Sintering jig

Abstract

The utility model provides a sintering jig, and relates to the technical field of semiconductor preparation. The utility model provides a sintering jig which comprises a base and a plurality of sintering parts arranged on the base at intervals in the linear direction, each sintering part comprises a first flange piece and a second flange piece which are oppositely arranged, each sintering part further comprises at least one discharging position arranged between the corresponding first flange piece and the corresponding second flange piece, and when the number of the discharging positions is multiple, the first flange piece and the second flange piece are arranged at intervals. The multiple discharging positions are arranged at preset intervals in the extending direction of the first flange piece and used for containing pieces to be sintered; the base, the first flange piece and the second flange piece are each provided with a plurality of ventilation holes. According to the sintering jig, the sintering efficiency can be guaranteed through multi-layer sintering, meanwhile, the ventilation holes are formed in the base, the first flange piece and the second flange piece, hot air is evenly transferred in the sintering process, products are evenly heated, and the yield and reliability of the products are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor preparation, in particular to a sintering jig. Background Art

[0002] The existing semiconductor packaging structure generally includes a lead frame, a die-bonding adhesive, a chip and a plastic package. Among them, the use of a lead frame and a chip for bonding is the current trend of semiconductor packaging devices towards high power density and high reliability applications.

[0003] The existing technology usually applies silver paste on the chip by dispensing; bakes the chip coated with silver paste to decompose and volatilize the solvent in the silver paste; applies adhesive to the silver paste where it is bonded to the lead frame; places the lead frame on the silver paste so that the lead frame is connected to the chip under the action of the adhesive; and performs pressure silver sintering on the bonded lead frame and silicon carbide power device chip, and decomposes and volatilizes the adhesive during the sintering process. However, the current sintering jig is usually single-layer sintering, which makes the sintering efficiency low; if the sintering efficiency is to be improved, multi-layer sintering is usually used, but multi-layer sintering easily causes uneven heating of the product, thereby reducing the product yield and reliability. Utility Model Content

[0004] The utility model aims to provide a sintering jig, which ensures sintering efficiency and realizes uniform heating of products, thereby improving product yield and reliability.

[0005] The embodiment of the utility model is achieved as follows:

[0006] In one aspect of the utility model, a sintering jig is provided, comprising a base and a plurality of sintering parts arranged on the base at intervals along a straight direction, the sintering parts comprising a first side guard and a second side guard arranged opposite to each other, the sintering parts further comprising at least one discharge position arranged between the first side guard and the second side guard, when the discharge positions comprise a plurality of discharge positions, the plurality of discharge positions are arranged at preset intervals along the extension direction of the first side guard, and the discharge positions are used to place the parts to be sintered; the base, the first side guard and the second side guard are all provided with a plurality of ventilation holes.

[0007] Optionally, the discharge position is provided with a plurality of first support rods and a plurality of second support rods which are parallel to each other and spaced apart from each other, the ends of the plurality of first support rods are respectively connected to the first side guard member and extend toward the second side guard member, and the ends of the plurality of second support rods are respectively connected to the second side guard member and extend toward the first side guard member; the plurality of first support rods are arranged at preset intervals in the same plane to be parallel to the plate surface of the base, and the plurality of second support rods are arranged at preset intervals in the same plane to be parallel to the plate surface of the base.

[0008] Optionally, the first support rod and the second support rod are arranged in the same plane, and a preset gap is set between the first support rod and the second support rod, and the preset gap is used to pass a push rod, which is used to push the sintered part along the setting direction of the multiple first support rods.

[0009] Optionally, the ventilation holes on the base are arranged in a straight line.

[0010] Optionally, any ventilation hole on the base is located between the projection ranges of two adjacent first support rods on the base.

[0011] Optionally, the ventilation holes on the first side guard and the second side guard are arranged in a straight line along the setting direction of the multiple discharge positions.

[0012] Optionally, the first side guard member and the second side guard member are parallel to each other and are arranged perpendicular to the base.

[0013] Optionally, the sintering jig further includes a first support bar and a second support bar, the first support bar being vertically arranged on a first side guard member close to one side edge of the base; the second support bar being vertically arranged on a second side guard member close to the other side edge of the base, and the extension direction of the first support bar and the second support bar is in the same direction as the setting direction of the plurality of first support rods.

