Chamfering machine correction sheet fixing device

Abstract

The utility model provides a chamfering machine correction sheet fixing device which can be applied to various fields using chamfering machines in semiconductor wafer production. The device is composed of four supporting rods, two fixing rods, four shaft sleeves, a fixing shaft, a disc, a ruler, a tension meter and a pull rod. The supporting rod is composed of a supporting rod transverse rod and a supporting rod vertical rod, and the fixing rod is composed of a fixing rod transverse rod and a fixing rod vertical rod. The tension meter and the pull rod are arranged in the center of the disc, and a scale is marked on one side of the disc. As long as the same pulling force is used every time, the deviation of the fixing position of the correction sheet can be very small, and the situation that the correction target value is difficult to reach due to the fact that the correction deviation of acting force in the X-axis direction and the Y-axis direction of the correction sheet during manual fixing is caused due to different manual pulling forces is avoided.

Description

Technical Field

[0001] The utility model is mainly applied to the field of using a chamfering machine in semiconductor wafer processing, and specifically relates to a chamfering machine correction sheet fixing device. Background Art

[0002] Semiconductor wafer production generally involves edge chamfering production, which requires the use of a chamfering machine. The chamfering machine must be calibrated before production. At present, when calibrating a chamfering machine, the calibration sheet is generally placed and fixed manually for calibration. When manually fixed, the force cannot be accurately controlled, so the calibration sheet will have deviations in the X-axis and Y-axis directions after being fixed. If the calibration sheet is pulled tight, the Y-axis correction value will be biased to a larger positive value. If it is pulled lightly, the Y-axis correction value will be biased to a larger negative value. The pulling force will fluctuate, and the Y-axis correction value will fluctuate between positive and negative, making it difficult to calibrate to the target value. The same situation will occur if the pulling force in the X-axis direction is different and the pulling force direction deviation is also present.

[0003] With the increase in the types of semiconductors, especially the production of silicon carbide semiconductor wafers, the chamfering machine calibration accuracy is required to be higher. Silicon wafers are relatively softer, and it is easier to grind with a grinding wheel. More diameter can be removed each time the chamfer edge is chamfered, and there will be no effect when the correction deviation is relatively large. Silicon carbide is very hard, second only to diamond. It is not easy to grind with a diamond grinding wheel, and only a small amount of diameter can be removed each time. When the correction deviation value is large, it is easy to grind the local position of the circumference, and the symmetrical position is prone to broken edges due to the large amount of grinding. In severe cases, the wafer will crack, partially break, and damage the groove of the grinding wheel. Therefore, when grinding such super-hard material wafers, the correction value needs to be controlled very small to make the entire circumferential diameter removal amount more uniform. However, manual placement and fixation have relatively large deviations, and multiple corrections are required to control the correction value within a small range, which is not only time-consuming but also has low accuracy. Utility Model Content

[0004] In view of the deficiencies in the existing technology, the utility model provides a chamfering machine correction sheet fixing device, which solves the above-mentioned background problems.

[0005] The purpose of the utility model can be achieved through the following technical solutions: a chamfering machine correction plate fixing device. The device includes four support rods, two fixed rods, a fixed shaft, four sleeves, a disc, a scale, a dynamometer and a pull rod. The support rods are composed of a support rod cross bar and a support rod vertical bar, and the fixed rods are composed of a fixed rod cross bar and a fixed rod vertical bar. The support rods and the fixed rods are around the disc, the dynamometer is at the center of the disc, the pull rod is at the center of the dynamometer, and a scale is marked on one side of the disc. The four support rods can rotate, the two fixed rods can rotate, the fixed shaft is fixed, the sleeve can rotate, the disc is fixed, the dynamometer is fixed, and the pull rod is fixed.

[0006] In one embodiment of the utility model, the support rod can rotate and serve as a support foot of the device to support the fixing device. The support rod can rotate and the cross bar of the support rod can be extended to adapt to correction sheet placement plates of different shapes and sizes.

[0007] In one embodiment of the utility model, the fixing rod can rotate to fix the calibration sheet. The fixing rod can rotate, the fixing vertical rod can be extended and retracted to adapt to calibration sheets of different sizes, and the fixing rod horizontal rod can be extended and retracted to adapt to calibration sheet placement plates of different shapes and sizes.

[0008] In one embodiment of the utility model, the fixed shaft is fixed and plays the role of supporting the disc and fixing the sleeve, and provides a central axis for the rotation of the sleeve.

[0009] In one embodiment of the utility model, the shaft sleeve can rotate to fix the support rod and the fixed rod and to rotate with the support rod and the fixed rod.

[0010] In an embodiment of the present invention, the disc is fixed and provides support for the scale and the dynamometer.

[0011] In one embodiment of the utility model, the scale is fixed and does not move, providing a scale basis for the rotation of the fixed rod and providing a direction indication function for the installation of the dynamometer and the pull rod.

[0012] In one embodiment of the utility model, the dynamometer is fixed, providing a tension basis for the device to fix the correction plate and providing support for the fixation of the pull rod.

[0013] In one embodiment of the utility model, the pull rod is fixed and provides a force-bearing component for the operator to pull and push the device.

