Flexible pressure sensor and electronic product
By designing segmented holes on the flexible piezoresistive conductive layer and dividing them into multiple piezoresistive conductive units, the problem of low accuracy of the flexible sensor is solved, and higher accuracy and sensitivity are achieved.
Patent Information
- Application Number
- CN202420649737.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-29
- Publication Date
- 2025-05-06
- Estimated Expiration
- 2034-03-29
AI Technical Summary
The accuracy of existing flexible sensors is low, mainly due to the current diffusion of piezoresistive conductive materials, resulting in inaccurate resistance detection.
The flexible piezoresistive conductive layer is designed, and by creating multiple split holes on it, it is divided into multiple piezoresistive conductive units arranged in multiple rows and columns to ensure that the detection current does not diffuse around.
Through the design of the split hole, current diffusion is avoided, the accuracy and sensitivity of the flexible pressure sensor are improved, and the problem of low sensor accuracy is solved.
Smart Images
Figure CN222837706U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of sensors, and in particular relates to a flexible pressure sensor and an electronic product. Background Art
[0002] Existing flexible sensor designs include Figure 1 As shown, the inner sides of the upper and lower packages are attached with a whole row and column electrode, and the upper row and column electrode 1 is separated from the lower row and column electrode 3 by a layer of piezoresistive conductive material 2. The pressure change is detected by detecting the resistance change of the piezoresistive conductive material at the intersection of the row and column electrodes.
[0003] Usually, the piezoresistive conductive material layer is made of a whole piece of flexible conductive material. When measuring the resistance of the piezoresistive conductive material at the intersection of row and column electrodes point by point, the current will diffuse around the plane during the measurement process. Figure 2 As shown, this interferes with the measurement of the resistance at the intersection of the row and column electrodes, resulting in relatively low accuracy of the sensor. Summary of the invention
[0004] The utility model provides a flexible pressure sensor, which solves the technical problem of low accuracy of sensors in the prior art.
[0005] In order to solve the above technical problems, the utility model adopts the following technical solutions:
[0006] A flexible pressure sensor, comprising:
[0007] A flexible piezoresistive conductive layer having a plurality of segmentation holes, wherein the plurality of segmentation holes segment the flexible piezoresistive conductive layer into a plurality of piezoresistive conductive units arranged in a plurality of rows and columns;
[0008] An upper electrode layer, comprising a plurality of strip-shaped upper electrodes, the plurality of upper electrodes being located on the upper surface of the flexible piezoresistive conductive layer, and the plurality of upper electrodes being in corresponding contact with the upper surfaces of the plurality of rows of piezoresistive conductive units;
[0009] The lower electrode layer comprises a plurality of strip-shaped lower electrodes, the plurality of lower electrodes are located on the lower surface of the flexible piezoresistive conductive layer, and the plurality of lower electrodes are in corresponding contact with the lower surfaces of the plurality of columns of piezoresistive conductive units.
[0010] In some embodiments of the present application, the segmentation holes are in the shape of long strips, and the distance between two adjacent segmentation holes is greater than 0;
[0011] The piezoresistive conductive unit is square and is surrounded by four segmentation holes.
[0012] In some embodiments of the present application, the segmentation holes are circular rings with breakpoints, and the distance between two adjacent segmentation holes is greater than 0;
[0013] The piezoresistive conductive unit is circular and is surrounded by one of the segmented holes.
[0014] In some embodiments of the present application, the segmentation holes are arc-shaped, and the distance between two adjacent segmentation holes is greater than 0;
[0015] The piezoresistive conductive unit is circular and is surrounded by a plurality of the segmented holes located on the same circumference.
[0016] In some embodiments of the present application, the piezoresistive conductive unit is square;
[0017] The width of the upper electrode is smaller than the side length of the piezoresistive conductive unit.
[0018] The width of the lower electrode is smaller than the side length of the piezoresistive conductive unit.
[0019] In some embodiments of the present application, the piezoresistive conductive unit is circular;
[0020] The width of the upper electrode is smaller than the diameter of the piezoresistive conductive unit.
[0021] The width of the lower electrode is smaller than the diameter of the piezoresistive conductive unit.
[0022] In some embodiments of the present application, the upper electrode is bonded to the upper surface of the flexible piezoresistive conductive layer;
[0023] The lower electrode is bonded to the lower surface of the flexible piezoresistive conductive layer.
