Purging device and waste gas treatment system

Abstract

The utility model provides a purging device and a waste gas treatment system, and relates to the technical field of waste gas treatment, in particular to the purging device which comprises a reaction barrel, a special gas pipeline and a purging pipeline. Wherein the special gas pipeline comprises at least one bending section, and the purging pipeline comprises a contraction section communicated with the bending section, so that the introduced inert gas can be pertinently purged to act on the bending section, and the beneficial effect of avoiding dust particle accumulation or blockage at the bending section is achieved. The cross sectional area of the contraction section is gradually reduced along the direction close to the bending section, so that the flowing speed of the introduced inert gas can be increased by utilizing the Venturi effect, the purging efficiency is increased, and the deposition or precipitation of solid dust particles is further reduced; the beneficial effects of prolonging the service life, improving the treatment efficiency and reducing the maintenance cost and the downtime are achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of waste gas treatment, in particular to a purge device and a waste gas treatment system. Background Art

[0002] In the production of the pan-semiconductor industry, the use of chemicals and special gases has led to the generation of a large amount of toxic and harmful waste gas. If the above waste gas is discharged directly into the external environment without treatment, it will cause irreversible damage to the atmosphere, soil and water resources, affecting the ecological balance. Therefore, the industry is generally equipped with a waste gas treatment system to meet the requirements of environmental and safety regulations and reduce the negative impact on the ecological environment.

[0003] However, waste gas generally contains solid dust particles that are not easy to capture. During the waste gas treatment process, these dust particles will be deposited as the waste gas flows in the pipeline, especially causing blockage or corrosion at the bends of the pipeline. In other words, the deposition of these dust particles will shorten the service life of the equipment, affect the accuracy and processing efficiency of the equipment, and increase the maintenance cost and downtime of the equipment. Utility Model Content

[0004] The utility model aims to provide a purging device and an exhaust gas treatment system, which can reduce the beneficial effects of solid dust particle deposition or precipitation, increase service life, improve treatment efficiency, and reduce maintenance costs and downtime.

[0005] The beneficial effects of the embodiments of the utility model include:

[0006] The present application provides a purging device, which includes a reaction barrel, a special gas pipeline and a purging pipeline. Among them, the special gas pipeline includes at least one bending section, and the purging pipeline includes a contraction section connected to the bending section, so that the inert gas introduced can be targeted to purge the bending section, thereby achieving the beneficial effect of avoiding dust particle accumulation or blockage at the bending section. In addition, due to the setting that the cross-sectional area of ​​the contraction section gradually decreases along the direction close to the bending section, the inert gas introduced can use the Venturi effect to increase the flow rate, thereby increasing the purging efficiency, so as to further reduce the deposition or precipitation of solid dust particles, and achieve the beneficial effects of increasing the service life, improving the processing efficiency, and reducing the maintenance cost and downtime.

[0007] The present application provides an exhaust gas treatment system, which includes the above-mentioned purge device, thereby also being able to reduce the beneficial effects of solid dust particle deposition or precipitation, increase service life, improve treatment efficiency, and reduce maintenance costs and downtime. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0009] Figure 1 A schematic diagram of a purge device provided in an embodiment of the utility model;

[0010] Figure 2 The embodiment of the utility model provides Figure 1 The enlarged schematic diagram of point A in the middle;

[0011] Figure 3 A schematic diagram of the exhaust gas flow direction provided by an embodiment of the utility model;

[0012] Figure 4 Another schematic diagram of the purge device provided by the embodiment of the utility model;

[0013] Figure 5 This is a schematic diagram of the inert gas flow provided in an embodiment of the present utility model.

[0014] Icons: 10-purge device; 100-reaction barrel; 300-special gas pipeline; 310-first straight pipe section; 330-bend section; 350-second straight pipe section; 500-purge pipeline; 510-first direct current section; 520-contraction section; 530-second direct current section; 540-diffusion section; 550-flow control valve; 710-fire source generator; 730-signal feedback unit. DETAILED DESCRIPTION

[0015] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0016] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0017] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0018] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0019] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0020] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0021] An embodiment of the present application provides an exhaust gas treatment system, which includes a purge device 10 .

[0022] The purging device 10 provided in the embodiment of the present application can purge the bends in the special gas pipeline 300, i.e., the places where solid particle dust is easily deposited, so as to achieve the beneficial effect of reducing the deposition or precipitation of solid dust particles, thereby correspondingly achieving the beneficial effects of increasing service life, improving processing efficiency, and reducing maintenance costs and downtime.