[0014] Optionally, the first support bar is vertically arranged at one end of the first side member away from the base and extends toward the side away from the second side member; the second support bar is vertically arranged at one end of the second side member away from the base and extends toward the side away from the first side member.

[0015] Optionally, ventilation holes are provided on the first support bar and the second support bar, and the ventilation holes are arranged in a straight line along the extension direction of the first support bar and the second support bar.

[0016] The beneficial effects of the utility model include:

[0017] The present application provides a sintering jig, comprising a base and a plurality of sintering parts arranged on the base at intervals along a straight line direction, the sintering parts comprising a first side guard and a second side guard arranged oppositely, the sintering parts further comprising at least one discharge position arranged between the first side guard and the second side guard, when the discharge positions comprise a plurality of discharge positions, the plurality of discharge positions are arranged at preset intervals along the extension direction of the first side guard, and the discharge positions are used to place the parts to be sintered; the base, the first side guard and the second side guard are all provided with a plurality of ventilation holes. The above-mentioned sintering jig can ensure the sintering efficiency through multi-layer sintering while providing ventilation holes on the base, the first side guard and the second side guard to ensure uniform hot air transfer during the sintering process, thereby achieving uniform heating of the product and improving the product yield and reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 One of the structural schematic diagrams of the sintering fixture provided in the embodiment of the utility model;

[0020] Figure 2 The second structural schematic diagram of the sintering fixture provided by the embodiment of the utility model;

[0021] Figure 3 A schematic diagram of the structure of the sintering fixture and the workpiece to be sintered provided in the embodiment of the utility model;

[0022] Figure 4 A top view of a sintering jig provided in an embodiment of the utility model;

[0023] Figure 5 A schematic structural diagram of a first side guard of a sintering jig provided in an embodiment of the utility model;

[0024] Figure 6 A schematic structural diagram of a second side guard of a sintering jig provided in an embodiment of the utility model.

[0025] Icons: 100-sintering fixture; 110-base; 120-sintering part; 121-first side guard; 122-second side guard; 123-discharging position; 124-first support rod; 125-second support rod; 130-ventilation hole; 140-first support bar; 150-second support bar; 200-push rod; 300-part to be sintered. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0029] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0030] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0031] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] Please refer to Figure 1The present embodiment provides a sintering jig 100, comprising a base 110 and a plurality of sintering parts 120 arranged on the base 110 at intervals along a straight line direction, the sintering part 120 comprising a first side guard 121 and a second side guard 122 arranged opposite to each other, the sintering part 120 further comprising at least one discharge position 123 arranged between the first side guard 121 and the second side guard 122, when the discharge position 123 comprises a plurality of discharge positions 123, the plurality of discharge positions 123 are arranged at preset intervals along the extension direction of the first side guard 121, and the discharge positions 123 are used to place a workpiece 300 to be sintered; the base 110, the first side guard 121 and the second side guard 122 are all provided with a plurality of ventilation holes 130.

[0033] Specifically, the present application provides a sintering fixture 100, which includes a base 110, and the base 110 is used to provide support for the overall structure of the sintering fixture 100 and the workpiece 300 to be sintered; a plurality of sintering parts 120 are arranged on the base 110, such as Figure 1 As shown, a plurality of sintering parts 120 are arranged side by side on the base 110 , and two adjacent sintering parts 120 are arranged at intervals, so that the sintering parts 120 can better transfer hot air and achieve uniform heating.

[0034] The sintering part 120 includes a first side member 121 and a second side member 122, which are arranged at intervals relative to each other so that there is a space between the first side member 121 and the second side member 122 for placing the sintered part 300. The sintering part 120 also includes a plurality of discharge positions 123, which are arranged between the first side member 121 and the second side member 122, and a plurality of discharge areas are arranged at preset intervals along the extension direction of the first side member 121 to ensure that the sintered part 300 can be placed in the discharge area and the top does not contact the adjacent discharge area.

