Shunt plate structure of CVD (chemical vapor deposition) furnace

Abstract

The utility model provides a shunting disc structure of a CVD (Chemical Vapor Deposition) deposition furnace, belongs to the technical field of CVD deposition furnaces, and aims to solve the problems that according to an existing shunting disc structure of the CVD deposition furnace, the dismounting and mounting process of a shunting disc is tedious, the maintenance efficiency is influenced, and the hole blockage cleaning process of the shunting disc is tedious. Comprising a deposition furnace body; the air inlet is fixedly formed in the top of the deposition furnace main body; the mounting clamping table is fixedly connected to the interior of the deposition furnace main body; the shunting disc main body is arranged at the upper part of the mounting clamping table; the adjusting disc is rotationally connected to the upper part of the shunting disc main body; the maintenance assembly is arranged in the shunting disc main body; and the anti-blocking assembly is arranged in the shunting disc main body. The device has the advantages of being quick to disassemble and assemble, convenient to maintain, convenient to dredge and the like.

Description

Technical Field

[0001] The utility model belongs to the technical field of CVD deposition furnaces, and more specifically, particularly relates to a diverter plate structure of a CVD deposition furnace. Background Art

[0002] When preparing diamond films or diamond wafers, they are mainly prepared through CVD deposition furnaces. The CVD deposition furnace converts carbon-containing gases (such as methane) into active species under high temperature, high pressure and specific atmosphere conditions. These active species are deposited on the surface of a specific substrate and grow into diamond films. When carbon gas is input into the CVD deposition furnace, a diverter plate structure of the CVD deposition furnace is required to evenly distribute the gas to the entire deposition area to ensure that the deposition rate and quality of each part of the substrate surface are consistent. The diverter plate structure of the existing CVD deposition furnace is mainly in the shape of a flat plate with uniform small holes distributed on it. The gas is evenly distributed to the deposition area through the small holes, and the diverter plate is fixed to the air inlet or reaction chamber of the CVD deposition furnace by bolts and sealing gaskets.

[0003] Existing application number CN201920285249.X The utility model provides a CVD deposition furnace device with a diverter plate, including a furnace body, an air intake device, a diverter plate and a deposition chamber. The diverter plate is provided with a plurality of holes. After the source gas passes through the air intake device and reaches the mixing chamber, it will enter the deposition chamber through the holes on the diverter plate. Since the inner diameter of the holes close to the central axis of the diverter plate is thinner and the inclination angle is larger, the gas concentration in the local space close to the central axis of the diverter plate in the deposition chamber is avoided to be too high. At the same time, the inner diameter of the holes far away from the central axis of the diverter plate is thicker and the inclination angle is smaller, thereby avoiding the gas concentration in the local space close to the central axis of the diverter plate in the deposition chamber is avoided to be too low. On the whole, the gas concentration entering the deposition chamber tends to be uniform, which greatly improves the utilization efficiency of the source gas and significantly improves the deposition quality.

[0004] Based on the above, the existing diverter plate structure of the CVD deposition furnace fixes the diverter plate at the air inlet or reaction chamber of the CVD deposition furnace through bolts and sealing gaskets. After a period of use, the diverter plate needs to be cleaned and maintained in time, which helps to keep the deposition furnace clean and extend its service life. However, the disassembly and assembly process is relatively cumbersome, which affects the maintenance efficiency. Moreover, if the solid particles generated during the deposition process are not discharged in time, or due to poor gas flow, they may accumulate in the holes of the diverter plate, causing the holes to be blocked, and the cleaning process is relatively cumbersome. Utility Model Content

[0005] In order to solve the above-mentioned technical problems, the utility model provides a diverter plate structure of a CVD deposition furnace to solve the problem that the diverter plate structure of the existing CVD deposition furnace fixes the diverter plate at the air inlet or reaction chamber of the CVD deposition furnace by bolts and sealing gaskets. After being used for a period of time, the diverter plate needs to be cleaned and maintained in time, which helps to keep the deposition furnace clean and extend its service life. However, the disassembly and assembly process is relatively cumbersome, which affects the maintenance efficiency. Moreover, if the solid particles generated during the deposition process are not discharged in time, or due to poor gas flow, they may accumulate in the holes of the diverter plate, causing the holes to be blocked and the cleaning process is relatively cumbersome.

