Quick insertion type suction cup mechanism

Abstract

The utility model discloses a quick plug type sucker mechanism which comprises a sucker base, a plurality of suckers and a plug board, the suckers and the plug board are arranged on the sucker base, a plurality of inserting holes are formed in the sucker base at intervals, one end of each sucker is inserted into the corresponding inserting hole, one part of the plug board is inserted into the corresponding inserting hole, and the rest part of the plug board is located outside the corresponding inserting hole. The sum of the number of the suckers and the number of the blocking plates is equal to the number of the inserting holes, the suckers are parallel to the blocking plates, and all the suckers and the blocking plates are located in the same horizontal direction. According to the quick-insertion type suction cup mechanism, by arranging the blocking plates matched with the insertion holes, the quick-insertion type suction cup mechanism can be matched with various numbers of suction cups at will within the number range of the insertion holes of the quick-insertion type suction cup mechanism, only the insertion holes which are not used need to be blocked by the blocking plates, operation is easy and quick, and the problem of long delivery time cannot be generated; the working efficiency can be improved; and in a certain number range, a new sucker base does not need to be manufactured again, so that the expenditure can be effectively saved.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon chip manufacturing, and specifically relates to a quick-insertion sucker mechanism. Background Art

[0002] Silicon wafers are usually fixed by vacuum or electrostatic suction cups during production to be pulled out of the quartz boat. However, each suction cup mechanism can only match a fixed number of suction cups. If the number of suction cups is changed, the suction cup base of the suction cup mechanism needs to be re-cut and re-made, which is a long-delivery material. This will cause delivery problems and increase the production cost of the enterprise. Utility Model Content

[0003] In view of this, in order to overcome the defects of the prior art, the purpose of the utility model is to provide an improved quick-insert suction cup mechanism, so that a quick-insert suction cup mechanism can arbitrarily match various numbers of suction cups within the number range of its insertion holes.

[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0005] A quick-insert suction cup mechanism includes a suction cup base and a plurality of suction cups and a plugging plate arranged on the suction cup base, wherein a plurality of insertion holes are arranged at intervals on the suction cup base, one end of the suction cup is inserted into the insertion hole, a part of the plugging plate is inserted into the insertion hole, and the remaining part of the plugging plate is located outside the insertion hole, the sum of the number of the suction cups and the plugging plates is equal to the number of the insertion holes, the suction cups are parallel to the plugging plates, and all the suction cups and the plugging plates are located in the same horizontal direction. The suction cup mechanism can also be used when the number of suction cups inserted into the plugging holes is less than the number of the plugging holes provided on the suction cup base, and the plugging plates only need to be used to seal the remaining plugging holes, without the need to redesign and manufacture a new suction cup base.

[0006] According to some preferred implementation aspects of the present invention, the height of the blocking plate is equal to the length of the insertion hole, and the thickness of the blocking plate is equal to the width of the insertion hole.

[0007] According to some preferred implementation aspects of the utility model, the socket runs through the thickness direction of the suction cup base, and the multiple sockets on the suction cup base are evenly spaced along the length direction of the suction cup base. The length of the socket is smaller than the height of the suction cup base and the length direction of the socket is parallel to the height direction of the suction cup base.

[0008] According to some preferred implementation aspects of the utility model, first grooves are provided on both side outer walls of the suction cup base, the length direction of the first grooves is parallel to the length direction of the suction cup base, and the first grooves are connected to the insertion hole.

[0009] According to some preferred implementation aspects of the utility model, two opposite sides of the blocking plate are provided with notches, and the two notches are arranged corresponding to the two first grooves. The structure of the blocking plate in the suction cup mechanism of the utility model is compatible with the structure of the suction cup base, which is convenient for quick removal and replacement of the blocking plate and the suction cup.

[0010] According to some preferred implementation aspects of the present invention, the length of the notch is equal to the width of the first groove, and when the blocking plate is inserted into the socket, the center of the notch and the center of the first groove are located on the same line parallel to the length direction of the first groove.

[0011] According to some preferred implementation aspects of the utility model, the length of the blocking plate is greater than the thickness of the suction cup base, and when the blocking plate is inserted into the socket, one side of the blocking plate is flush with one side of the suction cup base, and the bottom surface of one of the notches is flush with the bottom surface of the corresponding first groove.

