Drying cavity assembly and coating equipment

Abstract

The utility model is suitable for the technical field of coating equipment, and provides a drying cavity assembly, which comprises a drying cavity, a feeding hole is formed in one side wall of the drying cavity, and a discharging hole positioned above the feeding hole is formed in the other side wall of the drying cavity; the feeding conveying mechanism is used for driving a tray on which a workpiece to be plated is placed to enter the drying cavity from the feeding hole in the horizontal direction; the transmission chains are vertically arranged in the drying cavity, each transmission chain is provided with a plurality of bearing parts which are distributed at intervals in the vertical direction, and the bearing parts can sequentially drive the trays on the feeding conveying mechanism to ascend to the position of the discharging opening; the driving device is in transmission connection with the plurality of transmission chains; and the push rod mechanism is arranged in the drying cavity, corresponds to the position of the discharge port and is used for pushing the tray lifted to the position of the discharge port out of the discharge port. According to the drying cavity assembly, the drying treatment efficiency of the workpiece to be coated can be improved, and the drying treatment rhythm is ensured to be matched with the coating rhythm of the coating equipment, so that the coating efficiency of the coating equipment is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to a drying chamber component and coating equipment. Background Art

[0002] Plasma Enhanced Chemical Vapor Deposition (PECVD) coating equipment uses microwaves or radio frequencies to ionize gases containing atoms of film components, forming plasma locally, and using the principle that plasma is highly chemically active and easily reacts, thereby depositing the required thin film on the workpiece to be plated. Before the coating equipment performs the coating process on the workpiece, it is generally necessary to place the workpiece to be plated on a tray, and the tray and the workpiece to be plated are transported into the drying chamber for drying treatment, and then the dried workpiece to be plated and the tray are transported into the coating chamber for coating of the workpiece to be plated.

[0003] In the prior art, a drying chamber assembly of a coating equipment usually includes a drying chamber with a feed port and a discharge port, and a conveyor belt arranged in the drying chamber. The conveyor belt is used to drive a tray with workpieces to be plated to enter the drying chamber horizontally from the feed port. After the workpieces to be plated are dried, the workpieces to be plated together with the trays are horizontally moved out from the discharge port to the coating chamber through the conveyor belt for coating. However, the number of trays stored on the conveyor belt is limited. Only after the workpieces to be plated in the previous trays are dried can the subsequent workpieces to be plated together with the trays be transported from the feed port to the drying chamber for drying. As a result, the drying efficiency of the workpieces to be plated is low, and the drying rhythm is difficult to match the coating rhythm of the coating equipment, resulting in low coating efficiency of the coating equipment. Utility Model Content

[0004] The utility model provides a drying chamber component, which aims to solve the problem that the drying chamber component of the coating equipment in the prior art has low drying efficiency of the workpiece to be plated, and the drying process rhythm is difficult to match the coating rhythm of the coating equipment, resulting in low coating efficiency of the coating equipment.

[0005] The utility model is implemented by providing a drying chamber component for coating equipment, comprising:

[0006] A drying chamber, wherein a feed inlet is provided on one side wall of the drying chamber, and a discharge port is provided on the other side wall of the drying chamber opposite to the feed inlet;

[0007] A feeding and conveying mechanism provided in the drying chamber, used for driving a tray on which workpieces to be plated are placed to enter the drying chamber from the feeding port in a horizontal direction;

[0008] A plurality of transmission chains are arranged in the drying chamber and vertically on opposite sides of the feeding and conveying mechanism, each of the transmission chains is provided with a plurality of bearing parts spaced apart in the vertical direction, and each of the bearing parts can sequentially drive the tray on the feeding and conveying mechanism to rise to the discharge port position;

[0009] A driving device drivingly connected to the plurality of transmission chains; and

[0010] A push rod mechanism is arranged in the drying chamber and corresponds to the position of the discharge port, and is used to push the tray raised to the position of the discharge port out of the discharge port.

[0011] Preferably, the drying chamber is provided with two feed ports spaced apart from each other up and down, two discharge ports spaced apart from each other up and down, two feed transmission mechanisms corresponding one-to-one to the two feed ports, and two push rod mechanisms corresponding one-to-one to the two discharge ports, each discharge port corresponds to one feed port, and each discharge port is located above the corresponding feed port.

[0012] Preferably, the feed transmission mechanism includes two conveyor belts symmetrically arranged on both sides of the drying chamber, and a first motor which is transmission-connected to the two conveyor belts and is used to drive the two conveyor belts to rotate synchronously. The two conveyor belts can simultaneously drive the tray to enter the drying chamber from the feed port in a horizontal direction.

