Etching device for integrated circuit device

Abstract

The utility model discloses an integrated circuit device etching and removing device which is characterized by comprising a processing table, smoke dust generated by etching and removing an integrated circuit device can be absorbed through a smoke suction pump and two smoke suction pipes, a large amount of smoke dust generated in the etching and removing process is reduced, and the etching and removing efficiency of the integrated circuit device is improved. According to the carving and removing device, the possibility that the carving and removing cutter is damaged while machining is affected is avoided, a smoke suction pump and two smoke suction pipes move front and back and left and right and can synchronously move with the carving and removing cutter, and then the smoke dust suction effect of the smoke suction pump and the two smoke suction pipes can be improved; the two clamping plates can be moved, and the integrated circuit device can be clamped and fixed through the two clamping plates, so that the possibility of deviation and movement of the integrated circuit device due to infirm placement of the integrated circuit device in the etching process of the integrated circuit device can be reduced, and the etching efficiency of the integrated circuit device is improved. And the etching effect of the integrated circuit device can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of integrated circuit processing, in particular to an integrated circuit device etching and removing device. Background Art

[0002] An integrated circuit is a miniature electronic device or component. Using a certain process, the transistors, resistors, capacitors, inductors and other components and wiring required in a circuit are interconnected and made on a small piece or several small pieces of semiconductor wafers or dielectric substrates, and then packaged in a tube shell to become a miniature structure with the required circuit function; all the components have formed a whole in structure, making electronic components a big step forward in miniaturization, low power consumption, intelligence and high reliability.

[0003] An integrated circuit device removal device is required in the process of processing and removing integrated circuit devices. During the use of the currently available integrated circuit device removal devices, most of the integrated circuit device removal devices will generate a large amount of smoke and dust during the etching process, which will affect the processing and cause harm to human safety. During the etching process of the integrated circuit device, if the integrated circuit device is not placed firmly, the integrated circuit device may be offset and moved, which may easily affect the etching effect of the integrated circuit device. Utility Model Content

[0004] In view of the problems mentioned in the background technology, the purpose of the utility model is to provide an integrated circuit device etching device to solve the problems mentioned in the background technology.

[0005] The above technical objectives of the utility model are achieved through the following technical solutions:

[0006] A device for engraving integrated circuit devices, comprising a processing table, a placing plate fixedly connected to the processing table, mounting plates fixedly connected to both sides of the processing table, a first servo electric cylinder fixedly provided on the two mounting plates, an output end of the first servo electric cylinder transmission connected to a first connecting rod via a coupling, sides of the two first connecting rods fixedly connected to a clamping plate, a first sliding mechanism and a first driving mechanism are arranged on the processing table, an output end of the first driving mechanism is transmission connected to the first sliding mechanism, a supporting plate is arranged on the first sliding mechanism, a second sliding mechanism is arranged at the bottom of the supporting plate, a second driving mechanism is arranged at the side of the supporting plate, an output end of the second driving mechanism is transmission connected to the second sliding mechanism, a connecting plate is arranged at the bottom of the second sliding mechanism, a smoking pump is fixedly installed on the connecting plate, two smoking pipes are fixedly connected to the bottom plate of the smoking pump, a telescopic mechanism is arranged at the bottom of the connecting plate, an output end of the telescopic mechanism is transmission connected to a rotating mechanism, and an engraving knife is transmission connected to the output end of the rotating mechanism.

[0007] By adopting the above technical scheme, through the first sliding mechanism and the first driving mechanism arranged on the processing table, the second sliding mechanism and the second driving mechanism arranged on the support plate, and the smoke pump fixedly installed on the connecting plate, the first driving mechanism can be used to operate the first sliding mechanism, so that the connecting plate can be moved left and right, and the second driving mechanism can be used to operate the second sliding mechanism, so that the connecting plate can be moved forward and backward. The smoke pump and the two smoking pipes can be used to absorb the smoke generated by the cutting of the integrated circuit device, thereby reducing the possibility of a large amount of smoke generated during the cutting process, which affects the processing and causes harm to human safety. The smoke pump and the two smoking pipes can be used to move forward and backward and left and right, and can be moved synchronously with the cutting knife, thereby improving the smoke absorption effect of the smoke pump and the two smoking pipes. Through the first servo electric cylinders fixedly installed on the two mounting plates, the two first servo electric cylinders can drive the two first connecting rods to extend and retract, so that the two clamps can be moved. The integrated circuit device can be clamped and fixed by the two clamps, thereby reducing the possibility of the integrated circuit device being offset and moved due to the loose placement of the integrated circuit device during the cutting process, thereby improving the cutting effect of the integrated circuit device.