[0024] In some embodiments of the present application, the upper electrode layer further includes an upper substrate, and the plurality of upper electrodes are bonded to the upper substrate in parallel and at intervals;
[0025] The lower electrode layer further includes a lower substrate, and the plurality of lower electrodes are bonded on the lower substrate in parallel and at intervals.
[0026] In some embodiments of the present application, the width of the segmentation hole is any value between 0.2 mm and 0.3 mm;
[0027] Alternatively, the width of the dividing hole is any value between 0.3 mm and 2 mm.
[0028] Based on the design of the above-mentioned flexible pressure sensor, the utility model proposes an electronic product, including the above-mentioned flexible pressure sensor.
[0029] Compared with the prior art, the advantages and positive effects of the utility model are as follows: the flexible pressure sensor and electronic product of the utility model are designed with multiple segmentation holes on the flexible piezoresistive conductive layer, and the multiple segmentation holes divide the flexible piezoresistive conductive layer into multiple piezoresistive conductive units arranged in multiple rows and columns; the upper electrode layer includes multiple strip-shaped upper electrodes, and the multiple upper electrodes are located on the upper surface of the flexible piezoresistive conductive layer, and the multiple upper electrodes are in corresponding contact with the upper surfaces of the multiple rows of piezoresistive conductive units; the lower electrode layer includes multiple strip-shaped lower electrodes, and the multiple lower electrodes are located on the lower surface of the flexible piezoresistive conductive layer, and the multiple lower electrodes are in corresponding contact with the lower surfaces of the multiple columns of piezoresistive conductive units; by designing the segmentation holes, when detecting the resistance value of the piezoresistive conductive unit, the detection current will not spread to the surroundings of the piezoresistive conductive unit due to the existence of the segmentation holes, thereby avoiding inaccurate resistance detection caused by current diffusion, solving the technical problem of low sensor accuracy in the prior art, and improving the accuracy and sensitivity of the flexible pressure sensor.
[0030] After reading the detailed description of the embodiments of the present invention in conjunction with the accompanying drawings, other features and advantages of the present invention will become more clear. BRIEF DESCRIPTION OF THE DRAWINGS
[0031] Figure 1 It is a structural schematic diagram of an existing flexible pressure sensor;
[0032] Figure 2 is the current flow diagram;
[0033] Figure 3 It is a structural schematic diagram of an embodiment of the flexible pressure sensor proposed by the utility model;
[0034] Figure 4 is a schematic structural diagram of an embodiment of a flexible piezoresistive conductive layer;
[0035] Figure 5 It is a structural schematic diagram of another embodiment of a flexible piezoresistive conductive layer.
[0036] Reference numerals:
[0037] 1. Upper row and column electrodes; 2. Piezoresistive conductive material; 3. Lower row and column electrodes;
[0038] 10. upper electrode layer; 11. upper electrode; 12. upper substrate;
[0039] 20. Flexible piezoresistive conductive layer; 21. Piezoresistive conductive unit; 22. Splitting hole;
[0040] 30. Lower electrode layer; 31. Lower electrode; 32. Lower substrate. DETAILED DESCRIPTION
[0041] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0042] In the description of the present application, it should be understood that the terms "center", "up", "down", "front", "back", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.
[0043] In the description of this application, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the feature. In the description of this application, unless otherwise specified, "plurality" means two or more.
[0044] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0045] Embodiment 1
[0046] The flexible pressure sensor of this embodiment includes an upper electrode layer 10, a flexible piezoresistive conductive layer 20, a lower electrode layer 30, etc. Figure 3 , Figure 4 shown.
[0047] The flexible piezoresistive conductive layer 20 has a plurality of segmentation holes 22, which are connected vertically, and the plurality of segmentation holes 22 segment the flexible piezoresistive conductive layer 20 into a plurality of piezoresistive conductive units 21 arranged in a plurality of rows and columns. That is, the flexible piezoresistive conductive layer 20 is segmented into a plurality of piezoresistive conductive units 21 by the plurality of segmentation holes 22, and the plurality of piezoresistive conductive units 21 are arranged in a plurality of rows and columns.
