Pre-detection tool for wafer conveying device

Abstract

The utility model discloses a pre-checking tool for a wafer conveying device, relates to the technical field of semiconductors, and solves the technical problem that the prior art is inconvenient to maintain the abnormal problem of a Z-axis moving part, the wafer conveying device comprises the Z-axis moving part used for driving a wafer to do lifting motion in the Z-axis direction, the pre-checking tool comprises a fixing part, a clamping part, a clamping part and a clamping part, the fixing part is used for fixing the Z-axis moving part; the controller is electrically connected with the Z-axis moving part and is used for controlling the operation of the Z-axis moving part; and the acquisition unit is arranged on the fixed part, is positioned on one side of the Z-axis moving part, and is used for acquiring sound information when the Z-axis moving part operates. According to the utility model, abnormal problems during the operation of the Z-axis moving part can be found in advance, and maintenance is carried out aiming at the abnormal problems, so that the maintenance of the Z-axis moving part is greatly facilitated, and time and labor cost are saved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a pre-inspection tool for a wafer conveying device. Background Art

[0002] The wafer conveyor is used to convey wafers in different process flows. The Z-axis moving part is the main moving part of the wafer conveyor and needs to be inspected and repaired during actual use. At present, after the Z-axis moving part and the cavity are assembled, if abnormal vibration, abnormal noise or other abnormal conditions occur, the operation status can only be checked by manually sliding the Z-axis up and down, and the status after power-on cannot be guaranteed. The abnormal noise of the Z-axis moving part cannot be discovered in this way. It can only be discovered when the Z-axis moving part moves after power-on after docking and delivery. If an abnormality is found, it is necessary to fully disassemble the location where the abnormal noise occurs, find out the cause, and restore after solving it. At the same time, the debugging personnel need to re-debug the projects that have been debugged, and due to the small space after docking, the disassembly process is extremely cumbersome and difficult, which is easy to damage the appearance of key components such as the cavity. If the troubleshooting process requires frequent disassembly and assembly, it will result in a large loss of man-hours, which greatly increases the labor cost.

[0003] Therefore, it is necessary to provide a pre-inspection tool for a wafer conveying device to solve the above-mentioned problems existing in the prior art. Utility Model Content

[0004] The purpose of the utility model is to provide a pre-inspection tooling for a wafer conveying device, which can truly simulate the operating status of the Z-axis moving part after installation, discover abnormal problems during the operation of the Z-axis moving part in advance and repair the abnormal problems, greatly facilitating the maintenance of the Z-axis moving part and saving time and labor costs.

[0005] To achieve the above purpose, the technical solution of the utility model is as follows:

[0006] A pre-inspection tool for a wafer conveying device, the wafer conveying device comprising a Z-axis moving part for driving the wafer to perform lifting movement in the Z-axis direction, the pre-inspection tool comprising:

[0007] A fixing part, used for fixing the Z-axis moving part;

[0008] A controller, the controller being electrically connected to the Z-axis motion part and used for controlling the operation of the Z-axis motion part;

[0009] A collection unit is arranged on the fixed part and located at one side of the Z-axis moving part, and is used to collect sound information when the Z-axis moving part is in operation.

[0010] The beneficial effects of the pre-inspection tooling for a wafer conveying device provided by the utility model are: by designing a fixing part, the Z-axis moving part is placed completely vertically to realize the actual placement angle of the Z-axis moving part after docking with the cavity; at the same time, the operation state of the Z-axis moving part is controlled by designing a controller, that is, the actual operation state is simulated by powering on the Z-axis moving part before assembling the cavity, and the sound information of the Z-axis moving part during operation collected by the acquisition unit is fed back to the operator, that is, abnormal problems during the operation of the Z-axis moving part can be discovered offline and solved offline, breaking through the limitation of inconvenient maintenance due to the small space in the cavity, avoiding the loss of working hours and the possibility of damage to the inside of the cavity, improving the tooling efficiency, and greatly saving time and labor costs.