[0023] The specific structures of the various components of the purge device 10 provided in this embodiment and the corresponding relationships between them will be described in detail below.

[0024] Figure 1 This is a schematic diagram of a purge device 10 provided in an embodiment of the utility model. Figure 2 The embodiment of the utility model provides Figure 1 The enlarged schematic diagram of A in the figure. Figure 1 and Figure 2 As shown, the purge device 10 includes a reaction barrel 100 , a special gas pipeline 300 and a purge pipeline 500 .

[0025] The special gas pipeline 300 is connected to the reaction barrel 100, and the special gas pipeline 300 includes at least one bending section 330. It should be noted that the exhaust gas enters the reaction barrel 100 through the special gas pipeline 300. Specifically, when the exhaust gas flows through the bending section 330, the airflow path changes, and the exhaust gas is likely to collide with the inner wall of the pipeline here, causing dust particles in the exhaust gas to be adsorbed or adhered to the bending section 330, causing the pipeline to be blocked.

[0026] The purge pipeline 500 includes a first direct current section 510 and a contraction section 520, and one end of the contraction section 520 is connected to the first direct current section 510, and the other end is connected to the bending section 330, so that the introduced inert gas can be targetedly purged at the bending section 330, thereby achieving the beneficial effect of avoiding dust particle accumulation or blockage at the bending section 330 while improving the utilization efficiency of the inert gas.

[0027] Moreover, the cross-sectional area of ​​the contraction section 520 gradually decreases in the direction close to the bending section 330, so that the inert gas introduced at the contraction section 520 utilizes the Venturi effect to increase the flow rate, thereby more effectively sweeping the accumulated or blocked dust particles and increasing the sweeping efficiency. It should be noted that the Venturi effect is specifically manifested in the phenomenon that the flow rate of the fluid increases when the restricted flow passes through the reduced flow cross section, that is, the flow rate is inversely proportional to the flow cross section. The contraction section 520 in the present application is similar to achieving flow rate increase through an inward-contracted trumpet structure.

[0028] In other words, the provision of the above-mentioned purge pipeline 500 prevents solid dust particles in the exhaust gas from being deposited or accumulated at the bending section 330 of the special gas pipeline 300, and prevents the special gas pipeline 300 from being blocked or corroded in the process of supplying the exhaust gas to the reaction barrel 100, thereby extending the service life of the purge device 10, reducing the maintenance cost and downtime of the purge device 10, and improving the purification efficiency of the purge device 10.

[0029] Figure 3 The schematic diagram of the exhaust gas flow provided by the embodiment of the utility model, wherein: Figure 3 The arrow in the figure indicates the direction of exhaust gas flow. Figure 3 As shown, the purging device 10 further includes a fire source generator 710 , which is connected to the reaction barrel 100 and is used to provide flame to the reaction barrel 100 .

[0030] It should be noted that, in order to further improve the combustion efficiency, the fire source generator 710 in the present application is two flamethrowers arranged at an angle, which intersect in the inner cavity of the reaction barrel 100 to form a flame area with a wider coverage and higher combustion temperature, so as to facilitate the full reaction of the exhaust gas supplied through the special gas pipeline 300. In addition, the fire source generator 710 can also be set as a plasma heater.

[0031] See also Figure 4 , Figure 4 Another schematic diagram of the purge device 10 provided in an embodiment of the utility model. In order to improve the processing efficiency of the reaction barrel 100, the number of the special gas pipelines 300 is multiple, and the multiple special gas pipelines 300 are arranged at intervals along the circumference of the reaction barrel 100. Based on the above arrangement, the multiple special gas pipelines 300 can provide exhaust gas from multiple directions, and make the exhaust gas converge at the opening of the fire source generator 710, fully improving the processing efficiency of the input exhaust gas in the reaction barrel 100.

[0032] In some embodiments, in order to further improve the uniformity of the exhaust gas in the reaction barrel 100, a plurality of special gas pipelines 300 may be arranged at equal intervals along the circumference of the reaction barrel 100. Figure 4 In the schematic diagram shown, four special gas pipelines 300 are arranged at equal intervals along the circumference of the reaction barrel 100; for example, in Figure 1 In the schematic diagram shown, the two special gas pipelines 300 are symmetrically arranged in the reaction barrel 100 with the axial center line of the reaction barrel 100 as the symmetry axis. In addition, the purge pipeline 500 can correspond one-to-one with the special gas pipeline 300 or the bent section 330 of the special gas pipeline 300 to avoid blockage or corrosion of the special gas pipeline 300 as much as possible during the process of passing the exhaust gas.

