Water supply purging system and magnetron sputtering equipment

Abstract

The utility model discloses a water supply purging system and magnetron sputtering equipment. The water supply purging system comprises a liquid supply assembly, a gas supply assembly and a liquid path assembly. The liquid path assembly can communicate with the liquid supply assembly and the gas supply assembly so as to meet the supply liquid cooling requirement and the cooling liquid blowing requirement of magnetron sputtering. In the liquid supply state, one side of the first connector communicates with the liquid inlet, the other side of the first connector communicates with the liquid supply assembly, one side of the second connector communicates with the liquid outlet, and the other side of the second connector communicates with the liquid supply assembly. And in the scavenging state, one side of the first connector communicates with the liquid inlet, the other side of the first connector communicates with the gas supply assembly, one side of the second connector communicates with the liquid outlet, and the other side of the second connector communicates with the liquid outlet, so that the cooling liquid can be discharged out of the cooling channel. When the cooling channel needs to be purged, purging and liquid discharging of the cooling channel can be achieved only by adjusting the liquid path assembly, disassembly of the magnetron sputtering equipment is avoided, and convenience of cooling liquid purging is greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of magnetron sputtering vacuum coating, in particular to a water supply and purge system and magnetron sputtering equipment. Background Art

[0002] Magnetron sputtering equipment generally has a cooling channel, and the coolant is arranged in the cooling channel to cool the target back plate, power supply, pump group, substrate table and other components. Before maintenance, replacement and disassembly of these components, the coolant in the cooling channel needs to be cleaned out. Taking the target assembly as an example, the target assembly generally includes a target substrate and a target back plate. The target back plate is provided with a cooling channel on the side away from the target material. The coolant circulates in the cooling process during magnetron sputtering so that the coolant can cool the target substrate. In magnetron sputtering, the target material is a consumable, and the target back plate can be reused. When replacing the target material connected to the target back plate, the coolant in the cooling channel needs to be completely cleaned out first. In the prior art, the coolant supply is generally shut off manually, and the inlet and outlet of the cooling channel are exposed by disassembly, and then the high-pressure air is manually connected to the cooling channel to achieve the cooling liquid purge. The purge operation of the coolant in the prior art is difficult and the convenience is poor. Utility Model Content

[0003] The main purpose of the utility model is to provide a water supply purging system and a magnetron sputtering device, which can solve the technical problems of difficult cooling liquid purging operation and poor convenience.

[0004] To achieve the above-mentioned purpose, the utility model proposes a water supply and purge system. The water supply and purge system is suitable for being connected to the cooling channel of the magnetron sputtering equipment, and the cooling channel includes a liquid inlet and a liquid outlet. The water supply and purge system includes a liquid supply component, an air supply component and a liquid circuit component. The liquid supply component is used to provide a coolant. The air supply component is used to provide a purge gas. The liquid circuit component has a first interface, a second interface and a liquid discharge port, and the liquid circuit component can switch between a liquid supply state and a purge state. In the liquid supply state, one side of the first interface is connected to the liquid inlet and the other side is connected to the liquid supply component, and one side of the second interface is connected to the liquid outlet and the other side is connected to the liquid supply component; in the purge state, one side of the first interface is connected to the liquid inlet and the other side is connected to the air supply component, and one side of the second interface is connected to the liquid outlet and the other side is connected to the liquid discharge port, so that the coolant can be discharged from the cooling channel.

[0005] In some embodiments, the liquid circuit component includes a control valve, which includes a first three-way valve and a second three-way valve. The first three-way valve has a first interface, and the first three-way valve is respectively connected to the air supply component, the liquid supply component and the liquid inlet; the second three-way valve has a second interface, and the second three-way valve is respectively connected to the liquid discharge port, the liquid supply component and the liquid outlet.

[0006] In some embodiments, the control valve is configured as a manual valve; or, the control valve is configured as a gas-driven valve; or, the control valve is configured as an electrically-driven valve.

[0007] In some embodiments, the fluid circuit assembly further includes a control unit, the control unit is configured as a programmable logic controller, the control valve is configured as an electrically controlled valve, and the control unit is used to control the start or close of the control valve; wherein the control unit is electrically connected to the control valve, or the control unit is communicatively connected to the control valve.

