Nitrogen bubbling device for palladium tank

Abstract

The utility model discloses a nitrogen bubbling device for a palladium tank. The nitrogen bubbling device comprises a bracket, a nitrogen conveying pipe I and a nitrogen conveying pipe II, the support is provided with a plurality of clamping grooves used for fixing the first nitrogen conveying pipe and the second nitrogen conveying pipe. The first nitrogen conveying pipes are distributed at the two ends of the support. The second nitrogen conveying pipe is distributed in the middle of the support. A plurality of air holes are formed in the nitrogen conveying pipe I and the nitrogen conveying pipe II; the two ends of the first nitrogen conveying pipe and the two ends of the second nitrogen conveying pipe are each provided with an air inlet. According to the utility model, the structure is simple, the nitrogen conveying pipe is convenient to install, and the escape amount of inert gas at different positions is balanced through the distribution of the two nitrogen pipes and the distribution of the air holes in the pipeline, so that a plating solution flows on the surface of a wafer more uniformly.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a palladium tank nitrogen bubbling device. Background Art

[0002] In the process of chemical nickel-palladium plating, the role of the palladium tank is to act as a barrier layer between nickel and gold, preventing the migration of nickel to the surface of the gold layer and keeping the gold surface clean. In order to improve the uniform coverage of palladium plating on different UBM bumps on the wafer surface, a nitrogen (clean inert gas) bubbling device is set in the palladium tank. The impact force generated by the bubbles discharged from the nitrogen holes during movement and bursting can effectively help the plating solution flow more evenly on the wafer surface. The existing nitrogen bubbler is not only complex in structure, but also cannot well balance the amount of inert gas escaping at different positions, affecting the uniformity of electroplating. Utility Model Content

[0003] In order to solve the above problems, the utility model provides a palladium tank nitrogen bubbling device, which has a simple structure, is convenient for the installation of a nitrogen delivery pipe, and can balance the escape amount of inert gas at different positions.

[0004] The technical scheme of the utility model is: a palladium tank nitrogen bubbling device, comprising a bracket, a nitrogen delivery pipe 1 and a nitrogen delivery pipe 2; the bracket is provided with a plurality of slots for fixing the nitrogen delivery pipe 1 and the nitrogen delivery pipe 2; the nitrogen delivery pipe 1 is distributed at both ends of the bracket; the nitrogen delivery pipe 2 is distributed in the middle of the bracket; a plurality of air holes are provided on the nitrogen delivery pipe 1 and the nitrogen delivery pipe 2; and air inlets are provided at both ends of the nitrogen delivery pipe 1 and the nitrogen delivery pipe 2.

[0005] Furthermore, the bracket includes an outer frame, a longitudinal beam and a cross beam; a pair of longitudinal beams are arranged in the outer frame, and the two ends of the longitudinal beams are fixed on the outer frame; the longitudinal beams and the outer frame are also connected by cross beams; a plurality of slots are arranged on the longitudinal beams at equal intervals; and each of the cross beams is provided with two slots.

[0006] Furthermore, the two ends of the nitrogen delivery pipe 1 are installed on the longitudinal beams at the two ends of the bracket in a serpentine structure, and the rest of the pipe is fixed on the cross beam in a straight line; the middle part of the nitrogen delivery pipe 2 is installed on the longitudinal beam in the middle of the bracket in a serpentine structure, and the two ends of the nitrogen delivery pipe 2 are fixed on the cross beam in a straight line; on the several sections of the nitrogen delivery pipe 1 and the nitrogen delivery pipe 2 located between the two longitudinal beams, except for the two outermost sections of the nitrogen delivery pipe 1 having one air hole in the middle, the remaining sections of the nitrogen delivery pipe 1 and the nitrogen delivery pipe 2 are provided with two air holes; the two air holes divide the nitrogen delivery pipe 1 or the nitrogen delivery pipe 2 into three equal sections.