[0048] The upper electrode layer 10 includes a plurality of strip-shaped upper electrodes 11, and the plurality of upper electrodes 11 are located on the upper surface of the flexible piezoresistive conductive layer 20. The plurality of upper electrodes 11 are arranged in parallel and at intervals, and the plurality of upper electrodes 11 are in corresponding contact with the upper surfaces of the plurality of rows of piezoresistive conductive units. The upper electrode 11 is in a strip shape and can be in contact with a row of piezoresistive conductive units. Each upper electrode 11 is in contact with a row of piezoresistive conductive units. In other words, the upper surface of each row of piezoresistive conductive units is in contact with an upper electrode 11. The number of upper electrodes 11 (i.e., the number of rows) is the same as the number of rows of piezoresistive conductive units 21, and each upper electrode 11 is in corresponding contact with a row of piezoresistive conductive units. The upper electrode 11 may also be referred to as a row electrode.
[0049] The lower electrode layer 30 includes a plurality of strip-shaped lower electrodes 31, and the plurality of lower electrodes 31 are located on the lower surface of the flexible piezoresistive conductive layer 20. The plurality of lower electrodes 31 are arranged in parallel and at intervals, and the plurality of lower electrodes 31 are in corresponding contact with the lower surfaces of the plurality of columns of piezoresistive conductive units. The lower electrode 31 is in a strip shape and can be in contact with a column of piezoresistive conductive units. Each lower electrode 31 is in contact with a column of piezoresistive conductive units. In other words, the lower surface of each column of piezoresistive conductive units is in contact with a lower electrode 31. The number of lower electrodes 31 (i.e., the number of columns) is the same as the number of columns of the piezoresistive conductive units 21, and each lower electrode 31 is in corresponding contact with a column of piezoresistive conductive units. The lower electrode 31 may also be referred to as a column electrode.
[0050] For each piezoresistive conductive unit 21 , its upper surface is in contact with one upper electrode 11 , and its lower surface is in contact with one lower electrode 31 .
[0051] When the piezoresistive conductive unit 21 is subjected to pressure, its resistance value changes, and the pressure change is detected by detecting the resistance change of the piezoresistive conductive unit 21. If the flexible piezoresistive conductive layer 20 is not designed with split holes, the current will diffuse in the plane of the flexible piezoresistive conductive layer 20 during the resistance detection process, affecting the detection accuracy.
[0052] When multiple segmentation holes 22 are designed to divide the flexible piezoresistive conductive layer 20 into multiple piezoresistive conductive units 21 arranged in multiple rows and columns, due to the presence of the segmentation holes 22, when detecting the resistance value of one of the piezoresistive conductive units 21, the detection current will not spread around the piezoresistive conductive unit 21, that is, the detection current will not spread in the entire flexible piezoresistive conductive layer 20, thereby avoiding inaccurate resistance detection due to current diffusion, and further avoiding affecting the pressure detection accuracy of the sensor.
[0053] In the flexible pressure sensor of the present embodiment, a plurality of segmentation holes 22 are designed on the flexible piezoresistive conductive layer 20, and the plurality of segmentation holes 22 segment the flexible piezoresistive conductive layer 20 into a plurality of piezoresistive conductive units 21 arranged in a plurality of rows and columns; the upper electrode layer 10 includes a plurality of strip-shaped upper electrodes 11, and the plurality of upper electrodes 11 are located on the upper surface of the flexible piezoresistive conductive layer 20, and the plurality of upper electrodes 11 are in corresponding contact with the upper surfaces of the plurality of rows of piezoresistive conductive units; the lower electrode layer 30 includes a plurality of strip-shaped lower electrodes 31, and the plurality of lower electrodes 31 are located on the lower surface of the flexible piezoresistive conductive layer 20, and the plurality of lower electrodes 31 are in corresponding contact with the lower surfaces of the plurality of columns of piezoresistive conductive units; by designing the segmentation holes 22, when detecting the resistance value of the piezoresistive conductive unit 21, the detection current will not diffuse to the surroundings of the piezoresistive conductive unit 21 due to the presence of the segmentation holes 22, thereby avoiding inaccurate resistance detection due to current diffusion, solving the technical problem of low sensor accuracy in the prior art, and improving the accuracy and sensitivity of the flexible pressure sensor.
[0054] In some embodiments of the present application, in order to facilitate processing and design, the segmentation hole 22 is a long strip, and the distance between two adjacent segmentation holes is greater than 0, that is, the adjacent segmentation holes do not touch each other; the piezoresistive conductive unit 21 is a square, surrounded by four segmentation holes 22, see Figure 4 shown.
