Wafer box switch adjusting pin

Abstract

The utility model provides a wafer box switch adjusting pin which comprises a pin body, a moving piece and a telescopic piece, a cavity is arranged in the pin body, and an opening communicated with the cavity is arranged at the end part of the pin body; the end part of the moving part is provided with an inward folding corner; the telescopic part is located in the cavity and connected or makes contact with the moving part, and the moving part is driven to operate through stretching or rebounding of the telescopic part so that the distance between the end of the moving part and the opening can be adjusted. According to the wafer box switch adjusting pin, the matching degree of the lock pin and the lock hole can be improved, the problem of size difference between the wafer box lock hole and the wafer box lock pin manufactured by an equipment manufacturer is solved, the debugging difficulty can be reduced, the application range can be expanded, and the operation convenience can be improved.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductor equipment and relates to a wafer box switch regulating pin. Background Art

[0002] A front opening unified pod (FOUP) is a front opening container with a switchable door frame used in semiconductor manufacturing processes to protect, transport, and store wafers.

[0003] When FOUP is used, it needs to be used in conjunction with the Load port device, which is a mechanical device used to load and unload the placed FOUP and the semiconductor equipment. Among them, there is a lock hole on the door frame of the FOUP, and a lock pin (Opener) matching the lock hole is set on the Load port device. The lock pin can open and close the door frame of the FOUP to realize the transportation of wafers between the FOUP and the semiconductor equipment.

[0004] The existing lock pins for FOUP are usually of fixed length. During the application process, the pin and the hole need to be well matched, and the installation position of the FOUP lock pin must also correspond to the position of the FOUP placed on the load port equipment. If the pin and the hole are not well matched, the FOUP door frame cannot be opened and closed. In addition, due to the differences in the sizes of the lock holes and lock pins manufactured by various equipment manufacturers, there will also be problems with the pin and the hole not being matched, and thus the FOUP door frame cannot be opened and closed.

[0005] Therefore, it is necessary to provide a wafer box switch adjustment pin. Utility Model Content

[0006] In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a wafer box switch adjustment pin, which is used to solve the problem of mismatch between the lock and the pin when opening and closing the wafer box in the prior art.

[0007] In order to achieve the above-mentioned purpose and other related purposes, the utility model provides a wafer box switch adjustment pin, and the wafer box switch adjustment pin comprises:

[0008] A pin body, the pin body comprising a first end and a second end arranged opposite to each other, the pin body having a cavity therein, and the first end and the second end of the pin body both being provided with an opening communicating with the cavity;

[0009] A moving member, the moving member comprising a first end and a second end which are arranged opposite to each other, and the second end of the moving member has an inward turning corner;

[0010] A telescopic member, comprising a first end and a second end arranged opposite to each other, the telescopic member is located in the cavity, and the first end and the second end of the telescopic member are respectively connected to or in contact with the first end of the movable member; and the movable member is driven to operate by the telescopic movement or rebound of the telescopic member to adjust the distance between the second end of the movable member and the opening.

[0011] The utility model also provides another wafer box switch adjustment pin, the wafer box switch adjustment pin comprising:

[0012] A pin body, the pin body comprising a first end and a second end arranged opposite to each other, the pin body having a cavity therein, and the first end of the pin body being provided with an opening communicating with the cavity;

[0013] A moving member, the moving member comprising a first end and a second end which are arranged opposite to each other, and the second end of the moving member has an inward turning corner;

[0014] A telescopic member, the telescopic member includes a first end and a second end that are relatively arranged, the telescopic member is located in the cavity, and the first end of the telescopic member is connected or in contact with the first end of the movable member, and the second end of the telescopic member is fixed on the pin body; and the movable member is driven to operate through the telescopic movement or rebound of the telescopic member to adjust the distance between the second end of the movable member and the opening.

[0015] Optionally, the cross-sectional shape of the second end of the moving member includes an arc, a trapezoid or a triangle.