[0007] Furthermore, elastic fasteners are provided on both side walls of the slot; the elastic fasteners include a semicircular support ring and a U-shaped ring; the top end of the semicircular support ring is fixed to the side wall of the slot, the bottom end is fixedly connected to one end of the U-shaped ring, and the other end of the U-shaped ring is fixed to the side wall of the slot.

[0008] The beneficial effects of the utility model are:

[0009] 1) The bracket of the utility model has a simple structure, and a card slot is arranged on the bracket, which is convenient for the installation of the nitrogen delivery pipe, is easy to use, convenient to install, and simplifies the structure of the nitrogen bubbling.

[0010] 2) The utility model is provided with two nitrogen delivery pipes, and air holes are arranged on the nitrogen delivery pipes. Nitrogen delivery pipe one is distributed at both ends of the bracket, and nitrogen delivery pipe two is distributed in the middle of the bracket. By changing the layout of the existing nitrogen delivery pipes and reasonably distributing the air holes on the pipes, the purpose of balancing the escape amount of inert gas at different positions is achieved, so that the plating solution flows more evenly on the wafer surface.

[0011] 3) The utility model provides an elastic fastener in the card slot to facilitate the fixation of the nitrogen delivery pipe and prevent the device from slipping and falling off. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0013] Figure 1 It is a three-dimensional diagram of the utility model.

[0014] Figure 2 A schematic diagram of the card slot. DETAILED DESCRIPTION

[0015] The technical solution of the utility model will be clearly and completely described below through specific implementation methods. Example 1

[0016] refer to Figure 1 , which is a palladium tank nitrogen bubbling device of the utility model, includes a bracket 1, a nitrogen delivery pipe 2 and a nitrogen delivery pipe 3; the bracket 1 is provided with a plurality of slots 14 for fixing the nitrogen delivery pipe 2 and the nitrogen delivery pipe 3; the nitrogen delivery pipe 2 is distributed at both ends of the bracket 1; the nitrogen delivery pipe 2 is distributed in the middle of the bracket 1; a plurality of air holes 4 are provided on the nitrogen delivery pipe 2 and the nitrogen delivery pipe 3; and air inlets are provided at both ends of the nitrogen delivery pipe 2 and the nitrogen delivery pipe 3.

[0017] The bracket 1 of this embodiment includes an outer frame 11, a longitudinal beam 12 and a cross beam 13; a pair of longitudinal beams 12 are arranged in the outer frame 11, and the two ends of the longitudinal beams 12 are fixed to the outer frame 11; the longitudinal beams 12 and the outer frame are also connected by the cross beams 13; a plurality of slots 14 are arranged on the longitudinal beams 12 at equal intervals; each of the cross beams 13 is provided with two slots 14.

[0018] The nitrogen delivery pipe 2 of this embodiment adopts a PFA pipe. The bracket 1 is made of quartz material. The bracket of the utility model has a simple structure and is easy to install and fix the nitrogen delivery pipe 2. Nitrogen is discharged from the air hole through the nitrogen delivery pipe 2. The impact force generated by the bubble during movement and bursting can effectively help the plating solution flow more evenly on the wafer surface.

[0019] The two ends of the nitrogen delivery pipe 1 2 of this embodiment are installed on the longitudinal beams 12 at the two ends of the bracket in a serpentine structure, and the remaining part is fixed on the cross beam 13 in a straight line; the middle part of the nitrogen delivery pipe 2 3 is installed on the longitudinal beam 12 in the middle of the bracket in a serpentine structure, and the two ends of the nitrogen delivery pipe 2 3 are fixed on the cross beam 13 in a straight line; on the several sections of the nitrogen delivery pipe 1 2 and the nitrogen delivery pipe 2 3 located between the two longitudinal beams, except for the two outermost sections of the nitrogen delivery pipe 1 2, which have an air hole 4 in the middle, the remaining sections of the nitrogen delivery pipe 1 2 and the nitrogen delivery pipe 2 3 are provided with two air holes 4; the two air holes 4 divide the nitrogen delivery pipe 1 2 or the nitrogen delivery pipe 2 3 into three equal sections.

