Isolation device
By designing an isolation device including a mobile base and liftable and telescopic isolation curtain, the problem of poor isolation effect in the purification room in semiconductor manufacturing process is solved, efficient and automated isolation operations are achieved, labor costs are reduced and pollution is avoided.
Patent Information
- Application Number
- CN202421703959.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-17
- Publication Date
- 2025-05-06
- Estimated Expiration
- 2034-07-17
AI Technical Summary
In semiconductor manufacturing processes, the isolation effect of the purification room in the prior art is poor, manual installation of isolation curtains is low efficiency and increases labor costs, and handling isolation items in a narrow space is prone to contamination.
An isolation device including a mobile base and an isolation part is designed, which consists of a support table and a moving structure, which can drive the support table to be translated, and the isolation part includes an elevator and retractable isolation curtain, through which an automated isolation operation is achieved.
It improves the isolation effect of the purification room, reduces labor costs, improves isolation efficiency, and avoids pollution in the purification room.
Smart Images
Figure CN222838810U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of integrated circuit manufacturing, in particular to an isolation device. Background Art
[0002] Because the cost of building and operating clean rooms in the fields of medical, food, semiconductor, etc. is high, especially the cost of producing and operating clean rooms used in semiconductor manufacturing processes is higher, the space design for placing machines in clean rooms is relatively compact. After the semiconductor process equipment is placed in the clean room in the semiconductor manufacturing process, the space in the clean room becomes smaller, and it is inconvenient to move large objects.
[0003] The clean room used in the semiconductor process has a high purification level. Even if a short construction is carried out in the clean room, in order to ensure that the clean environment around the construction area is not affected, some isolation and protection measures need to be adopted to isolate the construction area from the surrounding environment. At present, the main method of isolating the construction area from the surrounding environment is to manually install and fix the isolation curtain. However, the manual installation method increases the labor cost, and the manual installation of the isolation curtain is less efficient and takes up more time in the clean room. In addition, since the manual installation and fixing of the isolation curtain cannot fully isolate some isolation items, it is necessary to move or transport some isolation items in the isolation room. The small space in the clean room is not conducive to the transportation of isolation items, and the transportation process is very likely to cause pollution to the clean room.
[0004] Therefore, how to improve the isolation effect in the clean room, reduce the consumption of manpower costs during the isolation process, and improve the isolation efficiency is a technical problem that needs to be solved urgently. Summary of the invention
[0005] The utility model provides an isolation device, which is used for improving the isolation effect in a clean room, reducing the consumption of manpower cost during the isolation process, and improving the isolation efficiency.
[0006] According to some embodiments, the utility model provides an isolation device, comprising:
[0007] A mobile base, comprising a support platform and a mobile structure, wherein the support platform comprises a top surface and a bottom surface that are relatively distributed, the mobile structure is connected to the support platform, and the mobile structure can drive the support platform to translate along a direction parallel to the top surface of the support platform;
[0008] The isolation part is located above the support platform along a first direction, and the isolation part includes a bracket connected to the support platform and an isolation curtain installed on the bracket, wherein the first direction is perpendicular to the top surface of the support platform.
[0009] In some embodiments, the mobile structure comprises:
[0010] The roller is installed on the bottom surface of the support platform.
[0011] In some embodiments, the mobile base further comprises:
[0012] A lifting structure is installed on the bottom surface of the support platform, and the lifting structure can drive the support platform to move up and down along the first direction.
[0013] In some embodiments, the isolation portion includes:
[0014] The first isolating portion is connected to the top surface of the support platform. The first isolating portion is connected to the edge of the top surface of the support platform and is distributed around the center of the top surface of the support platform. The first isolating portion can move up and down along the first direction.
[0015] In some embodiments, the first isolation portion includes a first bracket connected to the top surface of the support platform and a first isolation curtain mounted on the first bracket;
[0016] There are multiple first brackets, and each of the first brackets can independently move up and down along the first direction.
[0017] In some embodiments, the first isolation portion further comprises:
[0018] A rotating structure is located on the top surface of the support platform and is connected to the first bracket, and is used to drive the first bracket to rotate around the rotating structure within a preset angle, so that the first bracket and the top surface of the support platform are obliquely intersected.
[0019] In some embodiments, the isolation portion further comprises:
[0020] The second isolation part is connected to a side of the first isolation part away from the support platform along the first direction, and the second isolation part can be telescopically moved along a second direction, wherein the second direction is parallel to the top surface of the support platform.
