Paddle rod movement mechanism

Abstract

The utility model provides a paddle rod movement mechanism which comprises a heat insulation plate and a moving assembly, a paddle rod is arranged on the moving assembly, and the moving assembly moves along the heat insulation plate to drive the paddle rod to enter or leave substrate processing equipment; the moving assembly comprises at least one pair of rolling parts, the rolling parts are arranged on the two sides of the heat insulation plate in the thickness direction in pairs, and the rolling parts are arranged on the surface of the heat insulation plate in an attached mode. The rolling part is arranged, so that the deformation of the heat insulation plate under the high temperature effect can be improved, the operation reliability of the paddle rod movement mechanism is improved, the friction resistance is small, the operation resistance of the paddle rod movement mechanism is small, and driving and adjusting are smooth.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaics, in particular to a paddle-rod motion mechanism. Background Art

[0002] In the process of preparing solar cells, silicon wafers need to go through processes such as texturing, diffusion, etching, coating and printing. Diffusion furnaces, tubular PECVD equipment or tubular LPCVD equipment are important equipment involved in the above production links, and are also equipped with paddle movement mechanisms and heat insulation boards.

[0003] The paddle motion mechanism moves along the heat shield through the paddle seat, driving the paddle and the silicon wafer boat on the paddle to move, and then delivering or taking out the carried silicon wafer from the cavity of the diffusion furnace, tubular PECVD equipment, tubular PEALD equipment or tubular LPCVD equipment. The heat shield can protect the measuring elements such as sensors on the back of the heat shield, but the heat shield is easily deformed under the high temperature of the heat shield furnace, which in turn affects the operation of the paddle motion mechanism. Utility Model Content

[0004] The purpose of the present application is to provide a paddle motion mechanism that can improve the deformation of the insulation board under high temperature, improve the reliability of the operation of the paddle motion mechanism, and has small friction resistance, small operating resistance of the paddle motion mechanism, and smoother driving and adjustment.

[0005] The paddle rod motion mechanism provided in this application includes a heat insulation board and a moving component, wherein the paddle rod seat is installed on the moving component, a rod is arranged on the moving component, and the moving component moves along the heat insulation board to drive the paddle rod to enter or leave the substrate processing equipment; the moving component includes at least one pair of rolling components, wherein the rolling components are arranged in pairs on both sides of the heat insulation board along the thickness direction, and the rolling components are arranged in contact with the surface of the heat insulation board.

[0006] Optionally, the moving assembly includes two pairs of rolling components, and the two pairs of rolling components are located on both sides of the first plate along the moving direction.

[0007] Optionally, the rolling component comprises a roller.

[0008] Optionally, the area swept by the roller during movement may cover the surface area of ​​the heat insulation board within the corresponding stroke.

[0009] Optionally, the moving assembly comprises a first plate and a second plate connected to each other, the first plate and the second plate are respectively arranged on both sides of the heat insulation plate in a thickness direction, a paddle rod seat is installed on the first plate, and the paddle rod seat is connected to the paddle rod;

[0010] The moving assembly further comprises a roller support, wherein the roller support is mounted on the first plate or the second plate, and the roller is mounted on the roller support.

[0011] Optionally, the paddle rod seat can be raised and lowered and adjusted on the first plate.

[0012] Optionally, the paddle movement mechanism further includes a first slide rail, the length direction of the first slide rail is consistent with the moving direction of the moving assembly, and at least one of the roller brackets includes a first sliding member, and the first sliding member is slidably matched with the first slide rail.

[0013] Optionally, the paddle movement mechanism includes a mounting bracket and a back plate, the heat insulation plate and the back plate are installed on the mounting bracket, the heat insulation plate and the back plate are spaced apart from each other to form a device cavity, the second plate is arranged in the device cavity, the first slide rail is arranged above the device cavity, and the moving paths of the first slide rail and the second plate are staggered.