[0008] Preferably, the first sliding mechanism includes a first slide rail and a first slider, the first slide rail is fixedly connected to the processing table, and the first slider is slidably connected to the first slide rail.

[0009] By adopting the above technical solution, the first sliding block is slidably connected to the first sliding rail, so that the support plate can be moved, and then the engraving knife can be moved left and right.

[0010] Preferably, the first driving mechanism includes a first servo motor and a first threaded rod, the first servo motor is fixedly mounted on the processing table, the first threaded rod is transmission-connected to the output end of the first servo motor via a coupling, and the threaded rod is threadedly connected to the first slider.

[0011] By adopting the above technical solution, the first servo motor drives the first threaded rod to rotate, and the first threaded rod is threadedly connected to the first slider, so that the first slider can be slidably connected to the first slide rail.

[0012] Preferably, the second sliding mechanism includes a second slide rail and a second slider, the second slide rail is fixedly connected to the bottom of the support plate, the second slider is slidably connected to the bottom of the second slide rail, and the second slider is fixedly connected to the connecting plate.

[0013] By adopting the above technical solution, the second sliding block is slidably connected to the bottom of the second sliding rail, so that the connecting plate can be moved forward and backward, and then the engraving knife can be moved forward and backward.

[0014] Preferably, the second driving mechanism includes a second servo motor and a second threaded rod, the second servo motor is fixedly mounted on the side of the support plate, the second threaded rod is transmission-connected to the output end of the second servo motor via a coupling, and the second threaded rod is threadedly connected to the second slider.

[0015] By adopting the above technical solution, the second servo motor drives the second threaded rod to rotate, and the second threaded rod is threadedly connected to the second slider, so that the second slider can slide at the bottom of the second slide rail.

[0016] Preferably, the telescopic mechanism includes a second servo electric cylinder and a second connecting rod, the second servo electric cylinder is fixedly mounted on the bottom of the connecting plate, the second connecting rod is transmission-connected to the output end of the second servo electric cylinder via a coupling, and the second connecting rod is fixedly connected to the rotating mechanism.

[0017] By adopting the above technical solution, the second servo electric cylinder drives the second connecting rod to be extended and retracted, thereby enabling the engraving knife to be raised and lowered.

[0018] Preferably, the rotating mechanism includes a third servo motor and a rotating rod, the third servo motor is fixedly mounted on the bottom of the second connecting rod, the rotating rod is transmission-connected to the output end of the third servo motor via a coupling, and the rotating rod is fixedly connected to the engraving knife.

[0019] By adopting the above technical solution, the third servo motor drives the rotating rod to rotate, thereby enabling the engraving and cutting knife to rotate.

[0020] Preferably, rubber pads are bonded to the sides of the two clamping plates.

[0021] By adopting the above technical solution and providing the rubber pad, the friction force on the surface of the clamping plate can be increased, so that the two clamping plates can clamp the integrated circuit device more firmly.

[0022] In summary, the utility model mainly has the following beneficial effects:

[0023] First, the utility model uses a first sliding mechanism and a first driving mechanism arranged on the processing table, a second sliding mechanism and a second driving mechanism arranged on the support plate, and a smoke pump fixedly installed on the connecting plate. The first driving mechanism can make the first sliding mechanism operate, and then the connecting plate can be moved left and right. The second driving mechanism can make the second sliding mechanism operate, and then the connecting plate can be moved forward and backward. The smoke pump and the two smoking pipes can absorb the smoke generated by the etching of the integrated circuit device, thereby reducing the possibility of a large amount of smoke generated during the etching process, affecting the processing and causing harm to human safety. The smoke pump and the two smoking pipes can move forward and backward, left and right, and can move synchronously with the etching knife, thereby improving the smoke removal effect of the smoke pump and the two smoking pipes.