[0033] In order to improve the controllability and flexibility of the inert gas, the purging device 10 further includes a flow control valve 550, which is connected to the first direct current section 510 and is used to control the first direct current section 510 to be in a flowing state or a closed state. Based on the above configuration, the controllability and flexibility of the inert gas are achieved, thereby reducing the waste of the inert gas, improving the utilization rate of the inert gas, and achieving the scientific nature of the inert gas purging effect.

[0034] Specifically, when the purge device 10 is in a working state, the flow control valve 550 is opened and the first direct current section 510 is in a circulation state, thereby allowing inert gas to pass through to prevent the special gas pipeline 300 from being blocked; when the purge device 10 is in a non-working state, the flow control valve 550 is closed and the first direct current section 510 is in a closed state, thereby reducing the waste of inert gas and lowering production costs.

[0035] In some embodiments, the flow control valve 550 provided in the present application can be a manual valve to facilitate installation and save costs. In other embodiments, the flow control valve 550 provided in the present application can be a solenoid valve to facilitate remote control, automatic adjustment and rapid response.

[0036] The purge device 10 also includes a signal feedback unit 730, which is connected to the reaction barrel 100 and is used to obtain the opening and closing status of the fire source generator 710. In the case where the flow control valve 550 is a solenoid valve, the above-mentioned signal feedback unit 730 can be indirectly communicated with the flow control valve 550 through an external controller. That is, the controller receives the feedback signal (opening and closing of the fire source generator 710) of the signal feedback unit 730, processes the feedback signal, and then outputs the control signal to the flow control valve 550 accordingly, thereby improving the response speed and working efficiency of the entire purge device 10. In some embodiments, the controller can be set as an industrial control board or a PLC (programmable logic controller).

[0037] Based on the above, the signal feedback unit 730 is used to open the flow control valve 550 when the fire source generator 710 is turned on, or to close the flow control valve 550 when the fire source generator 710 is turned off. In other words, the signal feedback unit 730 provided in the present application obtains the state of the fire source generator 710 to obtain the overall working state of the purge device 10, thereby controlling the on and off of the first direct current section 510.

[0038] Specifically, when the fire source generator 710 is turned on, the flame burns, the purge device 10 is in a working state, the flow control valve 550 is opened, and the first direct current section 510 is in a flow state; when the fire source generator 710 is turned off, the flame is extinguished, the purge device 10 is in a non-working state, the flow control valve 550 is closed, and the first direct current section 510 is in a closed state.

[0039] In addition, in order to finely control the flow rate of the inert gas, a pressure sensor may be provided at the inlet of the special gas pipeline 300, so as to understand the pressure in the special gas pipeline 300 in real time. In particular, when the special gas pipeline 300 is blocked at the bending section 330, the pressure in the special gas pipeline 300 will increase accordingly, so that the operator can find the blockage in time and open the flow control valve 550.

[0040] In addition, the staff can also judge the blockage of dust particles at the bending section 330 according to different pressure values, so as to adjust the flow control valve 550 to different openings. It should be noted that the staff can set one or more pressure sensors at the opening of the special gas pipeline 300 to compare the sensor values ​​and avoid the reading deviation caused by the accumulation of dust particles affecting the opening of the flow control valve 550.

[0041] Please refer again Figure 1 and Figure 3 Next, the special gas pipeline 300 will be described in detail. The special gas pipeline 300 includes a first straight pipe section 310 and a second straight pipe section 350, and the first straight pipe section 310, the bending section 330, the second straight pipe section 350 and the reaction barrel 100 are connected in sequence, and there is a first angle between the axial centerline of the first straight pipe section 310 and the axial centerline of the contraction section 520.

[0042] It is understandable that, based on the setting of the first angle, the contraction section 520 is connected obliquely with the bending section 330, so that the inert gas provided by the contraction section 520 can accurately purge the dust accumulation or blockage in the bending section 330, thereby improving the purge efficiency, thereby improving the waste gas treatment efficiency in the reaction barrel 100. In addition, the setting of the first angle also reduces the top pressure generated by the first straight pipe section 310, thereby reducing the pressure of the contraction section 520, so that the gas flow rate of the contraction section 520 is faster and the response speed is faster.