[0014] Optionally, the propeller movement mechanism further includes a driving assembly, the driving assembly includes a first motor and a synchronous belt, the second plate is provided with a connecting portion, the connecting portion is connected to the synchronous belt, and the first motor is used to drive the synchronous belt to rotate, so as to drive the second plate to move;

[0015] The back plate is provided with a second slide rail, the length direction of the second slide rail is consistent with the moving direction of the moving component, and the second plate is provided with a second sliding member, which is slidably matched with the second slide rail to limit the moving direction of the second plate.

[0016] Optionally, the heat insulation board is provided with a measuring opening penetrating along the thickness direction, and the measuring opening is a circular opening.

[0017] Optionally, a surface of one side of the heat insulation plate facing the paddle rod is polished.

[0018] Optionally, the substrate processing equipment is a diffusion furnace, a tubular PECVD equipment, a tubular PEALD equipment or a tubular LPCVD equipment.

[0019] One side of the heat insulation board is set toward the diffusion furnace. Under the influence of high temperature, the heat insulation board may be deformed. In the process of the moving component of the paddle motion mechanism in the present application moving along the heat insulation board, the rolling component can roll along the surface of the heat insulation board, which can prevent the deformation of the heat insulation board to a certain extent or smooth the position of the deformed heat insulation board, thereby improving or avoiding the deformation of the heat insulation board and playing a certain corrective role in the deformation. Moreover, the rolling component and the heat insulation board are in rolling contact, the friction resistance is small, the running resistance of the paddle motion mechanism is small, and the driving and adjustment are smoother. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the structure of the paddle bar motion mechanism in an embodiment of the present application;

[0021] Figure 2 for Figure 1 Schematic diagram of the structure of the middle propeller movement mechanism after removing the propeller seat, propeller, and silicon wafer boat support;

[0022] Figure 3 for Figure 2 An enlarged schematic diagram of the middle left end position;

[0023] Figure 4 for Figure 2 Schematic diagram of the structure of the middle propeller bar motion mechanism after removing the first plate;

[0024] Figure 5 for Figure 4 A magnified view of the location of the rolling components;

[0025] Figure 6 for Figure 5 A magnified view of the middle roller support position;

[0026] Figure 7 This is a schematic diagram of the arrangement of two pairs of rolling components and heat insulation plates in an embodiment of the present application, from a top view;

[0027] Figure 8 for Figure 7 Right view of;

[0028] Fig. 9 for Figure 8 Schematic diagram of the three-dimensional structure;

[0029] Fig.10 for Fig. 9 Enlarged view of the center roller support location.

[0030] The reference numerals in the above figures are described as follows:

[0031] 1-insulation board; 1a-measuring opening;

[0032] 2-moving assembly; 21-roller; 22-second plate; 23-first plate; 24-connecting portion; 25-second sliding member; 26-roller bracket; 261-first sliding member;

[0033] 3-driving assembly; 31-first motor; 32-synchronous belt;

[0034] 4-lifting mechanism; 41-second motor; 42-lifting track;

[0035] 5-back plate; 51-second slide rail;

[0036] 6-paddle holder;

[0037] 7-paddle;

[0038] 8- silicon wafer boat support;

[0039] 9-Mounting bracket;

[0040] 10-First slide rail. DETAILED DESCRIPTION

[0041] In order to enable those skilled in the art to better understand the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0042] Please refer to Figure 1 , Figure 1 Schematic diagram of the structure of the paddle movement mechanism in the embodiment of the present application.