[0021] In some embodiments, the second isolation portion comprises:
[0022] a second bracket extending along the second direction and connected to an end of the first bracket away from the support platform, the second bracket being capable of telescopic movement along the second direction;
[0023] a third bracket extending along a third direction and connected to the second bracket and an end of the first bracket away from the support platform, the third bracket being capable of telescopic movement along the third direction, wherein the third direction is parallel to the top surface of the support platform and intersects with the second direction;
[0024] The second isolation curtain is installed on the second bracket and the third bracket.
[0025] In some embodiments, the bracket in the isolation portion is connected to the top surface of the support platform, the bracket extends along the first direction, and the bracket can move up and down along the first direction;
[0026] The isolation curtain in the isolation portion is connected to an end portion of the bracket away from the support platform along the first direction.
[0027] In some embodiments, the isolation curtain is a transparent isolation plate.
[0028] The isolation device provided by the utility model is provided with a movable base including a support platform and a movable structure, and the movable structure can drive the support platform to translate in a direction parallel to the top surface of the support platform, and an isolation part is provided above the support platform, and the starting structure can drive the isolation part above the support platform to move synchronously while driving the translation of the support platform, thereby avoiding the tedious operation of manual installation, improving the efficiency of isolation, and improving the isolation effect. Moreover, the first isolation part in the isolation device can move up and down in a first direction, and the second isolation part can move telescopically in a direction parallel to the top surface of the support platform, so that the first isolation part in the isolation device can be matched with the items to be isolated by lifting and lowering and / or telescoping the second isolation part, which not only further improves the isolation effect, but also avoids the impact of handling or moving the isolated items on the clean room. BRIEF DESCRIPTION OF THE DRAWINGS
[0029] Attached Figure 1 It is a structural schematic diagram of an isolation device in a specific implementation mode of the utility model;
[0030] Attached Figure 2 It is a structural schematic diagram of another isolation device in a specific implementation manner of the utility model. DETAILED DESCRIPTION
[0031] The specific implementation of the isolation device provided by the utility model is described in detail below with reference to the accompanying drawings.
[0032] This specific embodiment provides an isolation device, Figure 1 Schematic diagram of the structure of an isolation device in a specific implementation mode of the utility model. Figure 1As shown, the isolation device comprises:
[0033] A mobile base, comprising a support platform 10 and a mobile structure, wherein the support platform 10 comprises a top surface 101 and a bottom surface 102 which are relatively distributed, and the mobile structure is connected to the support platform 10, and the mobile structure can drive the support platform 10 to translate along a direction parallel to the top surface 101 of the support platform 10;
[0034] The isolation part is located above the support platform 10 along a first direction D1, and includes a bracket connected to the support platform 10 and an isolation curtain installed on the bracket, wherein the first direction D1 is perpendicular to the top surface 101 of the support platform 10.
[0035] Specifically, the mobile base includes the support platform 10 and the mobile structure, the support platform 10 includes the top surface 101 and the bottom surface 102 relatively distributed along the first direction D1, and the mobile structure is installed on the bottom surface 102 of the support platform 10. The isolation part is installed on the top surface 101 of the support platform 10 along the first direction D1. The isolation part includes the bracket and the isolation curtain installed on the bracket, and the bracket is used to support the isolation curtain. When construction is performed in a clean room of a semiconductor manufacturing process (for example, maintenance of part of semiconductor process equipment), the area between the isolation curtain in the isolation part and the support platform 10 or the area surrounded by the isolation curtain in the isolation part and the support platform 10 is used as an isolation space, and the isolation curtain is used to isolate the isolation space from other areas in the clean room (for example, the area in the clean room except the area occupied by the isolation device) to prevent the construction in the clean room from affecting other clean environments in the clean room. At the same time, since the mobile structure can drive the support platform 10 to translate in a direction parallel to the top surface 101 of the support platform 10, the translational movement of the support platform 10 drives the isolation part located above the support platform 10 to move synchronously, that is, it is only necessary to translate the isolation device to the position required for construction in the clean room through the mobile structure, and there is no need to manually install the isolation curtain at the construction position, thereby avoiding the tedious operation of manual installation, improving the efficiency of isolation, and improving the isolation effect. At the same time, the top surface 101 of the support platform 10 can be used as a bearing surface for construction workers during the construction process, that is, construction workers can stand on the top surface of the support platform 10, which not only raises the height of the construction workers and allows them to perform construction at high places, but also reduces the contact between the construction workers and the ground in the clean room, thereby further reducing the impact on the purification environment in the clean room.
