Automatically moving magnetic control target material mechanism and coating machine

Abstract

The utility model discloses an automatic moving magnetic control target material mechanism and a coating machine, the automatic moving magnetic control target material mechanism comprises a mounting base, at least two screw rod gear assemblies and at least two target seat assemblies, the screw rod gear assemblies are positioned above the mounting base, and the target seat assemblies are positioned above the mounting base. The target seat assemblies are located above the lead screw gear assembly and are in transmission connection with the lead screw gear assembly, the lead screw gear assembly drives the target seat assemblies to move between the sputtering positions and the avoiding positions in a reciprocating mode, and the distance between the sputtering positions of the at least two sets of target seat assemblies is smaller than the distance between the avoiding positions of the at least two sets of target seat assemblies. The multiple screw rod gear assemblies are arranged on the mounting base in the circumferential direction, and the target materials are oppositely arranged, so that when the first target material moves from the avoiding position to the sputtering position along with the sliding base, the second target material can move from the sputtering position to the avoiding position, the relative movable distance of the target materials is increased, and the sputtering efficiency is improved. And more adjustment possibilities are brought to the coating uniformity and the coating speed.

Description

Technical Field

[0001] The utility model relates to the field of film coating equipment, in particular to an automatically movable magnetron target material mechanism and a film coating machine. Background Art

[0002] A magnetron sputtering coating machine is a device that uses a magnetic field to control the direction and speed of sputtering materials to form a thin film coating on the surface of the material. In a magnetron sputtering coating machine, an inert gas (such as argon) under a certain pressure is usually used to generate plasma, and then the ions and electrons in the plasma are controlled by a magnetic field to collide with the target material and sputter out atoms or molecules, eventually forming a thin film on the surface of the material. This technology is widely used in electronics, optics, automobiles, aerospace and other fields.

[0003] The structure of magnetron sputtering coating machine is generally that the bottom plate is installed with flat target material, and the top plate is installed with substrate. Under the existing structure, the target material is generally placed horizontally. Since the magnetic field strength of magnetron sputtering target material is very large and the relative distance between multiple targets is relatively small, a target material is affected by not only its own magnetic field, but also the magnetic field of other surrounding targets, which brings great challenges to the uniformity of thin film coating. Utility Model Content

[0004] In order to overcome the deficiencies of the prior art, the utility model aims to realize an automatically moving magnetron target mechanism and a coating machine for achieving uniformity of thin film coating.

[0005] The purpose of the utility model is achieved by the following technical solutions:

[0006] An automatically moving magnetron target mechanism comprises a mounting base, the automatically moving magnetron target mechanism also comprises at least two screw gear assemblies and at least two target seat assemblies, the screw gear assembly is located above the mounting base, the target seat assembly is located above the screw gear assembly and is transmission-connected to the screw gear assembly, the screw gear assembly drives the target seat assembly to reciprocate between a sputtering position and an avoidance position, and the distance between at least two groups of the target seat assemblies at the sputtering position is smaller than the distance between at least two groups of the target seat assemblies at the avoidance position.

[0007] Preferably, the distance between at least two groups of the target support assemblies at the avoidance position gradually decreases to the distance between at least two groups of the target support assemblies at the sputtering position.

[0008] Preferably, the screw gear assembly is arranged circumferentially on the mounting base.

[0009] Preferably, the screw gear assembly includes a mounting seat, a first gear, a second gear and a bearing, the first gear is fixedly connected to the mounting base through the mounting seat, the second gear is meshingly connected to the first gear, and the second gear is transmission-connected to the screw through the bearing.

[0010] Preferably, the automatically moving magnetron target mechanism further comprises at least two targets, and the targets are located on the target base assembly.

[0011] Preferably, the screw gear assembly further comprises a guide rod, and the guide rod is arranged parallel to the screw.

[0012] Preferably, the target seat assembly includes a sliding seat, the sliding seat includes a sliding block, the sliding block is hollow inside, and sliding holes are respectively provided on both sides of the sliding block, and the sliding holes pass through the screw rod and the guide rod respectively, and the automatically moving magnetron target material mechanism also includes a bellows, and the bellows includes a first bellows, which is located below the sliding block and is connected to the sliding block.

[0013] Preferably, the target seat assembly also includes a support and a disc assembly, the sliding seat also includes a mounting rod, the mounting rod is located on both sides of the sliding block, a third through hole is provided below the support, the mounting rod is detachably connected to the third through hole, the disc assembly is fixedly connected to the sliding block through the support to form a space, the bellows also includes a second bellows, the second bellows is located in the space, and the disc assembly is connected to the sliding block through the second bellows.