[0011] Furthermore, the acquisition unit includes a sound sensor, a first connecting rod and a second connecting rod, the first connecting rod is arranged on the fixed part, the second connecting rod is connected to the first connecting rod and is arranged orthogonally to the first connecting rod, the sound sensor is connected to the second connecting rod, and when the Z-axis motion part is fixed on the fixed part, the sound sensor is located on one side of the Z-axis motion part. The beneficial effect is that the structural matching form of the sound sensor, the first connecting rod and the second connecting rod is adopted, and this structural design is simple, and can accurately detect the sound information when the Z-axis motion part is running.

[0012] Furthermore, the first connecting rod is provided with a slide rail, the slide rail extends along the length direction of the first connecting rod, and the second connecting rod is connected to the slide rail and can move along the slide rail. The beneficial effect is that by designing the slide rail on the first connecting rod, the second connecting rod and the sound sensor can move on the slide rail, so that the sound sensor can detect the sound information of the moving part when the moving part moves as the moving part moves.

[0013] Furthermore, the first connecting rod is detachably connected to the fixing part and the second connecting rod. The beneficial effect is that the detachable connection method is convenient for installation and disassembly.

[0014] Furthermore, the second connecting rod is a telescopic structure. The beneficial effect is that by designing the second connecting rod as a telescopic structure, the distance between the second connecting rod and the Z-axis moving part can be flexibly adjusted, thereby changing the distance between the sound sensor and the Z-axis moving part.

[0015] Furthermore, the Z-axis motion part includes a driving component and a lifting shaft, the lifting shaft is connected to one end of the driving component, and the controller is electrically connected to the other end of the driving component, and is used to control the driving component to drive the lifting shaft to perform lifting motion in the Z-axis direction. The beneficial effect is that the lifting shaft is driven to move by the driving component, so as to achieve lifting motion of the lifting shaft in the Z-axis direction.

[0016] Furthermore, the Z-axis motion part further comprises a mounting plate and a slider slidably connected to the mounting plate, the slider being connected to the lifting shaft; the sound sensor is connected to the slider, and is used to collect sound information of the driving component and the lifting shaft when the slider moves. The beneficial effect is that by arranging the sound sensor on the slider, the sound sensor can collect sound information of the driving component and the lifting shaft when the slider moves.

[0017] Furthermore, the controller is connected to the drive assembly via an aviation plug, which has the beneficial effect of ensuring the reliability of electrical transmission by connecting the controller and the drive assembly with the aviation plug.

[0018] Furthermore, the fixed part is provided with a mounting hole, and the Z-axis moving part further comprises a support column, and the Z-axis moving part is fixed to the fixed part by inserting the support end of the support column into the mounting hole. The beneficial effect is that the Z-axis moving part stands perpendicular to the horizontal plane by providing a mounting hole adapted to the support column of the Z-axis moving part.

[0019] Furthermore, the fixing part is in the shape of a disk with a hollow center, which has the beneficial effects of not only reducing the weight of the fixing part itself, but also saving material costs and facilitating the transportation and installation of the fixing part. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a front view of a pre-inspection tooling for a wafer conveying device according to an embodiment of the utility model;

[0021] Figure 2 This is a schematic diagram of the connection between the Z-axis moving part and the fixed part of an embodiment of the utility model;

[0022] Figure 3 A top view of the fixing portion of an embodiment of the utility model;

[0023] Figure 4 This is a schematic diagram of the connection between the collection unit and the fixing part of an embodiment of the utility model;

[0024] Figure 5 A top view of a pre-inspection tooling for a wafer conveying device according to an embodiment of the utility model;

[0025] Figure 6 for Figure 5 Medium AA section view.

