Horizontal conveying trough body conveying device

Abstract

The utility model provides a tank body transportation device for horizontal transportation, which relates to the technical field of semiconductor equipment and comprises a roller transportation mechanism, a horizontal transportation mechanism and a horizontal transportation mechanism, the stop mechanism is arranged at the vertex position of the roller conveying mechanism; the side pushing mechanism is arranged on one side of the roller conveying mechanism; the correlation sensors are electrically connected with the side pushing mechanism, arranged on the two sides of the vertex position of the roller conveying mechanism and located between the stop mechanism and the zero point position of the roller conveying mechanism; when the groove body is conveyed to the vertex position of the roller conveying mechanism and abuts against the stop mechanism, light of the correlation sensor is blocked, the side pushing mechanism pushes the groove body in the conveying direction perpendicular to the groove body till the groove body abuts against the other side of the roller conveying mechanism, and the groove body is positioned. The device has the beneficial effects that the groove body can be kept not inclined on the roller conveying mechanism, the subsequent wafer taking and placing actions of the wafer conveying mechanism are facilitated, and the possibility of wafer damage is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a trough transport device for horizontal transport. Background Art

[0002] In semiconductor equipment, the function of the water tank transmission mechanism is to move the water tank to the specified position through a combination of a motor and a cylinder, and then take the wafer out of the water tank and put it into the Process Tank through the wafer transmission mechanism, thereby ensuring that the wafer processing process can run completely.

[0003] The water tank transfer mechanism can place a water tank with wafers through manual or automated equipment to provide wafers to the wafer transfer mechanism; it can also place an empty water tank through manual or automated equipment to place processed wafers and transfer the wafers to subsequent process equipment.

[0004] At present, the transmission mechanism of the water tank transmission mainly uses photoelectric sensors to determine whether the water tank is in place. It can determine whether the water tank is on the transmission mechanism mainly by whether the water tank body blocks the light path of the through-beam sensor. A set of transmitting and receiving ends of the through-beam sensor are placed at the diagonal end of the water tank placement position; the light emitted by the transmitting end can be obtained by the receiving end to trigger the signal. When there is no water tank, the light emitted by the transmitting end of the through-beam sensor can be received by the receiving end of the through-beam sensor, so it can be determined that there is no water tank. When there is a water tank, the light emitted by the transmitting end of the through-beam sensor cannot be received by the receiving end of the through-beam sensor, so it can be determined that there is a water tank.

[0005] At present, the water tank transmission mechanism mainly uses a regressive reflective photoelectric sensor to determine whether the water tank is in place. If the water tank is placed at an angle, although the through-beam sensor can also determine that the water tank is in place, it cannot ensure that the water tank is placed horizontally and stably. When the water tank is placed horizontally and tilted, it may affect the action of the wafer transmission mechanism to take and place the wafer, resulting in damage to the wafer. Utility Model Content

[0006] In view of the problems existing in the prior art, the utility model provides a horizontal transport tank transport device, comprising:

[0007] A roller transport mechanism, wherein the roller transport mechanism transports the trough body placed on the top from the zero point position to the top point position;

[0008] A stop mechanism, arranged at the top point of the roller transport mechanism;

[0009] A side push mechanism, arranged on one side of the roller transport mechanism;

[0010] A beam sensor, electrically connected to the side thrust mechanism, disposed on both sides of the top point of the roller conveying mechanism, and located between the stop mechanism and the zero point of the roller conveying mechanism;

[0011] When the trough body is transported to the top position of the roller transport mechanism and abuts against the stop mechanism, it blocks the light of the incident sensor, and the side push mechanism pushes the trough body along a transport direction perpendicular to the trough body until it abuts against the other side of the roller transport mechanism to position the trough body.

[0012] Preferably, the roller transport mechanism comprises:

[0013] A transport platform, with a plurality of rollers disposed on both sides of the transport platform;

[0014] A transport motor drives each of the rollers to rotate so as to transport the trough body placed on the transport platform to the top position of the transport platform along the transport direction;

[0015] A plurality of guide wheels are arranged on both sides of the transport platform along the transport direction and are located directly above each of the rollers. The side pushing mechanism pushes the trough body perpendicular to the transport direction until it abuts against the guide wheel on the other side.

