Nickel bath nitrogen bubbling device

Abstract

The utility model discloses a nickel bath nitrogen bubbling device. The nickel bath nitrogen bubbling device comprises a bracket, a nitrogen conveying module and a promoting module, the nitrogen conveying module and the promoting module are connected with the support in a clamped mode. The nitrogen conveying module is positioned above the promoting module and is used for forming nitrogen bubbles; and the promoting module is used for promoting nitrogen bubbles to rise. The support structure is arranged, the structure is simple, the nitrogen conveying module and the promoting module are convenient to install and fix, the arrangement of the nitrogen conveying module and the promoting module helps a plating solution to flow on the surface of a wafer more evenly, and UBM protruding blocks with different size designs can have good plating layer thickness uniformity.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a nickel tank nitrogen bubbling device. Background Art

[0002] In the field of microelectronic product packaging, chemical nickel-gold or chemical nickel-palladium-gold process technology is used to deposit a solderable nickel-gold or nickel-palladium-gold layer on the semiconductor wafer I / O metal aluminum or copper pad, which serves as the UBM (underbumping metallization) layer in bump packaging or the OPM (over pad metallization) layer in traditional WB (wirebonding) technology.

[0003] In the process of chemical nickel-palladium-gold plating, the nickel tank forms a uniform metal nickel layer on the product surface. However, uneven coating thickness is a common problem in the nickel tank. In order to improve the more uniform distribution of the plating solution on the entire lot product surface and improve the plating uniformity of UBM bumps of different sizes, a nickel tank nitrogen bubbling device is designed. Utility Model Content

[0004] In order to solve the above problems, the utility model provides a nickel tank nitrogen bubbling device to improve the more uniform distribution of the plating solution on the entire lot product surface and improve the plating uniformity of UBM bumps designed with different sizes.

[0005] The technical solution of the utility model is: a nickel tank nitrogen bubbling device, comprising a bracket, a nitrogen delivery module and a promotion module; the nitrogen delivery module and the promotion module are clamped with the bracket; the nitrogen delivery module is located above the promotion module and is used to form nitrogen bubbling, the nitrogen delivery module comprises a nitrogen delivery pipe 1 and a nitrogen delivery pipe 2; the nitrogen delivery pipe 1 is distributed at both ends of the bracket; the nitrogen delivery pipe 2 is distributed in the middle nitrogen delivery module of the bracket; the promotion module is used to promote the nitrogen bubbling to rise.

[0006] Furthermore, the bracket includes an outer frame, a longitudinal beam, a first crossbeam, and a second crossbeam; two longitudinal beams are arranged in the outer frame; two ends of the longitudinal beam are fixed to the outer frame; a first crossbeam is arranged between the two longitudinal beams; a second crossbeam is arranged between the longitudinal beam and the outer frame; a first card slot for fixing the nitrogen delivery module is arranged on the longitudinal beam and the second crossbeam; a second card slot for fixing the promotion module is also arranged on the second crossbeam; the position of the second card slot is lower than the position of the first card slot.

[0007] Furthermore, a pair of promotion modules are arranged in the bracket; the promotion module includes a plurality of water flow tubes arranged in parallel; a plurality of water flow holes are arranged on the water flow tubes; the two ends of the water flow tubes are connected by a connecting pipe; and the water flow tubes are connected to the water pipes.

[0008] Furthermore, the promotion module also includes a mounting seat; the mounting seat is a disc structure, and a through hole is arranged in the center of the disc structure; waist-shaped holes are arranged around the through hole; a water inlet pipe connected to the through hole is welded on the mounting seat; the other end of the water inlet pipe is welded to the middle of the branch pipe and is connected to the branch pipe; the two ends of the branch pipe are respectively fixed on the two water flow pipes in the middle and are connected to the water flow pipes.

[0009] Furthermore, the two ends of the nitrogen delivery pipe 1 are installed on the longitudinal beams at the two ends of the bracket in a serpentine structure, and the rest of the pipe is fixed on the cross beam in a straight line; the middle part of the nitrogen delivery pipe 2 is installed on the longitudinal beam in the middle of the bracket in a serpentine structure, and the two ends of the nitrogen delivery pipe 2 are fixed on the cross beam in a straight line; on the several sections of the nitrogen delivery pipe 1 and the nitrogen delivery pipe 2 located between the two longitudinal beams, except for the two outermost sections of the nitrogen delivery pipe 1 having one air hole in the middle, the remaining sections of the nitrogen delivery pipe 1 and the nitrogen delivery pipe 2 are provided with two air holes; the two air holes divide the nitrogen delivery pipe 1 or the nitrogen delivery pipe 2 into three equal sections.

[0010] The beneficial effects of the utility model are:

[0011] 1) The utility model is provided with a bracket structure, which has a simple structure and is convenient for installing and fixing the nitrogen delivery module and the promotion module.

[0012] 2) The utility model is provided with a nitrogen delivery module, and nitrogen is introduced into the nitrogen delivery module to form bubbles. The impact force generated by the bubbles during movement and bursting effectively helps the coating to flow more evenly on the wafer surface, so that UBM bumps of different sizes can have better coating thickness uniformity.

