever-type rotating control member 2 rotates in the direction of the two arrows in the figure to achieve the function of fine-tuning the angle. In fact, angle adjustment is an important and difficult part in chip testing. The rotating probe 3 can make it more flexibly adapt to the electrodes of the device under test of different shapes and angles to cope with some specially designed electrodes, and can also increase the contact angle of the electrode, thereby improving the alignment accuracy of the electrode to a certain extent. In some specific embodiments, the lever-type rotating control member 2 can be adjusted in conjunction with the αβ tilting platform to achieve angle adjustment.

[0048] Finally, as the needle tip of probe 3 contacts the electrode of the chip, the electrical performance testing instrument begins to perform a series of electrical performance tests on the chip, such as voltage-current (IV) characteristic test, capacitance-voltage (CV) characteristic test, etc.

[0049] After the test is completed, the probe platform safely removes the probe 3 from the chip, and the chip is moved out of the test area by the robotic arm.

[0050] Example 5

[0051] Based on the above-mentioned embodiment, the lever-type rotary control member 2 is divided into a controlled section 208 and a driven section 207 by the rotary connection position, wherein the end of the driven section 207 is the second end 202, and the end of the controlled section 208 is the first end 201. In some preferred cases, the length of the controlled section 208 does not exceed half of the length of the driven section 207. In this preferred embodiment, when the controlled section 208 (i.e., the rod body portion from the rotation center of the lever-controlled rotary control member to the first end 201) is displaced, a movement effect of reducing the amplitude and improving the precision can be generated in the driven section 207 (i.e., the rod body from the rotation center to the second end 202).

[0052] In some preferred embodiments, a precision stepper motor is integrated in the driving track 203, and the stepper motor drives the driven component 204 including a gear to move precisely along the track through fine step control.

[0053] In another preferred embodiment, the driving track 203 has a linear electromagnetic driving system, wherein the driving track 203 has an electromagnetic coil built therein, and the driven part 204 contains a magnetic material that interacts with the electromagnetic coil. By changing the direction and intensity of the current in the electromagnetic coil, the position and speed of the driven part 204 can be accurately controlled, thereby adjusting the position of the probe 3. This configuration is particularly suitable for occasions that require rapid response and adjustment.

[0054] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A chip test probe platform, the probe platform is arranged in a chip detection device, characterized in that: The probe platform comprises: A fixing component (1), one end of the fixing component (1) being used to be fixed on a chip detection device, and the other end of the fixing component (1) extending out of a connecting portion (103); Wherein, a driving track (203) and a rotating fixing part (105) are provided on the connecting part (103), the driving track (203) is an arc-shaped track, and the rotating fixing part (105) is located at the center of the arc-shaped track; A lever-type rotating control member (2), wherein the middle portion of the lever-type rotating control member (2) is rotatably connected to the rotating fixing portion (105), and the lever-type rotating control member (2) is used to rotate on the rotating fixing portion (105); The lever-type rotating control member (2) has a first end (201) and a second end (202), the rotating path of the first end (201) corresponds to the driving track (203), the first end (201) is slidably connected to the driving track (203), and a probe (3) is arranged on the second end (202); Wherein, the rotation radius of the first end (201) exceeds the rotation radius of the second end (202).

2. The chip testing probe platform according to claim 1, characterized in that: The fixing component (1) has a base (101) with one side fixedly connected to the chip detection device, a bent body (102) extending from the other side of the base (101), and the end of the bent body (102) has the connecting portion (103); The connecting portion (103) is a boss body having a slot (104), and the driving track (203) and the rotating fixing portion (105) are arranged in the slot (104).

3. The chip testing probe platform according to claim 2, characterized in that: The connecting portion (103) is perpendicular to the chip to be tested, and the probe (3) arranged at the end of the connecting portion (103) is directly opposite to the chip testing platform in an initial state.

4. The chip testing probe platform according to claim 2, characterized in that: A driven component (204) is slidably disposed in the driving track (203); one end of the driven component (204) is disposed in the driving track (203) and is driven, and the other end is fixedly connected to the first end (201); the first end (201) moves along the driving track (203) driven by the driven component (204).

5. The chip testing probe platform according to claim 4, characterized in that: The driving track (203) and the driven component (204) include a first driven component (205) and a second driven component (206) which are symmetrically arranged. The first driven component (205) and the second driven component (206) are respectively arranged on both sides of the first end (201) to drive the first end (201).

6. The chip testing probe platform according to claim 2, characterized in that: The second end (202) is also connected to a probe fixing member (209), and the probe fixing member (209) is a rectangular block connected to the second end (202), and the probe (3) is arranged through the probe fixing member (209).

7. The chip testing probe platform according to claim 2, characterized in that: The lever-type rotation control member (2) is divided into a controlled section (208) and a driven section (207) by a rotation connection position; The end of the driven section (207) is the second end (202), the end of the controlled section (208) is the first end (201), and the length of the controlled section (208) does not exceed half of the length of the driven section (207).

8. The chip testing probe platform according to claim 4, characterized in that: A stepping motor is arranged inside the driving track (203), and a chain transmission is used between the driving track (203) and the driven component (204).

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