[0055] Therefore, four long strip-shaped dividing holes can divide a square piezoresistive conductive unit 21 , which is convenient for design and processing.
[0056] In some other embodiments of the present application, in order to facilitate processing and design, the segmentation hole is a circular ring with breakpoints; the distance between two adjacent segmentation holes is greater than 0, that is, adjacent segmentation holes do not touch each other; the piezoresistive conductive unit is circular and surrounded by a segmentation hole.
[0057] Therefore, a circular ring-shaped dividing hole with a breakpoint divides a circular piezoresistive conductive unit, which is convenient for design and processing.
[0058] In some other embodiments of the present application, in order to facilitate processing and design, the segmentation holes are arc-shaped, and the distance between two adjacent segmentation holes is greater than 0, that is, the adjacent segmentation holes do not touch each other; the piezoresistive conductive unit is circular and surrounded by multiple segmentation holes located on the same circumference. For example, see Figure 5 As shown, the piezoresistive conductive unit 21 is circular and is surrounded by four segmented holes 22 located on the same circumference.
[0059] Therefore, a circular piezoresistive conductive unit is divided out by a plurality of dividing holes on the same circumference, which is convenient for design and processing.
[0060] In some embodiments of the present application, the piezoresistive conductive unit 21 is square.
[0061] The width of the upper electrode is smaller than the side length of the piezoresistive conductive unit, so as to avoid the upper electrode contacting two rows of piezoresistive conductive units at the same time, thereby avoiding affecting the accuracy of resistance detection.
[0062] The width of the lower electrode is smaller than the side length of the piezoresistive conductive unit, so as to avoid the lower electrode contacting two columns of piezoresistive conductive units at the same time, thereby avoiding affecting the accuracy of resistance detection.
[0063] In some other embodiments of the present application, the piezoresistive conductive unit is circular.
[0064] The width of the upper electrode is smaller than the diameter of the piezoresistive conductive unit, so as to avoid the upper electrode contacting two rows of piezoresistive conductive units at the same time, thereby avoiding affecting the accuracy of resistance detection.
[0065] The width of the lower electrode is smaller than the diameter of the piezoresistive conductive unit, so as to avoid the lower electrode contacting two columns of piezoresistive conductive units at the same time, thereby avoiding affecting the accuracy of resistance detection.
[0066] In some embodiments of the present application, the upper electrode 11 is bonded to the upper surface of the flexible piezoresistive conductive layer 20, that is, the upper electrode 11 is bonded to the upper surface of a corresponding row of piezoresistive conductive units, which is convenient for installation and ensures the connection stability between the upper electrode 11 and the flexible piezoresistive conductive layer 20.
[0067] In some embodiments of the present application, the lower electrode 31 is bonded to the lower surface of the flexible piezoresistive conductive layer 20, that is, the lower electrode 31 is bonded to the lower surface of a corresponding column of piezoresistive conductive units, which is convenient for installation and ensures the connection stability between the lower electrode 31 and the flexible piezoresistive conductive layer 20.
[0068] In some embodiments of the present application, in order to ensure the safety of the upper electrode 11, the upper electrode layer 10 further includes an upper substrate 12, and a plurality of strip-shaped upper electrodes 11 are bonded in parallel and at intervals to the upper substrate 12. Therefore, the upper surface of the upper electrode 11 is bonded to the upper substrate 12, and the lower surface of the upper electrode 11 is bonded to the upper surface of a corresponding row of piezoresistive conductive units.
[0069] In some embodiments of the present application, in order to ensure the safety of the lower electrode 31, the lower electrode layer 30 further includes a lower substrate 32, and a plurality of strip-shaped lower electrodes 31 are bonded in parallel and at intervals on the lower substrate 32. Therefore, the lower surface of the lower electrode 31 is bonded to the lower substrate 32, and the upper surface of the lower electrode 31 is bonded to the lower surface of a corresponding column of piezoresistive conductive units.
[0070] In some embodiments of the present application, the width of the segmentation hole is any value between 0.2 mm and 0.3 mm. By selecting the above width, the segmentation hole width is ensured to be large enough to effectively block current diffusion, while avoiding excessive width leading to material waste.
[0071] In some other embodiments of the present application, the width of the segmentation hole is any value between 0.3 mm and 2 mm. By selecting the above width, the segmentation hole width is ensured to be large enough to effectively block current diffusion, while avoiding excessive width leading to material waste.