[0013] Preferably, the driving device includes a second motor and a transmission box connected to the second motor, and the transmission box simultaneously forms a transmission connection with the plurality of transmission chains.

[0014] Preferably, it also includes:

[0015] a first sensor disposed in the drying chamber and close to the feeding side of the feeding conveying mechanism, for detecting that when the tray enters the feeding conveying mechanism, triggering a deceleration signal of the feeding conveying mechanism; and

[0016] A second sensor disposed in the drying chamber and close to the discharge side of the feed conveying mechanism is used to detect that when the tray moves into position on the feed conveying mechanism, a signal to stop the feed conveying mechanism is triggered.

[0017] Preferably, it also includes:

[0018] A third sensor disposed in the drying chamber and corresponding to the discharge port position is used to detect that when the tray rises to the discharge port position, triggering a signal for the transmission chain to stop rotating.

[0019] Preferably, the push rod mechanism comprises:

[0020] A housing fixed to the drying chamber;

[0021] A fixed guide rail mounted on the housing;

[0022] A first belt installed on the fixed guide rail and arranged along the length direction of the fixed guide rail;

[0023] A rotating motor connected to the first belt transmission and used to drive the first belt to rotate;

[0024] A movable guide rail movably disposed on the fixed guide rail and connected to the first belt, wherein the first belt can drive the movable guide rail to extend and retract relative to the fixed guide rail;

[0025] A second belt installed on the movable guide rail and arranged along the length direction of the movable guide rail, the movable guide rail is connected to the second belt and can drive the second belt to rotate; and

[0026] A push rod connected to the second belt, wherein the second belt can drive the push rod to extend and retract relative to the movable guide rail.

[0027] Preferably, the number of the transmission chains is four, and the four transmission chains are respectively arranged at four angular positions in the drying chamber.

[0028] Preferably, the bearing portion is an L-shaped support member that is detachably fixed to the transmission chain.

[0029] The utility model also provides a coating device, comprising the above-mentioned drying chamber component.

[0030] The utility model provides a drying chamber assembly by providing a feed inlet on one side wall of the drying chamber, and arranging a discharge port located above the feed inlet on the other side wall of the drying chamber, and utilizing a feed transmission mechanism to drive a tray on which workpieces to be plated are placed to enter the drying chamber in a horizontal direction in sequence, and arranging a plurality of transmission chains arranged vertically in the drying chamber, utilizing a plurality of bearing parts on the transmission chain to sequentially drive the tray on the feed transmission mechanism to rise to the discharge port position, and then utilizing a push rod mechanism to push the tray raised to the discharge port position out of the discharge port; because the plurality of bearing parts on the transmission chain sequentially carry the tray and drive the tray The tray rises in the drying chamber. During the rising process of the tray, the workpieces to be plated in the tray are heated and dried at the same time, which greatly increases the number of workpieces to be plated that are dried at the same time. The feeding transmission mechanism can continuously transmit the workpieces to be plated to the drying chamber for drying, thereby realizing continuous drying of the workpieces to be plated, greatly improving the drying efficiency of the workpieces to be plated, ensuring that the drying process rhythm can match the coating cycle of the coating equipment, greatly improving the coating efficiency of the coating equipment, and making full use of the vertical space of the drying chamber, which not only improves the drying efficiency of the workpieces to be plated, but also does not increase the floor space of the drying chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 A three-dimensional diagram of a drying chamber assembly provided in an embodiment of the utility model;

[0032] Figure 2 A three-dimensional diagram of a part of the structure of a drying chamber assembly provided by an embodiment of the utility model;

[0033] Figure 3 A three-dimensional diagram of another part of the structure of a drying chamber assembly provided by an embodiment of the utility model;

[0034] Figure 4 for Figure 3 A magnified view of the part A in the middle;

[0035] Figure 5 A three-dimensional diagram of a push rod mechanism in a drying chamber assembly provided by an embodiment of the utility model;

[0036] Figure 6 A schematic side view of a push rod mechanism in a drying chamber assembly provided by an embodiment of the utility model;

[0037] Figure 7 For along Figure 6 Schematic diagram of the cross section in the BB direction;

[0038] Figure 8 A three-dimensional diagram of a coating device provided in an embodiment of the utility model. DETAILED DESCRIPTION