[0012] According to some preferred implementation aspects of the utility model, the verticality between the suction cup and the blocking plate and the side surface of the suction cup base on which the insertion hole is formed is less than or equal to 0.1.

[0013] According to some preferred implementation aspects of the utility model, the portion of the blocking plate outside the insertion hole is provided with a first through hole that runs through the thickness direction thereof. The first through hole is provided to facilitate the removal of the blocking plate from the suction cup base. When removing the blocking plate, the first through hole on the blocking plate can be gripped with a wrench and pulled out.

[0014] According to some preferred implementation aspects of the utility model, the blocking plate is made of ceramic. The blocking plate made of ceramic has good processing accuracy, and the burrs on the blocking plate are not easy to warp when the blocking plate is disassembled, which can prevent the burrs from crushing the suction cup.

[0015] Due to the adoption of the above technical scheme, compared with the prior art, a quick-plug suction cup mechanism of the utility model can match any number of suction cups within the number range of its sockets by setting a blocking plate that matches the sockets. It is only necessary to block the unused sockets with the blocking plates. The operation is simple and fast, and there is no problem of long delivery time, which is conducive to improving work efficiency. Moreover, within a certain quantity range, there is no need to re-make a new suction cup base, which can effectively save expenses. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0017] Figure 1 It is a three-dimensional structural schematic diagram of the quick-insertion suction cup mechanism in the preferred embodiment of the utility model;

[0018] Figure 2 This is a schematic diagram of the three-dimensional structure of the suction cup base in the preferred embodiment of the utility model;

[0019] Figure 3 This is a schematic diagram of the cross-sectional structure when the suction cup base is plugged with a blocking plate in a preferred embodiment of the utility model;

[0020] Figure 4 This is a schematic diagram of the three-dimensional structure of the blocking plate in the preferred embodiment of the utility model;

[0021] Figure 5 This is a schematic diagram of the three-dimensional structure of the suction cup in the first viewing angle in the preferred embodiment of the utility model;

[0022] Figure 6 It is a schematic diagram of the three-dimensional structure of the suction cup in the second viewing angle in the preferred embodiment of the utility model;

[0023] Figure 7 This is a schematic diagram of the three-dimensional structure of the air extraction block in the preferred embodiment of the utility model;

[0024] Figure 8 This is a schematic diagram of the three-dimensional structure of the vacuum block in the preferred embodiment of the utility model after omitting the sealing sheet;

[0025] Wherein, the accompanying drawings are marked as follows:

[0026] Suction cup base -1, socket -11, first groove -12, suction cup -2, first part -21, second notch -211, first flow channel -212, first air suction hole -213, second groove -214, first adsorption groove -215, first protrusion -216, second protrusion -217, second part -22, second flow channel -221, second air suction hole -222, third groove -223, second adsorption groove -224, third part -23, third flow channel -231, third air suction hole -232, fourth groove -233, third adsorption groove -234, blocking plate -3, notch -31, first through hole -32, air extraction block -4, joint -41, sealing sheet -42, second through hole -421, through groove -43, fifth groove -44, sixth groove -45, third through hole -46, pressing block -5, guard plate -6. DETAILED DESCRIPTION

[0027] In order to enable those skilled in the art to better understand the solution of the utility model, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

[0028] Reference Figures 1 to 8 The quick-insert suction cup mechanism of this embodiment is used to absorb and fix the silicon wafer to pull it out of the quartz boat. It includes a suction cup base 1, an air pumping block 4, and a plurality of suction cups 2 and a blocking plate 3 arranged on the suction cup base 1. The side of the suction cup base 1 away from the silicon wafer is connected to the air pumping block 4; the suction cup 2 is parallel to the blocking plate 3 and all the suction cups 2 and the blocking plate 3 are located in the same horizontal direction.