[0026] Figure numerals: 1. fixing part; 11. mounting hole; 2. Z-axis moving part; 21. driving assembly; 211. servo motor; 212. first pulley; 213. synchronous belt; 214. second pulley; 215. screw rod; 216. screw rod nut; 22. lifting shaft; 23. mounting plate; 24. slider; 241. first connecting block; 242. second connecting block; 25. elastic connecting member; 26. support column; 3. controller; 4. acquisition unit; 41. sound sensor; 42. first connecting rod; 43. second connecting rod; 44. slide rail; 5. protective plate. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the utility model belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0028] Since the Z-axis motion part is an important motion unit, if an abnormal problem is found, it can only be found and solved online, which is very inconvenient. Specifically, after the Z-axis motion part is assembled inside the cavity, if abnormal conditions such as abnormal noise occur, the Z-axis motion part needs to be disassembled as a whole in the cavity for maintenance, which causes inconvenience. Therefore, the pre-inspection tooling for the wafer conveying device of the utility model can complete the discovery and solution of problems before the Z-axis motion part is assembled in the cavity, and the offline operation state after installation can be truly simulated, and the existing abnormal problems can be discovered in advance, and these problems can be fed back to the staff, so as to solve the problems according to the feedback data, and the space before installation gives the staff enough space for disassembly, which greatly facilitates the maintenance work and saves time and labor costs. Online in this article refers to the Z-axis motion part being assembled in the cavity, and offline refers to the Z-axis motion part not being assembled in the cavity.

[0029] The specific implementation of the utility model is further described in detail below in conjunction with the accompanying drawings.

[0030] like Figure 1-Figure 4As shown, an embodiment of the utility model provides a pre-inspection tooling for a wafer conveying device, the wafer conveying device includes a Z-axis moving part 2, which is used to drive the wafer to do lifting and lowering movement in the Z-axis direction, and the pre-inspection tooling includes: a fixing part 1, a controller 3 and a collection unit 4. The fixing part 1 is used to fix the Z-axis moving part 2. Taking the horizontal plane of the operating table as a reference, the fixing part 1 is used to make the Z-axis moving part 2 perpendicular to the horizontal plane, thereby simulating the real placement scene of the Z-axis moving part 2 assembled in the cavity. The controller 3 is electrically connected to the Z-axis moving part 2, and is used to control the operation of the Z-axis moving part 2, thereby simulating the real state of the Z-axis moving part 2 when it is running in the cavity. The collection unit 4 is arranged on the fixing part 1 and is located on one side of the Z-axis moving part 2, and is used to collect sound information when the Z-axis moving part 2 is running. The sound information of the Z-axis moving part 2 collected by the collection unit 4 is fed back to the staff, so as to detect the abnormal situation of the Z-axis moving part 2.

[0031] In some embodiments of the present invention, the acquisition unit 4 is also connected to the controller 3 to feed back the collected sound information to the controller 3. The controller 3 reads and processes the sound information, and then sends a control signal to the Z-axis motion part 2 according to the processed sound information to control the operation of the Z-axis motion part 2.

[0032] It should be noted that the feedback of abnormal situations such as abnormal noises can also be perceived through vision and hearing, and in combination with the data collected by the collection unit 4, the abnormal situation can be fed back more quickly.

[0033] like Figure 1 and Figure 4 As shown, in some embodiments of the utility model, the acquisition unit 4 includes a sound sensor 41, a first connecting rod 42 and a second connecting rod 43. The first connecting rod 42 is arranged on the fixed part 1. The second connecting rod 43 is connected to the first connecting rod 42 and is arranged orthogonally to the first connecting rod 42. That is, the first connecting rod 42 is vertically arranged on the fixed part 1, and the second connecting rod 43 is parallel to the fixed part 1, so that the first connecting rod 42 is parallel to the Z-axis moving part 2. At the same time, the sound sensor 41 is connected to the second connecting rod 43. When the Z-axis moving part 2 is vertically fixed on the fixed part 1, the sound sensor 41 connected to the second connecting rod 43 is located on one side of the Z-axis moving part 2, that is, close to the Z-axis moving part 2, so as to detect the sound information when the Z-axis moving part 2 is running.