[0039] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0040] A drying chamber assembly provided by the embodiment of the utility model is provided with a feed inlet on one side wall of the drying chamber, and a discharge outlet located above the feed inlet is provided on the other side wall of the drying chamber, a feed transmission mechanism is used to drive a tray on which workpieces to be plated are placed to enter the drying chamber in a horizontal direction in sequence, and a plurality of transmission chains arranged vertically are provided in the drying chamber, a plurality of bearing parts on the transmission chain are used to drive the tray on the feed transmission mechanism to rise to the discharge outlet position in sequence, and then a push rod mechanism is used to push the tray that has risen to the discharge outlet position out of the discharge outlet; because the plurality of bearing parts on the transmission chain are used to carry the tray in sequence and drive the tray The tray rises in the drying chamber. During the rising process of the tray, the workpieces to be plated in the tray are heated and dried at the same time, which greatly increases the number of workpieces to be plated that are dried at the same time. The feed transmission mechanism can continuously transmit the workpieces to be plated to the drying chamber for drying, thereby realizing continuous drying of the workpieces to be plated, greatly improving the efficiency of the drying treatment of the workpieces to be plated, ensuring that the drying treatment rhythm can match the coating rhythm of the coating equipment, greatly improving the coating efficiency of the coating equipment, and making full use of the vertical space of the drying chamber, which not only improves the efficiency of the drying treatment of the workpieces to be plated, but also does not increase the floor space of the drying chamber.

[0041] Please refer to Figure 1-Figure 4 The present invention provides a drying chamber assembly 10 for coating equipment, including:

[0042] A drying chamber 1, wherein a feed inlet 11 is provided on one side wall of the drying chamber 1, and a discharge port 12 located above the feed inlet 11 is provided on the other side wall of the drying chamber 1 opposite to the feed inlet 11;

[0043] The feeding and conveying mechanism 2 provided in the drying chamber 1 is used to drive the tray on which the workpiece to be plated is placed to enter the drying chamber 1 from the feeding port 11 in the horizontal direction;

[0044] A plurality of transmission chains 3 are arranged in the drying chamber 1 and vertically on opposite sides of the feeding and conveying mechanism 2. Each transmission chain 3 is provided with a plurality of bearing parts 31 spaced apart in the vertical direction. Each bearing part 31 can sequentially drive the tray on the feeding and conveying mechanism 2 to rise to the position of the discharge port 11.

[0045] A driving device 4 connected to a plurality of transmission chains 3; and

[0046] The push rod mechanism 5 disposed in the drying chamber 1 and corresponding to the position of the discharge port 11 is used to push the tray raised to the position of the discharge port 11 out of the discharge port 11 .

[0047] In an embodiment of the utility model, a drying chamber assembly is provided by opening a feed port 11 on one side wall of the drying chamber 1, and setting a discharge port 12 located above the feed port 11 on the other side wall of the drying chamber 1 opposite to the feed port 11, and setting a plurality of transmission chains 3 symmetrically distributed on both sides of a feed transmission mechanism 2 and arranged vertically, and utilizing a plurality of bearing parts 31 on the transmission chain 3 to lift a tray on the feed transmission mechanism 2 with workpieces to be plated and drive the tray to rise to the position of the discharge port 12, and then utilizing a push rod mechanism 5 to push the tray raised to the position of the discharge port 12 out of the discharge port 12, thereby completing the drying process of the workpieces to be plated in the tray. After the feed conveying mechanism 2 conveys the tray into the drying chamber 1, the multiple bearing parts 31 on the transmission chain 3 are used to drive the tray to rise in the drying chamber 1 in turn to dry the workpiece to be plated. By controlling the rotation speed of the transmission chain 3, the workpiece to be plated rises to the height of the discharge port 12 to just complete the time requirement for the drying process of the workpiece to be plated in the tray; multiple bearing parts 31 distributed at vertical intervals are used to carry multiple trays in the vertical direction in turn and drive the multiple trays to move and dry at the same time, which greatly increases the number of workpieces to be plated that are dried at the same time. The feed conveying mechanism 2 can continuously convey the trays with the workpieces to be plated into the drying chamber 1, which greatly improves the efficiency of the drying process of the workpieces to be plated, and well matches the drying process rhythm with the coating rhythm, thereby greatly improving the coating efficiency of the coating equipment; and the vertical space of the drying chamber 1 is fully utilized, which not only improves the efficiency of the drying process of the workpiece to be plated, but also reduces the floor space of the drying chamber 1.

[0048] In actual application, the discharge port 12 of the drying chamber 1 can be directly or indirectly connected to the feed port of the coating chamber of the coating equipment, and the push rod mechanism 5 is used to push the tray that rises to the position of the discharge port 11 from the discharge port 11 into the coating chamber to carry out the coating process of the coating equipment.