[0035] For example, Figure 3 As shown, the sintering jig 100 includes three sintering parts 120, and each sintering part 120 includes three discharge areas. Therefore, the sintering jig 100 can sinter 9 pieces 300 to be sintered at the same time, thereby greatly improving the sintering efficiency. It should be noted that in addition to the three sintering parts 120, the sintering jig 100 can also be set to four sintering parts 120, five sintering parts 120, and the discharge areas in each sintering part 120 can also be four, five, etc. The present application does not impose any restrictions on the specific number of sintering parts 120 and the specific number of discharge areas. In the actual production process, the specific number of sintering parts 120 and the specific number of discharge areas can be appropriately adjusted.

[0036] Alternatively, if Figure 1As shown, in order to allow enough space above and below the discharge position 123 so that hot air can be evenly blown into the discharge position 123 to further achieve uniform heating, a preset interval is provided between the discharge position 123 and the base 110 to prevent the lower side of the discharge position 123 from being closely attached to the base 110 .

[0037] In order to improve the yield and reliability of multi-layer sintered products, the base 110, the first side guard 121 and the second side guard 122 of the sintering fixture 100 are all provided with a plurality of ventilation holes 130, so that the hot air in the sintering fixture 100 is evenly transferred during the sintering process, and will not be blocked by the setting of the base 110, the first side guard 121 and the second side guard 122, thereby ensuring that the product is heated evenly.

[0038] It should be noted that, in one possible implementation mode of the present application, first, Figure 4 As shown, the ventilation holes 130 on the base 110 are arranged in a straight line direction to ensure that when the sintered part 300 is placed in the discharge area, its bottom can be exposed to hot air from the ventilation holes 130 of the base 110. Since the multiple ventilation holes 130 on the base 110 are arranged in a straight line in parallel along the extension direction of the base 110, it can ensure that the bottom of the sintered part 300 is exposed to uniform hot air, thereby ensuring that the product is heated evenly and improving product reliability.

[0039] Second, if Figure 5 and Figure 6 As shown, the ventilation holes 130 on the first side guard 121 and the second side guard 122 are arranged in a straight line along the setting direction of the plurality of discharge positions 123 .

[0040] Specifically, the ventilation holes 130 on the first side guard member 121 and the second side guard member 122 are arranged in a straight line along the setting direction of the multiple first support rods 124 to ensure that when the sintered part 300 is placed in the discharge area, both sides of it can be exposed to hot air from the ventilation holes 130 of the base 110. Since the ventilation holes 130 on the first side guard member 121 and the second side guard member 122 are arranged in a straight line in parallel, it can ensure that the left and right sides of the sintered part 300 are evenly exposed to hot air, thereby ensuring that the product is evenly heated and improving product reliability.

[0041] Third, if Figure 1 As shown, the first side guard 121 and the second side guard 122 are parallel to each other and are arranged perpendicular to the base 110, so that the structure of the sintering part 120 is more stable and reliable.

[0042] The sintering fixture 100 can ensure sintering efficiency through multi-layer sintering while providing ventilation holes 130 on the base 110, the first side member 121 and the second side member 122 to evenly transfer hot air during sintering, thereby achieving even heating of the product and improving product yield and reliability.

[0043] In one embodiment of the present application, the discharge position 123 is provided with a plurality of first support rods 124 and a plurality of second support rods 125 which are parallel to each other and spaced apart from each other, the ends of the plurality of first support rods 124 are respectively connected to the first side guard member 121 and extend toward the second side guard member 122, and the ends of the plurality of second support rods 125 are respectively connected to the second side guard member 122 and extend toward the first side guard member 121; the plurality of first support rods 124 are arranged at preset intervals in the same plane to be parallel to the plate surface of the base 110, and the plurality of second support rods 125 are arranged at preset intervals in the same plane to be parallel to the plate surface of the base 110.

[0044] Specifically, the discharge position 123 is provided with a plurality of first support rods 124 and a plurality of second support rods 125, the plurality of first support members are parallel to each other and spaced apart, and the ends of the first support members are vertically connected to the first side guard member 121; the plurality of second support members are parallel to each other and spaced apart along the first direction, and the ends of the second support rods 125 are vertically connected to the second side guard member 122, and the first support members and the second support members together constitute a discharge area for placing the parts to be sintered 300.

