Coating material structure

Abstract

The utility model provides a coating material structure which is provided with a coating material main body, and the coating material main body comprises a heater, an inner layer and an outer layer. Wherein the heater is arranged in the packing material main body and is used for heating a pipeline; the inner layer is arranged between the gas pipeline and the heater and is provided with an inner flame-resistant layer; the outer layer is arranged on the outer side surface of the heater and used for preserving heat and improving the effect of the heater. The inner layer and the outer layer cover the heater, so that when the heater is used for a long time, the insulating layer is cracked or volatile matters appear, generated particles cannot escape to the external environment, and the dust falling amount of the environment is prevented from being increased. And the inner flame-resistant layer has the characteristic of not generating particles and volatile matters at the temperature below the working temperature, and can be directly used as an insulating layer to avoid cracking of the insulating layer or generation of volatile matters.

Description

Technical Field

[0001] The present application relates to the field of heating systems for gas pipelines, and in particular to a coating material structure capable of preventing volatilization of coating materials and coating dust sources to reduce the amount of dust falling into the environment. Background Art

[0002] Various chemical gases are often used in semiconductor manufacturing processes. These gases are heated to 300-500 degrees Celsius for use in the process. The used waste gas is extracted through the gas pipeline and sent to the waste gas purification facility or filtration system. The high-temperature waste gas after use may be mixed with different chemical substances or another gas formed by chemical reactions. Once it comes into contact with the room temperature pipeline, the waste gas itself or the chemical substances in it will form crystals on the inner wall of the pipe, gradually blocking the gas pipeline, resulting in reduced pipeline efficiency and increased maintenance frequency.

[0003] In order to avoid crystallization on the inner wall of the tube, the solution most commonly used today is to use a pipeline heating system, commonly known as a jacket heater (Heating Jacket System) to help heat the gas pipeline to prevent the exhaust gas from contacting the wall of the room temperature pipeline and condensing or crystallizing. However, in order to increase the yield in the semiconductor process, it is necessary to manufacture in a clean room, and the amount of dust in the space needs to be strictly controlled. It is well known that the structure of the jacket heater is that the outermost insulation layer covers the heater and the pipeline, and the heater is provided with an insulating layer to avoid leakage. The insulating layer will decompose or produce volatiles when used in a high temperature environment in contact with the heater for a long time, becoming the main source of dust in the clean room, affecting the cleanliness of the clean room and thus affecting the product yield.

[0004] The applicant in this case is aware of the shortcomings of the well-known pipe heating system. Long-term contact with the heater in a high-temperature environment will cause the heater's insulation layer to decompose or produce volatiles, which will then generate a large amount of dust particles that will escape into the environment, destroying the cleanliness of the clean room. Therefore, the applicant has actively and continuously developed technical solutions that can solve the above problems. Utility Model Content

[0005] In view of the above problems, the main purpose of the present application is to provide a coating material structure that can be applied to a pipeline heating system and has a flexible soft material that seals and covers the heater to reduce the amount of dust falling into the environment.

[0006] Another object of the present application is to provide a coating material structure using a soft material that is resistant to high temperatures and will not decompose or volatilize to produce a large number of particles during long-term use.

[0007] In order to achieve the aforementioned purpose, the present application provides a coating material structure, having a packaging material body, the packaging material body comprising: a heater, an inner layer and an outer layer. The heater is arranged inside the packaging material body to heat the heating target; the inner layer is arranged between the heater and the target, covering the inner surface of one side of the heater; the outer layer covers the outer surface of the other side of the heater to enhance the heating effect of the heater. The inner side and the outer side in the present application refer to the side of the flame-resistant layer close to the heated target when in use as the inner side, and the side of the outer layer away from the heated target as the outer side.

[0008] The inner layer includes: an inner flame-resistant layer and an inner insulating layer, and the inner insulating layer covers the inner surface of the heater. The outer layer has an outer insulating layer, a thermal insulation layer, a rubber layer and an outer skin, and the outer insulating layer covers the heater; the thermal insulation layer covers the outer insulating layer for thermal insulation; the outer skin is arranged on the outermost side of the outer layer to prevent external substances from rubbing, puncturing or corroding the coating material structure of the present application; the rubber layer connects the outer skin and the thermal insulation layer to prevent delamination. When power is turned on, the heater generates eddy currents in the heating target to heat the heating target, and the inner insulating layer and the outer insulating layer are used to prevent the heater from leaking electricity.