[0049] In the embodiment of the utility model, the specific type of the workpiece to be plated is not limited, for example, it can be the back cover of a mobile phone or other workpieces. In this embodiment, the workpiece to be plated can be placed on a corresponding tray, each tray can hold one or more workpieces to be plated, and multiple workpieces to be plated can be placed in layers or flat on the tray, and the tray with the workpiece to be plated enters the feed transmission mechanism 2 in the drying chamber 1 from the feed port 11 in the horizontal direction, and the tray is driven forward by the feed transmission mechanism 2, thereby realizing the transmission of the workpiece to be plated. The bearing part 31 on the transmission chain 3 is used to drive the tray on the feed transmission mechanism 2 to rise to the discharge port 12 in turn, thereby driving the workpiece to be plated to rise to the height position of the discharge port 12, and then the push rod mechanism 5 is used to push the tray that has risen to the position of the discharge port 12 out of the discharge port 12, thereby pushing the workpiece to be plated together with the tray out of the discharge port 12. In addition to the present embodiment, the workpiece to be plated may also not require a tray. The workpiece to be plated may directly enter the feed conveying mechanism 2 in the drying chamber 1 from the feed port 11 in the horizontal direction. The feed conveying mechanism 2 directly drives the workpiece to be plated to move forward, and the bearing part 31 on the transmission chain 3 drives the workpiece to be plated on the feed conveying mechanism 2 to rise to the height position of the discharge port 12 in turn, and then the push rod mechanism 5 is used to push the workpiece to be plated that has risen to the position of the discharge port 12 out of the discharge port 12.

[0050] In the embodiment of the utility model, the drying chamber 1 is roughly in a rectangular parallelepiped structure, and the feed port 11 and the discharge port 12 are respectively arranged on two opposite sides of the drying chamber 1. Among them, the drying chamber 1 is connected to an external hot air source providing device, and the external hot air source providing device continuously introduces a hot air source into the drying chamber 1 to achieve hot air drying treatment of the coated workpiece in the drying chamber 1. In addition, the drying chamber 1 is also connected to a vacuum pumping device, and the vacuum pumping device is used to vacuum the drying chamber 1. On the one hand, it prevents the air from oxidizing the workpiece to be plated during the heating process, and on the other hand, it can make the air pressure in the drying chamber 1 close to the air pressure in the coating chamber, so as to avoid the air pressure in the drying chamber 1 affecting the air pressure in the coating chamber, thereby ensuring the reliability of vacuum coating.

[0051] As an embodiment of the present utility model, the number of the feed port 11, the discharge port 12, the feed transmission mechanism 2 and the push rod mechanism 5 is consistent, the setting position of the feed transmission mechanism 2 corresponds to the position of the feed port 11, and the position of the push rod mechanism 5 corresponds to the position of the discharge port 12. Among them, the number of the feed port 11, the discharge port 12, the feed transmission mechanism 2 and the push rod mechanism 5 can be one, two or more.

[0052] As an embodiment of the utility model, the drying chamber 1 is provided with two feed ports 11 spaced apart from each other in upper and lower directions, two discharge ports 12 spaced apart from each other in upper and lower directions, two feed transmission mechanisms 2 arranged in the drying chamber 1 and corresponding one-to-one to the two feed ports 11, and two push rod mechanisms 5 arranged in the drying chamber 1 and corresponding one-to-one to the two discharge ports 12, each discharge port 12 corresponds to a feed port 11, and each discharge port 12 is located above the corresponding feed port 11.

[0053] In this embodiment, the number of the feed port 11, the discharge port 12, the feed transmission mechanism 2 and the push rod mechanism 5 are all two, and each feed port 11 corresponds to one discharge port 12, one feed transmission mechanism 2 and one push rod mechanism 5. Specifically, the tray on which the workpiece to be plated is placed enters the corresponding lower feed transmission mechanism 2 from the lower feed port 11, and at the same time, the tray on which the workpiece to be plated is placed enters the corresponding upper feed transmission mechanism 2 from the upper feed port 11, and the lower feed transmission mechanism 2 and the upper feed transmission mechanism 2 respectively drive the trays thereon into the drying chamber 1, and the bearing parts 31 on the multiple transmission chains 3 sequentially drive the trays on the lower feed transmission mechanism 2 to rise to the height position where the lower discharge port 12 is located, and the trays that have risen to the height position where the lower discharge port 12 is located are removed from the lower discharge port 12 by the lower push rod mechanism 5 corresponding to the lower discharge port 12. At the same time, the transmission chain 3 drives the tray on the upper feeding transmission mechanism 2 to rise to the height position of the upper discharge port 12, and the tray that has risen to the height position of the upper discharge port 12 is pushed out from the upper discharge port 12 through the upper push rod mechanism 5. In this way, the two feeding ports 11 are used for feeding and the two discharge ports 12 are used for discharging, so as to realize the simultaneous drying process of two drying lines, which greatly improves the drying efficiency of the workpiece to be plated. The two discharge ports 12 can respectively cooperate with the two coating cavities of the coating equipment, so as to improve the coating efficiency of the coating equipment, and the two coating cavities share one drying chamber 1, which can reduce the cost of the coating equipment.