[0043] Taking the diffusion process of silicon wafers as an example, the paddle motion mechanism in this embodiment is used in the silicon wafer diffusion process. The paddle motion mechanism can send the silicon wafer into the diffusion furnace for diffusion deposition. The paddle motion mechanism specifically includes a heat shield 1, a paddle seat 6 for mounting a paddle 7, a drive assembly 3 and a moving assembly 2. The paddle seat 6 is mounted on the moving assembly 2. The drive assembly 3 can drive the moving assembly 2 to move along the heat shield 1. The moving assembly 2 can drive the paddle seat 6 to move along the heat shield 1. Figure 1 As shown, a paddle 7 is installed on the paddle seat 6, and the movement of the paddle seat 6 drives the paddle 7 to enter or leave the substrate processing equipment accordingly. The substrate processing equipment is, for example, a diffusion furnace, a tubular PECVD equipment, a tubular PEALD equipment or a tubular LPCVD equipment and other heating equipment with heating functions. In detail, a silicon wafer boat support 8 is placed on the paddle 7, and the silicon wafer boat support 8 is used to carry the wafer boat and the silicon wafer in the wafer boat. The wafer boat can be a quartz boat. In some embodiments, the wafer boat can also be directly placed on the paddle 7; the moving component 2 drives the paddle seat 6 to move, and then drives the paddle 7 and the silicon wafer boat support 8 to move synchronously, and then before the diffusion process starts, the silicon wafer is driven into the furnace chamber of the diffusion furnace. After the diffusion process is completed, the moving component 2 moves in the opposite direction, and the paddle 7 is used to make the silicon wafer boat support 8 carry the silicon wafer out of the furnace chamber of the diffusion furnace.

[0044] The paddle motion mechanism may include a mounting bracket 9, and the heat insulation board 1 of the paddle motion mechanism may be fixed on the mounting bracket 9. The side of the heat insulation board 1 facing the diffusion furnace is defined as the front side, and the other side is defined as the back side. Figure 1In the embodiment, the propeller seat 6, propeller 7 and silicon wafer boat support 8 are all arranged on the front side of the heat insulation board 1, and the back side of the heat insulation board 1 is provided with sensors and other measuring elements, such as position sensors, for measuring the moving distance of the propeller 7; the heat insulation board 1 plays a role of heat insulation, reducing the influence of high temperature on the measuring elements, etc. For example, the surface of the heat insulation board 1 facing the propeller 7, i.e., the front side, is polished, so that the heat insulation board 1 can reflect at least part of the heat and play a better role of heat insulation, or a heat preservation material can be used on the heat insulation board 1 to play the effect of hindering heat transfer.

[0045] Please continue to refer to Figure 2 and Figure 3 , Figure 2 for Figure 1 The schematic diagram of the structure of the middle propeller movement mechanism after removing the propeller seat 6, propeller 7, and silicon wafer boat support 8 shows the first plate 23 of the moving assembly 2, and the propeller seat 6 is specifically installed on the first plate 23; Figure 3 for Figure 2 Enlarged schematic diagram of the center left end position.

[0046] The moving assembly 2 in this embodiment includes at least one pair of rolling components, which are specifically rollers 21 in this embodiment. The rolling components are arranged in pairs on both sides of the insulation board 1 along the thickness direction. Figure 2 , 3 The direction perpendicular to the paper surface. Exemplarily, the moving component 2 in this embodiment includes two pairs of rolling parts, and the rolling parts are arranged against the surface of the insulation board 1, and the rolling parts can roll and move along the surface of the insulation board 1. That is to say, in the process of the moving component 2 moving along the insulation board 1, the rolling parts roll along the surface of the insulation board 1. As mentioned above, one side of the insulation board 1 is arranged toward the diffusion furnace. Under the influence of high temperature, the insulation board 1 may be deformed, especially the insulation board 1 is generally arranged as a relatively flat and long plate structure, which is more susceptible to deformation due to high temperature. The rolling parts can roll along the surface of the insulation board 1, which can prevent the deformation of the insulation board 1 to a certain extent or smooth the position of the deformation of the insulation board 1, thereby improving or avoiding the deformation of the insulation board 1, and playing a certain corrective role in the deformation. Moreover, the rolling parts are in rolling contact with the insulation board 1, the friction resistance is small, the running resistance of the paddle movement mechanism is small, and the driving and adjustment are smoother.

[0047] You can continue to refer to Figure 4 , Figure 4 for Figure 2 The schematic diagram of the structure of the middle paddle rod movement mechanism after removing the first plate 23 also illustrates the length direction and width direction of the insulation board 1. The length direction of the insulation board 1 is also the moving direction of the moving component 2 and the paddle rod seat 6. Under normal working conditions, the width direction of the insulation board 1 is also the vertical direction.