[0009] In a preferred application, the inner flame retardant layer covers the inner insulating layer; the outer insulating layer is arranged on the innermost side of the outer layer; and the inner flame retardant layer does not generate a large amount of volatiles when working below the working temperature. This prevents the volatiles generated by the heater from escaping to the outside, thereby achieving the effect of reducing the amount of dust in the environment.

[0010] A preferred embodiment of the present application, wherein the outer layer also has an outer flame resistant layer, and both the inner flame resistant layer and the outer flame resistant layer have insulating properties, which can be used as an insulating layer to cover the heater to avoid the generation of a large amount of volatiles after the insulating layer is heated.

[0011] Preferably, the operating temperature of the outer insulating layer and the thermal insulation layer is between 160 and 260 degrees Celsius.

[0012] Preferably, the outer insulating layer and the thermal insulation layer may be foamed silicone.

[0013] Preferably, the working temperature of the inner flame resistant layer and the outer flame resistant layer is between 150 and 300 degrees Celsius, preferably 200 degrees Celsius. When used within the working temperature range, the inner flame resistant layer and the outer flame resistant layer will not generate volatiles.

[0014] Preferably, the inner flame-resistant layer and the outer flame-resistant layer are made of flame-resistant and insulating soft materials, such as polyimide (PI).

[0015] Preferably, the packaging material body is formed into a tube shape.

[0016] Preferably, the heater has a coil and can heat the target by induction heating.

[0017] Compared with the prior art, the coating material structure provided in the embodiment of the present application has at least the following beneficial effects:

[0018] The heating effect of the heater can be guaranteed. At the same time, the inner layer and the outer layer cover the heater, so that when the insulation layer is cracked or volatiles are produced due to long-term use of the heater, the particles generated will not escape into the external environment, thereby avoiding the increase of environmental dust. In addition, the inner flame-resistant layer has the characteristic of not generating particles and volatiles below the working temperature, and can also be directly used as an insulation layer to avoid cracking of the insulation layer or the production of volatiles. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the structure of an embodiment of the present application;

[0020] Figure 2 It is a detailed structural diagram of the first embodiment of the present application;

[0021] Figure 3 It is a detailed structural diagram of the second embodiment of the present application.

[0022] [Description of Reference Numerals]

[0023] 1: Heater;

[0024] 11: Coil;

[0025] 12: Insulation layer;

[0026] 21: Inner flame resistant layer;

[0027] 22: inner insulation layer;

[0028] 3: Outer layer;

[0029] 31: Insulation layer;

[0030] 32: glue layer;

[0031] 33: skin;

[0032] 34: outer insulation layer;

[0033] 35: Outer flame resistant layer. DETAILED DESCRIPTION

[0034] In order to facilitate the understanding of the present application, the present application is described in detail below in conjunction with the accompanying drawings and embodiments. A part of the embodiments of the present application is provided in the accompanying drawings, but not all of the embodiments. The present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present application more thorough and comprehensive. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without paying progressive efforts belong to the scope of protection of the present application.

[0035] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present application. The terms used in the specification of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application.

[0036] Figure 1 to Figure 2 is a schematic diagram of an embodiment of the present application, such as Figure 1 The structural diagram of the embodiment of the present application is Figure 2 As shown in the detailed structural diagram of the first embodiment of the present application, the coating material structure in the present application has a packaging material body. The packaging material body covers the gas pipeline and includes: a heater 1, an inner layer 2 and an outer layer 3. Among them, the inner layer 2 has an inner flame-resistant layer 21 and an inner insulating layer 22; the outer layer 3 has a thermal insulation layer 31, a glue layer 32, an outer skin 33 and an outer insulating layer 34, and the outer insulating layer 34 covers the heater 1; the thermal insulation layer 31 covers the outer insulating layer 34 for thermal insulation; the outer skin 33 is arranged on the outermost side of the outer layer 3 to prevent foreign substances from rubbing, puncturing or corroding the coating material structure of the present application; the glue layer 32 connects the outer skin 33 and the thermal insulation layer 31 to avoid delamination. The inner insulating layer 12 and the outer insulating layer 34 cover the inner surface and the outer surface of the heater 1, the inner surface refers to the side facing the coated gas pipeline, and the outer surface refers to the other side relative to the inner surface.