[0024] Second, the utility model uses the first servo electric cylinders fixedly installed on the two mounting plates to drive the two first connecting rods to extend and retract, so that the two clamping plates can be moved. The integrated circuit device can be clamped and fixed by the two clamping plates, thereby reducing the possibility of the integrated circuit device being offset and moved due to the unstable placement of the integrated circuit device during the etching process of the integrated circuit device, thereby improving the etching effect of the integrated circuit device. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is one of the structural schematic diagrams of the utility model;

[0026] Figure 2 This is the second structural diagram of the utility model;

[0027] Figure 3 yes Figure 2 A is an enlarged schematic diagram.

[0028] Figure numerals: 1. processing table; 2. placement plate; 3. mounting plate; 4. first servo electric cylinder; 5. first connecting rod; 6. clamping plate; 7. first sliding mechanism; 701. first slide rail; 702. first slider; 8. first driving mechanism; 801. first servo motor; 802. first threaded rod; 9. supporting plate; 10. second sliding mechanism; 101. second slide rail; 102. second slider; 11. second driving mechanism; 111. second servo motor; 112. second threaded rod; 12. connecting plate; 13. smoking pump; 14. smoking pipe; 15. telescopic mechanism; 151. second servo electric cylinder; 152. second connecting rod; 16. rotating mechanism; 161. third servo motor; 162. rotating rod; 17. engraving knife; 18. rubber pad. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] Example 1

[0031] refer to Figure 1-3A device for engraving and removing integrated circuit devices comprises a processing table 1, a placing plate 2 is fixedly connected to the processing table 1, mounting plates 3 are fixedly connected to both sides of the processing table 1, first servo electric cylinders 4 are fixedly connected to the two mounting plates 3, the output end of the first servo electric cylinder 4 is connected to the first connecting rod 5 through a coupling transmission, the sides of the two first connecting rods 5 are fixedly connected to the clamping plates 6, a first sliding mechanism 7 and a first driving mechanism 8 are arranged on the processing table 1, the first sliding mechanism 7 comprises a first slide rail 701 and a first slider 702, the first slide rail 701 is fixedly connected to the processing table 1, the first slider 702 is slidably connected to the first slide rail 701, and the support plate 9 can be moved by the first slider 702 being slidably connected to the first slide rail 701, Then, the engraving knife 17 can be moved left and right. The first driving mechanism 8 includes a first servo motor 801 and a first threaded rod 802. The first servo motor 801 is fixedly installed on the processing table 1. The first threaded rod 802 is transmission-connected to the output end of the first servo motor 801 through a coupling. The threaded rod is threadedly connected to the first slider 702. The first threaded rod 802 is driven to rotate by the first servo motor 801. The first threaded rod 802 is threadedly connected to the first slider 702. Then, the first slider 702 can be slidably connected to the first slide rail 701. The output end of the first driving mechanism 8 is transmission-connected to the first sliding mechanism 7. A support plate 9 is provided on the first sliding mechanism 7. A second sliding mechanism 10 is provided at the bottom of the support plate 9. The second sliding mechanism 10 includes a second slide rail 101 and a second slider 102. The second slide rail 101 is fixedly connected to the bottom of the support plate 9. The second slider 102 is slidably connected to the bottom of the second slide rail 101. The second slider 102 is fixedly connected to the connecting plate 12. The second slider 102 is slidably connected to the bottom of the second slide rail 101, so that the connecting plate 12 can move forward and backward, and then the engraving knife 17 can move forward and backward. A second driving mechanism 11 is provided on the side of the support plate 9. The second driving mechanism 11 includes a second servo motor 111 and a second threaded rod 112. The second servo motor 111 is fixedly installed on the side of the support plate 9. The second threaded rod 112 is transmission-connected to the output end of the second servo motor 111 through a coupling. The second threaded rod 112 is threadedly connected with the second slider 102, and the second servo motor 111 drives the second threaded rod 112 to rotate. The second threaded rod 112 is threadedly connected with the second slider 102, so that the second slider 102 can slide at the bottom of the second slide rail 101. The output end of the second driving mechanism 11 is transmission-connected with the second sliding mechanism 10. A connecting plate 12 is provided at the bottom of the second sliding mechanism 10, and a smoking pump 13 is fixedly installed on the connecting plate 12. Two smoking pipes 14 are fixedly connected to the bottom plate of the smoking pump 13. A telescopic mechanism 15 is provided at the bottom of the connecting plate 12. The telescopic mechanism 15 includes a second servo electric cylinder 151 and a second connecting rod 152. The second servo electric cylinder 151 is fixedly installed at the bottom of the connecting plate 12.The second connecting rod 152 is connected to the output end of the second servo electric cylinder 151 through a coupling, and the second connecting rod 152 is fixedly connected to the rotating mechanism 16. The second servo electric cylinder 151 drives the second connecting rod 152 to be extended and retracted, so that the engraving knife 17 can be lifted and lowered. The output end of the telescopic mechanism 15 is connected to the rotating mechanism 16, and the rotating mechanism 16 includes a third servo motor 161 and a rotating rod 162. The third servo motor 161 is fixedly installed at the bottom of the second connecting rod 152. The rotating rod 162 is connected to the third servo electric cylinder 151 through a coupling. The output end of the servo motor 161 is connected to the rotating rod 162, which is fixedly connected to the cutting knife 17. The rotating rod 162 is driven by the third servo motor 161 to rotate, so that the cutting knife 17 can be rotated. The output end of the rotating mechanism 16 is connected to the cutting knife 17. Through the first sliding mechanism 7 and the first driving mechanism 8 set on the processing table 1, the second sliding mechanism 10 and the second driving mechanism 11 set on the support plate 9, and the smoking pump 13 fixedly installed on the connecting plate 12, the first sliding mechanism 7 can be driven by the first driving mechanism 8. The second driving mechanism 11 can be used to operate the second sliding mechanism 10, so that the connecting plate 12 can be moved forward and backward. The smoke pump 13 and the two smoking pipes 14 can absorb the smoke generated by the cutting of the integrated circuit device, reducing the possibility of a large amount of smoke generated during the cutting process, which affects the processing and causes harm to human safety. The smoke pump 13 and the two smoking pipes 14 can move forward and backward, left and right, and can move synchronously with the cutting knife 17, so as to improve the smoke removal effect of the smoke pump 13 and the two smoking pipes 14. The first servo electric cylinders 4 fixedly installed on the two mounting plates 3 can drive the two first connecting rods 5 to extend and retract, so that the two clamping plates 6 can be moved. The integrated circuit device can be clamped and fixed by the two clamping plates 6, so as to reduce the possibility of the integrated circuit device being offset and moved due to the loose placement of the integrated circuit device during the cutting process, so as to improve the cutting effect of the integrated circuit device.