[0008] In some embodiments, the liquid circuit assembly further includes a filter, one side of the filter is connected to the liquid supply assembly, and the other side of the filter is connected to the first interface, and the filter is used to filter the coolant.

[0009] In some embodiments, the liquid circuit assembly further includes a sensor, one side of the sensor being able to communicate with the second interface and the other side of the sensor being connected with the liquid supply assembly, and the sensor is used to detect the temperature and flow rate of the cooling liquid.

[0010] In some embodiments, the gas supply assembly includes an air source and a pressure regulating valve, one side of the pressure regulating valve is connected to the air source and the other side can be connected to the first interface, and the pressure regulating valve is used to adjust the air pressure of the air flow out of the air source.

[0011] In some embodiments, the fluid circuit assembly further includes a check valve, one side of which is connected to the pressure regulating valve and the other side of which can be connected to the first interface, and the check valve is used to limit the flow of coolant to the pressure regulating valve.

[0012] In some embodiments, the first interface is arranged in a one-to-one correspondence with the liquid inlet, the second interface is arranged in a one-to-one correspondence with the liquid outlet, and the liquid circuit assembly includes at least two groups of first interfaces and second interfaces.

[0013] A second aspect of the present application further provides a magnetron sputtering device, which includes a water supply and purge system according to any of the above embodiments.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] In the technical solution of the present application, the water supply and purge system is provided with a liquid supply component and an air supply component, and the liquid circuit component can be connected to the liquid supply component and the air supply component respectively to meet the liquid supply cooling demand and the coolant purge demand of magnetron sputtering. The technical solution of the present application controls the connection state of the liquid circuit component through a control valve. When the cooling channel needs to be purged, the cooling channel can be purged and drained by simply adjusting the liquid circuit component, avoiding the disassembly of the magnetron sputtering equipment and greatly improving the convenience of coolant purge. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0017] Figure 1 This is a schematic diagram of the structure of the cooling channel in the target assembly in one embodiment of the utility model;

[0018] Figure 2 This is a partial structural diagram of a water supply and purge system in one embodiment of the utility model;

[0019] Figure 3 For this utility model Figure 2 A partial structural diagram of the water supply purge system in Example 1;

[0020] Figure 4 For this utility model Figure 2 A partial structural diagram of the water supply purge system in Example II;

[0021] Figure 5 For this utility model Figure 2 A partial structural diagram of the water supply purge system in Example III;

[0022] Figure 6 For this utility model Figure 2 A partial structural diagram of the water supply purge system in Example IV;

[0023] Figure 7 It is a partial structural schematic diagram of a liquid supply assembly and a liquid circuit assembly in an embodiment of the utility model, wherein the first three-way valve is a manual valve;

[0024] Figure 8 It is a partial structural schematic diagram of a liquid supply component and a liquid circuit component in an embodiment of the utility model, wherein the first three-way valve is an electrically controlled valve;

[0025] Fig. 9 It is a partial structural schematic diagram of a liquid supply assembly and a liquid circuit assembly in an embodiment of the utility model, wherein the second three-way valve is a manual valve;

[0026] Fig.10 It is a partial structural schematic diagram of a liquid supply assembly and a liquid circuit assembly in an embodiment of the utility model, wherein the second three-way valve is an electrically controlled valve;

[0027] Fig.11 It is a partial structural schematic diagram of the gas supply component and the liquid circuit component in one embodiment of the utility model;

[0028] Fig.12 It is a schematic diagram of the path for the liquid path component to centrally discharge the coolant in one embodiment of the utility model.

[0029] Description of Figure Numbers:

[0030] Water supply purge system 100;

[0031] Liquid supply assembly 110;

[0032] Gas supply assembly 120; gas source 121; pressure regulating valve 122;

[0033] Liquid circuit assembly 130; control valve 131; first three-way valve 1311; first interface 13111; third interface 13112; second three-way valve 1312; second interface 13121; liquid discharge port 132; control unit 133; filter 134; sensor 135; check valve 136;

[0034] Bracket 140;

[0035] Cooling channel 210; liquid inlet 211; liquid outlet 212.