[0037] In a preferred application, the packaging material body covers the gas pipeline, and the heater 1 is started to heat the gas pipeline. The outer layer 3 prevents the heat generated by the heater 1 from escaping to the external environment through the thermal insulation layer 31; the high resistance of the inner insulating layer 22 and the outer insulating layer 34 is used to prevent the heater 1 from leaking electricity and conducting it to the outside to cause harm and reduce the aging speed of the heater 1; the inner flame-resistant layer 21 covers the inner insulating layer 22; the outer insulating layer 34 is arranged at the innermost side of the outer layer 3 to prevent the inner insulating layer 22 and the outer insulating layer 34 from being used for a long time due to high-temperature decomposition or the generation of volatiles. The generated particles escape into the external space and increase the amount of dust in the environment, thereby reducing the amount of dust generated by the packaging material structure in the embodiment of the present application.

[0038] like Figure 3As shown in the detailed structural diagram of the second embodiment of the present application, the outer layer 3 also has an outer flame resistant layer 35, and the inner flame resistant layer 21 and the outer flame resistant layer 35 both have insulating properties and can be directly used as the inner insulating layer 22 and the outer insulating layer 34, and the inner flame resistant layer 21 and the outer flame resistant layer 35 are used to cover the heater 1.

[0039] Specifically, the structure of the inner layer 2 and the outer layer 3 enveloping the heater 1 can cover the heater 1, so that the particles and volatiles generated by the heater 1 will not be lost to the external environment. In addition, when the inner flame resistant layer 21 and the outer flame resistant layer 35 are working below the working temperature, they will not generate a large amount of particles and volatiles, thereby reducing the amount of dust falling into the environment.

[0040] Preferably, the operating temperature of the thermal insulation layer 31, the adhesive layer 32, the outer skin 33 and the outer insulating layer 34 may be 160 to 260 degrees Celsius.

[0041] Preferably, the thermal insulation layer 31 and the outer insulating layer 34 may be made of foamed silicone.

[0042] Preferably, the working temperature of the inner flame resistant layer 21 and the outer flame resistant layer 35 can be 150-300 degrees Celsius, preferably 200 degrees Celsius.

[0043] Preferably, the inner flame resistant layer 21 and the outer flame resistant layer 35 can be made of polyimide.

[0044] The packaging material body with different structures can be designed according to the difference in the length of the gas pipeline; for example, when the gas pipeline is long, an opening can be formed in the packaging material body to facilitate covering the gas pipeline, and when the gas pipeline is short, the packaging material body can be directly formed into a tube.

[0045] In one embodiment of the present application, the heater has a coil 11, which can heat the gas pipeline by induction heating.

[0046] The above-mentioned embodiments only express the preferred implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present application. It should be pointed out that, for ordinary technicians in this field, several changes and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application.

Claims

1. A packaging material structure, having a packaging material body, characterized in that: include: a heater, disposed inside the packaging material body; an inner layer covering the inner surface of the heater and comprising an inner flame resistant layer; as well as an outer layer covering an outer surface of the heater; The inner flame resistant layer has the property of not generating volatile substances within the working temperature range of 150 to 300 degrees Celsius.

2. The covering material structure according to claim 1, characterized in that: The inner layer also includes an inner insulating layer disposed between the inner flame-resistant layer and the heater.

3. The covering material structure according to claim 2, characterized in that: The outer layer comprises: an outer insulating layer, a heat preservation layer, a glue layer and an outer skin, the outer insulating layer covers the heater; the heat preservation layer covers the outer side of the outer insulating layer; the glue layer connects the heat preservation layer and the outer skin.

4. The covering material structure according to claim 1, characterized in that: The outer layer includes an outer flame-resistant layer, and both the inner flame-resistant layer and the outer flame-resistant layer have insulating properties; the inner flame-resistant layer covers the inner surface of the heater; and the outer flame-resistant layer covers the outer surface of the heater.

5. The covering material structure according to claim 4, characterized in that: The outer layer further comprises: a heat-insulating layer, a glue layer and an outer skin, wherein the heat-insulating layer covers the outer flame-resistant layer; and the glue layer connects the heat-insulating layer and the outer skin.

6. The covering material structure according to claim 3, characterized in that: The inner flame resistant layer is polyimide.

7. The covering material structure according to claim 5, characterized in that: The inner flame resistant layer and the outer flame resistant layer are polyimide.

8. The covering material structure according to claim 6 or 7, characterized in that: The packaging material main body is formed in a tube shape.

9. The covering material structure according to claim 6, characterized in that: The outer insulating layer and the heat-insulating layer are made of foamed silica gel.

10. The covering material structure according to claim 6 or 7, characterized in that: The heater has: A coil is heated by induction heating.

Images