[0006] The purpose and effect of the diverter plate structure of a CVD deposition furnace of the utility model are achieved by the following specific technical means:

[0007] A diverter plate structure of a CVD deposition furnace comprises a deposition furnace main body;

[0008] An air inlet, the air inlet being fixedly mounted on the top of the deposition furnace body;

[0009] An installation card platform, wherein the installation card platform is fixedly connected to the inside of the deposition furnace body;

[0010] A diverter plate body, the diverter plate body is arranged on the upper part of the mounting card platform;

[0011] An adjusting disk, the adjusting disk being rotatably connected to the upper part of the main body of the diverter disk;

[0012] A maintenance component, wherein the maintenance component is arranged inside the main body of the diverter plate;

[0013] An anti-blocking component is arranged inside the main body of the diverter disc.

[0014] Furthermore, the maintenance component includes:

[0015] A clamping groove, wherein the clamping groove is provided inside the main body of the diverter plate;

[0016] A limit block is slidably connected inside the clamping groove.

[0017] Furthermore, the maintenance component also includes:

[0018] A first elastic member, wherein the first elastic member is fixedly installed in the clamping groove, and the first elastic member is fixedly installed in the limiting block;

[0019] A limit latch is fixedly installed inside the limit block.

[0020] Furthermore, the maintenance component also includes:

[0021] A clamping block, the clamping block is fixedly mounted on the upper part of the mounting clamping platform;

[0022] The limiting hole is arranged inside the clamping block.

[0023] Furthermore, the anti-blocking component includes:

[0024] A driving motor, wherein the driving motor is fixedly mounted on the bottom of the main body of the diverter plate;

[0025] The rotating shaft is rotatably connected inside the main body of the diverter plate, the rotating shaft is fixedly installed inside the driving motor, and the driving motor is fixedly installed inside the adjusting plate.

[0026] Furthermore, the anti-blocking component also includes:

[0027] The vent holes are provided in multiple groups, multiple groups of vent holes are provided inside the main body of the diverter plate, and multiple groups of vent holes are provided inside the regulating plate.

[0028] Furthermore, the anti-blocking component also includes:

[0029] A cleaner, wherein the cleaner is provided with multiple groups, multiple groups of cleaners are fixedly installed inside the main body of the diverter plate, and multiple groups of cleaners are fixedly installed inside the regulating plate;

[0030] Anti-blocking round heads, wherein the anti-blocking round heads are provided in multiple groups, and the multiple groups of anti-blocking round heads are slidably connected inside the cleaner;

[0031] The second elastic member is provided in multiple groups, and the multiple groups of second elastic members are fixedly installed inside the cleaner.

[0032] Compared with the prior art, the utility model has the following beneficial effects:

[0033] First of all, the utility model has a maintenance component, which plays a role in limiting the installation of the installation card table and the diverter plate body by inserting the limit pin into the limit hole. Moreover, by toggling the limit block, the limit pin can be pulled out from the limit hole, so that the diverter plate body can be quickly disassembled, which greatly improves the disassembly and assembly efficiency of the diverter plate body and facilitates the disassembly and assembly and maintenance of the diverter plate body.

[0034] Secondly, the utility model has an anti-blocking component, which drives the rotating shaft to rotate through a driving motor, thereby changing the angle of the adjusting disk, causing the adjusting disk and the diverter disk body to block the vents from each other, causing the vents to change, thereby changing the gas flow rate, and facilitating the adjustment of the vents. Moreover, when the vents are rotated to the vent position, the anti-blocking round head pops out under the elastic action of the second elastic part to dredge the inside of the vent, thereby greatly improving the dredging efficiency of the vents.