[0016] Preferably, the stopping mechanism comprises:

[0017] A cylinder, a cylinder rod of which is connected to one end of a lever, and the trough body is transported to the top position of the roller transport mechanism and abuts against the other end of the lever;

[0018] A cylinder fixing member, through which the cylinder is fixed at the zero point of the roller transport mechanism.

[0019] Preferably, the stop mechanism includes a pin shaft and a fixed plate, the pin shaft is fixed to the top of the cylinder, and the fixed plate rotates around the pin shaft to form the lever.

[0020] Preferably, the other end of the lever is provided with a pulley.

[0021] Preferably, the side thrust mechanism comprises:

[0022] A rodless cylinder, wherein the rodless cylinder is fixed to one side of the roller transport mechanism through a cylinder support;

[0023] A push plate is connected to the rodless cylinder, and the rodless cylinder pushes the push plate out in a direction perpendicular to the transport direction.

[0024] Preferably, the width of the trough body is greater than the width of the transport platform.

[0025] Preferably, the light emitted by the through-beam sensor is tangent to the stopping mechanism.

[0026] The above technical solution has the following advantages or beneficial effects: adding a stopping mechanism and a side pushing mechanism, and when the shooting sensor detects that the transported trough body has reached the position of the stopping mechanism, controlling the side pushing mechanism to push the trough body along a transport direction perpendicular to the trough body to abut against one side of the roller transport mechanism, ensuring that the trough body can remain without tilting on the roller transport mechanism, which is beneficial to the subsequent wafer conveying mechanism to take and place the wafer and reduce the possibility of wafer damage. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a structural schematic diagram of a horizontally transported tank transport device in a preferred embodiment of the utility model;

[0028] Figure 2 This is a top view of a horizontally transported tank transport device in a preferred embodiment of the utility model;

[0029] Figure 3 This is a structural schematic diagram of a stop mechanism in a preferred embodiment of the utility model;

[0030] Figure 4 A side view of the stop mechanism in a preferred embodiment of the present utility model;

[0031] Figure 5 This is a structural schematic diagram of a side thrust mechanism in a preferred embodiment of the utility model. DETAILED DESCRIPTION

[0032] The present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. The present invention is not limited to the implementation mode, and other implementation modes may also fall within the scope of the present invention as long as they meet the purpose of the present invention.

[0033] In a preferred embodiment of the present utility model, based on the above problems existing in the prior art, a horizontal tank transport device is provided. Figure 1 As shown, including:

[0034] The roller transport mechanism 1 transports the trough body 2 placed on the top from the zero point to the top point;

[0035] The stopping mechanism 3 is arranged at the top position of the roller transport mechanism 1;

[0036] A side push mechanism 4 is arranged on one side of the roller transport mechanism 1;

[0037] The beam sensor 5 is electrically connected to the side thrust mechanism 4, and is disposed on both sides of the top position of the roller conveyor mechanism 1, and is located between the stop mechanism 3 and the zero point position of the roller conveyor mechanism 1 in the horizontal direction;

[0038] When the trough body 2 is transported to the top position of the roller transport mechanism 1 and abuts against the stop mechanism 3, it blocks the light of the opposing sensor 5. The side push mechanism 4 pushes the trough body 2 along the transport direction perpendicular to the trough body until it abuts against the other side of the roller transport mechanism 1, so that the trough body 2 is positioned.

[0039] Specifically, since the existing water tank transmission mechanism can only determine whether the tank body is transported to the corresponding position, and cannot ensure that the tank body 2 does not tilt, in this embodiment, a stop mechanism 3 and a side push mechanism 4 are added. When the beam sensor 5 detects that the transported tank body 2 has reached the position of the stop mechanism 3 and is stopped by the stop mechanism 3, the side push mechanism 4 pushes the tank body 2 along the transportation direction perpendicular to the tank body to abut against one side of the roller transport mechanism 1, ensuring that the tank body 2 can remain non-tilted in the roller transport mechanism 1, which is beneficial to the subsequent wafer conveying mechanism to take and place the wafer and reduce the possibility of wafer damage. In the attached figure, the zero point is marked as X and the vertex is marked as Y.