[0048] The rolling component in this embodiment includes a roller 21. The area swept by the roller 21 during movement can cover the surface area of ​​the insulation board 1 within the corresponding stroke, that is, the roller 21 can roll and smooth the entire surface of the insulation board 1 within the stroke. Specifically, the length of the roller 21 can be set to be not less than the width of the insulation board 1. That is, the upper end of the roller 21 is not lower than the upper end of the insulation board 1, and the lower end of the roller 21 is not higher than the lower end of the insulation board 1. In this way, when the roller 21 moves along the length direction of the insulation board 1, the insulation board 1 can be smoothed in the entire width direction to better correct the deformation of the insulation board 1 that may occur under the influence of high temperature. Of course, the length of the roller 21 can also be less than the insulation board 1. In theory, the middle part of the insulation board 1 is easier to deform than the two ends, so the roller 21 mainly rolls in contact with the middle part of the insulation board 1, which is also a feasible solution. This embodiment does not make too many restrictions on the specific length of the roller 21. In this embodiment, the rolling component is configured as a roller shaft 21, which has a simple structure, is easy to process and install, and has good rolling consistency. It should be understood that the rolling component is not limited to the roller shaft 21, and the rolling component includes, for example, a roller, and one rolling component may include multiple rollers.

[0049] Please continue to refer to Figure 3 , and combined with Figure 5 understand, Figure 5 for Figure 4 Magnified view of the location of the rolling components.

[0050] The moving assembly 2 in this embodiment includes a first plate 23 (shown in FIG. Figure 3 ) and the second plate 22, the first plate 23 and the second plate 22 are respectively arranged on both sides of the heat insulation board 1 along the thickness direction, and the side of the heat insulation board 1 facing the diffusion furnace is defined as the front side, and the other side is defined as the back side, then the first plate 23 is arranged on the front side of the heat insulation board 1, and the second plate 22 is located on the back side of the heat insulation board 1, and the above-mentioned sensors and other measuring elements are arranged on the back side of the heat insulation board 1. Among them, the first plate 23 is used to install the propeller seat 6, and the first plate 23 and the second plate 22 are connected, such as Figure 5 As shown, the upper and lower ends of the second plate 22 are provided with connection holes, and the first plate 23 and the second plate 22 can be connected and fixed by fasteners such as screws. Of course, other limiting connections or fixed connections can also be used, such as snap connections, pin connections, etc., to achieve synchronous movement of the first plate 23 and the second plate 22. The driving component 3 specifically drives the second plate 22 to move, and the second plate 22 drives the first plate 23 to move, and the first plate 23 drives the propeller seat 6 to move. The second plate 22 is arranged on the back side of the heat insulation board 1, and the transmission connection with the driving component 3 is located on the back side of the heat insulation board 1. Based on the protection of the heat insulation board 1, it is not easily affected by high temperature.

[0051] It can also be understood that the moving component 2 is not limited to the setting of the first plate 23 and the second plate 22. For example, the first plate 23 is not set, the paddle rod seat 6 is connected to the second plate 22, and the driving component 3 directly drives the second plate 22. Alternatively, the second plate 22 is not set, and the driving component 3 directly drives the first plate 23. However, it is obvious that the combination setting of the first plate 23 and the second plate 22 can not only ensure the reliability of the connection of the paddle rod seat 6, but also facilitate the protection of the driving component 3.

[0052] At this time, the moving assembly 2 also includes a roller bracket 26, and the roller 21 is installed on the roller bracket 26. The roller bracket 26 can be installed on the first plate 23 or the second plate 22. Similarly, for the purpose of protection, the roller bracket 26 can be installed on the second plate 22 located on the back side of the insulation board 1, and can be connected to the second plate 22 by a connector, or other fixed connection or limit connection methods such as welding. A pair of rollers 21 are installed on a corresponding roller bracket 26, so that the installation is relatively simple, and the orientation and spacing of the pair of rollers 21 are easy to determine. The two can be arranged relative to each other in the thickness direction of the insulation board 1 to clamp the insulation board 1 together, so as to better roll the insulation board 1 smoothly.