[0036] In some embodiments, the mobile structure comprises:
[0037] The roller is installed on the bottom surface 102 of the support platform 10 .
[0038] For example, there are multiple rollers, and the multiple rollers are symmetrically distributed about the center of the bottom surface 102 of the support platform 10 to smoothly move the support platform 10 and prevent the isolation device from tilting during the translation process.
[0039] In one example, the mobile base also includes feet, which are installed on the bottom surface 102 of the support platform 10, and the feet can be telescopically moved along the first direction D1, so that after the support platform 10 is translated to the position where construction is required in the clean room, the feet are extended along the first direction D1 and abut against the ground of the clean room to fix and support the support platform 10 to prevent the support platform 10 from moving or shaking during the construction process.
[0040] In some embodiments, the mobile base further comprises:
[0041] The lifting structure is installed on the bottom surface 102 of the support platform 10 , and the lifting structure can drive the support platform 10 to move up and down along the first direction D1 .
[0042] In one example, the lifting structure may include an electric cylinder. The lifting structure is installed on the bottom surface 102 of the support platform 10, and the lifting structure can drive the support platform 10 to move up and down along the first direction D1. The lifting movement of the support platform 10 along the first direction D1 drives the isolation part above it to move up and down along the first direction D1. On the one hand, it is possible to adjust the height of the staff carried on the top surface 101 of the support platform 10, which is convenient for construction work at different heights, thereby expanding the application range and application field of the isolation device; on the other hand, when the isolation part moves up and down along the first direction D1, the isolation curtain in the isolation part moves up and down synchronously along the first direction D1, so that the objects to be isolated (such as machines) at different heights in the clean room can be isolated, which improves the flexibility of isolation selection in the clean room and further improves the isolation effect. In one example, the mobile base also includes a protective structure, which is connected to the lifting structure and is used to limit the height of the support platform 10 along the first direction D1 to improve the safety of construction personnel during construction. Wherein, the protection structure may include a pulley assembly and a gear assembly connected to the pulley assembly.
[0043] In some embodiments, the isolation portion includes:
[0044] The first isolation portion is connected to the top surface 101 of the support platform 10 . The first isolation portion is connected to the edge of the top surface 101 of the support platform 10 and is distributed around the center of the top surface 101 of the support platform 10 . The first isolation portion can move up and down along the first direction D1 .
[0045] In some embodiments, the first isolation portion includes a first bracket 11 connected to the top surface 101 of the support platform 10 and a first isolation curtain 12 installed on the first bracket 11;
[0046] There are multiple first brackets 11 , and each of the first brackets 11 can independently move up and down along the first direction D1 .
[0047] For example, if Figure 1 As shown, the first isolation part includes a plurality of first brackets 11 connected to the top surface 101 of the support platform 10, and the first bracket 11 is connected to the edge of the top surface 101 of the support platform 10 to avoid occupying too much space on the top surface 101 of the support platform 10, so that the construction personnel have enough space to carry out construction work. A plurality of first brackets 11 are distributed around the center of the top surface 101 of the support platform 10, and the first isolation curtain 12 is installed on the bracket 11. The first isolation curtain 12 and the top surface of the support platform 10 are surrounded together to form an isolation space 16, and the construction personnel carry out construction work in the isolation space, and the isolation space 16 is isolated from other areas in the clean room by the first isolation curtain 12. Each first bracket 11 can independently move up and down along the first direction D1, and the lifting and lowering movement of the first bracket 11 along the first direction D1 will drive the first isolation curtain 12 installed thereon to move synchronously to adjust the height of the first isolation curtain 12 along the first direction D1, so as to realize the isolation of objects (such as machines) of different heights in the clean room from the isolation space. The lifting and lowering movement of the first bracket 11 along the first direction D1 will drive the first isolation curtain 12 installed thereon to move synchronously, so that the first isolation curtain 12 is extended and retracted along the first direction D1 to adjust the expansion area and height of the first isolation curtain 12. For example, when the first bracket 11 rises along the first direction D1, the first isolation curtain 12 is extended upward along the first direction D1, and the expansion area and height of the first isolation curtain 12 are increased at the same time; when the first bracket is lowered along the first direction D1, the first isolation curtain 12 is retracted downward along the first direction D1, and the expansion area and height of the first isolation curtain 12 are reduced at the same time. In one example, the first isolation curtain 12 can be a honeycomb curtain or a telescopic plate.