[0013] 3) The promotion module provided in the utility model can effectively promote the nitrogen bubbling and rising, and work together with the nitrogen delivery module to help the coating flow more evenly on the wafer surface.

[0014] 4) In the utility model, nitrogen delivery pipe 1 is distributed at both ends of the bracket, and nitrogen delivery pipe 2 is distributed in the middle of the bracket. By changing the layout of the existing nitrogen delivery pipes and reasonably distributing the air holes on the pipes, the purpose of balancing the escape amount of inert gas at different positions is achieved, so that the plating solution flows more evenly on the wafer surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0016] Figure 1 It is a top view of the utility model.

[0017] Figure 2 Schematic diagram of the nitrogen delivery module.

[0018] Figure 3 Schematic diagram of the promotion module.

[0019] Figure 4 This is the main view of the utility model

[0020] Figure 5 It is a side view of the utility model. DETAILED DESCRIPTION

[0021] The technical solution of the utility model will be clearly and completely described below through specific implementation methods.

[0022] refer to Figure 1-5 The utility model is a nickel tank nitrogen bubbling device, comprising a bracket 1, a nitrogen delivery module 2 and a promotion module 3. The nitrogen delivery module 2 and the promotion module 3 are clamped with the bracket 1. The nitrogen delivery module 2 is located above the promotion module 3, and the nitrogen delivery module 2 is used to form nitrogen bubbles; the promotion module 3 is used to push the nitrogen bubbles to rise.

[0023] In this embodiment, the nitrogen delivery module 2 and the promotion module 3 are clamped on the bracket 1. The bracket has a simple structure and is used to fix the nitrogen delivery module 2 and the promotion module 3. The nitrogen delivery module 2 forms bubbles. The impact force generated by the bubbles during movement and bursting effectively helps the coating to flow more evenly on the wafer surface, so that UBM bumps of different sizes can have better coating thickness uniformity. The promotion module 3 is arranged below the nitrogen delivery module 2, which can promote the rise of the bubbles formed by the nitrogen delivery module 2, and the pure water output by the promotion module itself can improve the flow of the electroplating solution, so that the oxygen is fully dissolved, which can effectively reduce the foam in the plating solution.

[0024] In this embodiment, the nitrogen delivery module 2 includes a nitrogen delivery pipe 1 21 and a nitrogen delivery pipe 2 22 ; both the nitrogen delivery pipe 1 21 and the nitrogen delivery pipe 2 22 are PFA pipes.

[0025] The two ends of the nitrogen delivery pipe 1 21 are installed on the longitudinal beams at the two ends of the bracket in a serpentine structure, and the rest of the part is fixed on the cross beam 2 in a straight line; the middle part of the nitrogen delivery pipe 22 is installed on the longitudinal beam in the middle of the bracket in a serpentine structure, and the two ends of the nitrogen delivery pipe 22 are fixed on the cross beam 2 in a straight line; on the several sections of the nitrogen delivery pipe 1 21 and the nitrogen delivery pipe 2 22 located between the two longitudinal beams, except for the two outermost sections of the nitrogen delivery pipe 1 21, which have an air hole 23 in the middle, the remaining sections of the nitrogen delivery pipe 1 21 and the nitrogen delivery pipe 2 22 are provided with two air holes 23; the two air holes 23 divide the nitrogen delivery pipe 1 21 or the nitrogen delivery pipe 2 22 into three equal sections.

[0026] This embodiment changes the layout of the existing nitrogen delivery pipes, distributes nitrogen delivery pipe 1 at both ends of the bracket, and distributes nitrogen delivery pipe 2 in the middle of the bracket. At the same time, the air holes on the pipes are reasonably distributed to achieve the purpose of balancing the escape amount of inert gas at different positions, so that the plating solution flows more evenly on the wafer surface.

[0027] The bracket 1 of this embodiment includes an outer frame 11, a longitudinal beam 12, a cross beam 13, and a cross beam 2 14; two longitudinal beams 12 are arranged in the outer frame 11; both ends of the longitudinal beam 12 are fixed to the outer frame 11; a cross beam 13 is arranged between the two longitudinal beams 12; a cross beam 2 14 is arranged between the longitudinal beam 12 and the outer frame 11; a slot 15 for fixing the nitrogen delivery module is arranged on the longitudinal beam 12 and the cross beam 2 14; a slot 2 17 for fixing the promotion module 3 is also arranged on the cross beam 2 14; the position of the slot 2 17 is lower than the position of the slot 15.

[0028] In this embodiment, a plurality of first clamping grooves are provided on the longitudinal beam 12 and the second transverse beam 14 for clamping the PFA tube. The width of the first clamping groove is slightly smaller than the diameter of the tube body.

[0029] In this embodiment, a second clamping groove 17 is provided on the second crossbeam 14 for clamping the connecting pipe of the promotion module 3. The clamping arms on both sides of the second clamping groove have a certain elasticity. When the connecting pipe is pressed into the second clamping groove, the clamping arms on both sides are squeezed and stretched outward. After the connecting pipe enters the clamping groove, the clamping arms are reset to clamp the connecting pipe.