[0036] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0037] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0038] As an efficient thin film deposition technology, magnetron sputtering coating is widely used in vacuum coating industries such as semiconductors, flat panel displays, and photovoltaics. In magnetron sputtering coating, through the interaction of electric and magnetic fields, electrons are accelerated to fly to the substrate under the action of the electric field and collide with argon atoms. Argon atoms ionize a large number of argon ions and electrons. Electrons fly to the substrate, and argon ions are accelerated to bombard the target material under the action of the electric field, sputtering a large number of target atoms. Neutral target atoms (or molecules) are deposited on the substrate to form a film. The purity of the target material in the magnetron sputtering coating equipment has a great influence on the performance of the sputtered film. The higher the purity of the target material, the better the performance of the sputtered film.

[0039] Magnetron sputtering equipment generally has a cooling channel, and the coolant is arranged in the cooling channel to cool the target back plate, power supply, pump group, substrate table and other components. Before maintenance, replacement and disassembly of these components, the coolant in the cooling channel needs to be cleaned out. Taking the target assembly as an example, the target assembly generally includes a target substrate and a target back plate. The target back plate is provided with a cooling channel on the side away from the target material. The coolant circulates in the cooling process during magnetron sputtering so that the coolant can cool the target substrate. In magnetron sputtering, the target material is a consumable, and the target back plate can be reused. When replacing the target material connected to the target back plate, the coolant in the cooling channel needs to be completely cleaned out first. In the prior art, the coolant supply is generally shut off manually, and the inlet and outlet of the cooling channel are exposed by disassembly, and then the high-pressure air is manually connected to the cooling channel to achieve the cooling liquid purge. The purge operation of the coolant in the prior art is difficult and the convenience is poor.

[0040] To solve the above technical problems, Figures 1 to 12 As shown, the present application proposes a water supply purge system 100. Figure 1 As shown, the water supply and purge system 100 is suitable for being connected to the cooling channel 210 of the magnetron sputtering device, and the cooling channel 210 includes a liquid inlet 211 and a liquid outlet 212. Figure 2 As shown, the water supply and purge system 100 includes a liquid supply component 110 , an air supply component 120 and a liquid circuit component 130 .

[0041] like Figure 3 , Figure 7 as well as Figure 8 As shown, the liquid supply component 110 is used to provide cooling liquid. The cooling liquid can be water or methanol, etc. The liquid supply component 110 may include a liquid storage part, a recovery part, and a cooling part. The liquid storage part is used to store the cooling liquid, the recovery part is used to collect the purged cooling liquid, and the cooling part can cool the cooling liquid entering the cooling channel 210 so that the cooling liquid meets the cooling requirements of the target substrate, etc. The cooling part can be configured as a chiller, which can cool the cooling liquid to a set temperature such as 18°C ​​or 22°C. The chiller is easy to operate and has good temperature regulation capabilities.

[0042] like Figure 2 as well as Fig.11 As shown, the air supply assembly 120 is used to provide a purge gas. The purge gas can be air or any other suitable gas. The air supply assembly 120 can provide a purge gas with a suitable air pressure and a suitable flow rate to the cooling channel 210 to quickly dry the coolant discharged from the cooling channel 210.

[0043] like Figure 2 , Figure 3 , Figure 4 as well as Figure 6As shown, the liquid circuit assembly 130 has a first interface 13111, a second interface 13121 and a liquid discharge port 132, and the liquid circuit assembly 130 can be switched between a liquid supply state and a scavenging state.

[0044] like Figure 2 , Figure 3 ,as well as Figure 4 As shown, in the liquid supply state, one side of the first interface 13111 is connected to the liquid inlet 211, and the other side is connected to the liquid supply assembly 110, and one side of the second interface 13121 is connected to the liquid outlet 212, and the other side is connected to the liquid supply assembly 110. The coolant can flow from the liquid supply assembly 110 to the first interface 13111, and then flow from the first interface 13111 into the liquid inlet 211, and then flow to the cooling channel 210, and the coolant cools the target substrate and the like in the cooling channel 210. The coolant enters the second interface 13121 from the liquid outlet 212, and then flows back to the liquid supply assembly 110 from the second interface 13121. The liquid supply assembly 110 can filter and cool the refluxed coolant, etc., to achieve the circulation of the coolant.