[0035] The utility model has the advantages of quick disassembly and assembly, easy maintenance, and convenient dredging, which greatly improves the disassembly and assembly efficiency of the diverter plate body, facilitates the disassembly and assembly of the diverter plate body, and effectively dredges the vent holes, greatly improving the dredging efficiency of the vent holes. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It is a schematic diagram of the main structure of the utility model.

[0037] Figure 2 It is a schematic diagram of the main structure of the diverter disc of the utility model.

[0038] Figure 3 It is a structural schematic diagram of an installation card platform of the utility model.

[0039] Figure 4 It is a schematic diagram of the structure of the regulating disk of the utility model.

[0040] Figure 5 It is a schematic diagram of the structure of the driving motor of the utility model.

[0041] Figure 6 It is a schematic diagram of the structure of the cleaner of the utility model.

[0042] In the figure, the corresponding relationship between the component names and the figure numbers is as follows:

[0043] 1. Deposition furnace body; 2. Air inlet; 3. Mounting table; 301. Snap-on block; 302. Limiting hole; 4. Diverter plate body; 401. Air vent; 402. Snap-on groove; 403. Limiting block; 404. First elastic member; 405. Limiting pin; 5. Adjusting plate; 6. Cleaner; 601. Anti-blocking round head; 602. Second elastic member; 7. Driving motor; 701. Rotating shaft. DETAILED DESCRIPTION

[0044] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0045] Embodiment 1:

[0046] As attached Figure 1 To Attachment Figure 6 As shown:

[0047] The utility model provides a diverter plate structure of a CVD deposition furnace, comprising a deposition furnace main body 1;

[0048] An air inlet 2, the air inlet 2 is fixedly mounted on the top of the deposition furnace body 1;

[0049] Install the card table 3, and the card table 3 is fixedly connected to the inside of the deposition furnace body 1;

[0050] The main body of the diverter plate 4 is arranged on the upper part of the mounting card platform 3;

[0051] An adjusting disk 5, the adjusting disk 5 is rotatably connected to the upper part of the diverter disk body 4;

[0052] A maintenance component is arranged inside the diverter plate body 4 .

[0053] The maintenance components include:

[0054] A clamping groove 402, which is provided inside the main body 4 of the diverter plate;

[0055] The limit block 403 is slidably connected to the inside of the clamping groove 402 ; the function of the limit block 403 is to slide the limit block 403 inside the clamping groove 402 when the limit block 403 is moved.

[0056] The maintenance components also include:

[0057] A first elastic member 404, the first elastic member 404 is fixedly installed in the clamping groove 402, and the first elastic member 404 is fixedly installed in the limiting block 403;

[0058] The limit latch 405 is fixedly installed inside the limit block 403; the limit block 403 moves to drive the limit latch 405 to move and compress the first elastic member 404, and the limit block 403 is released. The first elastic member 404 drives the limit block 403 and the limit latch 405 to reset and move under the elastic action.

[0059] The maintenance components also include:

[0060] A clamping block 301, which is fixedly mounted on the upper part of the mounting clamping platform 3;

[0061] The limiting hole 302 is provided inside the clamping block 301 ; the function of the limiting hole 302 is to clamp the clamping block 301 into the clamping groove 402 , and the limiting pin 405 is inserted into the limiting hole 302 , so as to limit the installation of the clamping platform 3 and the diverter plate body 4 .

[0062] The specific usage and function of this embodiment are as follows:

[0063] When the diverter plate body 4 needs to be installed on the upper part of the mounting fixture 3, the limit block 403 is pushed, and the limit block 403 slides inside the snap-in groove 402. The movement of the limit block 403 drives the limit pin 405 to move and compress the first elastic member 404, and the snap-in block 301 is inserted into the snap-in groove 402. The limit block 403 is released, and the first elastic member 404 drives the limit block 403 and the limit pin 405 to reset and move under the elastic action. The limit pin 405 resets and moves and is inserted into the limit hole 302, thereby playing the role of installation limit of the mounting fixture 3 and the diverter plate body 4.