[0034] like Figure 4 As shown, in some embodiments of the present invention, the first connecting rod 42 is detachably connected to the fixing part 1, and the first connecting rod 42 is also detachably connected to the second connecting rod 43. This facilitates the disassembly and assembly of the pre-inspection tooling, and is more adaptable and can be applied to different types of wafer conveying devices.

[0035] like Figure 4As shown, in some embodiments of the utility model, the second connecting rod 43 is a telescopic structure. The second connecting rod 43 is designed as a telescopic structure, so that the sound sensor 41 can adapt to the Z-axis moving part 2 at different distances, and has greater flexibility. Exemplarily, the telescopic structure includes a fixed rod and a moving rod plugged and slidably connected in the fixed rod, and the fixed rod is provided with an adjustment member for fixing the moving rod to any position in the fixed rod. For example, the adjustment member includes a bolt that is penetrated and threadedly connected to the fixed rod, and the rod portion of the bolt abuts against the moving rod.

[0036] like Figure 1 and Figure 2 As shown, in some embodiments of the present invention, the Z-axis motion part 2 includes a driving component 21 and a lifting shaft 22. The lifting shaft 22 is connected to one end of the driving component 21, and the controller 3 is connected to the other end of the driving component 21. The controller 3 is used to control the driving component 21 to drive the lifting shaft 22 to move up and down in the Z-axis direction. That is, the controller 3 controls the operating state of the driving component 21, and the driving component 21 drives the lifting shaft 22 to move, thereby truly simulating the driving component 21 driving the lifting shaft 22 to make a reciprocating linear motion up and down in the Z-axis direction.

[0037] like Figure 1 and Figure 2 As shown, in some embodiments of the utility model, the driving assembly 21 includes a servo motor 211, a first pulley 212, a synchronous belt 213, a second pulley 214 and a lead screw. The driving end of the servo motor 211 is coaxially connected to the first pulley 212, the synchronous belt 213 is sleeved outside the first pulley 212 and the second pulley 214, and the lead screw is coaxially connected to the second pulley 214. The lead screw includes a lead screw 215 and a lead screw nut 216, and the lead screw nut 216 is sleeved on one end of the lead screw 215.

[0038] like Figure 5-Figure 6 As shown, the servo motor 211 is started, and the driving end of the servo motor 211 rotates to drive the first pulley 212 to rotate, and the first pulley 212 drives the synchronous belt 213 to move, and the synchronous belt 213 transmits power to the second pulley 214, and the second pulley 214 drives the screw rod 215 to move, and drives the screw rod nut 216 to move up and down in the Z-axis direction, and the screw rod nut 216 drives the slider 24 to move up and down in the Z-axis direction, and the slider 24 drives the lifting shaft 22 to move up and down. For example, the servo motor 211 rotates clockwise to drive the screw rod nut 216 and the slider 24 to move up to a certain position, thereby driving the lifting shaft 22 to rise to the upper limit position; for example, the servo motor 211 rotates counterclockwise to drive the screw rod nut 216 and the slider 24 to move down to a certain position, thereby driving the lifting shaft 22 to drop to the lower limit position, so that the lifting shaft 22 moves up and down along the Z-axis direction within a certain range of travel (from the upper limit position to the lower limit position).

[0039] like Figure 1 and Figure 2 As shown and combined with reference Figure 4-Figure 6 In some embodiments of the utility model, the Z-axis motion part 2 further includes a mounting plate 23 and a slider 24 slidably connected to the mounting plate 23. The slider 24 is connected to the lifting shaft 22. When the screw rod 215 is driven by the driving assembly 21, the screw nut 216 drives the slider 24 to move up and down in the Z-axis direction, thereby driving the lifting shaft 22 to move up and down in the Z-axis direction. At the same time, a guide rail is provided on the mounting plate 23, and the slider 24 slides up and down on the mounting plate 23 along the guide rail. The travel range of the guide rail is from the upper limit position to the lower limit position. The sound sensor 41 is connected to the slider 24, so that the sound sensor 41 moves with the slider 24, and is used to collect sound information when the driving assembly 21 and the lifting shaft 22 are running. That is, one side of the sound sensor 41 is connected to the second connecting rod 43, and the other side is connected to the slider 24, which is used to collect sound information when the driving assembly 21 and the lifting shaft 22 are running, so as to detect whether the driving assembly 21 and the lifting shaft 22 have abnormal conditions such as abnormal noise when running.