[0054] In the embodiment of the utility model, the specific structures of the two feeding and conveying mechanisms 2 can be the same or different. Preferably, the specific structures of the two feeding and conveying mechanisms 2 are the same, which is convenient for processing and assembly.

[0055] As an embodiment of the utility model, the feed transmission mechanism 2 includes two conveyor belts 21 symmetrically arranged on both sides of the drying chamber 1, and a first motor 22 that is transmission-connected to the two conveyor belts 21 and is used to drive the two conveyor belts 21 to rotate synchronously. The two conveyor belts 21 can simultaneously drive the tray from the feed port 11 into the drying chamber 1 in a horizontal direction.

[0056] In this embodiment, the first motor 22 drives the two conveyor belts 21 to rotate synchronously, and the two conveyor belts 21 synchronously drive the tray horizontally forward into the drying chamber 1, so that the tray moves smoothly, and the structure is simple and the implementation cost is low.

[0057] Specifically, two pairs of pulleys are installed in the drying chamber 1, and each transmission belt 21 is wound around a corresponding pair of pulleys. The driving pulleys of the two pairs of pulleys are connected through a transmission shaft, and the first motor 22 is connected to the transmission shaft. The first motor 22 drives the transmission shaft to rotate, and the transmission shaft drives the two pairs of pulleys to rotate, thereby driving the two transmission belts 21 to rotate at the same time, and the two transmission belts 21 are used to synchronously drive the tray to move forward horizontally into the drying chamber 1. In addition to this embodiment, the two transmission belts 21 can also be replaced by two chains, and the two pairs of pulleys can be replaced by two pairs of sprockets.

[0058] As an embodiment of the utility model, the driving device 4 includes a second motor 41 and a transmission box 42 connected to the second motor 41. The transmission box 42 forms a transmission connection with multiple transmission chains 3 at the same time. The second motor 41 forms a transmission connection with multiple transmission chains 3 using the transmission box 42, which can reduce costs and simplify the structure.

[0059] Specifically, a pair of transmission chains 3 are respectively provided on opposite sides of the feed transmission mechanism 2, each transmission chain 3 is wound around a driving sprocket and a driven sprocket, and the driving sprockets of each pair of transmission chains 3 are connected to the same linkage shaft 43, and the two output shafts of the transmission box 42 are respectively connected to the two linkage shafts 43. The second motor 41 drives the two output shafts of the transmission box 42 to rotate, thereby driving the multiple transmission chains 3 to rotate synchronously.

[0060] Please refer to Figure 4 As an embodiment of the present invention, the bearing part 31 is an L-shaped support member that can be detachably fixed on the transmission chain 3, which is convenient for installation and processing, and can better carry the tray. Among them, the number of bearing parts 31 on each transmission chain 3 can be flexibly set according to actual conditions.

[0061] As a preferred embodiment of the present invention, there are four transmission chains 3, which are respectively arranged at four corner positions in the drying chamber 1. The bearing parts 31 on the four transmission chains 3 can simultaneously bear the four corner positions of the tray, making the transmission chains 3 more stable in bearing the tray.

[0062] Please refer again Figure 3 , as an embodiment of the utility model, further comprising:

[0063] A first sensor 6 disposed in the drying chamber 1 and close to the feeding side of the feeding conveying mechanism 2 is used to detect when a tray enters the feeding conveying mechanism 2 and trigger a deceleration signal of the feeding conveying mechanism 2; and

[0064] The second sensor 7 disposed in the drying chamber 1 and close to the discharge side of the feeding conveying mechanism 2 is used to detect when the tray moves into position on the feeding conveying mechanism 2 and trigger a signal for the feeding conveying mechanism 2 to stop moving.