[0064] When the diverter plate body 4 needs to be disassembled, the limit block 403 is moved, and the limit block 403 drives the limit pin 405 to be pulled out of the limit hole 302, so that the diverter plate body 4 loses the limit, and the diverter plate body 4 can be lifted out, which is convenient for disassembly and maintenance of the diverter plate body 4.

[0065] Embodiment 2:

[0066] Based on the first embodiment, Figures 1 to 6 As shown, it also includes:

[0067] The anti-blocking component is arranged inside the diverter plate body 4.

[0068] Among them, the anti-blocking components include:

[0069] A driving motor 7, which is fixedly mounted on the bottom of the diverter plate body 4;

[0070] The rotating shaft 701 is rotatably connected inside the diverter plate body 4, and the rotating shaft 701 is fixedly installed inside the driving motor 7, and the driving motor 7 is fixedly installed inside the adjusting plate 5; the function is that when the driving motor 7 is powered on, the driving motor 7 drives the rotating shaft 701 to rotate inside the diverter plate body 4, and the rotating shaft 701 drives the adjusting plate 5 to rotate on the upper part of the diverter plate body 4, thereby adjusting the angular position of the adjusting plate 5.

[0071] Among them, the anti-blocking components also include:

[0072] The vent holes 401 are provided in multiple groups, multiple groups of vent holes 401 are provided inside the diverter plate body 4, and multiple groups of vent holes 401 are provided inside the adjusting plate 5; the function is that when the vent holes 401 inside the diverter plate body 4 and the vent holes 401 inside the adjusting plate 5 are aligned, the vent holes 401 overlap to maximize the gas flow rate, and when the angle of the adjusting plate 5 changes, the adjusting plate 5 and the diverter plate body 4 block the vent holes 401 from each other, causing the vent holes 401 to change, thereby changing the gas flow rate.

[0073] Among them, the anti-blocking components also include:

[0074] The cleaner 6 is provided with multiple groups, and multiple groups of cleaners 6 are fixedly installed inside the diverter plate body 4, and multiple groups of cleaners 6 are fixedly installed inside the regulating plate 5;

[0075] Anti-blocking round heads 601, wherein the anti-blocking round heads 601 are provided in multiple groups, and the multiple groups of anti-blocking round heads 601 are slidably connected to the inside of the cleaner 6;

[0076] The second elastic member 602 is provided with multiple groups, and the multiple groups of second elastic members 602 are fixedly installed inside the cleaner 6; the role played is that the cleaner 6 inside the diverter plate body 4 is pressed by the adjusting disk 5 to make the anti-blocking round head 601 slide inside the cleaner 6 and compress the second elastic member 602. When the adjusting disk 5 is rotated to a suitable angle, the adjusting disk 5 drives the vent 401 to align with the anti-blocking round head 601. The second elastic member 602 drives the anti-blocking round head 601 to pop out from the inside of the cleaner 6 into the inside of the vent 401 under the elastic action, so as to clear the inside of the vent 401.

[0077] The specific usage and function of this embodiment are as follows:

[0078] The driving motor 7 is powered on and works, and the driving motor 7 drives the rotating shaft 701 to rotate inside the diverter plate body 4. The rotating shaft 701 drives the adjusting plate 5 to rotate on the upper part of the diverter plate body 4, and plays a role in adjusting the angle position of the adjusting plate 5. When the vent holes 401 inside the diverter plate body 4 and the vent holes 401 inside the adjusting plate 5 are aligned, the vent holes 401 overlap to maximize the gas flow rate. When the angle of the adjusting plate 5 changes, the adjusting plate 5 and the diverter plate body 4 block the vent holes 401 from each other, causing the vent holes 401 to change, thereby changing the gas flow rate.