[0045] In order to enable the discharge area to support the sintered part 300 more stably and improve the yield of the sintered product, multiple first support members are located in the same plane, multiple second support members are also located in the same plane, and the first support members and the second support members are also located in the same plane to be parallel to the plate surface of the base 110 to ensure the flatness of the discharge area, so that the sintered part 300 is flatly and stably supported by the multiple first support rods 124 and the multiple second support rods 125, thereby achieving thermal stability in the sintering process and further improving the product yield.

[0046] For example, Figure 1 and Figure 4 As shown, the first support rod 124 and the second support rod 125 are arranged in the same plane, and a preset gap is set between the first support rod 124 and the second support rod 125. The preset gap is used to pass the push rod 200, and the push rod 200 is used to push the sintered part 300 along the setting direction of the multiple first support rods 124.

[0047] Specifically, a preset gap is set between the first support rod 124 and the second support rod 125 for inserting the push rod 200. The push rod 200 can push the sintered part 300 so that the sintered part 300 is set on the first support rod 124 and the second support rod 125 along the setting direction of multiple support rods, thereby improving the sintering efficiency.

[0048] It should be noted that in order to ensure that the product is flat after sintering, the preset gap between the first support rod 124 and the second support rod 125 should be reduced as much as possible, and it is sufficient that the preset gap is slightly larger than the diameter of the push rod 200, so as to ensure that the push rod 200 can be flexibly inserted between the first support rod 124 and the second support rod 125 in the discharge area. By reducing the preset gap between the first support rod 124 and the second support rod 125, the suspended part of the sintered part 300 in the sintering jig 100 can be reduced as much as possible, preventing the sintered part 300 from being warped and deformed due to the influence of gravity due to the excessive suspended area in the middle, thereby improving the product yield and reliability.

[0049] Alternatively, if Figure 4 As shown, any ventilation hole 130 on the base 110 is located between the projection ranges of two adjacent first support rods 124 on the base 110 .

[0050] Specifically, when the workpiece 300 to be sintered is arranged in the discharge area, the first support rod 124 and the second support rod 125 jointly support the workpiece 300 to be sintered. In order to ensure that the bottom of the workpiece 300 to be sintered is evenly exposed to hot air and the product is evenly heated, the multiple ventilation holes 130 on the base 110 are arranged in a straight line in parallel along the extension direction of the base 110. In order to make the hot air emitted by the ventilation holes 130 on the base 110 blow evenly toward the workpiece 300 to be sintered, any ventilation hole 130 on the base 110 is located between the projection range of two adjacent first support rods 124 on the base 110 to prevent the hot air from being blocked by the first support rod 124 or the second support rod 125, thereby improving the product yield and reliability.

[0051] In one possible implementation of this application, please combine Figure 1 , Figure 2 and Figure 4 The sintering jig 100 also includes a first support bar 140 and a second support bar 150. The first support bar 140 is vertically arranged on a first side member 121 close to one side edge of the base 110; the second support bar 150 is vertically arranged on a second side member 122 close to the other side edge of the base 110. The extension direction of the first support bar 140 and the second support bar 150 is the same as the setting direction of the plurality of first support rods 124.

[0052] Specifically, the sintering jig 100 also includes a first support bar 140 and a second support bar 150. The first support bar 140 is vertically arranged on the first side member 121 close to one side edge of the base 110; the second support bar 150 is vertically arranged on the second side member 122 close to the other side edge of the base 110, so that the first support bar 140 and the second support bar 150 are respectively located on the opposite side edges of the sintering jig 100; through the arrangement of the first support bar 140 and the second support bar 150, the sintering jig 100 can be easily placed on the conveyor belt of the sintering equipment, so as to realize the subsequent transmission of the sintering jig 100 and improve the sintering efficiency.

[0053] In order to make the transmission process of the sintering jig 100 more stable, the extension direction of the first support bar 140 and the second support bar 150 is the same as the setting direction of the plurality of first support rods 124 to increase the contact area between the first support bar 140 and the second support bar 150 and the sintering equipment.

[0054] Furthermore, the first support bar 140 is vertically arranged at one end of the first side member 121 away from the base 110, and extends toward the side away from the second side member 122; the second support bar 150 is vertically arranged at one end of the second side member 122 away from the base 110, and extends toward the side away from the first side member 121. Such an arrangement can further increase the area of ​​the first support bar 140 and the second support bar 150, so that the transmission process of the sintering jig 100 is more stable and reliable.