[0020] This embodiment changes the layout of the existing nitrogen delivery pipe and reasonably distributes the air holes on the pipe to achieve the purpose of balancing the escape amount of inert gas at different positions, so that the plating solution flows more evenly on the wafer surface. Example 2

[0021] In order to improve the fixing effect of the nitrogen delivery pipe and prevent it from slipping and falling off, in this embodiment, elastic fasteners 15 are provided on both side walls of the nitrogen delivery pipe fixing slot 14.

[0022] like Figure 2 As shown, the elastic fastener 15 includes a semicircular support ring 151 and a U-shaped ring 152; the top end of the semicircular support ring 151 is fixed to the side wall of the slot 14, and the bottom end is fixedly connected to one end of the U-shaped ring 152, and the other end of the U-shaped ring 152 is fixed to the side wall of the slot 14.

[0023] In this embodiment, the elastic fasteners 15 on both sides and the bottom of the slot are tightly wrapped around the outer circumference of the nitrogen delivery pipe, which will not excessively squeeze the nitrogen delivery pipe and can effectively fix it.

[0024] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art may make various modifications or equivalent substitutions to the present invention within the essence and protection scope of the present invention, and such modifications or equivalent substitutions should also be deemed to fall within the protection scope of the technical solution of the present invention.

Claims

1. Palladium tank nitrogen bubbling device, characterized in that: The invention comprises a support (1), a nitrogen delivery pipe 1 (2) and a nitrogen delivery pipe 2 (3); the support (1) is provided with a plurality of slots (14) for fixing the nitrogen delivery pipe 1 (2) and the nitrogen delivery pipe 2 (3); the nitrogen delivery pipe 1 (2) is distributed at both ends of the support (1); the nitrogen delivery pipe 2 (3) is distributed in the middle of the support (1); a plurality of air holes (4) are provided on the nitrogen delivery pipe 1 (2) and the nitrogen delivery pipe 2 (3); and air inlets are provided at both ends of the nitrogen delivery pipe 1 (2) and the nitrogen delivery pipe 2 (3).

2. The palladium tank nitrogen bubbling device according to claim 1, characterized in that: The bracket (1) comprises an outer frame (11), a longitudinal beam (12) and a cross beam (13); a pair of longitudinal beams (12) are arranged inside the outer frame (11), and two ends of the longitudinal beams (12) are fixed to the outer frame (11); the longitudinal beams (12) and the outer frame are also connected via the cross beams (13); a plurality of slots (14) are arranged at equal intervals on the longitudinal beams (12); and each of the cross beams (13) is provided with two slots (14).

3. The palladium tank nitrogen bubbling device according to claim 1, characterized in that: The two ends of the nitrogen delivery pipe 1 (2) are mounted on the longitudinal beams (12) at the two ends of the bracket in a serpentine structure, and the remaining part is fixed on the cross beam (13) in a straight line; the middle part of the nitrogen delivery pipe 2 (3) is mounted on the longitudinal beam (12) in the middle of the bracket in a serpentine structure, and the two ends of the nitrogen delivery pipe 2 (3) are fixed on the cross beam (13) in a straight line; on the several sections of the nitrogen delivery pipe 1 (2) and the nitrogen delivery pipe 2 (3) located between the two longitudinal beams, except for the two outermost sections of the nitrogen delivery pipe 1 (2) having one air hole (4) in the middle, the remaining sections of the nitrogen delivery pipe 1 (2) and the nitrogen delivery pipe 2 (3) are provided with two air holes (4); the two air holes (4) divide the nitrogen delivery pipe 1 (2) or the nitrogen delivery pipe 2 (3) into three equal sections.

4. The palladium tank nitrogen bubbling device according to claim 1, characterized in that: Elastic fasteners (15) are provided on both side walls of the slot (14); the elastic fastener (15) comprises a semicircular support ring (151) and a U-shaped ring (152); the top end of the semicircular support ring (151) is fixed to the side wall of the slot (14), the bottom end is fixedly connected to one end of the U-shaped ring (152), and the other end of the U-shaped ring (152) is fixed to the side wall of the slot (14).

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