[0065] In this embodiment, the first sensor 6 and the second sensor 7 can be specifically a Hall sensor or an infrared sensor. The first sensor 6 and the second sensor 7 are electrically connected to the control device (not shown), respectively, and the control device is electrically connected to the drive device 4 and the feed conveyor mechanism 2. Specifically, the control device is electrically connected to the first motor 22 of the feed conveyor mechanism 2. When the first sensor 6 detects that the tray enters the feed conveyor mechanism 2, the first sensor 6 triggers the feed conveyor mechanism 2 deceleration signal to the control device, and the control device controls the first motor 22 of the feed conveyor mechanism 2 to decelerate, so that the two conveyor belts 21 decelerate and move, so that the tray is more stably driven forward by the feed conveyor mechanism 2; during the forward transmission of the tray on the feed conveyor mechanism 2, when the second sensor 7 detects that the tray moves to the right position on the feed conveyor mechanism 2, the feed conveyor mechanism 2 stop signal is triggered to the control device, and the control device controls the first motor 22 of the feed conveyor mechanism 2 to stop rotating, so that the two conveyor belts 21 stop moving, so that the bearing part 31 on the transmission chain 3 carries the tray and drives the tray to rise, and the feed conveyor mechanism 2 continues to work and drives the next tray to move forward, and repeats the above actions.

[0066] As an embodiment of the utility model, it also includes:

[0067] The third sensor 8 disposed in the drying chamber 1 and corresponding to the height position of the discharge port 12 is used to detect that when the tray rises to the position of the discharge port 12, it triggers a signal for the transmission chain 3 to stop rotating.

[0068] In this embodiment, the third sensor 8 can be specifically a Hall sensor or an infrared sensor. The third sensor 8 is electrically connected to the control device, and the control device is electrically connected to the second motor 41 of the drive device 4. When the transmission chain 3 drives the tray to rise, when the tray moves to the height position corresponding to the third sensor 8, the third sensor 8 detects that the tray has risen to the right position, and the third sensor 8 triggers a signal to stop the transmission chain 3 to the control device, and the control device controls the second motor 41 of the drive device 4 to stop rotating, so that the push rod mechanism 5 executes the action of pushing the tray out of the discharge port 12.

[0069] As an embodiment of the utility model, it also includes:

[0070] The fourth sensor 9, which is arranged in the drying chamber 1 and is located above the height position of the third sensor 8, is used to trigger a stop signal when a tray is detected.

[0071] In this embodiment, the fourth sensor 9 can be a Hall sensor or an infrared sensor, and the fourth sensor 9 is electrically connected to the control device. When the push rod mechanism 5 fails to push out the tray in time, the tray continues to rise and causes the tray to collide with the machine. Therefore, when the fourth sensor 9 detects the tray, it triggers a stop signal to the control device, and the control device controls the first motor 22 of the feed transmission mechanism 2 and the second motor 41 of the drive device 4 to stop working. Manual troubleshooting is required before the machine can continue to operate, thereby playing a protective role.

[0072] Please refer to Figure 5-Figure 7 As an embodiment of the utility model, the push rod mechanism 5 includes:

[0073] A housing 51 fixed to the drying chamber 1;

[0074] A fixed guide rail 52 mounted on the housing 51;

[0075] A first belt 53 installed on the fixed guide rail 52 and arranged along the length direction of the fixed guide rail 52;

[0076] A rotating motor 54 drivingly connected to the first belt 53 and used to drive the first belt 53 to rotate;

[0077] A movable guide rail 55 movably disposed on the fixed guide rail 52 and connected to the first belt 53, wherein the first belt 53 can drive the movable guide rail 55 to extend and retract relative to the fixed guide rail 52;

[0078] A second belt 56 mounted on the movable guide rail 55 and arranged along the length direction of the movable guide rail 55, the movable guide rail 55 is connected to the second belt 56 and can drive the second belt 56 to rotate; and

[0079] The push rod 57 connected to the second belt 56 can drive the push rod 57 to extend and retract relative to the movable guide rail 55 .

[0080] In this embodiment, the push rod mechanism 5 also includes a first pulley 58 and a second pulley 59 which are arranged on the fixed guide rail 52 at intervals along the length direction of the fixed guide rail 52, and a third pulley 501 and a fourth pulley 502 which are arranged on the movable guide rail 55 at intervals along the length direction of the movable guide rail 55. The first belt 53 is wound around the first pulley 58 and the second pulley 59, and the rotating motor 54 is connected to the first pulley 58 or the second pulley 59; the second belt 56 is wound around the third pulley 501 and the fourth pulley 502.