[0053] Please combine Figure 6-10 understand, Figure 6 for Figure 5 An enlarged view of the position of the middle roller shaft support 26; Figure 7 This is a schematic diagram of the arrangement of two pairs of rolling components and the heat insulation board 1 in the embodiment of the present application, which is a top view; Figure 8 for Figure 7 Right view of; Fig. 9 for Figure 8 Schematic diagram of the three-dimensional structure; Fig.10 for Fig. 9 An enlarged view of the position of the middle roller shaft support 26.

[0054] like Fig.10 As shown, the roller support 26 is provided with two connecting holes 26a. In a pair of rollers 21, one end of one roller 21 can be inserted into a corresponding connecting hole 26a, and one end of the other roller 21 can be inserted into the corresponding other connecting hole 26a. The connecting holes 26a can be clearance-matched to allow rotation around their own axis, or they can be rotatably connected to the roller support 26 through bearings to further reduce rolling resistance. The ends of the rollers 21 can be directly connected to the roller support 26, or they can be connected as shown in FIG. Fig.10 As shown, a connecting shaft section is provided at the end of the roller shaft 21, and the connecting shaft section is directly inserted into the connecting hole 26a for connection, or is connected to the roller shaft support 26 through a bearing.

[0055] Look again Figure 5In this embodiment, both ends of the roller 21 are connected to the corresponding roller brackets 26, so that the ends of each roller 21 can be limited, the structure is more stable, and the clamping of the insulation board 1 is more reliable. The roller bracket 26 can span the insulation board 1, that is, along the thickness direction of the insulation board 1, part of the roller bracket 26 is located on one side of the insulation board 1, and part of the roller bracket 26 is located on the other side of the insulation board 1. In this way, each roller bracket 26 can be connected to one end of a pair of rollers 21, so as to facilitate the pairing of the rollers 21. Figure 5 In the embodiment, a roller support 26 is respectively provided at the upper and lower ends of a pair of rollers 21.

[0056] Please continue to refer to Figure 6 , the paddle movement mechanism in the implementation of the present application also includes a first slide rail 10, and the first slide rail 10 is fixed relative to the heat insulation board 1. For example, the first slide rail 10 and the heat insulation board 1 can be installed on the mounting bracket 9. The first slide rail 10 can be located above the back side of the heat insulation board 1. At this time, the roller bracket 26 can include a first sliding member 261, and the first sliding member 261 can move along the first slide rail 10. It can be seen that the first slide rail 10 can also be set below the back side of the heat insulation board 1, and the roller bracket 26 below can be set with a first sliding member 261 to move along the first slide rail 10 below. That is, a set of slide rails and sliding members can be set at least one place above and below. The cooperation of the first slide rail 10 and the first sliding member 261 can ensure that the roller 21 can roll more stably along the surface of the heat insulation board 1. In addition, the first slide rail 10 is set above the back side of the heat insulation board 1, which not only plays a role in limiting and guiding the roller bracket 26, but also plays a role in supporting the entire moving assembly 2.

[0057] like Figure 3 As shown, the moving assembly 2 in this embodiment includes two pairs of rolling components, specifically two pairs of rollers 21, which are located on both sides of the first plate 23 along the moving direction, and the moving direction is also the length direction of the insulation board 1. In this way, the rollers 21 actually make the connection of the moving assembly 2 more stable and have a better smoothing effect on the insulation board 1. Of course, only one pair of rolling components or more pairs of rolling components can also be provided.