[0045] like Figure 7 , Fig. 9 , Fig.11 as well as Fig.12 As shown, in the scavenging state, one side of the first interface 13111 is connected to the liquid inlet 211 and the other side is connected to the air supply component 120, and one side of the second interface 13121 is connected to the liquid outlet 212 and the other side is connected to the drain port 132, so that the coolant can be discharged from the cooling channel 210. The purge gas enters the first interface 13111 from the air supply component 120, and then enters the circulation channel from the first interface 13111, and purges the coolant in the circulation channel. The purged coolant and the purge gas flow to the second interface 13121 through the liquid outlet 212, and then flow to the drain port 132 from the second interface 13121. The coolant flowing to the drain port 132 can be discarded or reused after being processed. When there are multiple cooling channels 210, each cooling channel 210 is respectively connected to the air supply component 120, and the coolant purged from each cooling channel 210 can be centrally recovered and processed, which is not limited here. It should be noted that the connection between the various components of the present application can be direct or indirect, and there is no limitation here.

[0046] In the technical solution of the present application, the water supply and purge system 100 is provided with a liquid supply component 110 and an air supply component 120, and the liquid circuit component 130 can be connected to the liquid supply component 110 and the air supply component 120 respectively to meet the liquid supply cooling demand and the coolant purging demand of magnetron sputtering. The technical solution of the present application controls the connectivity of the liquid circuit component 130 by controlling the valve 131. When the cooling channel 210 needs to be purged, the cooling channel 210 can be purged and drained by adjusting the liquid circuit component 130, thereby avoiding the disassembly of the magnetron sputtering equipment and greatly improving the convenience of coolant purging. The coordination of the air supply component 120, the liquid supply component 110 and the liquid circuit component 130 of the present application can also effectively reduce the site restrictions of liquid supply, air supply and coolant collection, and further improve the convenience of purging the cooling channel 210 of the magnetron sputtering.

[0047] In the water supply and purge system 100, the liquid circuit assembly 130 as a whole can be divided into a water supply and air supply part, and a water discharge and air discharge part. The water supply and air supply part is respectively connected to the liquid supply assembly 110, the air supply assembly 120 and the liquid inlet 211 of the cooling channel 210, and the water discharge and air discharge part is respectively connected to the liquid outlet 212 of the cooling channel 210 and the liquid supply assembly 110. In order to facilitate the control of the connection state of each component and improve the structural compactness of the liquid circuit assembly 130, the control valve 131 can be configured as a three-way valve. Figure 8 as well as Fig.10As shown, in some embodiments, the control valve 131 includes a first three-way valve 1311 and a second three-way valve 1312. The first three-way valve 1311 has a first interface 13111, and the first three-way valve 1311 is respectively connected to the gas supply component 120, the liquid supply component 110 and the liquid inlet 211. Specifically, the first interface 13111 is connected to the liquid inlet 211, and the other two valve interfaces are respectively connected to the liquid supply component 110 and the gas supply component 120. The second three-way valve 1312 has a second interface 13121, and the second three-way valve 1312 is respectively connected to the liquid discharge port 132, the liquid supply component 110 and the liquid outlet 212. Specifically, the second interface 13121 is connected to the liquid outlet 212, and the other two valve interfaces are respectively connected to the liquid supply component 110 and the liquid discharge port 132. During liquid supply, the coolant flows from the liquid supply component 110 into the first three-way valve 1311, flows from the first three-way valve 1311 into the cooling channel 210, then flows from the cooling channel 210 into the second three-way valve 1312, and finally flows back to the liquid supply component 110 from the second three-way valve 1312. During gas scavenging, the purge gas enters the three-way valve from the gas supply component 120, enters the cooling channel 210 from the three-way valve, then enters the second three-way valve 1312 from the cooling channel 210, and finally enters the drain port 132 from the second three-way valve 1312. At this time, the connection channels between the first three-way valve 1311 and the second three-way valve 1312 and the liquid supply component 110 are all closed. The first three-way valve 1311 and the second three-way valve 1312 can be configured as any suitable valves such as ball valves, plug valves, butterfly valves, diaphragm valves, stop valves, T-type three-way valves, and straight-through three-way valves.