[0014] Preferably, the number of the screw gear assembly and the number of the target seat assembly are both four.

[0015] A coating machine includes the automatically moving magnetron target mechanism, characterized in that it also includes a shell, the shell is separated by the mounting base, the interior is a vacuum chamber, the exterior is an atmosphere side, the screw gear assembly and the target seat assembly are located in the vacuum chamber.

[0016] Compared with the prior art, the automatic moving magnetron target mechanism and coating machine of the utility model have the following advantages:

[0017] The present application discloses an automatically movable magnetron target mechanism and a coating machine, wherein a plurality of screw gear assemblies are circumferentially arranged on a mounting base, wherein the screw gear assemblies are fixedly connected to the mounting base via columns, and a target seat assembly is located above the screw gear assembly and is slidably connected to the screw gear assembly via a sliding seat. The targets are arranged opposite to each other so that when the first target moves from the avoidance position to the sputtering position as the sliding seat moves, the second target can move from the sputtering position to the avoidance position, thereby increasing the relative distance that the targets can move, and bringing more adjustment possibilities to the uniformity of the coating and the coating rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the automatically moving magnetron target mechanism of the utility model;

[0019] Figure 2 for Figure 1 Schematic diagram of the screw gear assembly structure;

[0020] Figure 3 for Figure 1 A schematic diagram of the target base assembly structure;

[0021] Figure 4 for Figure 1 Schematic diagram of the structure in working state.

[0022] In the figure: 100, screw gear assembly; 101, mounting seat; 102, first gear; 103, second gear; 104, bearing; 105, screw; 106, guide rod; 107, sputtering position; 108, avoidance position; 200, column; 201, first through hole; 202, second through hole; 300, target seat assembly; 301, sliding seat; 3011, sliding block; 3012, mounting rod; 302, supporting member; 3021, third through hole; 303, disc assembly; 400, target material; 401, first target material; 402, second target material; 500, bellows; 501, first bellows; 502, second bellows; 600, mounting base; 700, drive motor. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may be another intermediate component through which it is fixed. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be another intermediate component at the same time. When a component is considered to be "set on" another component, it may be directly set on the other component or there may be another intermediate component at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0026] Figure 1 to Figure 4 The utility model is an automatically moving magnetic control target material mechanism, such as Figure 1 As shown, the automatically moving magnetron target mechanism includes a mounting base 600, the automatically moving magnetron target mechanism also includes at least two screw gear assemblies 100, at least two target base assemblies 300 and at least two targets 400, the target 400 is located on the target base assembly 300, the screw gear assembly 100 is located above the mounting base 600, the target base assembly 300 is located above the screw gear assembly 100 and is transmission-connected to the screw gear assembly 100, the screw gear assembly 100 drives the target base assembly 300 to reciprocate between the sputtering position 107 and the avoidance position 108, and the distance between at least two groups of target base assemblies 300 at the sputtering position 107 is smaller than the distance between at least two groups of target base assemblies 300 at the avoidance position 108.

[0027] Specifically, the sputtering position 107 and the avoidance position 108 are located at two ends of the screw gear assembly 100 respectively.

[0028] Specifically, the distance between the at least two groups of target support assemblies 300 at the avoidance position 108 and the distance between the at least two groups of target support assemblies 300 at the sputtering position 107 gradually decreases.

[0029] Specifically, the screw gear assemblies 100 are arranged circumferentially on the mounting base 600. In a preferred embodiment, the screw gear assemblies 100 are distributed in a cross shape on the mounting base 600. In some other embodiments, the screw gear assemblies 100 are distributed in a radial shape on the mounting base 600.

[0030] In a preferred embodiment, the number of the lead screw gear assemblies 100 is four.

[0031] The automatically moving magnetron target mechanism further includes a column 200 , and the screw gear assembly 100 is fixedly connected to the mounting base 600 via the column 200 .

[0032] The upper parts of the two groups of columns 200 are respectively provided with a first through hole 201 and a second through hole 202 .

[0033] Specifically, two groups of columns 200 are arranged in parallel.