[0016] Optionally, the telescopic member includes a telescopic spring or a telescopic cylinder.

[0017] Optionally, a traction limiting member is further included, wherein the traction limiting member is located in the cavity and is connected to the first end of the moving member.

[0018] Optionally, the moving member is provided with a limiting protrusion which is larger than the opening width.

[0019] Optionally, the same moving member includes 1 or 2 limiting protrusions.

[0020] Optionally, the wafer box switch adjustment pin also includes a rotating pin seat, and the rotating pin seat is connected to the pin body.

[0021] Optionally, the telescopic member drives the second end of the movable member to move in a range of 1 mm to 10 mm.

[0022] Optionally, the wafer box switch adjustment pin is an axisymmetric structure.

[0023] As described above, the wafer box switch adjustment pin of the utility model includes a pin body, a moving part and a telescopic part, wherein the pin body has a cavity and the end is provided with an opening connected to the cavity; the end of the moving part has an inward corner; the telescopic part is located in the cavity and is connected or in contact with the moving part, and the moving part is driven to operate by the extension or rebound of the telescopic part to adjust the distance between the end of the moving part and the opening.

[0024] The wafer box switch adjustment pin of the utility model can improve the matching degree between the lock pin and the lock hole, solve the size difference problem between the FOUP lock hole and the FOUP lock pin manufactured by the equipment manufacturer, and can reduce the debugging difficulty of the FOUP Opener, expand the scope of application, and improve the convenience of operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 Shown is a front view of the wafer box switch adjustment pin in the first embodiment of the present invention.

[0026] Figure 2 Display as Figure 1 Top view of the cassette switch adjustment pins.

[0027] Figure 3 Shown is a front view of the wafer box switch adjustment pin in the second embodiment of the present utility model.

[0028] Figure 4 Display as Figure 3 Top view of the cassette switch adjustment pins.

[0029] Figure 5 Shown is a front view of a wafer box switch adjustment pin in embodiment 3 of the present utility model.

[0030] Figure 6 Shown is a front view of another wafer box switch adjustment pin in embodiment 3 of the present utility model.

[0031] Figure 7 Shown is a front view of the wafer box switch adjustment pin in the fourth embodiment of the present utility model.

[0032] Figure 8 Shown is a front view of the wafer box switch adjustment pin in the fifth embodiment of the present utility model.

[0033] Fig. 9 Shown is a front view of the wafer box switch adjustment pin in the sixth embodiment of the present utility model.

[0034] Description of Reference Numerals

[0035] 100 Pin

[0036] 200 moving parts

[0037] 301 Telescopic Spring

[0038] 302 Telescopic Cylinder

[0039] 400 Traction limiter

[0040] 500 Limiting block

[0041] A Inward turn DETAILED DESCRIPTION

[0042] The following is an explanation of the implementation of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific implementations, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0043] It should be noted that the illustrations provided in this embodiment are only used to schematically illustrate the basic concept of the present invention. Therefore, the drawings only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0044] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0045] Embodiment 1

[0046] See also Figure 1 to Figure 3 , the present embodiment provides a wafer box switch adjustment pin, the wafer box switch adjustment pin comprises: a pin body 100, a moving part 200 and a telescopic part, the pin body 100 comprises a first end and a second end arranged opposite to each other, the pin body 100 has a cavity, and the first end and the second end of the pin body 100 are both provided with openings communicating with the cavity; the moving part 200 comprises a first end and a second end arranged opposite to each other, and the second end of the moving part 200 has an inward corner A; the telescopic part comprises a first end and a second end arranged opposite to each other, the telescopic part is located in the cavity, and the first end and the second end of the telescopic part are respectively connected or in contact with the first end of the moving part 200; and the moving part 200 is driven to operate by the telescopic movement or rebound of the telescopic part to adjust the distance between the second end of the moving part 200 and the opening.