[0043] In addition, when the axial centerline of the first straight tube section 310 is in the vertical direction, the first angle ranges from 0 degrees to 90 degrees. Figure 1 In the embodiment, the first angle is 45°. It should be noted that the first angle can be adaptively adjusted according to the angle, length and diameter of the special gas pipeline 300 (the first straight pipe section 310 and / or the second straight pipe section 350), which is not limited in this application.

[0044] like Figure 1 As shown, in order to improve the waste gas treatment efficiency, there is a second angle between the axial centerline of the second straight pipe section 350 and the axial centerline of the reaction barrel 100. Based on the setting of the second angle, the second straight pipe section 350 is connected to the reaction barrel 100 at an angle, so that the waste gas flows smoothly, the turbulence or eddy current generated during the flow of the waste gas is reduced, and the energy consumption is reduced. In addition, the dust particles carried in the waste gas can also be reduced from being deposited on the side wall or bottom of the second straight pipe section 350, further avoiding blockage.

[0045] Furthermore, considering that the diameters of the contraction section 520 and the second straight pipe section 350 are different, the axial centerline of the contraction section 520 is lower than the axial centerline of the second straight pipe section 350, so that the inert gas introduced through the contraction section 520 can accurately blow the dust particles at the bending section 330 into the second straight pipe section 350, thereby reducing the possibility of dust particles being blown into a dead corner and effectively reducing the possibility of dust particles being deposited on the pipe wall of the second straight pipe section 350, thereby improving the blowing efficiency.

[0046] Furthermore, the axial centerline of the second straight pipe section 350 passes through the outer flame of the above-mentioned flame to ensure that the exhaust gas can directly enter the area with the highest heat source temperature in the reaction barrel 100 for reaction, making full use of the flame provided by the fire source generator 710, maximizing the molecular movement rate and energy, thereby accelerating the exhaust gas treatment efficiency and shortening the exhaust gas treatment time.

[0047] Please refer again Figure 2 and Figure 5 Next, the purge pipeline 500 will be described in detail. Figure 5 This is a schematic diagram of the inert gas flow direction provided by an embodiment of the present utility model, and the direction indicated by the arrow in the figure is the inert gas flow direction.

[0048] As an optional embodiment, the purge pipeline 500 further includes a diffuser section 540, through which the contraction section 520 is connected to the bending section 330, and the cross-sectional area of ​​the diffuser section 540 gradually increases in the direction close to the bending section 330. It can be understood that the diffuser section 540 is similar to an outward-expanding trumpet structure, which can reduce the friction loss of the inert gas during the flow process, improve the energy efficiency of the system, and help stabilize the flow of the inert gas, preventing the inert gas from directly entering the bending section 330 with a large diameter and generating pressure fluctuations.

[0049] In addition, it should be noted that Figure 2 It can be seen that the contraction section 520 in the present application has a relatively short axial length and is steep enough to ensure that the flow velocity of the inert gas increases significantly when passing through the contraction section 520. The diffusion section 540 has a relatively long axial length and a gentle slope, which can reduce flow separation and eddy currents while avoiding excessive drop in flow velocity, thereby ensuring that the inert gas can act on the bending section 330 accurately and efficiently.

[0050] Optionally, the purge pipeline 500 also includes a second direct current section 530, and the contraction section 520 is connected to the diffusion section 540 through the second direct current section 530. It should be noted that the second direct current section 530 disposed between the contraction section 520 and the diffusion section 540 can provide a buffer area. On the one hand, it helps the inert gas flowing through the contraction section 520 to stabilize the flow rate, reduce eddies and turbulence caused by sudden changes in the pipeline, and reduce energy loss. On the other hand, it can also help the inert gas to restore part of the pressure and reduce pressure loss. In addition, it should also be noted that the first direct current section 510, the contraction section 520, the second direct current section 530 and the diffusion section 540 are coaxially arranged.