[0081] In the embodiment of the utility model, when the push rod mechanism 5 pushes the tray, the rotating motor 54 drives the first pulley 58 to rotate forward, the first pulley 58 and the second pulley 59 to rotate forward, the first pulley 58 and the second pulley 59 drive the first belt 53 to rotate forward, and the first belt 53 drives the movable guide rail 55 to move in the first direction relative to the fixed guide rail 52 during the movement, and the movable guide rail 55 drives the second belt 56 to rotate forward synchronously during the movement, the third pulley 501 and the fourth pulley 502 rotate forward with the second belt 59, and the push rod 57 moves in the first direction synchronously with the second belt 56, so that the movable guide rail 55 extends relative to the fixed guide rail 52, and the push rod 57 extends relative to the movable guide rail 55 to push the tray. To push the tray together with the workpiece to be plated into the coating chamber of the coating equipment; after the push rod 57 pushes the tray, the rotating motor 54 drives the first pulley 58 and the second pulley 59 to rotate in the opposite direction, the first pulley 58 and the second pulley 59 drive the first belt 53 to rotate in the opposite direction, the first belt 53 drives the movable guide rail 55 to move in a second direction opposite to the first direction relative to the fixed guide rail 52, the movement of the movable guide rail 55 will drive the second belt 56 to rotate in the opposite direction synchronously, the third pulley 501 and the fourth pulley 502 rotate in the opposite direction with the second belt 56, and the second belt 56 drives the push rod 57 to move in the second direction synchronously, thereby realizing the contraction of the push rod 57 and the movable guide rail 55, so that the push rod 57 can push the next tray.

[0082] Please refer to Figure 8 The embodiment of the utility model further provides a vacuum coating device, including the drying chamber assembly 10 of the above embodiment. Specifically, the vacuum coating device can be a PECVD vacuum coating device. The vacuum coating device provided by the embodiment of the utility model can improve the efficiency of the drying process of the workpiece to be plated by setting the above drying chamber assembly 10, ensure that the drying process beat matches the coating beat, and improve the coating efficiency of the coating device.

[0083] In the embodiment of the utility model, the vacuum coating equipment specifically includes a feeding mechanism 20, a first gate valve 30, a first buffer chamber 40, a second gate valve 50, a drying chamber assembly 10, a third gate valve 70, a coating chamber 80, a fourth gate valve 90, a second buffer chamber 100, a fifth gate valve 110 and a feeding mechanism 120, which are sequentially arranged. Among them, the structures of the first gate valve 30, the second gate valve 50, the third gate valve 70, the fourth gate valve 90 and the fifth gate valve 120 are the same, and they are all the gate valves of the above-mentioned embodiment 1.

[0084] Among them, the first gate valve 30 is used to control the closing or opening of the feed port of the first buffer chamber 40, the first gate valve 30 is used to control the connection or isolation between the first buffer chamber 40 and the drying chamber assembly 10, the third gate valve 70 is used to control the connection or isolation between the drying chamber assembly 10 and the coating chamber 80, the fourth gate valve 90 is used to control the connection or isolation between the coating chamber 80 and the second buffer chamber 100, and the fifth gate valve 110 is used to control the closing or opening of the discharge port 12 of the second buffer chamber 100.

[0085] In this embodiment, the tray on which the coated workpieces are placed passes through the loading mechanism 20, the first gate valve 30, the first buffer chamber 40, and the second gate valve 50 in sequence to enter the drying chamber 1 of the drying chamber assembly 10 for drying treatment, and then passes through the third gate valve 70 to enter the coating chamber 80 for coating. After the coating of the coated workpiece is completed, it passes through the fourth gate valve 90, the second buffer chamber 100, the fifth gate valve 110 in sequence, and then is unloaded from the unloading mechanism 120 to realize continuous coating of the coating equipment. Among them, the vacuum coating equipment is a double-layer coating production line, which can perform continuous coating at the same time, which can greatly improve the coating efficiency, that is, the upper and lower layers of the vacuum coating equipment are sequentially provided with a loading mechanism 20, a first gate valve 30, a first buffer chamber 40, a second gate valve 50, a third gate valve 70, a coating chamber 80, a fourth gate valve 90, a second buffer chamber 100, a fifth gate valve 110 and a unloading mechanism 120, and the upper and lower coating chambers 80 share a drying chamber assembly 10, which can reduce production costs. In addition, the coating equipment can also be a coating production line with three or more layers, which can further improve the coating efficiency.