[0047] Specifically, the wafer box switch adjustment pin in the present embodiment has the telescopic part with adjustable telescopic amount and connected to or in contact with the movable part 200, so that the distance between the end of the movable part 200 and the opening can be adjusted through the telescopic part, that is, the effective length of the wafer box switch adjustment pin can be adjusted to match the lock hole on the wafer box to be opened, thereby expanding the scope of application and improving the convenience of operation.

[0048] As an example, the telescopic member may include a telescopic spring 301 or a telescopic cylinder 302 .

[0049] See also Figure 1 The telescopic member in this embodiment adopts the telescopic spring 301, but the type of the telescopic member is not limited thereto. For example, in other embodiments, a telescopic cylinder 302 may also be adopted, which will not be introduced here. The type of the telescopic spring 301 can be selected according to needs.

[0050] Among them, when the telescopic spring 301 is used as the telescopic member, it can be understood that the telescopic spring 301 drives the moving member 200 to operate by rebounding to adjust the distance between the second end of the moving member 200 and the opening; when the telescopic cylinder 302 is used, the telescopic cylinder 302 can drive the moving member 200 to operate by telescopic operation to adjust the distance between the second end of the moving member 200 and the opening.

[0051] As an example, the cross-sectional shape of the second end of the moving member 200 may include an arc, a trapezoid, or a triangle.

[0052] For details, see Figure 1 FIG. 1 is a front view of the wafer box switch adjustment pin provided in this embodiment. Figure 2 Indicated as Figure 1 A top view of the wafer box switch adjustment pin in FIG. Figure 1-2 It can be seen that in this embodiment, the cross-sectional shape of the second end of the movable member 200 is triangular, that is, the inward corner A of the second end of the movable member 200 is an inclined line, but the cross-sectional shape of the second end of the movable member 200 is not limited to this, and may also be a trapezoid or an arc, etc., which will not be introduced here.

[0053] As an example, the wafer box switch adjustment pin may be an axisymmetric structure.

[0054] For details, see Figure 1 In this embodiment, the wafer box switch adjustment pin is preferably an axisymmetric structure to reduce the complexity of manufacturing and regulating the wafer box switch adjustment pin, but the structure of the wafer box switch adjustment pin is not limited to this.

[0055] As an example, the range in which the second end of the moving member 200 driven by the telescopic member moves may include 1 mm to 10 mm.

[0056] Specifically, in the process of opening the door frame of the wafer box, the wafer box switch adjustment pin is first in an initial extended state. When the wafer box switch adjustment pin is brought close to the lock hole on the wafer box, the inward corner A at the second end of the movable part 200 is retracted by external force (such as pushing inward) to compress the telescopic part so that the wafer box switch adjustment pin can be well matched with the lock hole; when the wafer box switch adjustment pin enters the lock hole, the wafer box switch adjustment pin can be rotated so that the wafer box switch adjustment pin can reach the space reserved for the lock hole, and the wafer box switch adjustment pin can be in a rebound state to open the door frame of the wafer box. Similarly, in the process of closing the door frame of the wafer box, the wafer box switch adjustment pin rotates through the space reserved by the lock hole to reach the lock hole. At this time, the wafer box switch adjustment pin is in a rebound state. Then, the inward corner A at the second end of the movable part 200 is retracted again by external force (such as external pulling) to compress the telescopic part, so that the wafer box switch adjustment pin disengages from the lock hole to close the door frame of the wafer box.

[0057] Among them, in order to expand the application range of the wafer box switch adjustment pin, the range in which the telescopic part drives the second end of the movable part 200 to move may include 1mm, 2mm, 3mm, 5mm, 10mm, etc., and the specific data range is not overly restricted here.

[0058] As an example, the wafer box switch adjustment pin further includes a rotating pin seat (not shown), and the rotating pin seat is connected to the pin body 100 .

[0059] Specifically, when the wafer box switch adjustment pin is performing a switch operation, the rotation of the wafer box switch adjustment pin can be achieved through the rotating pin seat fixedly connected to the wafer box switch adjustment pin. The rotation angle range of the rotating pin seat is not limited here, and may include 90°, 180°, etc.