[0029] Further, refer to Figure 2 The suction cup base 1 is provided with a plurality of insertion holes 11 that are evenly spaced along its length and penetrate through its thickness direction. The insertion holes 11 are used for inserting the suction cup 2 and the plugging plate 3. The length of each insertion hole 11 is less than the height of the suction cup base 1 and the length direction of the insertion hole 11 is parallel to the height direction of the suction cup base 1. The sum of the number of suction cups 2 and the plugging plate 3 is equal to the number of insertion holes 11. In addition, first grooves 12 are also provided on the other two outer walls of the suction cup base 1. The two first grooves 12 of this embodiment are correspondingly arranged. The length direction of the first groove 12 is parallel to the length direction of the suction cup base 1 and the first groove 12 is connected to the insertion hole 11.

[0030] Further, refer to Figure 1 and Figure 3 , a part of the plugging plate 3 is inserted into the socket 11, and the remaining part of the plugging plate 3 is located outside the socket 11, and the height of the plugging plate 3 is equal to the length of the socket 11, the thickness of the plugging plate 3 is equal to the width of the socket 11, and the length of the plugging plate 3 is greater than the thickness of the suction cup base 1. When the plugging plate 3 is inserted into the socket 11, the side of the plugging plate 3 away from the silicon wafer is flush with the side of the suction cup base 1 close to the vacuum block 4. The part of the plugging plate 3 located outside the socket 11 is provided with a first through hole 32 that runs through its thickness direction, which can facilitate the removal of the plugging plate 3 from the suction cup base 1. When removing, use a wrench to grab the first through hole 32 on the plugging plate 3 and pull it out. In this embodiment, the material of the plugging plate 3 is preferably ceramic. The processing accuracy of the plugging plate 3 made of ceramic is good. When the plugging plate 3 is removed, it is not easy to have burrs on the plugging plate 3, which can prevent the burrs from crushing the suction cup 2.

[0031] In order to make the structure of the blocking plate 3 more compatible with the structure of the suction cup base 1 and facilitate quick installation and replacement, notches 31 are provided on two opposite sides of the blocking plate 3. Figure 4 As shown, two notches 31 are provided corresponding to the two first grooves 12, and the shape of the notch 31 on the blocking plate 3 is similar to the cross-sectional shape of the groove on the suction cup base 1, and the length of the notch 31 is equal to the width of the first groove 12. Figure 3 As shown, when the blocking plate 3 is inserted into the insertion hole 11, the center of the notch 31 and the center of the first groove 12 are located on the same connecting line parallel to the length direction of the first groove 12, and the bottom surface of one notch 31 is flush with the bottom surface of the corresponding first groove 12.

[0032] Furthermore, if Figure 5 and Figure 6 As shown, each suction cup 2 includes a first portion 21, a second portion 22 and a third portion 23, one end of each of the second portion 22 and the third portion 23 is connected to a side of the first portion 21, and the second portion 22 and the third portion 23 are parallel to each other. Among them, one end of the first portion 21 is inserted into the insertion hole 11, and its side away from the silicon wafer is also flush with the side of the suction cup base 1 close to the air pump block 4; two second notches 211 are correspondingly opened on the two side edges of the portion of the first portion 21 inserted into the insertion hole 11, and the shape of the second notch 211 is similar to the cross-sectional shape of the groove on the suction cup base 1, and the length of the second notch 211 is equal to the width of the first groove 12. When the first portion 21 of the suction cup 2 is inserted into the insertion hole 11, the center of the second notch 211 and the center of the first groove 12 are located on the same connecting line parallel to the length direction of the first groove 12, and the bottom surface of a second notch 211 is flush with the bottom surface of the corresponding first groove 12. In order to ensure that the suction cup 2 and the plugging plate 3 can remain fixed when inserted into the insertion hole 11, two pressing blocks 5 are provided corresponding to the two first grooves 12. The pressing blocks 5 are fixedly connected to the suction cup base 1 and are located in the corresponding first grooves 12. The pressing blocks 5 can lock one end of the suction cup 2 and a part of the plugging plate 3 on the suction cup base 1 to prevent them from falling. Guard plates 6 with a similar shape to the suction cup 2 are also provided at both ends of the suction cup base 1. The suction cup 2 and the plugging plate 3 are both located between the two guard plates 6 to protect the suction cup 2 and the plugging plate 3.