[0032] refer to Figure 1 and Figure 2 The sides of the two clamping plates 6 are bonded with rubber pads 18. The provision of the rubber pads 18 can increase the friction force on the surface of the clamping plates 6, so that the two clamping plates 6 can clamp the integrated circuit device more firmly.

[0033] Principle and advantages of use: When in use, the integrated circuit device that needs to be engraved is placed on the placement plate 2, and the two first servo electric cylinders 4 drive the two first connecting rods 5 to be extended and retracted, so that the two clamps 6 can be moved, and the integrated circuit device can be clamped and fixed by the two clamps 6, thereby reducing the possibility that the integrated circuit device may be offset and moved due to the loose placement of the integrated circuit device during the engraving process of the integrated circuit device, thereby improving the engraving effect of the integrated circuit device, and the second servo electric cylinder 151 drives the second connecting rod 152 to be extended and retracted, so that the engraving knife 17 is raised and lowered, and the third servo motor 161 drives the rotating rod 162 to rotate, so that the engraving knife 17 can be rotated, and the integrated circuit device can be engraved, and the first servo motor 801 drives the first threaded rod 802 to rotate, and the first threaded rod 802 is driven by the first threaded rod 802 to rotate. The threaded rod 802 is threadedly connected to the first slider 702, so that the first slider 702 can be slidably connected to the first slide rail 701, and then the connecting plate 12 can be moved left and right. The second servo motor 111 drives the second threaded rod 112 to rotate. The second threaded rod 112 is threadedly connected to the second slider 102, so that the second slider 102 can be slidably connected to the bottom of the second slide rail 101, and then the connecting plate 12 can be moved forward and backward. The smoke pump 13 and the two smoking pipes 14 can absorb the smoke generated by the etching of the integrated circuit device, reducing the possibility of a large amount of smoke generated during the etching process, affecting the processing and causing harm to human safety. The smoke pump 13 and the two smoking pipes 14 can move forward, backward, left and right, and can move synchronously with the engraving knife 17, thereby improving the smoke removal effect of the smoke pump 13 and the two smoking pipes 14.