[0060] Embodiment 2

[0061] See also Figure 3-4 This embodiment provides another wafer box switch adjustment pin, which includes a pin body 100, a moving part 200, a telescopic spring 301 and a traction limiter 400, wherein the difference from the first embodiment is mainly that:

[0062] 1) Differences in the morphology of the moving member 200;

[0063] 2) The traction limiting member 400 is additionally added.

[0064] Only the differences from the first embodiment are introduced below. For other structures, please refer to the first embodiment and will not be described in detail here.

[0065] Specifically, Figure 3 In this embodiment, in order to expand the application scope and operational convenience of the wafer box switch adjustment pin, in this embodiment, the cross-sectional shape of the second end of the movable part 200 of the wafer box switch adjustment pin is arc-shaped, that is, the inward corner A is arc-shaped, but the cross-sectional shape of the second end of the movable part 200 is not limited to this, and may also be a trapezoidal shape.

[0066] Also, see Figure 3 In this embodiment, the traction limiter 400 is further arranged in the cavity, and one end of the traction limiter 400 is connected to the first end of the moving member 200, and the other end is connected to the pin body 100, so that the traction of the traction limiter 400 can avoid excessive displacement of the moving member 200 due to fatigue of the telescopic spring 301, etc. The type of the traction limiter 400 may include, for example, a steel wire rope, etc., which is not excessively limited here.

[0067] Embodiment 3

[0068] See also Figure 5-6 This embodiment provides two other wafer box switch adjustment pins, the wafer box switch adjustment pins include a pin body 100, a moving part 200, a telescopic spring 301 and a limiting protrusion 500, wherein the difference from the first embodiment is mainly that:

[0069] 1) Differences in the morphology of the moving member 200;

[0070] 2) The limiting protrusion 500 is additionally added.

[0071] Only the differences from the first embodiment are introduced below. For other structures, please refer to the first embodiment and will not be described in detail here.

[0072] Specifically, Figure 5 In this embodiment, in order to expand the application scope and operational convenience of the wafer box switch adjustment pin, in this embodiment, the cross-sectional shape of the second end of the movable part 200 of the wafer box switch adjustment pin is arc-shaped, that is, the inward corner A is arc-shaped, but the cross-sectional shape of the second end of the movable part 200 is not limited to this, and may also be a trapezoid, a triangle, etc.

[0073] Also, see Figure 5In this embodiment, the first end of the movable member 200 is set to have a width greater than the opening width, that is, the shape of the movable member 200 is "T"-shaped, and the first end of the movable member 200 is used as the limiting protrusion 500, so that the limiting protrusion 500 can avoid excessive displacement of the movable member 200 due to fatigue of the telescopic spring 301, etc., and the setting of the limiting protrusion 500 can reduce the structural complexity of the wafer box switch adjustment pin, which is convenient for operation.

[0074] in, Figure 5 In the case where the moving member 200 is provided with one stopper 500 at one end, further, as Figure 6 Two limiting protrusions 500 may also be provided on the same movable part 200, that is, the movable part 200 is in the shape of an "I" character, so that one limiting protrusion 500 is located inside the pin body 100, and the other limiting protrusion 500 is located outside the pin body 100, so that no matter the wafer box switch adjustment pin is extended or rebounded, good limiting can be achieved through the limiting protrusion 500.

[0075] Of course, in Figure 5 and Figure 6 In the embodiment, the limiting protrusions 500 are all arranged at the ends of the moving member 200. In another embodiment, the limiting protrusions 500 may also be arranged at other parts of the moving member 200, and no excessive restriction is made here.

[0076] Embodiment 4

[0077] See also Figure 7 This embodiment provides another wafer box switch adjustment pin, which includes a pin body 100, a moving part 200 and a telescopic cylinder 302, wherein the difference from the first embodiment is mainly that:

[0078] 1) Differences in the morphology of the moving member 200;

[0079] 2) A telescopic cylinder 302 is used as the telescopic member.