[0040] Specifically, the slider 24 includes a first connecting block 241 and a second connecting block 242 connected to the first connecting block 241. The first connecting block 241 is connected to the guide rail of the mounting plate 23 and slides up and down along the guide rail. The second connecting block 242 is connected to the screw nut 216 and the lifting shaft 22 respectively. When the screw nut 216 is driven to move, the second connecting block 242 is driven to move, and the second connecting block 242 drives the lifting shaft to move up and down in the Z-axis direction.

[0041] like Figure 4 As shown, in some embodiments of the utility model, a slide rail 44 is provided on the first connecting rod 42. The slide rail 44 extends along the length direction of the first connecting rod 42. The second connecting rod 43 is connected to the slide rail 44, and can move up and down along the slide rail. The travel range of the slide rail is the same as the travel range of the guide rail. That is, the driving component 21 drives the slider 24 to move up and down in the Z-axis direction, and the slider 24 drives the sound sensor 41 to move accordingly, and the sound sensor 41 drives the second connecting rod 43 to slide on the first connecting rod 42 along the slide rail 44, so that the sound sensor 41 moves accordingly when the moving part moves, and detects the sound information when the moving part moves.

[0042] like Figure 1-Figure 3As shown, in some embodiments of the utility model, a mounting hole 11 is provided on the fixing part 1. The Z-axis motion part 2 is vertically fixed to the fixing part 1 through the mounting hole 11. The Z-axis motion part 2 also includes a support column 26 for supporting the mounting plate 23 and the components mounted on the mounting plate 23. During installation, the supporting end of the support column 26 is inserted into the mounting hole 11, thereby fixing the mounting plate 23 and the fixing part 1. When performing specific structural design, since the shaft diameter of the support column 26 and the aperture of the mounting hole 11 have a certain accuracy, it is ensured that the support column 26 can be perpendicular to the fixing part 1, so that the mounting plate 23 and the components mounted on the mounting plate 23 are perpendicular to the fixing part 1, that is, in a standing state, thereby ensuring that the entire Z-axis motion part is perpendicular to the horizontal operating table, truly simulating the scene of being placed in the cavity. The number of mounting holes 11 is specifically set according to the actual situation of the support column 26. For example, the mounting holes 11 are designed to be four, so as to adapt to the four support columns 26, so as to be more stably fixed vertically on the fixing part 1.

[0043] like Figure 1 As shown, in some embodiments of the utility model, the Z-axis motion part 2 further includes an elastic connector 25. The elastic connector 25 is connected to the lifting shaft 22. When the lifting shaft 22 is driven, the elastic connector 25 is driven to move. The collection unit 4 is also used to collect sound information when the elastic connector 25 performs telescopic movement. In this way, it is detected whether abnormal conditions such as abnormal sounds occur when the elastic connector 25 performs telescopic movement.

[0044] like Figure 2 As shown, in some embodiments of the present invention, the elastic connector 25 is a bellows. The bellows is used to connect the lifting shaft 22 to alleviate the vibration of the lifting shaft 22 moving up and down, making the power transmission more stable.