[0048] The driving mode of the control valve 131 can also be set according to different usage requirements. Figure 7 , Figure 8 , Fig. 9 as well as Fig.10As shown, the first three-way valve 1311 and the second three-way valve 1312 can be configured as manual valves, gas-driven valves or electric-driven valves, respectively. In some embodiments, the first three-way valve 1311 and the second three-way valve 1312 can be manual valves, pneumatic valves or electric valves, and the first three-way valve 1311 can be a manual valve and the second three-way valve 1312 can be a pneumatic valve or an electric valve, etc. Various combinations can be used as long as they meet the use control requirements of the control valve 131, and there is no restriction here. Among them, manual valves such as manual ball valves are simple to operate, highly reliable and easy to maintain. Gas-driven valves such as electromagnetic hydraulic pneumatic vertical three-way valves control the valves through pneumatic actuators (such as cylinders) and electromagnetic reversing valves. Gas-driven valves are highly flexible and safe, and can be integrated with control systems such as PLC (programmable logic controller) to achieve automatic control. It can be understood that in the gas-driven valve, the valve body will be provided with an air inlet and an air outlet connected to the gas source. Specifically, the electric energy driven valve can be driven directly by the motor to move the valve. The electric energy driven valve is energy-saving and environmentally friendly, has high precision, and is easy to remotely control. It can also be combined with control systems such as PLC (programmable logic controller) to realize complex automation control strategies with a high degree of automation.

[0049] like Figure 2 as well as Figure 5 As shown, in some embodiments, the liquid circuit assembly 130 also includes a control unit 133, the control unit 133 is configured as a programmable logic controller, the control valve 131 is configured as an electrically controlled valve, and the control unit 133 is used to control the start or close of the control valve 131. Specifically, the electrically controlled valve can be the above-mentioned gas-driven valve or electric energy-driven valve. Among them, the control unit 133 can be electrically connected or communicatively connected to the control valve 131. Electrical connection data transmission is stable and reliable, and the communication connection has a high degree of integration, a small size, and is easy to use. The specific connection method can be selected according to different usage requirements. The control unit 133 cooperates with the control valve 131 to realize the automatic control of the first three-way valve 1311 and the second three-way valve 1312, thereby effectively reducing the risk of the control valve 131 being opened or closed by mistake, and improving the control accuracy of the control valve 131.

[0050] like Figure 7 as well as Figure 8As shown, the liquid circuit assembly 130 can transport the coolant in the liquid supply assembly 110 to the cooling channel 210. In order to reduce the impurities in the coolant and reduce the impurity deposition in the cooling channel 210 and the control valve 131, in some embodiments, the liquid circuit assembly 130 also includes a filter 134, one side of the filter 134 is connected to the liquid supply assembly 110, and the other side is connected to the first interface 13111, and the filter 134 is used to filter the coolant. The filter 134 can be connected to the connecting part by a pipe connection or a flange connection. A self-sealing valve or other device can be set in the filter 134, so that the liquid circuit assembly 130 does not need to install other pipe fittings such as a stop valve, thereby simplifying the pipeline design and improving the convenience of installation.

[0051] The liquid circuit assembly 130 can deliver cooling liquid, and the flow rate and temperature of the cooling liquid can directly affect the cooling effect of the cooling liquid on the target substrate, etc. In some embodiments, the water supply assembly can be provided with a water cooler, which can deliver cooling liquid at a fixed temperature. After the cooling liquid passes through the cooling channel 210 to cool the target substrate, etc., the temperature will rise. At this time, the temperature and flow rate of the cooling liquid flowing out of the liquid outlet 212 can be detected to obtain the cooling effect in the cooling channel 210. The control unit 133 can adjust the temperature and flow rate of the cooling liquid according to the detection of the detector. Fig. 9 as well as Fig.10 As shown, in some embodiments, the liquid circuit component 130 also includes a sensor 135, one side of the sensor 135 can be connected to the second interface 13121, and the other side is connected to the liquid supply component 110, and the sensor 135 is used to detect the temperature and flow rate of the coolant. Specifically, the sensor 135 can be configured as a flow-temperature integrated sensor 135, and the sensor 135 can also be integrated by a temperature sensor 135 and a flow sensor 135. The temperature sensor 135 can be a contact liquid temperature sensor 135, a non-contact liquid temperature sensor 135, a microelectronic liquid temperature sensor 135, or an electrochemical liquid temperature sensor 135. The flow sensor 135 can be an electromagnetic flowmeter, a vortex flowmeter, a volume flow sensor 135, a differential pressure flow sensor 135, an ultrasonic flow sensor 135, a thermal flow sensor 135, etc.