[0051] Taking the purge device 10 provided in this embodiment as an example, its specific working process and working principle are as follows:

[0052] The staff ignites the fire source generator 710, and the flame burns. At this time, the signal feedback unit 730 obtains that the fire source generator 710 is turned on, opens the flow control valve 550, and the first direct section 510 is introduced into the inert gas. After the equipment enters the normal operation state, the exhaust gas is introduced into the first straight pipe section 310. The inert gas flows through the contraction section 520, and the flow rate is increased by the Venturi effect. Then, it passes through the second direct section 530 and the diffusion section 540 in sequence to stabilize the pressure, and then accurately blows to the bending section 330 where dust particles are prone to accumulate. The accumulated dust particles are guided to the outlet of the fire source generator 710 through the second straight pipe section 350 along with the exhaust gas, which is the highest temperature, and are fully burned. When the exhaust gas treatment is completed, the fire source generator 710 is turned off. At this time, the signal feedback unit 730 obtains that the fire source generator 710 is turned off, the flame is extinguished, the flow control valve 550 is closed, and the first direct section 510 stops introducing inert gas, saving inert gas resources.

[0053] In summary, the present application provides a purge device 10 and an exhaust gas treatment system, wherein the purge device 10 includes a reaction barrel 100, a special gas pipeline 300 and a purge pipeline 500. Among them, the special gas pipeline 300 includes at least one bending section 330, and the purge pipeline 500 includes a contraction section 520 connected to the bending section 330, so that the inert gas introduced can be targetedly purged at the bending section 330, thereby achieving the beneficial effect of avoiding dust particles from accumulating or clogging at the bending section 330. In addition, due to the setting that the cross-sectional area of ​​the contraction section 520 gradually decreases in the direction close to the bending section 330, the inert gas introduced can use the Venturi effect to increase the flow rate, thereby increasing the purge efficiency, so as to further reduce the deposition or precipitation of solid dust particles, and achieve the beneficial effects of increasing the service life, improving the processing efficiency, and reducing the maintenance cost and downtime.

[0054] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may be subject to various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A purge device, characterized in that: The invention comprises a reaction barrel (100), a special gas pipeline (300) and a purge pipeline (500); the special gas pipeline (300) is connected to the reaction barrel (100), and the special gas pipeline (300) comprises at least one bending section (330); the purge pipeline (500) comprises a first direct-flow section (510) and a contraction section (520), and one end of the contraction section (520) is connected to the first direct-flow section (510), and the other end is connected to the bending section (330), and the cross-sectional area of ​​the contraction section (520) gradually decreases along the direction approaching the bending section (330).

2. The purging device according to claim 1, characterized in that: The purge pipeline (500) further comprises a diffusion section (540), the contraction section (520) is connected to the bending section (330) via the diffusion section (540), and the cross-sectional area of ​​the diffusion section (540) gradually increases in a direction approaching the bending section (330).

3. The purging device according to claim 2, characterized in that: The purge pipeline (500) further includes a second direct flow section (530), and the contraction section (520) is connected to the diffusion section (540) via the second direct flow section (530).

4. The purging device according to claim 1, characterized in that: The special gas pipeline (300) comprises a first straight pipe section (310) and a second straight pipe section (350), and the first straight pipe section (310), the bent section (330), the second straight pipe section (350) and the reaction barrel (100) are sequentially connected, and a first angle exists between an axial centerline of the first straight pipe section (310) and an axial centerline of the contraction section (520).

5. The purging device according to claim 4, characterized in that: A second angle exists between the axial centerline of the second straight pipe section (350) and the axial centerline of the reaction barrel (100).

6. The purging device according to claim 5, characterized in that: The axial centerline of the contraction section (520) is lower than the axial centerline of the second straight pipe section (350).

7. The purging device according to claim 6, characterized in that: The purging device (10) further comprises a fire source generator (710), which is connected to the reaction barrel (100) and is used to provide flame to the reaction barrel (100); the axial centerline of the second straight pipe section (350) passes through the outer flame of the flame.

8. The purging device according to claim 7, characterized in that: The purging device (10) further comprises a flow control valve (550), wherein the flow control valve (550) is connected to the first direct current section (510) and is used to control the first direct current section (510) to be in a flow state or a closed state.

9. The purging device according to claim 8, characterized in that: The purging device (10) further comprises a signal feedback unit (730), wherein the signal feedback unit (730) is connected to the reaction barrel (100) and is used to open the flow control valve (550) when the fire source generator (710) is turned on, or to close the flow control valve (550) when the fire source generator (710) is turned off.

10. An exhaust gas treatment system, characterized in that: The invention comprises the purging device according to any one of claims 1 to 9.

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