Machining clamp for gas distribution disc

Abstract

The utility model provides a processing clamp for a gas distribution plate, which comprises a plate body, one side of the plate body is used for clamping a lathe, and the other side of the plate body is used for fixing a product; a first groove and a second groove are sequentially and concentrically formed in the surface of the side, facing a product, of the tray body in the direction from the center to the periphery, and the depth of the first groove is the same as that of the second groove. A first groove row and a second groove row are further formed in the surface of the side, facing a product, of the tray body, the first groove row and the second groove row are arranged in a cross shape, and the intersection point of the cross shape coincides with the center of the tray body. By means of the specific structural design of the machining clamp, the machining clamp can be matched with a special gas distribution disc structure in an embedded mode, the parallelism and planeness of the surfaces of the two sides of the gas distribution disc are kept consistent, the structure is simple, machining efficiency is improved, and the machining clamp is suitable for being used and popularized.

Description

Technical Field

[0001] The utility model belongs to the technical field of gas distribution plate processing, and relates to a processing fixture for a gas distribution plate. Background Art

[0002] Chemical vapor deposition technology is often used in semiconductor manufacturing. One or more gaseous compounds or single substances containing thin film elements react chemically on the substrate surface to form a thin film. This process is a type of chemical vapor deposition (CVD). Its principle is to use various energy sources such as heating, plasma excitation or light radiation to make gaseous or vaporous chemicals in the reactor react chemically in the gas phase or on the gas-solid interface to form solid deposits.

[0003] During the CVD coating process, the wafer is under the gas distribution plate. During the CVD chemical vapor deposition process, the gas distribution plate must ensure good sealing to ensure the stability of the deposition process. If the sealing is not good, it will cause the surface to tilt and the coating to be uneven, affecting the use of the chip. The direct factor affecting the sealing of the gas distribution plate is the processing accuracy of the gas distribution plate surface and the side groove.

[0004] The prior art solution discloses a fixture for processing semiconductor gas distribution plates, which includes a fixture body, one side of the fixture body is recessed to form a first groove, a first boss is formed circumferentially on the outer side of the first groove, a raised portion of the gas distribution plate is inserted into the first groove, an ear plate of the gas distribution plate is overlapped on the first boss, a limiting groove is formed on the first boss, a limiting portion formed on the lower side of the ear plate is inserted into the limiting groove, and the fixture body is installed on a processing table.

[0005] The prior art solution also discloses a gas distribution plate drilling processing template, which includes a first drilling template, a first through hole is provided in the first drilling template, a first annular step is provided in the first through hole, and the gas distribution plate is fixed on the annular step surface of the first annular step; a second drilling template connected to the first annular step is provided on one side surface of the first drilling template, a second through hole is provided in the second drilling template, and a second annular step is provided in the second through hole.

[0006] However, under the existing technology, when the tool is processing the gas distribution disk, the circular gas distribution disk is not fixed stably. The gas distribution disk is light in weight and is prone to shaking after the tool head contacts it. The gas distribution disk is prone to shaking during processing, which eventually leads to frequent processing errors in the tank body. Therefore, it is urgent to design a processing fixture for the gas distribution disk to overcome the defects of the existing technology and meet the actual application needs. Utility Model Content

[0007] In view of the deficiencies in the prior art, the purpose of the utility model is to provide a processing fixture for a gas distribution plate, and in particular, to a processing fixture for a special SHD gas distribution plate. In the utility model, through the specific structural design of the processing fixture, it can be embedded with the special gas distribution plate structure, so that the parallelism and flatness of the surfaces on both sides of the gas distribution plate are kept consistent, the structure is simple, the processing efficiency is improved, and it is suitable for popularization and use.