[0055] In one possible implementation of the present application, Figure 4 As shown, ventilation holes 130 are provided on the first support bar 140 and the second support bar 150 , and the ventilation holes 130 are arranged in a straight line along the extending direction of the first support bar 140 and the second support bar 150 .

[0056] Specifically, in order to further improve the yield and reliability of multi-layer sintered products, ventilation holes 130 are provided on the first support bar 140 and the second support bar 150. The ventilation holes 130 are arranged in a straight line along the extension direction of the first support bar 140 and the second support bar 150 to ensure that the sintered parts 300 arranged in the same direction as the first support bar 140 and the second support bar 150 can be exposed to uniform hot air, thereby ensuring that the product is heated evenly and improving product reliability.

[0057] The above description is only an optional embodiment of the utility model and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

[0058] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present utility model will not further describe various possible combinations.

Claims

1. A sintering jig, characterized in that: The invention comprises a base (110) and a plurality of sintering parts (120) arranged on the base (110) at intervals along a straight line direction, the sintering parts (120) comprising a first side guard (121) and a second side guard (122) arranged opposite to each other, the sintering parts (120) further comprising at least one discharge position (123) arranged between the first side guard (121) and the second side guard (122), when the discharge position (123) comprises a plurality of discharge positions (123), the plurality of discharge positions (123) are arranged at preset intervals along the extension direction of the first side guard (121), and the discharge positions (123) are used for placing a to-be-sintered part (300); the base (110), the first side guard (121) and the second side guard (122) are all provided with a plurality of ventilation holes (130).

2. The sintering jig according to claim 1, characterized in that: The material discharge position (123) is provided with a plurality of first support rods (124) and a plurality of second support rods (125) which are parallel to each other and spaced apart from each other; the ends of the plurality of first support rods (124) are respectively connected to the first side guard member (121) and extend toward the second side guard member (122); the ends of the plurality of second support rods (125) are respectively connected to the second side guard member (122) and extend toward the first side guard member (121); the plurality of first support rods (124) are arranged at preset intervals in the same plane to be parallel to the plate surface of the base (110); and the plurality of second support rods (125) are arranged at preset intervals in the same plane to be parallel to the plate surface of the base (110).

3. The sintering jig according to claim 2, characterized in that: The first support rod (124) and the second support rod (125) are arranged in the same plane, and a preset gap is arranged between the first support rod (124) and the second support rod (125), and the preset gap is used to pass a push rod (200), and the push rod (200) is used to push the sintered part (300) along the arrangement direction of the plurality of first support rods (124).

4. The sintering jig according to claim 2, characterized in that: The ventilation holes (130) on the base (110) are arranged in a straight line.

5. The sintering jig according to claim 4, characterized in that: Any of the ventilation holes (130) on the base (110) is located between the projection ranges of two adjacent first support rods (124) on the base (110).

6. The sintering jig according to claim 1, characterized in that: The ventilation holes (130) on the first side guard (121) and the second side guard (122) are arranged in a straight line along the setting direction of the plurality of discharge positions (123).

7. The sintering jig according to claim 1, characterized in that: The first side guard member (121) and the second side guard member (122) are parallel to each other and are arranged perpendicular to the base (110).

8. The sintering jig according to claim 2, characterized in that: The sintering jig (100) further comprises a first support bar (140) and a second support bar (150), wherein the first support bar (140) is vertically arranged on the first side guard member (121) close to one side edge of the base (110); and the second support bar (150) is vertically arranged on the second side guard member (122) close to the other side edge of the base (110), and the extension direction of the first support bar (140) and the second support bar (150) is the same as the arrangement direction of the plurality of first support rods (124).

9. The sintering jig according to claim 8, characterized in that: The first support bar (140) is vertically arranged at one end of the first side guard (121) away from the base (110), and extends toward a side away from the second side guard (122); the second support bar (150) is vertically arranged at one end of the second side guard (122) away from the base (110), and extends toward a side away from the first side guard (121).

10. The sintering jig according to claim 8, characterized in that: The first support bar (140) and the second support bar (150) are provided with ventilation holes (130), and the ventilation holes (130) are arranged in a straight line along the extension direction of the first support bar (140) and the second support bar (150).

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