[0014] Based on the above, the advantages and characteristics of the embodiments of the utility model are that the design of the device can provide a fixed pulling force and a fixed force direction when the correction plate is fixed, so that the pulling force and the force direction are consistent during each correction, thereby reducing the deviation when the correction plate is fixed and causing errors in the chamfering machine correction. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 Device structure diagram

[0016] Figure 2 Schematic diagram of the bottom of the device

[0017] Figure 3 Support rod diagram

[0018] Figure 4 Fixed rod diagram

[0019] Figure 5 Left side view of the device

[0020] Figure 6 Ruler scale chart

[0021] Description of Figure Numbers:

[0022] 1.2 Support rod

[0023] 3.4 Fixed rod

[0024] 5 Dynamometer

[0025] 6 discs

[0026] 7 Tie rod

[0027] 8 Ruler

[0028] 9 Bushing

[0029] 10Fixed Axis

[0030] 11 support rod cross bar

[0031] 12 support rod vertical rod

[0032] 13 Fixed rod cross bar

[0033] 14Fixed rod vertical rod DETAILED DESCRIPTION

[0034] The specific implementation of the utility model is described in detail below with reference to the accompanying drawings:

[0035] Reference Figure 1 , Figure 2 , Figure 3 and Figure 4According to the size and shape of the calibration plate, adjust the angle of the support rods 1 and 2, adjust the length of the cross bars 11 of the support rods 1 and 2, adjust the length of the vertical bars 14 of the fixing rods 3 and 4, adjust the length of the cross bars 13 of the fixing rods 3 and 4 according to the size of the calibration plate, rotate the fixing rods 3 and 4, the fixing rod 3 rotates to the left at a certain angle according to the scale 8 on the disc 6, and the fixing rod 4 rotates to the right at a certain angle according to the scale 8 on the disc 6. The angle is preferably 25 degrees, 30 degrees, 35 degrees, and 40 degrees. The fixing rods 3 and 4 are symmetrical with the zero scale of the scale 8 as the center line, so that the force provided by the fixing rods 3 and 4 on the calibration plate is consistent in size and direction, and the device is placed horizontally. Place it on the calibration plate, with the bottom ends of the support rods 1 and 2 and the solid rod 12 in contact with the surface of the calibration plate. The line connecting the zero scale of the scale 8 and the pull rod 7 coincides with the center line of the V-groove of the calibration plate. The vertical rods 14 of the fixed rods 3 and 4 are in contact with the circumference of the calibration plate. Select a fixed pulling force to pull the pull rod 7 forward horizontally, preferably 0.5N, 1N, 1.5N, 2N. When the dynamometer displays the selected pulling force, hold for 2s so that the vertical rods 14 of the fixed rods 3 and 4 squeeze the circumference of the calibration plate to fix the calibration plate. Push the pull rod 7 backward horizontally to disengage the vertical rods 14 of the fixed rods 3 and 4 from the circumference of the calibration plate, and remove the fixing device.

[0036] Reference Figure 3 One end of the vertical rod 12 is vertically fixed to one end of the cross rod 11, and the other end of the cross rod 11 is vertically fixed to the shaft sleeve 9, and the two cross rods 11 are horizontally symmetrical at 180 degrees.

[0037] Reference Figure 4 One end of the vertical rod 14 is vertically fixed to one end of the cross rod 13, and the other end of the cross rod 14 is vertically fixed to the shaft sleeve 9.

[0038] Reference Figure 5 , along the fixed axis 10 from top to bottom, the support rod 1, the support rod 2, the fixed rod 3, and the fixed rod 4 are respectively sleeved.

[0039] Reference Figure 1 and Figure 5 The upper end of the fixed shaft 10 is fixed at the center of the disk 6, the dynamometer 5 is fixed on the disk 6 along the zero degree scale direction of the scale 8 on the disk 6, and a pull rod 7 is fixed at the center position of one end of the dynamometer 5 away from the scale 8, and the pull rod is in a straight line with the zero degree scale direction of the scale 8 on the disk 6.

[0040] Reference Figure 6 The ruler 8 is fixed to the edge of the disk 6, and a scale is marked every 5 degrees on both sides of the zero scale until 60 degrees.

[0041] The above embodiments are only used to further illustrate the specific implementation methods of the utility model, but the utility model is not limited to the embodiments. Any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the utility model fall within the protection scope of the technical solution of the utility model.

Claims

1. A chamfering machine correction sheet fixing device, characterized in that: The device consists of four supporting rods, two fixed rods, a fixed shaft, four bushings, a disc, a ruler, a dynamometer and a pull rod. The supporting rods consist of a supporting rod cross rod and a supporting rod vertical rod, and the fixed rods consist of a fixed rod cross rod and a fixed rod vertical rod. The supporting rods and the fixed rods are around the disc, the dynamometer is at the center of the disc, the pull rod is at the center of the dynamometer, and a ruler is marked on one side of the disc.

2. A chamfering machine correction sheet fixing device according to claim 1, characterized in that: The support rod and crossbar of the device can be extended and retracted to form brackets of different lengths to adapt to correction sheet placement plates of different sizes.

3. The chamfering machine correction sheet fixing device according to claim 1, characterized in that: The fixing rod of the device can be rotated to form fixing rods with different included angles to adapt to correction sheet placement plates of different shapes.

4. The chamfering machine correction sheet fixing device according to claim 1, characterized in that: The fixing rod crossbar of the device can be extended and retracted to adapt to correction pieces of different sizes.

5. The chamfering machine correction sheet fixing device according to claim 1, characterized in that: The vertical rod of the fixing rod of the device can be extended and retracted to adapt to correction sheet placing plates of different shapes.

6. A chamfering machine correction sheet fixing device according to claim 1, characterized in that: The device is equipped with a tensile gauge to provide a tensile basis for fixing the correction plate.

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