[0034] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An integrated circuit device etching device, comprising a processing table (1), characterized in that: A placement plate (2) is fixedly connected to the processing table (1), mounting plates (3) are fixedly connected to both sides of the processing table (1), first servo electric cylinders (4) are fixedly connected to the two mounting plates (3), the output end of the first servo electric cylinder (4) is connected to a first connecting rod (5) through a coupling, and the sides of the two first connecting rods (5) are fixedly connected to clamping plates (6), a first sliding mechanism (7) and a first driving mechanism (8) are arranged on the processing table (1), the output end of the first driving mechanism (8) is connected to the first sliding mechanism (7), a support plate (9) is arranged on the first sliding mechanism (7), and the bottom of the support plate (9) is A second sliding mechanism (10) is provided, a second driving mechanism (11) is provided on the side of the support plate (9), an output end of the second driving mechanism (11) is transmission-connected to the second sliding mechanism (10), a connecting plate (12) is provided at the bottom of the second sliding mechanism (10), a smoking pump (13) is fixedly mounted on the connecting plate (12), two smoking pipes (14) are fixedly connected to the bottom plate of the smoking pump (13), a telescopic mechanism (15) is provided at the bottom of the connecting plate (12), the output end of the telescopic mechanism (15) is transmission-connected to a rotating mechanism (16), and the output end of the rotating mechanism (16) is transmission-connected to a cutting knife (17).

2. The integrated circuit device etching device according to claim 1, characterized in that: The first sliding mechanism (7) comprises a first sliding rail (701) and a first sliding block (702); the first sliding rail (701) is fixedly connected to the processing table (1); and the first sliding block (702) is slidably connected to the first sliding rail (701).

3. The integrated circuit device removal device according to claim 2, characterized in that: The first driving mechanism (8) comprises a first servo motor (801) and a first threaded rod (802); the first servo motor (801) is fixedly mounted on the processing table (1); the first threaded rod (802) is transmission-connected to the output end of the first servo motor (801) via a coupling; and the threaded rod is threadedly connected to the first slider (702).

4. The integrated circuit device removal device according to claim 1, characterized in that: The second sliding mechanism (10) comprises a second sliding rail (101) and a second sliding block (102); the second sliding rail (101) is fixedly connected to the bottom of the supporting plate (9); the second sliding block (102) is slidably connected to the bottom of the second sliding rail (101); and the second sliding block (102) is fixedly connected to the connecting plate (12).

5. The integrated circuit device removal device according to claim 4, characterized in that: The second driving mechanism (11) comprises a second servo motor (111) and a second threaded rod (112); the second servo motor (111) is fixedly mounted on a side surface of the support plate (9); the second threaded rod (112) is transmission-connected to an output end of the second servo motor (111) via a coupling; and the second threaded rod (112) is threadedly connected to the second slider (102).

6. The integrated circuit device removal device according to claim 1, characterized in that: The telescopic mechanism (15) comprises a second servo electric cylinder (151) and a second connecting rod (152); the second servo electric cylinder (151) is fixedly mounted on the bottom of the connecting plate (12); the second connecting rod (152) is transmission-connected to the output end of the second servo electric cylinder (151) via a coupling; and the second connecting rod (152) is fixedly connected to the rotating mechanism (16).

7. The integrated circuit device removal device according to claim 6, characterized in that: The rotating mechanism (16) comprises a third servo motor (161) and a rotating rod (162); the third servo motor (161) is fixedly mounted on the bottom of the second connecting rod (152); the rotating rod (162) is transmission-connected to the output end of the third servo motor (161) via a coupling; and the rotating rod (162) is fixedly connected to the engraving knife (17).

8. The integrated circuit device removal device according to claim 1, characterized in that: The sides of the two clamping plates (6) are both bonded with rubber pads (18).

Images