[0008] To achieve this purpose, the utility model adopts the following technical solutions:

[0009] The utility model provides a processing fixture for a gas distribution plate, the processing fixture comprising a plate body, one side of the plate body is used for clamping a lathe, and the other side of the plate body is used for fixing the product; a first groove and a second groove are concentrically arranged in sequence along the center to the surrounding direction on the surface of the plate body on one side facing the product, and the depth of the first groove is the same as the depth of the second groove; a first groove row and a second groove row are also arranged on the surface of the plate body on the side facing the product, the first groove row and the second groove row are arranged in a cross shape, and the intersection of the cross coincides with the center of the plate body.

[0010] In the utility model, through the specific structural design of the processing fixture, it can be embedded with the special gas distribution plate structure, so that the parallelism and flatness of the surfaces on both sides of the gas distribution plate are consistent. The structure is simple, the processing efficiency is improved, and it is suitable for promotion and use.

[0011] It should be noted that the present invention does not specifically limit the specific material of the plate, and those skilled in the art can make adaptive adjustments according to actual conditions. Among them, the material of the plate can be stainless steel.

[0012] It should be noted that the depths of the first groove and the second groove in the utility model are the same, which can ensure that the center of the clamp remains consistent and there will be no phenomenon of one end being heavier than the other. When using a pressure plate to fix the product at the edge, threaded holes with the same distance can be used to apply pressure to the product so that it is evenly stressed and not easily deformed.

[0013] It should be noted that the first groove row and the second groove row in the utility model are arranged in a cross shape, which can ensure the stability of the product, wherein the first groove row refers to a groove row formed by a number of small threaded holes and a number of large threaded holes arranged in a straight line, and the large threaded hole row and the small threaded hole row are parallel, and the second groove row refers to a groove row formed by a number of small threaded holes and a number of large threaded holes arranged in a straight line, and the large threaded hole row and the small threaded hole row are parallel, wherein the shape, size and number of the small threaded holes and the large threaded holes can be adaptively adjusted according to actual conditions, and the large threaded holes are used to cooperate with the pressure plate to press the product, and the small threaded holes are used for side tops.

[0014] It should be noted that the specific structure of the connection between the plate body and the lathe in the present invention is not particularly limited, and those skilled in the art can make adaptive adjustments according to actual conditions. For example, the plate body may be provided with a card slot on the edges thereof, which is connected to the buckle of the lathe.

[0015] It should be noted that after placing the product on the surface of the tray in the utility model, the product can be fixed on one side of the tray by providing buckles on the edges thereof to start processing.

[0016] As a preferred technical solution of the utility model, through holes are evenly distributed on the disc body between the first groove and the second groove, and the through holes are used for detachable connection to the lathe.

[0017] It should be noted that the design of the through hole in the utility model facilitates the fixing pin to pass through and connect the disc body to the lathe, thereby maintaining the stability of the processing.

[0018] As a preferred technical solution of the utility model, there are at least three through holes, for example, 3, 4, 5, 6, 7, 8, etc., but it is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0019] As a preferred technical solution of the utility model, the diameter of the disk is 340-350 mm, for example, it can be 340 mm, 341 mm, 342 mm, 343 mm, 344 mm, 345 mm, 346 mm, 347 mm, 348 mm, 349 mm, 350 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0020] As a preferred technical solution of the present invention, the thickness of the disk is 30-31 mm, for example, it can be 30 mm, 30.1 mm, 30.2 mm, 30.3 mm, 30.4 mm, 30.5 mm, 30.6 mm, 30.7 mm, 30.8 mm, 30.9 mm, 31 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0021] The diameter of the disk body in the utility model is 340-350mm and the thickness is 30-31mm, because within this range, the gas distribution disk thin plate can be supported. Its specific diameter is 340mm and the thickness is 30mm. It fits tightly with the gas distribution disk of the semiconductor machine component to ensure the flatness and parallelism of the gas distribution disk processing. If it is not within this range, the gas distribution disk and the processing fixture will not match, the processing efficiency will be low, and the yield rate will be low.