[0040] In a preferred embodiment of the present invention, Figure 2 As shown, the roller transport mechanism 1 comprises:

[0041] A transport platform 11, with a plurality of rollers 12 disposed on both sides of the transport platform 11;

[0042] The transport motor drives each roller 12 to rotate so as to transport the tank body 2 placed on the transport platform to the top position of the transport platform 11 along the transport direction;

[0043] A plurality of guide wheels 13 are arranged on both sides of the transport platform 11 along the transport direction and are located above each roller 12 . The side push mechanism 4 pushes the trough body 2 perpendicular to the transport direction until it abuts against the guide wheel 13 on the other side.

[0044] Specifically, in this embodiment, the direction of the axis of the roller 12 and Figure 2 The pushing direction is consistent, the guide wheel 13 is directly above the roller 12, and the axis of the guide wheel 13 is in the vertical direction, and the axis of the guide wheel 13 and the axis of the roller 12 are perpendicular to each other. The roller 12 is used to transport the tank body 2, and the guide wheel 13 is used to assist the tank body 2 in transportation.

[0045] In a preferred embodiment of the present invention, Figure 3 and Figure 4 As shown, the stop mechanism 3 includes:

[0046] The cylinder 31, the cylinder rod 311 of the cylinder 31 is connected to one end of the lever 312, the trough body 2 is transported to the top position of the roller transport mechanism 1 and abuts against the other end of the lever 312;

[0047] The cylinder fixing part 32 , through which the cylinder 31 is fixed to one end of the roller transport mechanism 1 .

[0048] In a preferred embodiment of the present invention, a pulley 314 is disposed at the other end of the lever 312 .

[0049] In a preferred embodiment of the present invention, Figure 4 As shown, the stop mechanism 3 further includes a pin shaft 313 and a fixing plate 315 . The pin shaft 313 is fixed to the top of the cylinder 31 , and the fixing plate 315 rotates around the pin shaft 313 to form a lever 312 .

[0050] Specifically, in this embodiment, the cylinder rod 311 of the cylinder 31 can rise or fall in the vertical direction, and since the fixing plate 315 can rotate around the pin 313, the distance between the other end of the lever 312 and the zero point of the roller transport mechanism 1 can be adjusted by the cylinder 31;

[0051] When the cylinder rod 311 rises, one end of the lever 312 is lifted, and the other end of the lever 312 drops and moves in the opposite direction of transportation;

[0052] When the cylinder rod 311 descends, one end of the lever 312 is lowered, and the other end of the lever 312 rises and moves in the transport direction;

[0053] The stop position of the trough body 2 on the roller transport mechanism can be adjusted by adjusting the cylinder rod 311, and a certain buffering effect can be achieved through this structure. The pulley 314 at the other end of the lever 312 can slide on the surface of the trough body 2 when the trough body 2 abuts, avoiding direct contact of the lever 312 with the surface of the trough body 2 when the pulley 314 is not set, resulting in scratches, grooves or even cracks on the surface of the trough body 2.

[0054] In a preferred embodiment of the present invention, the light emitted by the through-beam sensor 5 is tangent to the stop mechanism 3 .

[0055] Specifically, in this embodiment, the side push mechanism 4 starts to push the trough body 2 when the trough body 2 reaches the stop position (i.e., the position stopped by the stop mechanism 3). Whether the stop position is reached needs to be judged by the through-beam sensor 5, so it is required that the light of the through-beam sensor 5 is tangent to the stop mechanism 3. Specifically, the light and the surface of the pulley 314 in the stop mechanism 3 are in contact with each other. Figure 2The groove body 2 is tangent to the pushing direction, and the light is just blocked when the groove body 2 reaches the stop position. Specifically, the corresponding sensor 5 and the pulley 314 at one end of the lever 312 are required to be tangent, so the position of the pulley 314 can also be adjusted by the lever 312 in the aforementioned embodiment to ensure that it is tangent to the light.