[0052] The gas supply assembly 120 can provide purge gas to the cooling channel 210. The pressure and gas volume of the gas provided by the gas supply assembly 120 may also be different depending on the different purge locations and the different coolant residual amounts in the same locations. Fig.11As shown, in order to facilitate the control of gas pressure and flow, the liquid circuit component 130 can also be provided with a pressure regulating valve 122. In some embodiments, the liquid circuit component 130 also includes a third interface 13112, one side of the third interface 13112 is used to communicate with the first interface 13111, and the other side is used to communicate with the gas supply component 120. The gas supply component 120 includes a gas source part 121 and a pressure regulating valve 122. One side of the pressure regulating valve 122 is connected to the gas source part 121, and the other side can be connected to the first interface 13111. The pressure regulating valve 122 is used to adjust the gas pressure of the gas flow out of the gas source part 121. Specifically, the control valve 131 can be configured as a three-way valve, and the third interface 13112 can be an interface for the first three-way valve 1311 to communicate with the gas supply component 120. The gas supply component 120 is connected to the third interface 13112, that is, it can be indirectly connected to the first interface 13111. According to different usage requirements, the pressure regulating valve 122 can compress the gas of the gas source part 121, or expand the gas of the gas source part 121, which is not limited here. It is understandable that when the same gas supply component 120 needs to provide purge gas for multiple cooling channels 210, the gas supply component 120 can uniformly compress or expand the gas of each cooling channel 210 to improve the integration of the gas supply component 120 and reduce the gas supply cost. The gas supply component 120 can also be compressed or expanded separately to enhance the flexibility of purge.

[0053] like Fig.11As shown, in some embodiments, the coolant flows out from the liquid supply assembly 110, flows through the control valve 131, and then flows from the control valve 131 to the cooling channel 210. The control valve 131 is also connected to the air supply assembly 120. In order to reduce the risk of the coolant flowing from the control valve 131 to the air supply assembly 120, the liquid circuit assembly 130 may also include a check valve 136. One side of the check valve 136 is connected to the pressure regulating valve 122, and the other side can be connected to the first interface 13111. The check valve 136 is used to limit the flow of the coolant to the pressure regulating valve 122. It can be understood that when the liquid circuit assembly 130 includes the control valve 131, the control valve 131 is configured as a three-way valve. Specifically, the check valve 136 can be connected to the third interface 13112 of the first three-way valve 1311. As long as the check valve 136 can limit the coolant flowing out of the cooling assembly from flowing to the air supply assembly 120, but flows to the cooling channel 210 connected to the first interface 13111. The check valve 136 of the liquid circuit assembly 130 can effectively prevent the coolant from flowing back, protect the equipment, maintain the system pressure, and prevent pollution and accidents. In some embodiments, the check valve 136 can also adjust the size of the airflow by adjusting the valve opening of the check valve 136 to meet specific air supply requirements. The check valve 136 can be configured as a lift check valve, a swing check valve, a butterfly check valve, a pipeline check valve or a compression check valve, etc., any valve that can meet the coolant check demand. Depending on the material used, the check valve 136 can be configured as a suitable valve such as a cast iron check valve, a brass check valve, a stainless steel check valve, etc.

[0054] like Figure 2 As shown, magnetron sputtering is widely used. In production, a large number of target backing plates are often required to perform magnetron sputtering at the same time. The first interface 13111 is set in a one-to-one correspondence with the liquid inlet 211, and the second interface 13121 is set in a one-to-one correspondence with the liquid outlet 212. Therefore, in order to meet the production needs of magnetron sputtering, the liquid circuit component 130 includes at least two groups of first interfaces 13111 and second interfaces 13121. Correspondingly, the gas supply component 120 can have multiple gas outlets, the liquid supply component 110 can have multiple liquid supply ports, and the liquid circuit component 130 can be provided with corresponding multiple groups of connecting parts and control valves 131 to achieve that a single cooling channel 210 is independently connected to the gas supply component 120 and the liquid supply component 110. The air supply assembly 120 may also be provided with a centralized air supply unit for unified air supply, and the liquid supply pipeline may also be provided with a centralized liquid supply unit for unified liquid supply. Accordingly, each group of connection parts of the liquid circuit assembly 130 is respectively connected to the cooling channel 210, and is uniformly connected to the centralized air supply unit of the air supply assembly 120 and the centralized liquid supply unit of the liquid supply assembly 110, so as to improve the structural compactness of the water supply and purge system 100. In addition, the water supply and purge system 100 may also include a bracket 140, which is used to support the air supply assembly 120, the liquid supply assembly 110 and the liquid circuit assembly 130, which will not be described in detail here.