[0022] As a preferred technical solution of the present invention, the depth of the first groove is 4 to 5 mm, for example, it can be 4mm, 4.1mm, 4.2mm, 4.3mm, 4.4mm, 4.5mm, 4.6mm, 4.7mm, 4.8mm, 4.9mm, 5mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0023] The depth of the first groove in the present invention is 4 to 5 mm because within this range the clamp and the product fit better and the product is fixed more stably. If it is not within this range, the product will be deformed.

[0024] As a preferred technical solution of the present invention, the diameter of the first groove is 30-35 mm, for example, it can be 30 mm, 30.5 mm, 31 mm, 31.5 mm, 32 mm, 32.5 mm, 33 mm, 33.5 mm, 34 mm, 35.5 mm, 35 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0025] The diameter of the first groove in the present invention is 30 to 35 mm because within this range the fixture and the product fit better and the product has better parallelism. If it is not within this range, the product cannot be placed in the fixture for clamping and subsequent processing cannot be performed.

[0026] As a preferred technical solution of the present invention, the diameter of the second groove is 200-280 mm, for example, it can be 200 mm, 210 mm, 220 mm, 230 mm, 240 mm, 250 mm, 260 mm, 270 mm, 280 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0027] The diameter of the second groove in the present invention is 200-280 mm because within this range the fixture and the product fit better and the product has better parallelism. If it is not within this range, the product cannot be placed in the fixture for clamping and subsequent processing cannot be performed.

[0028] As a preferred technical solution of the utility model, the flatness of the disk is less than 0.07 mm, for example, it can be 0.06 mm, 0.05 mm, 0.04 mm, 0.03 mm, 0.02 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0029] As a preferred technical solution of the utility model, the parallelism of the disk is less than 0.1mm, for example, it can be 0.09mm, 0.08mm, 0.07mm, 0.06mm, 0.05mm, 0.04mm, 0.03mm, 0.02mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0030] The flatness of the disc body in the utility model is less than 0.07mm and the parallelism is less than 0.1mm. This is because within this range, the fixture and the product fit better, the flatness and parallelism of the product are better, and it meets the processing requirements. If it is not within this range, the punching equipment of the product will alarm and the processing cannot continue. The processing process will cause the orifices of the product to be inconsistent, resulting in the flow rate exceeding the tolerance when the gas passes through, making the product coating thickness uneven and unusable, and unable to meet the processing requirements.

[0031] Exemplarily, the processing method of the processing fixture using the gas distribution plate in the utility model includes:

[0032] Fix the product on one side of the plate, and then place it on the lathe. Use the pressing plate to compact the four corners of the product equally. Use 3380 emulsifier 1:12 as auxiliary fluid for cutting. Use program code G96 constant speed cutting to set the spindle speed G50 to S300 / min, and use program code G98 to set the turning speed to 30mm / min per minute; leave a finishing allowance of 0.05mm, and use a diamond straight groove cutter to process the groove surface at one time during finishing. The processing parameters are to set the lathe spindle speed G50 to S400 / min and the cutting speed to 5mm / min. After processing, wipe the product surface with alcohol to check whether the surface is smooth, without burrs or knife marks.

[0033] Compared with the prior art, the beneficial effects of the utility model are:

[0034] In the utility model, through the specific structural design of the processing fixture, it can be embedded with the special gas distribution plate structure, so that the parallelism and flatness of the surfaces on both sides of the gas distribution plate are consistent. The structure is simple, the processing efficiency is improved, and it is suitable for promotion and use. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 A schematic diagram of the structure of a processing fixture for a gas distribution plate provided in a specific embodiment of the utility model;

[0036] Among them, 1-disc body; 2-first groove; 3-second groove; 4-first groove row; 5-second groove row. DETAILED DESCRIPTION

[0037] It should be understood that, in the description of the present utility model, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, which is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0038] It should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "disposed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0039] The technical solution of the utility model is further explained below with reference to the accompanying drawings and through specific implementation methods.