[0048] At the same time, since each of the first brackets 11 can independently move up and down along the first direction D1, by independently adjusting the height of each of the first brackets 11 along the first direction D1, the heights of the plurality of first brackets 11 along the first direction D1 are the same or different, so that the plurality of first brackets 11 and the first isolation curtain 12 are combined into different isolation shapes, so as to realize the isolation of objects of different shapes (such as machines) in the clean room from the isolation space 16. There is at least an area between two adjacent first brackets 11 where the first isolation curtain 12 is not set, that is, the first isolation curtain 12 does not fully surround the top surface 101 of the support platform 10, so as to facilitate construction operations.
[0049] In one example, the lengths of the plurality of first brackets 11 along the first direction D1 are the same, simplifying the manufacturing process of the isolation device. In another example, at least two first brackets 11 have different lengths along the first direction D1 to match the shapes of different objects to be isolated, further improving the isolation effect.
[0050] In some embodiments, the first isolation portion further comprises:
[0051] The rotating structure is located on the top surface 101 of the support platform 10, and the rotating structure is connected to the first bracket 11, and is used to drive the first bracket 11 to rotate around the rotating structure within a preset angle, so that the first bracket 11 and the top surface 101 of the support platform 10 are obliquely intersected.
[0052] For example, the rotating structure includes a rotating shaft and a driver, wherein the rotating shaft is mounted on the top surface 101 of the support table 10 and connected to the first bracket 11. The driver is connected to the first bracket 11 and is used to drive the first bracket 11 to rotate around the rotating shaft, so that the rotated first bracket 11 and the top surface 101 of the support table 10 are obliquely intersected to adjust the shape of the isolation space 16 and facilitate the isolation of objects of different shapes (such as machines) in the clean room from the isolation space 16. In one example, the angle between the first bracket 11 and the top surface 101 of the support table 10 is greater than or equal to 45 degrees and less than or equal to 90 degrees.
[0053] In some embodiments, the isolation portion further comprises:
[0054] The second isolation portion is connected to a side of the first isolation portion away from the support platform 10 along the first direction D1, and the second isolation portion can telescopically move along the second direction D2, wherein the second direction D2 is parallel to the top surface 101 of the support platform 10.
[0055] In some embodiments, the second isolation portion comprises:
[0056] A second bracket 13 extends along the second direction D2 and is connected to an end of the first bracket 11 away from the support platform 10, and the second bracket 13 can telescopically move along the second direction D2;
[0057] The third bracket 14 extends along the third direction D2 and is connected to the second bracket 13 and the end of the first bracket 11 away from the support platform 10, and the third bracket 14 can telescopically move along the third direction D3, wherein the third direction D3 is parallel to the top surface of the support platform 10, and the third direction D3 intersects with the second direction D2;
[0058] The second isolation curtain 15 is installed on the second bracket 13 and the third bracket 14 .
[0059] For example, if Figure 1 As shown, the second bracket 13 is located above the first bracket 11 along the first direction D1, and the second bracket 13 extends along the second direction D2, and the second bracket 13 can telescopically move along the second direction D2 to adjust the length of the second bracket 13 along the second direction D2. The second isolation curtain 15 completely covers the area surrounded by the second bracket 13 and the third bracket 14. The third bracket 14 is located above the first bracket 11 along the first direction D1, and the third bracket 14 extends along the third direction D3 and can telescopically move along the third direction D3 to adjust the length of the third bracket 14 along the third direction D3. By adjusting the length of the second bracket 13 along the second direction D2 and the length of the third bracket 14 along the third direction D3, the movement of the second bracket 13 and the movement of the third bracket 14 can both synchronously drive the expansion and contraction of the second isolation curtain 15, so as to adjust the shape and size of the second isolation curtain 15 when it is unfolded, so as to realize the isolation of objects (such as machines) of different shapes and sizes in the clean room from the isolation space 16.
[0060] In such Figure 1 In the structure shown, the first bracket 11, the second bracket 13 and the third bracket 14 together constitute the bracket in the isolation part, and the first isolation curtain 12 and the second isolation curtain 15 together constitute the isolation curtain in the isolation part.
[0061] Attached Figure 2 Schematic diagram of another isolation device in a specific embodiment of the utility model. In other embodiments, such as Figure 2As shown, the bracket 20 in the isolation portion is connected to the top surface of the support platform, the bracket extends along the first direction, and the bracket can move up and down along the first direction;
[0062] The isolation curtain 21 in the isolation portion is connected to the end of the bracket 20 away from the support platform along the first direction D1.
[0063] In some embodiments, the isolation curtain 21 is a transparent isolation plate.