[0058] Furthermore, if Figure 4As shown, the heat insulation board 1 in this embodiment is provided with a measuring opening 1a that penetrates along the thickness direction. As mentioned above, the back side of the heat insulation board 1 is provided with measuring elements such as sensors, and the silicon wafer boat support 8 and the silicon wafer can be detected through the measuring opening 1a. In this embodiment, the measuring opening 1a is set as a circular opening, so that even if the heat insulation board 1 is deformed under the influence of high temperature, when the inner edge of the circular opening is deformed accordingly, the transition is relatively uniform and not easy to curl. If the measuring opening is a square or other shape with local edges and corners, when the heat insulation board is deformed, the inner edge of the square opening is more likely to be locally concentrated, and it is easy to curl during the friction with the moving component, which in turn affects the operation accuracy and stability of the propeller motion mechanism. It can be seen that setting it as a circular opening is conducive to ensuring the operation accuracy and stability of the propeller motion mechanism.

[0059] Please continue to refer to Figure 1-3 It is understood that the driving assembly 3 of the paddle movement mechanism in this embodiment specifically includes a first motor 31 and a synchronous belt 32. The synchronous belt 32 extends along the length direction of the heat insulation board 1, and the first motor 31 drives the synchronous belt 32 to rotate. At this time, the second plate 22 is provided with a connecting portion 24, and the connecting portion 24 is connected to the synchronous belt 32. The first motor 31 drives the synchronous belt 32 to rotate. When the synchronous belt 32 rotates, the second plate 22 can be driven to reciprocate along the heat insulation board 1 through the connecting portion 24. It can be seen that the driving method of the driving assembly 3 is not limited to this, such as gear rack transmission, etc., and this embodiment does not make specific restrictions. The synchronous belt 32 can be set on the back side of the heat insulation board 1 to be protected by the heat insulation board 1. The combined structure of the first motor 31 and the synchronous belt 32 is simple in structure and low in cost.

[0060] The paddle motion mechanism in this embodiment may also include a back plate 5, which may also be mounted on the mounting bracket 9 and be in a relatively fixed position with the heat insulation board 1. The specifications and dimensions of the back plate 5 may be roughly equivalent to those of the heat insulation board 1, that is, the length and width of the back plate 5 may be roughly the same as those of the heat insulation board 1, or may be larger than the heat insulation board 1, and may be used as a substrate of the paddle motion mechanism. The back plate 5 is located on the back side of the heat insulation board 1 and is spaced apart from the heat insulation board 1. At this time, the heat insulation board 1 and the back plate 5 are spaced apart from each other to form a device cavity, and the second plate 22 is disposed in the device cavity between the heat insulation board 1 and the back plate 5. The above-mentioned first slide rail 10 is disposed above the device cavity, and the moving paths of the first slide rail 10 and the second plate 22 are staggered for convenient arrangement and non-interference. The back plate 5 may be provided with a second slide rail 51, and the second plate 22 may be provided with a second slide member 25. When the second plate 22 moves along the synchronous belt 32, the second slide member 25 may move along the second slide rail 51 to limit the moving direction of the second plate 22, so as to make the movement of the second plate 22 and even the entire moving assembly 2 more stable, and the rolling component may also have a better smoothing effect on the heat insulation plate. Figure 2As shown, the upper and lower parts of the back plate 5 are both provided with second slide rails 51, and corresponding second sliding members 25 are correspondingly provided at the upper and lower parts of the second plate 22 to further improve the stability of movement.

[0061] Look again Figure 1 In this embodiment, a lifting mechanism 4 is installed on the first plate 23, and the paddle rod seat 6 is specifically installed on the lifting mechanism 4. The lifting mechanism 4 may include a second motor 41 and a lifting track 42. The second motor 42 can drive the paddle rod seat 6 to move along the lifting track 42, so that the height of the paddle rod seat 6 can be adjusted, and then the height of the paddle rod 7, the silicon wafer boat support 8, and the silicon wafer can be adjusted, thereby improving the flexibility of the position of the silicon wafer entering the diffusion furnace and adapting to silicon wafer boat supports and silicon wafer boats of different sizes.

[0062] Specific examples are used herein to illustrate the principles and implementation methods of the present application, and the description of the above embodiments is only used to help understand the method and core ideas of the present application. It should be pointed out that for ordinary technicians in this technical field, without departing from the principles of the present application, several improvements and modifications can be made to the present application, and these improvements and modifications also fall within the scope of protection of the claims of the present application.