[0040] In a specific embodiment, the utility model provides a processing fixture for a gas distribution plate, such as Figure 1 As shown, the processing fixture includes a disk body 1, one side of the disk body 1 is used to clamp the lathe, and the other side of the disk body 1 is used to fix the product; a first groove 2 and a second groove 3 are concentrically arranged in sequence from the center to the surrounding direction on the surface of the disk body 1 on the side facing the product, and the depth of the first groove 2 and the depth of the second groove 3 are the same; a first groove row 4 and a second groove row 5 are also arranged on the surface of the disk body 1 on the side facing the product, and the first groove row 4 and the second groove row 5 are arranged in a cross shape, and the intersection of the cross coincides with the center of the disk body 1.

[0041] It should be noted that the present invention does not specifically limit the specific material of the tray body 1, and those skilled in the art can make adaptive adjustments according to actual conditions. Among them, the material of the tray body 1 can be stainless steel.

[0042] It should be noted that the first groove row 4 refers to a groove row formed by a number of small grooves arranged in a straight line, and the second groove row 5 refers to a groove row formed by a number of small grooves arranged in a straight line, wherein the shape, size and number of the small grooves can be adaptively adjusted according to actual conditions.

[0043] It should be noted that the specific structure of the connection between the plate body 1 and the lathe in the present invention is not particularly limited, and those skilled in the art can make adaptive adjustments according to actual conditions. For example, the plate body 1 may be provided with a card slot on the edges thereof, which is connected to the buckle of the lathe.

[0044] It should be noted that, after placing the product on the surface of the tray body 1 in the utility model, the product can be fixed on one side of the tray body 1 by providing buckles on the edges around the product to start processing.

[0045] Furthermore, through holes are evenly distributed on the disc body 1 between the first groove 2 and the second groove 3, and the through holes are used for detachable connection to a lathe.

[0046] It should be noted that the design of the through hole in the utility model facilitates the fixing pin to pass through and connect the disc body 1 to the lathe, thereby maintaining the stability of the processing.

[0047] Furthermore, there are at least three through holes, for example, 3, 4, 5, 6, 7, 8, etc., but the number is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0048] Furthermore, the diameter of the disk body 1 is 340-350 mm, for example, it can be 340 mm, 341 mm, 342 mm, 343 mm, 344 mm, 345 mm, 346 mm, 347 mm, 348 mm, 349 mm, 350 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0049] Furthermore, the thickness of the disk body 1 is 30-31 mm, for example, it can be 30 mm, 30.1 mm, 30.2 mm, 30.3 mm, 30.4 mm, 30.5 mm, 30.6 mm, 30.7 mm, 30.8 mm, 30.9 mm, 31 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0050] The diameter of the disk body 1 in the utility model is 340-350mm and the thickness is 30-31mm, because within this range, the gas distribution disk thin plate can be supported. Its specific diameter is 340mm and the thickness is 30mm. It fits tightly with the gas distribution disk of the semiconductor machine component to ensure the flatness and parallelism of the gas distribution disk processing. If it is not within this range, the gas distribution disk and the processing fixture will not match, the processing efficiency will be low, and the yield rate will be low.

[0051] Furthermore, the depth of the first groove 2 is 4 to 5 mm, for example, it can be 4 mm, 4.1 mm, 4.2 mm, 4.3 mm, 4.4 mm, 4.5 mm, 4.6 mm, 4.7 mm, 4.8 mm, 4.9 mm, 5 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0052] Furthermore, the diameter of the first groove 2 is 30-35 mm, for example, it can be 30 mm, 30.5 mm, 31 mm, 31.5 mm, 32 mm, 32.5 mm, 33 mm, 33.5 mm, 34 mm, 35.5 mm, 35 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0053] Furthermore, the diameter of the second groove 3 is 200-280 mm, for example, it can be 200 mm, 210 mm, 220 mm, 230 mm, 240 mm, 250 mm, 260 mm, 270 mm, 280 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0054] Furthermore, the flatness of the disc body 1 is less than 0.07 mm, for example, it can be 0.06 mm, 0.05 mm, 0.04 mm, 0.03 mm, 0.02 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0055] Furthermore, the parallelism of the disk body 1 is less than 0.1 mm, for example, it can be 0.09 mm, 0.08 mm, 0.07 mm, 0.06 mm, 0.05 mm, 0.04 mm, 0.03 mm, 0.02 mm, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0056] Example 1