[0064] For example, the lifting and lowering movement of the bracket 20 along the first direction D1 will synchronously drive the lifting and lowering movement of the isolation curtain 21 connected to the top of the bracket 20 along the first direction D1, so as to adjust the height of the isolation curtain 21 along the first direction D1 and the unfolding area of the isolation curtain 21, so that the isolation curtain 21 can isolate objects at different heights in the clean room. The isolation curtain 21 is a transparent isolation plate, so as to observe the state of the isolated objects above the isolation curtain 21. In one example, the length of the isolation curtain 21 along the second direction D2 is 1200mm, and the width of the isolation curtain 21 along the third direction D3 is 600mm or 1200mm, so as to isolate the FFU (Fan Filter Unit) in the clean room.
[0065] The isolation device provided in this specific embodiment is provided with a movable base including a support platform and a movable structure, and the movable structure can drive the support platform to translate in a direction parallel to the top surface of the support platform, and an isolation part is provided above the support platform, and the starting structure can drive the isolation part above the support platform to move synchronously while driving the translation of the support platform, thereby avoiding the tedious operation of manual installation, improving the efficiency of isolation, and improving the isolation effect. Moreover, the first isolation part in the isolation device can move up and down in a first direction, and the second isolation part can move telescopically in a direction parallel to the top surface of the support platform, so that the first isolation part in the isolation device can be matched with the items to be isolated by lifting and lowering and / or telescoping the second isolation part, which not only further improves the isolation effect, but also avoids the impact of handling or moving the isolated items on the clean room.
[0066] The above is only a preferred embodiment of the present invention. It should be pointed out that ordinary technicians in this technical field can make several improvements and modifications without departing from the principle of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.
Claims
1. An isolation device, characterized in that: include: A mobile base, comprising a support platform and a mobile structure, wherein the support platform comprises a top surface and a bottom surface that are relatively distributed, the mobile structure is connected to the support platform, and the mobile structure can drive the support platform to translate along a direction parallel to the top surface of the support platform; The isolation part is located above the support platform along a first direction, and the isolation part includes a bracket connected to the support platform and an isolation curtain installed on the bracket, wherein the first direction is perpendicular to the top surface of the support platform.
2. The isolation device according to claim 1, characterized in that: The mobile structure comprises: The roller is installed on the bottom surface of the support platform.
3. The isolation device according to claim 1, characterized in that: The movable base further includes: a lifting structure installed on the bottom surface of the support platform, and the lifting structure can drive the support platform to move up and down along the first direction.
4. The isolation device according to claim 1, characterized in that: The isolation portion comprises: The first isolating portion is connected to the top surface of the support platform. The first isolating portion is connected to the edge of the top surface of the support platform and is distributed around the center of the top surface of the support platform. The first isolating portion can move up and down along the first direction.
5. The isolation device according to claim 4, characterized in that: The first isolation part includes a first bracket connected to the top surface of the support platform and a first isolation curtain installed on the first bracket; There are multiple first brackets, and each of the first brackets can independently move up and down along the first direction.
6. The isolation device according to claim 5, characterized in that: The first isolation part also includes: a rotating structure, which is located on the top surface of the support platform, and the rotating structure is connected to the first bracket, and is used to drive the first bracket to rotate around the rotating structure within a preset angle, so that the first bracket and the top surface of the support platform are inclined and intersected.
7. The isolation device according to claim 5, characterized in that: The isolation unit also includes: The second isolation part is connected to a side of the first isolation part away from the support platform along the first direction, and the second isolation part can be telescopically moved along a second direction, wherein the second direction is parallel to the top surface of the support platform.
8. The isolation device according to claim 7, characterized in that The second isolation portion comprises: a second bracket extending along the second direction and connected to an end of the first bracket away from the support platform, the second bracket being capable of telescopic movement along the second direction; a third bracket extending along a third direction and connected to the second bracket and an end of the first bracket away from the support platform, the third bracket being capable of telescopic movement along the third direction, wherein the third direction is parallel to the top surface of the support platform and intersects with the second direction; The second isolation curtain is installed on the second bracket and the third bracket.
9. The isolation device according to claim 1, characterized in that: The bracket in the isolation part is connected to the top surface of the support platform, the bracket extends along the first direction, and the bracket can move up and down along the first direction; The isolation curtain in the isolation portion is connected to an end of the bracket away from the support platform along the first direction.
10. The isolation device according to claim 9, characterized in that The isolation curtain is a transparent isolation plate.