Claims

1. A paddle movement mechanism, characterized in that: The invention comprises a heat insulation board (1) and a moving assembly (2), wherein a paddle rod (7) is arranged on the moving assembly (2), and the moving assembly (2) moves along the heat insulation board (1) to drive the paddle rod (7) to enter or leave the substrate processing equipment; the moving assembly (2) comprises at least one pair of rolling components, wherein the rolling components are arranged in pairs on both sides of the heat insulation board (1) along the thickness direction, and the rolling components are arranged in contact with the surface of the heat insulation board (1).

2. The paddle movement mechanism according to claim 1, characterized in that: The moving assembly (2) comprises a first plate (23), a paddle rod seat (6) is mounted on the first plate (23), and the paddle rod seat (6) is connected to the paddle rod (7); The moving assembly (2) comprises two pairs of rolling components, and the two pairs of rolling components are located on both sides of the first plate (23) distributed along the moving direction.

3. The paddle movement mechanism according to claim 1, characterized in that: The rolling component comprises a roller shaft (21).

4. The paddle movement mechanism according to claim 3, characterized in that: The area swept by the roller (21) during movement can cover the surface area of ​​the heat insulation board (1) within the corresponding stroke.

5. The paddle movement mechanism according to claim 3, characterized in that: The moving assembly (2) comprises a first plate (23) and a second plate (22) connected to each other, the first plate (23) and the second plate (22) are arranged on both sides of the heat insulation plate (1) in the thickness direction, a paddle rod seat (6) is installed on the first plate (23), and the paddle rod seat (6) is connected to the paddle rod (7); The moving assembly (2) further comprises a roller support (26), wherein the roller support (26) is mounted on the first plate (23) or the second plate (22), and the roller (21) is mounted on the roller support (26).

6. The paddle movement mechanism according to claim 5, characterized in that: The oar bar seat (6) can be raised and lowered and adjusted on the first plate (23).

7. The paddle movement mechanism according to claim 5, characterized in that: The paddle movement mechanism also includes a first slide rail (10), the length direction of the first slide rail (10) is consistent with the moving direction of the moving component (2), and at least one of the roller brackets (26) includes a first sliding member (261), and the first sliding member (261) is slidably matched with the first slide rail (10).

8. The paddle movement mechanism according to claim 7, characterized in that: The paddle movement mechanism comprises a mounting bracket (9) and a back plate (5), the heat insulation plate (1) and the back plate (5) are mounted on the mounting bracket (9), the heat insulation plate (1) and the back plate (5) are spaced apart from each other to form a device cavity, the second plate (22) is arranged in the device cavity, the first slide rail (10) is arranged above the device cavity, and the movement paths of the first slide rail (10) and the second plate (22) are staggered.

9. The paddle bar motion mechanism according to claim 8, characterized in that: The propeller movement mechanism further comprises a driving assembly (3), wherein the driving assembly (3) comprises a first motor (31) and a synchronous belt (32), the second plate (22) is provided with a connecting portion (24), the connecting portion (24) and the synchronous belt (32) are connected, and the first motor (31) is used to drive the synchronous belt (32) to rotate, so as to drive the second plate (22) to move; The back plate (5) is provided with a second slide rail (51), the length direction of the second slide rail (51) is consistent with the moving direction of the moving component (2), and the second plate (22) is provided with a second sliding member (25), and the second sliding member (25) is slidably matched with the second slide rail (51) to limit the moving direction of the second plate (22).

10. The paddle bar motion mechanism according to claim 1, characterized in that: The heat insulation board (1) is provided with a measuring opening (1a) penetrating along the thickness direction, and the measuring opening (1a) is a circular opening.

11. The paddle bar motion mechanism according to claim 1, characterized in that: The surface of the heat insulation board (1) facing the paddle rod (7) is polished.

12. The paddle bar motion mechanism according to claim 1, characterized in that: The substrate processing equipment is a diffusion furnace, a tubular PECVD equipment, a tubular PEALD equipment or a tubular LPCVD equipment.

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