[0057] This embodiment provides a processing fixture for a gas distribution plate, wherein:

[0058] The processing fixture includes a disk body 1, one side of the disk body 1 is used to clamp the lathe, and the other side of the disk body 1 is used to fix the product; a first groove 2 and a second groove 3 are concentrically arranged in sequence from the center to the surrounding direction on the surface of the disk body 1 on the side facing the product, and the depth of the first groove 2 and the depth of the second groove 3 are the same; a first groove row 4 and a second groove row 5 are also arranged on the surface of the disk body 1 on the side facing the product, and the first groove row 4 and the second groove row 5 are arranged in a cross shape, and the intersection of the cross coincides with the center of the disk body 1.

[0059] Six through holes are evenly distributed on the disc body 1 between the first groove 2 and the second groove 3, and the through holes are used for detachable connection to a lathe.

[0060] The diameter of the disk body 1 is 343 mm, and the thickness of the disk body 1 is 31 mm; the flatness of the disk body 1 is 0.06 mm, and the parallelism of the disk body 1 is 0.09 mm.

[0061] The depth of the first groove 2 is 4 mm, the diameter of the first groove 2 is 34 mm, and the diameter of the second groove 3 is 260 mm.

[0062] In summary, the utility model can be embedded with a special gas distribution plate structure through the specific structural design of the processing fixture, so that the parallelism and flatness of the surfaces on both sides of the gas distribution plate are consistent. It has a simple structure, improves processing efficiency, and is suitable for promotion and use.

[0063] The above description is only a specific implementation method of the present utility model, but the protection scope of the present utility model is not limited thereto. Technicians in the relevant technical field should understand that any changes or substitutions that can be easily thought of by technicians in the relevant technical field within the technical scope disclosed in the present utility model fall within the protection scope and disclosure scope of the present utility model.

Claims

1. A gas distribution plate processing fixture, characterized in that: The processing fixture comprises a plate body, one side of which is used for clamping the lathe, and the other side of which is used for fixing the product; A first groove and a second groove are concentrically arranged in sequence along the center to the surrounding direction on one side surface of the plate body facing the product, and the depth of the first groove is the same as the depth of the second groove; A first groove row and a second groove row are also provided on a surface of the disk body facing the product. The first groove row and the second groove row are arranged in a cross shape, and the intersection of the cross coincides with the center of the disk body.

2. The processing fixture of the gas distribution plate according to claim 1, characterized in that: The disc body between the first groove and the second groove is evenly distributed with through holes, and the through holes are used for detachable connection with a lathe.

3. The processing fixture of the gas distribution plate according to claim 2, characterized in that: At least three through holes are provided.

4. The processing fixture for the gas distribution plate according to claim 1, characterized in that: The diameter of the disc is 340-350 mm.

5. The processing fixture of the gas distribution plate according to claim 1, characterized in that: The thickness of the disc body is 30-31 mm.

6. The processing fixture for the gas distribution plate according to claim 1, characterized in that: The depth of the first groove is 4-5 mm.

7. The processing fixture for the gas distribution plate according to claim 1, characterized in that: The diameter of the first groove is 30-35 mm.

8. The processing fixture for the gas distribution plate according to claim 1, characterized in that: The diameter of the second groove is 200-280 mm.

9. The processing fixture for the gas distribution plate according to claim 1, characterized in that: The flatness of the disc is less than 0.07 mm.

10. The processing fixture of the gas distribution plate according to claim 1, characterized in that: The parallelism of the disk is less than 0.1 mm.

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