[0072] The flexible piezoresistive conductive layer 20 is made of a piezoresistive conductive material and is a whole flexible piezoresistive conductive film.
[0073] The flexible pressure sensor of this embodiment improves the consistency of the flexible pressure sensor by designing the segmentation holes, and improves the sensitivity and softness of the sensor.
[0074] In the flexible pressure sensor of this embodiment, the entire flexible piezoresistive conductive film is cut, and the cut holes are gaps generated after cutting, which can weaken the flow of current in the plane. By cutting the flexible piezoresistive conductive layer, the influence of the plane resistance is weakened; different cutting hole shapes can be designed according to the actual application of the sensor; the width of the cutting hole can be designed according to the required density of the piezoresistive conductive unit.
[0075] Embodiment 2
[0076] Based on the design of the flexible pressure sensor in the first embodiment, the second embodiment proposes an electronic product including the flexible pressure sensor.
[0077] By designing the flexible pressure sensor in electronic products, the accuracy and sensitivity of pressure detection are improved, and the competitiveness of products is enhanced.
[0078] It should be pointed out that the above description is not a limitation of the present invention, and the present invention is not limited to the above examples. Changes, modifications, additions or substitutions made by ordinary technicians in this technical field within the essential scope of the present invention should also fall within the scope of protection of the present invention.
Claims
1. A flexible pressure sensor, characterized in that: include: A flexible piezoresistive conductive layer having a plurality of segmentation holes, wherein the plurality of segmentation holes segment the flexible piezoresistive conductive layer into a plurality of piezoresistive conductive units arranged in a plurality of rows and columns; An upper electrode layer, comprising a plurality of strip-shaped upper electrodes, the plurality of upper electrodes being located on the upper surface of the flexible piezoresistive conductive layer, and the plurality of upper electrodes being in corresponding contact with the upper surfaces of the plurality of rows of piezoresistive conductive units; The lower electrode layer comprises a plurality of strip-shaped lower electrodes, the plurality of lower electrodes are located on the lower surface of the flexible piezoresistive conductive layer, and the plurality of lower electrodes are in corresponding contact with the lower surfaces of the plurality of columns of piezoresistive conductive units.
2. The flexible pressure sensor according to claim 1, characterized in that: The segmentation holes are in the shape of long strips, and the distance between two adjacent segmentation holes is greater than 0; The piezoresistive conductive unit is square and is surrounded by four segmentation holes.
3. The flexible pressure sensor according to claim 1, characterized in that: The segmentation holes are circular with breakpoints, and the distance between two adjacent segmentation holes is greater than 0; The piezoresistive conductive unit is circular and is surrounded by one of the segmented holes.
4. The flexible pressure sensor according to claim 1, characterized in that: The segmentation holes are arc-shaped, and the distance between two adjacent segmentation holes is greater than 0; The piezoresistive conductive unit is circular and is surrounded by a plurality of the segmented holes located on the same circumference.
5. The flexible pressure sensor according to claim 1, characterized in that: The piezoresistive conductive unit is square; The width of the upper electrode is smaller than the side length of the piezoresistive conductive unit. The width of the lower electrode is smaller than the side length of the piezoresistive conductive unit.
6. The flexible pressure sensor according to claim 1, characterized in that: The piezoresistive conductive unit is circular; The width of the upper electrode is smaller than the diameter of the piezoresistive conductive unit. The width of the lower electrode is smaller than the diameter of the piezoresistive conductive unit.
7. The flexible pressure sensor according to claim 1, characterized in that: The upper electrode is bonded to the upper surface of the flexible piezoresistive conductive layer; The lower electrode is bonded to the lower surface of the flexible piezoresistive conductive layer.
8. The flexible pressure sensor according to claim 1, characterized in that: The upper electrode layer further comprises an upper substrate, and the plurality of upper electrodes are bonded on the upper substrate in parallel and at intervals; The lower electrode layer further includes a lower substrate, and the plurality of lower electrodes are bonded on the lower substrate in parallel and at intervals.
9. The flexible pressure sensor according to any one of claims 1 to 8, characterized in that: The width of the segmentation hole is any value between 0.2 mm and 0.3 mm; Alternatively, the width of the dividing hole is any value between 0.3 mm and 2 mm.
10. An electronic product, characterized in that: The flexible pressure sensor comprises the flexible pressure sensor as claimed in any one of claims 1 to 9.