[0086] A drying chamber assembly provided by the embodiment of the utility model is provided with a feed port 11 on one side wall of the drying chamber 1, a discharge port 12 located above the feed port 11 is provided on the other side wall of the drying chamber 1 opposite to the feed port 11, and a plurality of transmission chains 3 arranged vertically are provided in the drying chamber 1, and a tray on which a workpiece to be plated is placed on the feed transmission mechanism 2 is driven to rise to the discharge port 12 in sequence by a bearing portion 31 on the transmission chain 3, and then the tray raised to the discharge port 12 is pushed out from the discharge port 12 by a push rod mechanism 5; and a plurality of bearing portions 31 on the transmission chain 3 are used to carry the tray in sequence and drive the tray to be plated on the feed transmission mechanism 2. The tray rises in the drying chamber 1, and the workpieces to be plated in the tray are dried while rising, which greatly increases the number of workpieces to be plated that are dried at the same time. The feeding transmission mechanism 2 can continuously transmit the tray with the workpieces to be plated to the drying chamber 1 for drying, thereby realizing continuous drying of the workpieces to be plated, greatly improving the efficiency of the drying treatment of the workpieces to be plated, ensuring that the drying treatment rhythm matches the coating rhythm of the coating equipment, greatly improving the coating efficiency of the coating equipment, and making full use of the vertical space of the drying chamber 1, which not only improves the efficiency of the drying treatment of the workpieces to be plated, but also does not increase the floor space of the drying chamber 1.

[0087] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A drying chamber assembly for coating equipment, characterized in that: include: A drying chamber, wherein a feed inlet is provided on one side wall of the drying chamber, and a discharge port is provided on the other side wall of the drying chamber opposite to the feed inlet; A feeding and conveying mechanism provided in the drying chamber, used for driving a tray on which workpieces to be plated are placed to enter the drying chamber from the feeding port in a horizontal direction; A plurality of transmission chains are arranged in the drying chamber and vertically on opposite sides of the feeding and conveying mechanism, each of the transmission chains is provided with a plurality of bearing parts spaced apart in the vertical direction, and each of the bearing parts can sequentially drive the tray on the feeding and conveying mechanism to rise to the discharge port position; A driving device drivingly connected to the plurality of transmission chains; and A push rod mechanism is arranged in the drying chamber and corresponds to the position of the discharge port, and is used to push the tray raised to the position of the discharge port out of the discharge port.

2. The drying chamber assembly according to claim 1, characterized in that: The drying chamber is provided with two feed ports spaced apart from each other, two discharge ports spaced apart from each other, two feed transmission mechanisms corresponding one-to-one to the two feed ports, and two push rod mechanisms corresponding one-to-one to the two discharge ports, each discharge port corresponds to one feed port, and each discharge port is located above the corresponding feed port.

3. The drying chamber assembly according to claim 1, characterized in that: The feed transmission mechanism includes two conveyor belts symmetrically arranged on both sides of the drying chamber, and a first motor that is transmission-connected to the two conveyor belts and is used to drive the two conveyor belts to rotate synchronously. The two conveyor belts can simultaneously drive the tray to enter the drying chamber from the feed port in a horizontal direction.

4. The drying chamber assembly according to claim 1, characterized in that: The driving device includes a second motor and a transmission box connected to the second motor, and the transmission box is simultaneously in transmission connection with the plurality of transmission chains.

5. The drying chamber assembly according to claim 1, characterized in that: Also includes: A first sensor disposed in the drying chamber and close to the feeding side of the feeding conveying mechanism, used for detecting that when the tray enters the feeding conveying mechanism, triggering a deceleration signal of the feeding conveying mechanism; as well as A second sensor disposed in the drying chamber and close to the discharge side of the feed conveying mechanism is used to detect that when the tray moves into position on the feed conveying mechanism, a signal to stop the feed conveying mechanism is triggered.

6. The drying chamber assembly according to claim 1, characterized in that: Also includes: A third sensor disposed in the drying chamber and corresponding to the discharge port position is used to detect that when the tray rises to the discharge port position, triggering a signal for the transmission chain to stop rotating.

7. The drying chamber assembly according to claim 1, characterized in that: The push rod mechanism comprises: A housing fixed to the drying chamber; A fixed guide rail mounted on the housing; A first belt installed on the fixed guide rail and arranged along the length direction of the fixed guide rail; A rotating motor connected to the first belt transmission and used to drive the first belt to rotate; A movable guide rail movably disposed on the fixed guide rail and connected to the first belt, wherein the first belt can drive the movable guide rail to extend and retract relative to the fixed guide rail; A second belt installed on the movable guide rail and arranged along the length direction of the movable guide rail, the movable guide rail is connected to the second belt and can drive the second belt to rotate; and A push rod connected to the second belt, wherein the second belt can drive the push rod to extend and retract relative to the movable guide rail.

8. The drying chamber assembly according to claim 1, characterized in that: The number of the transmission chains is four, and the four transmission chains are respectively arranged at four angular positions in the drying chamber.

9. The drying chamber assembly according to claim 1, characterized in that: The bearing part is an L-shaped supporting member which is detachably fixed on the transmission chain.

10. A coating device, characterized in that: The invention comprises a drying chamber assembly as claimed in any one of claims 1 to 9.

Images