[0056] In a preferred embodiment of the present invention, Figure 5 As shown, the side thrust mechanism 4 includes:

[0057] A rodless cylinder 41, the rodless cylinder 41 is fixed to one side of the roller transport mechanism 1 through a cylinder support 42;

[0058] The push plate 43 is connected to the rodless cylinder 41, and the rodless cylinder 41 pushes the push plate out in a direction perpendicular to the transport direction.

[0059] Specifically, Figure 2 As shown in the figure, when the trough body 2 is transported to abut against the stop mechanism 3, it just blocks the light between the opposing sensors 5. At this time, the opposing sensors 5 send a signal to the side pushing mechanism 4, and the side pushing mechanism pushes the inclined trough body 2 (the dotted frame in the figure is the inclined trough body 2) along the transportation direction perpendicular to the trough body until it abuts against the guide wheel 13 on one side of the roller transport mechanism 1, so that the trough body 2 is straightened and positioned (the frame in the figure is the straightened trough body 2), which is beneficial to the subsequent wafer conveying mechanism to take and place the wafer and reduce the possibility of wafer damage.

[0060] In a preferred embodiment of the present invention, the width of the trough body 2 is greater than the width of the transport platform 11 .

[0061] Specifically, in this embodiment, the width of the trough body 2 must be greater than the width of the transport platform 11 to prevent the trough body 2 from being too narrow and not in contact with the roller 12 , causing the trough body 2 to stop on the transport platform 11 .

[0062] The above are only preferred embodiments of the present invention, and are not intended to limit the implementation methods and protection scope of the present invention. Those skilled in the art should be aware that all solutions obtained by equivalent substitutions and obvious changes made using the contents of this specification and illustrations should be included in the protection scope of the present invention.

Claims

1. A horizontal transport tank transport device, characterized in that: include: A roller transport mechanism, wherein the roller transport mechanism transports the trough body placed on the top from the zero point position to the top point position; A stop mechanism, arranged at the top point of the roller transport mechanism; A side push mechanism, arranged on one side of the roller transport mechanism; A beam sensor, electrically connected to the side thrust mechanism, disposed on both sides of the top point of the roller conveying mechanism, and located between the stop mechanism and the zero point of the roller conveying mechanism; When the trough body is transported to the top position of the roller transport mechanism and abuts against the stop mechanism, it blocks the light of the incident sensor, and the side push mechanism pushes the trough body along a transport direction perpendicular to the trough body until it abuts against the other side of the roller transport mechanism to position the trough body.

2. The tank transport device according to claim 1, characterized in that: The roller transport mechanism comprises: A transport platform, with a plurality of rollers disposed on both sides of the transport platform; A transport motor drives each of the rollers to rotate so as to transport the trough body placed on the transport platform to the top position of the transport platform along the transport direction; A plurality of guide wheels are arranged on both sides of the transport platform along the transport direction and are located directly above each of the rollers. The side pushing mechanism pushes the trough body perpendicular to the transport direction until it abuts against the guide wheel on the other side.

3. The tank transport device according to claim 1, characterized in that: The stop mechanism comprises: A cylinder, a cylinder rod of which is connected to one end of a lever, and the trough body is transported to the top position of the roller transport mechanism and abuts against the other end of the lever; A cylinder fixing member, through which the cylinder is fixed at the zero point of the roller transport mechanism.

4. The tank transport device according to claim 3, characterized in that: The stopping mechanism comprises a pin shaft and a fixing plate, wherein the pin shaft is fixed to the top of the cylinder, and the fixing plate rotates around the pin shaft to form the lever.

5. The tank transport device according to claim 3, characterized in that: The other end of the lever is provided with a pulley.

6. The tank transport device according to claim 1, characterized in that: The side thrust mechanism comprises: A rodless cylinder, wherein the rodless cylinder is fixed to one side of the roller transport mechanism through a cylinder support; A push plate is connected to the rodless cylinder, and the rodless cylinder pushes the push plate out in a direction perpendicular to the transport direction.

7. The tank transport device according to claim 2, characterized in that: The width of the trough body is greater than the width of the transport platform.

8. The tank transport device according to claim 1, characterized in that: The light emitted by the through-beam sensor is tangent to the stopping mechanism.

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