[0033] A first flow channel 212 is provided on one side surface of the first part 21 of the suction cup 2, and one end of the first flow channel 212 extends to the edge of the portion of the first part 21 inserted into the socket 11 to form an opening, and a first adsorption groove 215 is provided on the other side surface of the first part 21; a second flow channel 221 is provided on one side surface of the second part 22 close to the first flow channel 212, and a second adsorption groove 224 is provided on the other side surface of the second part 22; a third flow channel 231 is provided on one side surface of the third part 23 close to the first flow channel 212, and a third adsorption groove 234 is provided on the other side surface of the third part 23, the second flow channel 221 and the third flow channel 231 are both connected to the first flow channel 212, and the second adsorption groove 224 and the third adsorption groove 234 are both connected to the first adsorption groove 215. In addition, a second groove 214 is provided at the outer edge of the first flow channel 212, a third groove 223 is provided at the outer edge of the second flow channel 221, and a fourth groove 233 is provided at the outer edge of the third flow channel 231. The second groove 214, the third groove 223 and the fourth groove 233 are each provided with a cover plate (not shown) matching their respective shapes.

[0034] The first adsorption groove 215 is provided with a first protrusion 216 and a second protrusion 217 at intervals. The first protrusion 216 and the second protrusion 217 are located on the same straight line parallel to the length direction of the first part 21, and the first protrusion 216 and the second protrusion 217 are arranged in parallel. The first protrusion 216 and the second protrusion 217 are both rectangular blocks. The first adsorption groove 215 is divided into two "U"-shaped gas paths by the separation of the first protrusion 216 and the second protrusion 217. The first part 21 is provided with at least one first air suction hole 213 running through the thickness direction thereof on a side close to the first protrusion 216, a side close to the second protrusion 217, and each of the positions between the first protrusion 216 and the second protrusion 217. The first air suction holes 213 are all located within the range of the first adsorption groove 215 and are used to connect the first flow channel 212 with the first adsorption groove 215; the second part 22 is provided with at least one second air suction hole 222 running through the thickness direction thereof, and the second air suction hole 222 is located within the range of the second adsorption groove 224 to connect the second flow channel 221 with the third adsorption groove 234; the third part 23 is provided with at least one third air suction hole 232 running through the thickness direction thereof, and the third air suction hole 232 is located within the range of the third adsorption groove 234 to connect the third flow channel 231 with the third adsorption groove 234.

[0035] In this embodiment, the first flow channel 212, the second flow channel 221 and the third flow channel 231 are arranged to form a gas flow channel, and the first adsorption groove 215, the second adsorption groove 224 and the third adsorption groove 234 are used to generate negative pressure to adsorb silicon wafers. Specifically, the first flow channel 212 extends to the opening at the edge of the first portion 21 located in the insertion hole 11 and is connected to the negative pressure device. By starting the negative pressure device, the first flow channel 212 and the "U"-shaped gas path connected to the first flow channel 212 through the first suction hole 213, the second flow channel 221 and the second adsorption groove 224 connected to the second flow channel 221 through the second suction hole 222, the third flow channel 231 and the third adsorption groove 234 connected to the third flow channel 231 through the third suction hole 232 are all adsorbed flow channels to form negative pressure, thereby adsorbing silicon wafers.

[0036] Furthermore, if Figure 7 and Figure 8 As shown, the vacuum block 4 in this embodiment is connected to a negative pressure device to provide negative pressure for the suction cup 2. A through groove 43 running through the length direction of the vacuum block 4 is provided inside the vacuum block 4. A joint 41 is provided on the top of the vacuum block 4. The joint 41 is connected to the through groove 43, and a vacuum is passed to the through groove 43 inside the vacuum block 4 through the joint 41. A fifth groove 44 is provided on the side of the vacuum block 4 close to the suction cup base 1, and a sealing sheet 42 is provided in the fifth groove 44. The shape of the sealing sheet 42 is the same as that of the fifth groove 44, and the sealing sheet 42 is completely fitted in the fifth groove 44. The material of the sealing sheet 42 in this embodiment is preferably rubber. When the vacuum block 4 is assembled with the suction cup base 1, the sealing sheet 42 is in contact with both the vacuum block 4 and the suction cup base 1, and the two will have an extrusion effect on the sealing sheet 42. Due to the material characteristics of the sealing sheet 42, the sealing sheet 42 can seal the opening of the first flow channel 212 on the first part 21 to ensure that there is no leakage.