[0055] The second aspect of the present application also provides a magnetron sputtering device (not shown in the figure), which includes the water supply and purge system 100 of any of the above embodiments. Thanks to the improvement of the above water supply and purge system 100, the water supply and purge system 100 of this embodiment has the same technical effect as the above water supply and purge system 100, which will not be repeated here. It should be noted that the cooling channel 210 can be a cooling channel provided on the target back plate of the target assembly for cooling the target substrate, or it can be a cooling channel for cooling the magnetron sputtering device in addition to the target substrate and also having a liquid inlet 211 and a liquid outlet 212, which is not limited here.

[0056] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0057] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or", "and / or" or "and / or" appears in the full text, its meaning includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0058] The above are only preferred embodiments of the present invention, and do not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the utility model concept, or directly / indirectly used in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A water supply and purge system, suitable for being connected to a cooling channel of a magnetron sputtering device, wherein the cooling channel comprises a liquid inlet and a liquid outlet, and is characterized in that: The water supply and purge system comprises: A liquid supply component, used for providing cooling liquid; A gas supply assembly, used for providing a purge gas; A liquid circuit component having a first interface, a second interface and a drain port, wherein the liquid circuit component can switch between a liquid supply state and a scavenging state. In the liquid supply state, one side of the first interface is connected to the liquid inlet and the other side is connected to the liquid supply component, and one side of the second interface is connected to the liquid outlet and the other side is connected to the liquid supply component; in the scavenging state, one side of the first interface is connected to the liquid inlet and the other side is connected to the gas supply component, and one side of the second interface is connected to the liquid outlet and the other side is connected to the drain port, so that the coolant can be discharged from the cooling channel.

2. The water supply purge system according to claim 1, characterized in that: The liquid circuit component includes a control valve, which includes a first three-way valve and a second three-way valve, the first three-way valve having the first interface, and the first three-way valve is respectively connected to the air supply component, the liquid supply component and the liquid inlet; the second three-way valve has the second interface, and the second three-way valve is respectively connected to the liquid discharge port, the liquid supply component and the liquid outlet.

3. The water supply purge system according to claim 2, characterized in that: The control valve is configured as a manual valve; or, the control valve is configured as a gas-driven valve; or, the control valve is configured as an electric energy-driven valve.

4. The water supply purge system according to claim 2, characterized in that: The fluid circuit assembly further includes a control unit, the control unit is configured as a programmable logic controller, the control valve is configured as an electrically controlled valve, and the control unit is used to control the start or close of the control valve; Wherein, the control unit is electrically connected to the control valve, or the control unit is communicatively connected to the control valve.

5. The water supply purge system according to claim 1, characterized in that: The liquid circuit assembly further includes a filter, one side of the filter is connected to the liquid supply assembly, and the other side of the filter is connected to the first interface, and the filter is used to filter the coolant.

6. The water supply purge system according to claim 1, characterized in that: The liquid circuit component also includes a sensor, one side of which can be connected to the second interface and the other side of which is connected to the liquid supply component. The sensor is used to detect the temperature and flow rate of the coolant.

7. The water supply purge system according to claim 1, characterized in that: The gas supply assembly includes an air source and a pressure regulating valve. One side of the pressure regulating valve is connected to the air source and the other side can be connected to the first interface. The pressure regulating valve is used to adjust the air pressure of the air flow out of the air source.

8. The water supply purge system according to claim 7, characterized in that: The liquid circuit assembly also includes a check valve, one side of which is connected to the pressure regulating valve and the other side of which can be connected to the first interface, and the check valve is used to limit the flow of the coolant to the pressure regulating valve.

9. The water supply purge system according to claim 1, characterized in that: The first interface is arranged in a one-to-one correspondence with the liquid inlet, the second interface is arranged in a one-to-one correspondence with the liquid outlet, and the liquid circuit assembly includes at least two groups of the first interface and the second interface.

10. A magnetron sputtering device, characterized in that: A water supply and purge system comprising the water supply and purge system according to any one of claims 1 to 9.

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