[0045] When the Z-axis moving part 2 is in operation, the positions where abnormal noise may be generated include but are not limited to the following positions: (1) When the bellows is driven to move up and down, abnormal noise may occur; (2) When the lifting shaft 22 moves up and down, it will have excessive contact with its sheath, generating abnormal noise; (3) When the servo motor 211 and the first pulley 212, the synchronous belt 213, and the second pulley 214 are in operation, abnormal noise may be generated. In order to more accurately collect the sound information of these moving parts that generate abnormal noise, the collection unit 4 can be set at these three positions, so as to more accurately detect and prevent the occurrence of abnormal noise, that is, the sound sensor 41 is not connected to the slider 24, and the sound sensor 41 is set on one side of the driving component 21, one side of the lifting shaft 22, and one side of the elastic connector 25, so as to accurately measure the sound information of these three positions and monitor whether these three moving parts are abnormal.

[0046] The sound sensor 41 is used to collect abnormal sounds when the bellows is extended and retracted, abnormal sounds when the drive assembly 21 is running, and abnormal sounds when the lifting shaft 22 moves up and down, so as to detect whether an abnormality occurs based on the collected sound information. Of course, the positions detected by the sound sensor 41 are not limited to these three positions.

[0047] like Figure 1 and Figure 2 As shown, in some embodiments of the present invention, the controller 3 is connected to the servo motor 211 of the driving assembly 21 through an aviation plug to ensure the reliability of electrical transmission.

[0048] like Figure 3 As shown, in some embodiments of the present invention, the fixing part 1 is a disk-shaped hollowed-out center. Designing the center of the fixing part 1 to be hollowed-out can not only reduce the weight of the fixing part 1 itself, but also save material costs and facilitate the handling and installation of the fixing part 1.

[0049] In other embodiments of the present invention, the fixing portion 1 is also polygonal, such as a cuboid, a cube, etc. It should be noted that the shape of the fixing portion 1 is not specifically limited.

[0050] like Figure 1 and Figure 2 As shown, in some embodiments of the present invention, the pre-inspection tooling for the wafer conveyor device further includes a protective plate 5. The protective plate 5 is fixedly arranged on the fixing part 1, thereby surrounding the first pulley 212, the synchronous belt 213 and the second pulley 214 to ensure safety.

[0051] In some embodiments of the present invention, the specific operation steps of the pre-inspection tooling for the wafer conveyor are as follows:

[0052] Step S1: Assemble the Z-axis moving part 2 and vertically install the assembled Z-axis moving part 2 on the fixed part 1.

[0053] Specifically: insert the four support columns 26 of the assembled Z-axis moving part 2 into the four mounting holes 11 of the fixed part 1 for fixing, so that the Z-axis moving part 2 is installed as a whole on the fixed part 1; at the same time, check the position of the displacement sensor baffle and the displacement sensor of the lower Z-axis moving part 2 (the displacement sensor and the displacement sensor baffle cooperate to measure and limit the upper limit position and the lower limit position of the lifting shaft 22) to prevent them from being touched or damaged during movement.

[0054] Step S2: Connect the controller 3 to the servo motor 211 using an aviation plug, connect the power supply, and input a set of driver programs that can only realize the installation and operation of the Z-axis motion part 2.

[0055] Step S3: Release the brake of the servo motor 211, start the test software, and control the movement of the first pulley 212, the synchronous belt 213, the second pulley 214 and the lead screw of the drive assembly 21 to drive the lifting shaft 22 to move up and down, thereby driving the elastic connecting member 25 to perform telescopic movement.

[0056] Step S4: Observe the operating status of the driving assembly 21, lifting shaft 22 and elastic connector 25 of the Z-axis moving part 2 to see if there are any abnormal conditions such as obvious vibration and abnormal noise. At the same time, observe whether the sound information collected by the sound sensor 41 of the collection unit 4 exceeds the normal range.

[0057] Step S5: If the test result meets the requirements, the Z-axis moving part 2 is removed from the fixed part 1 and assembled with the cavity. If the test result does not meet the requirements, that is, vibration, abnormal sound, etc. occur, it is necessary to determine the location of the abnormality and disassemble it in a targeted manner to solve the problem. For example, if the synchronous belt 213 of the driving component 21 makes an abnormal sound, the synchronous belt 213 can be removed and replaced.