[0037] The sealing sheet 42 is provided with a plurality of second through holes 421 extending through the thickness direction thereof at even intervals along its length direction. The second through holes 421 on the sealing sheet 42 are arranged one-to-one with the insertion holes 11 on the suction cup base 1, and when the suction cup 2 is inserted into the insertion hole 11, the second through holes 421 are connected with the opening of the first flow channel 212 on the first part 21. A plurality of sixth grooves 45 are also provided at the position of the air pumping block 4 where the fifth groove 44 is located. The fifth groove 44 is arranged one-to-one with the sixth groove 45. The length of the sixth groove 45 in this embodiment is less than that of the fifth groove 44. The air pumping block 4 is also provided with a third through hole 46. One third through hole 46 is arranged corresponding to one sixth groove 45, so that the through groove 43 in the air pumping block 4 is connected with the sixth groove 45. Two adjacent third through holes 46 are arranged in two rows on the air pumping block 4, and are both located at one end of the sixth groove 45.

[0038] The quick-insertion suction cup mechanism of the utility model can arbitrarily match any number of suction cups 2 within the number range of its sockets 11, and the unused sockets 11 are blocked by the blocking plate 3. The operation is simple and fast, which is beneficial to improving work efficiency and can effectively save costs.

[0039] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with this technology to understand the content of the utility model and implement it accordingly. They cannot be used to limit the protection scope of the utility model. All equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. A quick-insert suction cup mechanism, characterized in that: It includes a suction cup base and a plurality of suction cups and a blocking plate arranged on the suction cup base, wherein a plurality of insertion holes are spaced apart on the suction cup base, one end of the suction cup is inserted into the insertion hole, a part of the blocking plate is inserted into the insertion hole, and the remaining part of the blocking plate is located outside the insertion hole, the sum of the number of the suction cups and the blocking plates is equal to the number of the insertion holes, the suction cups are parallel to the blocking plates, and all the suction cups and blocking plates are located in the same horizontal direction.

2. The quick-insert suction cup mechanism according to claim 1, characterized in that: The height of the blocking plate is equal to the length of the plugging hole, and the thickness of the blocking plate is equal to the width of the plugging hole.

3. The quick-insert suction cup mechanism according to claim 2, characterized in that: The socket runs through the thickness direction of the suction cup base, and the multiple sockets on the suction cup base are evenly spaced along the length direction of the suction cup base. The length of the socket is smaller than the height of the suction cup base and the length direction of the socket is parallel to the height direction of the suction cup base.

4. The quick-insert suction cup mechanism according to claim 3, characterized in that: First grooves are provided on both side outer walls of the suction cup base, the length direction of the first grooves is parallel to the length direction of the suction cup base, and the first grooves are connected to the insertion hole.

5. The quick-insert suction cup mechanism according to claim 4, characterized in that: Two opposite sides of the blocking plate are each provided with a notch, and the two notches are arranged corresponding to the two first grooves.

6. The quick-insert suction cup mechanism according to claim 5, characterized in that: The length of the notch is equal to the width of the first groove. When the blocking plate is inserted into the insertion hole, the center of the notch and the center of the first groove are located on the same connecting line parallel to the length direction of the first groove.

7. The quick-insert suction cup mechanism according to claim 6, characterized in that: The length of the blocking plate is greater than the thickness of the suction cup base. When the blocking plate is inserted into the socket, one side of the blocking plate is flush with one side of the suction cup base, and the bottom surface of one of the notches is flush with the bottom surface of the corresponding first groove.

8. The quick-insert suction cup mechanism according to claim 1, characterized in that: The verticality between the suction cup and the blocking plate and the side surface of the suction cup base on which the insertion hole is opened is less than or equal to 0.

1.

9. The quick-insert suction cup mechanism according to any one of claims 1 to 8, characterized in that: The portion of the blocking plate outside the insertion hole is provided with a first through hole penetrating the portion in the thickness direction thereof.

10. The quick-insert suction cup mechanism according to any one of claims 1 to 8, characterized in that: The blocking plate is made of ceramic.

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