[0030] In this embodiment, a pair of promotion modules 3 are arranged in the bracket 1; the promotion module 3 includes a plurality of water flow tubes 31 arranged in parallel; a plurality of water flow holes 32 are arranged on the water flow tubes 31; the two ends of the water flow tubes 31 are connected by a connecting pipe 34; the water flow tubes 31 are connected to the water pipe 33.

[0031] The promotion module 3 of this embodiment also includes a mounting seat 35; the mounting seat 35 is a disc structure, and a through hole is arranged in the center of the disc structure; waist-shaped holes are arranged around the through hole; a water inlet pipe 33 connected to the through hole is welded on the mounting seat 35; the other end of the water inlet pipe 33 is welded to the middle of the branch pipe 36 and is connected to the branch pipe 36; the two ends of the branch pipe are respectively fixed on the two water flow pipes 31 in the middle and are connected to the water flow pipes 31.

[0032] The pure water in this embodiment enters the water inlet pipe 33 through the circular hole of the mounting seat 35, then enters the water flow pipes on both sides through the branch pipe 36, and then enters the remaining water flow pipes through the connecting pipe. The water flow discharged from the water flow pipe 31 pushes the nitrogen bubbles to rise.

[0033] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art may make various modifications or equivalent substitutions to the present invention within the essence and protection scope of the present invention, and such modifications or equivalent substitutions should also be deemed to fall within the protection scope of the technical solution of the present invention.

Claims

1. Nitrogen bubbling device for nickel tank, characterized by: The invention comprises a support (1), a nitrogen delivery module (2) and a promotion module (3); the nitrogen delivery module (2) and the promotion module (3) are snap-connected with the support (1); the nitrogen delivery module (2) is located above the promotion module (3) and is used to form nitrogen bubbles; the nitrogen delivery module (2) comprises a first nitrogen delivery pipe (21) and a second nitrogen delivery pipe (22); the first nitrogen delivery pipe (21) is distributed at both ends of the support (1); the second nitrogen delivery pipe (22) is distributed in the middle of the support (1) and the nitrogen delivery module (2); the promotion module (3) is used to push the nitrogen bubbles upward.

2. The nickel tank nitrogen bubbling device according to claim 1, characterized in that: The support (1) comprises an outer frame (11), a longitudinal beam (12), a first crossbeam (13), and a second crossbeam (14); two longitudinal beams (12) are arranged inside the outer frame (11); two ends of the longitudinal beams (12) are fixed to the outer frame (11); a first crossbeam (13) is arranged between the two longitudinal beams (12); a second crossbeam (14) is arranged between the longitudinal beams (12) and the outer frame (11); a first clamping slot (15) for fixing a nitrogen delivery module is arranged on both the longitudinal beam (12) and the second crossbeam (14); a second clamping slot (17) for fixing a promotion module (3) is also arranged on the second crossbeam (14); the position of the second clamping slot (17) is lower than the position of the first clamping slot (15).

3. The nickel tank nitrogen bubbling device according to claim 1, characterized in that: A pair of promotion modules (3) are arranged in the bracket (1); the promotion modules (3) include a plurality of water flow pipes (31) arranged in parallel; a plurality of water flow holes (32) are arranged on the water flow pipes (31); the two ends of the water flow pipes (31) are connected by a connecting pipe (34); and the water flow pipes (31) are connected to a water pipe (33).

4. The nickel tank nitrogen bubbling device according to claim 3, characterized in that: The promotion module (3) further comprises a mounting seat (35); the mounting seat (35) is a disc structure, a through hole is arranged at the center of the disc structure; waist-shaped holes are arranged around the through hole; a water inlet pipe (33) connected to the through hole is welded on the mounting seat (35); the other end of the water inlet pipe (33) is welded to the middle of the branch pipe (36) and is connected to the branch pipe (36); the two ends of the branch pipe are respectively fixed to the two water flow pipes (31) in the middle and are connected to the water flow pipes (31).

5. The nickel tank nitrogen bubbling device according to claim 1, characterized in that: The two ends of the nitrogen delivery pipe 1 (21) are installed on the longitudinal beams at the two ends of the bracket in a serpentine structure, and the remaining part is fixed on the cross beam 2 in a straight line; the middle part of the nitrogen delivery pipe 2 (22) is installed on the longitudinal beam in the middle of the bracket in a serpentine structure, and the two ends of the nitrogen delivery pipe 2 (22) are fixed on the cross beam 2 in a straight line; on the several sections of the nitrogen delivery pipe 1 (21) and the nitrogen delivery pipe 2 (22) located between the two longitudinal beams, except for the two outermost sections of the nitrogen delivery pipe 1 (21) having one air hole (23) in the middle, the remaining sections of the nitrogen delivery pipe 1 (21) and the nitrogen delivery pipe 2 (22) are provided with two air holes (23); the two air holes (23) divide the nitrogen delivery pipe 1 (21) or the nitrogen delivery pipe 2 (22) into three equal sections.

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