[0058] Step S6: After solving the abnormal problem, it is necessary to test again according to steps S1-S5. After the test is qualified, the next step of assembly is carried out, that is, the qualified Z-axis motion part 2 is installed in the cavity. In the cavity, the top of the Z-axis motion part 2 is connected to the robot, and the robot grabs the wafer, thereby realizing the transmission of the wafer in different process flows.

[0059] In summary, the utility model is based on the pre-verification of the possibility of abnormal problems generated during equipment testing. By designing a fixing part, the Z-axis moving part is placed completely vertically to achieve the actual placement angle after the Z-axis moving part is docked with the cavity; the operating state of the Z-axis moving part is controlled by designing a controller, that is, the actual operating state is simulated by powering on the Z-axis moving part before assembling the cavity. At the same time, the sound information of the Z-axis moving part during operation collected by the acquisition unit is fed back to the operator, that is, abnormal problems during the operation of the Z-axis moving part are discovered offline and can be solved offline, breaking through the limitation of inconvenient maintenance due to the small space in the cavity, avoiding the loss of working hours and the possibility of damage to the inside of the cavity, improving tooling efficiency, and greatly saving time and labor costs.

[0060] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A pre-inspection tool for a wafer conveying device, wherein the wafer conveying device comprises a Z-axis moving part for driving the wafer to perform lifting movement in the Z-axis direction, characterized in that: The pre-inspection tooling comprises: A fixing part, used for fixing the Z-axis moving part; A controller, the controller being electrically connected to the Z-axis motion part and used for controlling the operation of the Z-axis motion part; A collection unit is arranged on the fixed part and located at one side of the Z-axis moving part, and is used to collect sound information when the Z-axis moving part is in operation.

2. The pre-inspection tooling for a wafer conveying device according to claim 1, characterized in that: The acquisition unit includes a sound sensor, a first connecting rod and a second connecting rod, the first connecting rod is arranged on the fixed part, the second connecting rod is connected to the first connecting rod and is arranged orthogonally to the first connecting rod, the sound sensor is connected to the second connecting rod, and when the Z-axis moving part is fixed on the fixed part, the sound sensor is located on one side of the Z-axis moving part.

3. The pre-inspection tooling for a wafer conveying device according to claim 2, characterized in that: The first connecting rod is provided with a slide rail, and the slide rail extends along the length direction of the first connecting rod. The second connecting rod is connected to the slide rail and can move along the slide rail.

4. The pre-inspection tooling for a wafer conveying device according to claim 2, characterized in that: The first connecting rod is detachably connected to the fixing portion and the second connecting rod.

5. The pre-inspection tooling for a wafer conveying device according to claim 2, characterized in that: The second connecting rod is a telescopic structure.

6. The pre-inspection tooling for a wafer conveying device according to claim 2, characterized in that: The Z-axis motion part includes a driving component and a lifting shaft, the lifting shaft is connected to one end of the driving component, and the controller is electrically connected to the other end of the driving component for controlling the driving component to drive the lifting shaft to perform lifting motion in the Z-axis direction.

7. The pre-inspection tooling for a wafer conveying device according to claim 6, characterized in that: The Z-axis motion part also includes a mounting plate and a slider slidably connected to the mounting plate, and the slider is connected to the lifting shaft; the sound sensor is connected to the slider and is used to collect sound information of the driving assembly and the lifting shaft when the slider moves.

8. The pre-inspection tooling for a wafer conveying device according to claim 6, characterized in that: The controller is connected to the driving assembly via an aviation plug.

9. The pre-inspection tooling for a wafer conveying device according to claim 1, characterized in that: The fixing part is provided with a mounting hole, and the Z-axis moving part further comprises a supporting column, and the Z-axis moving part is fixed to the fixing part by inserting the supporting end of the supporting column into the mounting hole.

10. The pre-inspection tooling for a wafer conveying device according to claim 1, characterized in that: The fixing portion is in the shape of a disk with a hollow center.

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