[0034] like Figure 2 As shown, the screw gear assembly 100 includes a mounting seat 101, a first gear 102, a second gear 103, a bearing 104, and a screw 105. The first gear 102 is fixedly connected to the mounting base 600 through the mounting seat 101, the second gear 103 is meshedly connected to the first gear 102, and the second gear 103 is transmission-connected to the screw 105 through the bearing 104. The screw gear assembly 100 also includes a guide rod 106, which is arranged parallel to the screw 105.

[0035] The screw rod 105 passes through the first through hole 201 to be fixed, and the guide rod 106 passes through the second through hole 202 to be fixed.

[0036] In a preferred embodiment, the axis of the first gear 102 is perpendicular to the axis of the second gear 103. At this time, the gears are vertically meshed, the position of the gears is more stable, and it is not easy to offset and vibrate, which can ensure the stability and accuracy of the transmission and achieve more stable transmission.

[0037] like Figure 3 As shown, the target base assembly 300 includes a sliding base 301 , a support member 302 and a disc assembly 303 . The target base assembly 300 is slidably connected to the screw gear assembly 100 via the sliding base 301 .

[0038] The sliding seat 301 includes a sliding block 3011, the interior of the sliding block 3011 is hollow, and sliding holes are respectively provided on both sides of the sliding block 3011, and the sliding holes respectively pass through the screw rod 105 and the guide rod 106. The sliding seat 301 also includes mounting rods 3012, and the mounting rods 3012 are located on both sides of the sliding block 3011.

[0039] A third through hole 3021 is provided below the support member 302, and the mounting rod 3012 is detachably connected to the third through hole 3021. The disc assembly 303 is fixedly connected to the sliding block 3011 through the support member 302 to form a space. The second bellows 502 is located in the space, and the second bellows 502 is respectively connected to the disc assembly 303 and the sliding block 3011.

[0040] The target material 400 includes a first target material 401 and a second target material 402. The first target material 401 and the second target material 402 are arranged opposite to each other on the upper surface of the disk assembly 303, so that when the first target material 401 moves to the sputtering position 107 along with the sliding seat 301, the second target material 402 can move to the avoidance position 108, thereby increasing the relative distance that the target material 400 can move, which brings more adjustment possibilities to the uniformity of the coating and the coating rate.

[0041] In some other embodiments, the number of the lead screw gear assembly 100 and the target base assembly 300 is 6 or 8. Specifically, the number of the targets 400 corresponds to the number of the lead screw gear assembly 100 and the target base assembly 300, so that multi-target coating can be achieved.

[0042] In the embodiment of the present application, the first target 401 is a TA target, and the second target 402 is an SI target. In some other embodiments, they can be other metal targets or alloy targets.

[0043] The forward and backward movement distance of the target 400 is between 70 mm and 578 mm. In one embodiment, the moving distance of the target 400 is 70 mm, in another embodiment, the moving distance of the target 400 is 578 mm, and in a preferred embodiment, the moving distance of the target 400 is 324 mm.

[0044] The automatically movable magnetron target mechanism further includes a bellows 500, which includes a first bellows 501 and a second bellows 502. The first bellows 501 is located below the sliding block 3011 and communicates with the sliding block 3011. The upper end of the first bellows 501 communicates with the sliding block 3011, the mounting base 600 is provided with a communicating hole, the lower end of the first bellows 501 communicates with the mounting base 600, the second bellows 502 is located directly above the first bellows 501, the lower end of the second bellows 502 communicates with the sliding block 3011, the sliding block 3011 is hollow inside, so that the sliding block 3011 is connected to the first bellows 501 through the hollow inside, and the upper part of the second bellows 502 communicates with the disc assembly 303.

[0045] In a preferred embodiment, the bellows 500 is connected to the sliding block 3011 by a sleeve, which is convenient for frequent disassembly and replacement. In some other embodiments, the bellows 500 and the sliding block 3011 can be connected by bolts or threads.

[0046] The automatically moving magnetron target mechanism further includes a driving motor 700 . The driving motor 700 is located below the mounting base 600 , and an output end of the driving motor 700 is transmission-connected to the mounting base 101 .

[0047] The present application also includes a coating machine, including an automatically moving magnetron target mechanism, and also includes a shell, the shell is divided by a mounting base 600, the interior is a vacuum chamber, and the exterior is an atmosphere side, the screw gear assembly 100, the target seat assembly 300 and the target material 400 are located in the vacuum chamber, and the coating machine realizes the circulation between the vacuum chamber and the atmosphere side through a first bellows 501 and a second bellows 502.

[0048] Specifically, the driving motor 700 is located on the atmosphere side.