[0079] The cleaner 6 inside the main body 4 of the diverter plate is pressed by the adjusting plate 5, so that the anti-blocking round head 601 slides inside the cleaner 6 and compresses the second elastic member 602. When the adjusting plate 5 rotates to a suitable angle, the adjusting plate 5 drives the vent 401 to align with the anti-blocking round head 601. The second elastic member 602 drives the anti-blocking round head 601 to pop out from the cleaner 6 to the vent 401 under the elastic action, and clears the vent 401. At the same time, the cleaner 6 and the anti-blocking round head 601 inside the adjusting plate 5 also clean the vent 401 inside the main body 4 of the diverter plate.

[0080] In this article, there are a few points to note:

[0081] 1. The drawings of the embodiments of the present disclosure only involve structures related to the embodiments of the present disclosure, and other structures may refer to general designs.

[0082] 2. In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to obtain new embodiments.

[0083] The above are only specific embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present disclosure, which should be included in the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be based on the protection scope of the claims.

Claims

1. A CVD deposition furnace diverter plate structure, the CVD deposition furnace diverter plate structure comprising a deposition furnace body (1); an air inlet (2), the air inlet (2) being fixedly mounted on the top of the deposition furnace body (1); characterized in that: An installation card table (3), the installation card table (3) is fixedly connected to the inside of the deposition furnace body (1); a diverter plate body (4), the diverter plate body (4) is arranged on the upper part of the installation card table (3); an adjustment plate (5), the adjustment plate (5) is rotatably connected to the upper part of the diverter plate body (4); a maintenance component, the maintenance component is arranged inside the diverter plate body (4); and an anti-blocking component, the anti-blocking component is arranged inside the diverter plate body (4).

2. A CVD deposition furnace diverter structure as claimed in claim 1, characterized in that: The maintenance component comprises: a clamping groove (402) and a limiting block (403); the clamping groove (402) is arranged inside the diverter plate body (4); and the limiting block (403) is slidably connected inside the clamping groove (402).

3. A shunt plate structure for a CVD deposition furnace as claimed in claim 2, characterized in that: The maintenance component further comprises: a first elastic member (404) and a limiting latch (405); the first elastic member (404) is fixedly mounted inside the clamping groove (402); the first elastic member (404) is fixedly mounted inside the limiting block (403); and the limiting latch (405) is fixedly mounted inside the limiting block (403).

4. The diverter plate structure of a CVD deposition furnace according to claim 2, characterized in that: The maintenance component further comprises: a clamping block (301) and a limiting hole (302); the clamping block (301) is fixedly mounted on the upper part of the mounting clamping platform (3); and the limiting hole (302) is arranged inside the clamping block (301).

5. The diverter plate structure of a CVD deposition furnace according to claim 1, characterized in that: The anti-blocking component comprises: a driving motor (7) and a rotating shaft (701); the driving motor (7) is fixedly mounted on the bottom of the diverter disc body (4); the rotating shaft (701) is rotatably connected inside the diverter disc body (4); the rotating shaft (701) is fixedly mounted inside the driving motor (7); and the driving motor (7) is fixedly mounted inside the regulating disc (5).

6. A shunt plate structure for a CVD deposition furnace as claimed in claim 5, characterized in that: The anti-blocking component further comprises: ventilation holes (401), wherein the ventilation holes (401) are provided in a plurality of groups, wherein the plurality of groups of ventilation holes (401) are provided inside the flow dividing plate body (4), and the plurality of groups of ventilation holes (401) are provided inside the regulating plate (5).

7. The diverter plate structure of a CVD deposition furnace according to claim 5, characterized in that: The anti-blocking component further comprises: a cleaner (6), an anti-blocking round head (601) and a second elastic member (602); the cleaner (6) is provided in multiple groups, the multiple groups of cleaners (6) are fixedly mounted inside the diverter plate body (4), and the multiple groups of cleaners (6) are fixedly mounted inside the regulating plate (5); the anti-blocking round heads (601) are provided in multiple groups, the multiple groups of anti-blocking round heads (601) are slidably connected inside the cleaner (6); and the second elastic member (602) is provided in multiple groups, the multiple groups of second elastic members (602) are fixedly mounted inside the cleaner (6).

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