[0049] When the present application is in use, the transmission of the screw gear assembly 100 is realized by driving the drive motor 700, driving the target base assembly 300 to move back and forth on the screw gear assembly 100. When the first target material 401 moves from the distal end 20 to the sputtering end 10 during the coating process, the second target material 402 can move from the sputtering end 10 to the distal end 20, thereby achieving the misalignment of the positions of the two target materials 400 and preventing the target materials 400 from being affected by each other's magnetic fields. The automatically movable magnetron target mechanism of the present application has a plurality of screw gear assemblies 100 arranged circumferentially on a mounting base 600, wherein the screw gear assemblies 100 are fixedly connected to the mounting base 600 via a column 200, and a target seat assembly 300 is located above the column 200 and is slidably connected to the screw gear assembly 100 via a sliding seat 301, thereby realizing a facing arrangement of two target materials 400, so that when the first target material 401 moves from the avoidance position 108 to the sputtering position 107 as the sliding seat 301 moves, the second target material 402 can move from the sputtering position 107 to the avoidance position 108, thereby increasing the relative distance that the target material 400 can move, thereby bringing more adjustment possibilities to the uniformity of the coating and the coating rate.

[0050] The above embodiments only express several implementation methods of the utility model, and the descriptions are relatively specific and detailed, but they cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, without departing from the concept of the utility model, several modifications and improvements can be made, which are equivalent modifications and improvements made to the above embodiments based on the essential technology of the utility model, and all of them belong to the protection scope of the utility model.

Claims

1. An automatically movable magnetron target mechanism, comprising a mounting base, characterized in that: The automatically moving magnetron target mechanism also includes at least two screw gear assemblies and at least two target seat assemblies, wherein the screw gear assembly is located above the mounting base, and the target seat assembly is located above the screw gear assembly and is transmission-connected to the screw gear assembly, wherein the screw gear assembly drives the target seat assembly to reciprocate between a sputtering position and an avoidance position, and a distance between at least two groups of the target seat assemblies at the sputtering position is smaller than a distance between at least two groups of the target seat assemblies at the avoidance position.

2. The automatically moving magnetron target mechanism according to claim 1, characterized in that: The distance between at least two groups of the target support assemblies at the avoidance position gradually decreases to the distance between at least two groups of the target support assemblies at the sputtering position.

3. The automatically moving magnetron target mechanism according to claim 1, characterized in that: The screw gear assembly is arranged circumferentially on the mounting base.

4. The automatically moving magnetron target mechanism according to claim 1, characterized in that: The screw gear assembly includes a mounting seat, a first gear, a second gear and a bearing. The first gear is fixedly connected to the mounting base through the mounting seat, the second gear is meshed with the first gear, and the second gear is transmission-connected to the screw through the bearing.

5. The automatically moving magnetron target mechanism according to claim 1, characterized in that: The automatically moving magnetron target mechanism further comprises at least two targets, and the targets are located on the target base assembly.

6. The automatically moving magnetron target mechanism according to claim 2, characterized in that: The screw gear assembly also includes a guide rod, which is arranged parallel to the screw.

7. The automatically moving magnetron target mechanism according to claim 6, characterized in that: The target seat assembly includes a sliding seat, the sliding seat includes a sliding block, the sliding block is hollow inside, and sliding holes are respectively provided on both sides of the sliding block, and the sliding holes pass through the lead screw and the guide rod respectively. The automatically moving magnetron target material mechanism also includes a bellows, and the bellows includes a first bellows, which is located below the sliding block and is connected to the sliding block.

8. The automatically moving magnetron target mechanism according to claim 7, characterized in that: The target seat assembly also includes a support and a disc assembly, the sliding seat also includes a mounting rod, the mounting rod is located on both sides of the sliding block, a third through hole is provided below the support, the mounting rod is detachably connected to the third through hole, the disc assembly is fixedly connected to the sliding block through the support to form a space, the bellows also includes a second bellows, the second bellows is located in the space, and the disc assembly is connected to the sliding block through the second bellows.

9. The automatically moving magnetron target mechanism according to claim 1, characterized in that: The number of the screw gear assembly and the number of the target seat assembly are both four.

10. A coating machine, comprising the automatically movable magnetron target mechanism according to any one of claims 1 to 9, characterized in that: It also includes a shell, which is separated by the mounting base, has a vacuum chamber inside and an atmosphere side outside, and the screw gear assembly and the target seat assembly are located in the vacuum chamber.

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