[0080] Only the differences from the first embodiment are introduced below. For other structures, please refer to the first embodiment and will not be described in detail here.

[0081] Specifically, Figure 7 In this embodiment, in order to expand the application scope of the wafer box switch adjustment pin, the cross-sectional shape of the second end of the movable part 200 of the wafer box switch adjustment pin is trapezoidal, that is, the inward corner A is straight, but the cross-sectional shape of the second end of the movable part 200 is not limited to this.

[0082] Also, see Figure 7 In this embodiment, the telescopic cylinder 302 is used as the telescopic member, so that the displacement of the moving member 200 can be regulated by extending and contracting the telescopic cylinder 302. The specific type of the telescopic cylinder 302 is not excessively restricted here.

[0083] Embodiment 5

[0084] See also Figure 8 This embodiment provides another wafer box switch adjustment pin, which includes a pin body 100, a moving part 200 and a telescopic cylinder 302, wherein the difference from the fourth embodiment mainly lies in that the moving part 200 is only provided at one end of the pin body 100.

[0085] Only the differences from the fourth embodiment are introduced below. For other structures, please refer to the fourth embodiment and will not be described in detail here.

[0086] Specifically, Figure 8 In this embodiment, the pin body 100 includes a first end and a second end that are relatively arranged, the pin body 100 has a cavity, and the first end of the pin body 100 is provided with an opening that is connected to the cavity; the moving member 200 includes a first end and a second end that are relatively arranged, and the second end of the moving member 200 has the inward corner A; the telescopic cylinder 302 includes a first end and a second end that are relatively arranged, the telescopic cylinder 302 is located in the cavity, and the first end of the telescopic cylinder 302 is connected or in contact with the first end of the moving member 200, the second end of the telescopic cylinder 302 is fixed on the second end of the pin body 100, and of course it can also be fixed to other parts of the pin body 100, and the telescopic cylinder 302 drives the moving member 200 to operate through the telescopic movement of the moving member 200 to adjust the distance between the second end of the moving member 200 and the opening.

[0087] The structure and shape of the moving member 200 are not limited thereto and can be selected as required. For example, the moving member 200 can also be Figure 1 , Figure 3 , Figure 5 , Figure 6 The appearance of the text is not overly restricted here.

[0088] Embodiment 6

[0089] See also Fig. 9 This embodiment provides another wafer box switch adjustment pin, the wafer box switch adjustment pin includes a pin body 100, a moving part 200, a telescopic spring 301 and a limiting protrusion 500, wherein the wafer box switch adjustment pin is different from the wafer box switch adjustment pin in the third embodiment. Figure 6The main difference of the wafer box switch adjustment pin shown is that the moving part 200 is only provided at one end of the pin body 100 .

[0090] Only the differences from the third embodiment are introduced below. For other structures, please refer to the third embodiment and will not be described in detail here.

[0091] Specifically, Fig. 9 In this embodiment, the pin body 100 includes a first end and a second end that are relatively arranged, the pin body 100 has a cavity, and the first end of the pin body 100 is provided with an opening that is connected to the cavity; the moving member 200 includes a first end and a second end that are relatively arranged, and the second end of the moving member 200 has the inward corner A; the telescopic cylinder 302 includes a first end and a second end that are relatively arranged, the telescopic cylinder 302 is located in the cavity, and the first end of the telescopic cylinder 302 is connected or in contact with the first end of the moving member 200, the second end of the telescopic cylinder 302 is fixed on the second end of the pin body 100, and of course it can also be fixed to other parts of the pin body 100, and the telescopic cylinder 302 drives the moving member 200 to operate through the telescopic movement of the moving member 200 to adjust the distance between the second end of the moving member 200 and the opening.

[0092] The structure and shape of the moving member 200 are not limited thereto and can be selected as required. For example, the moving member 200 can also be Figure 1 , Figure 3 , Figure 5 , Figure 7 The appearance of the text is not overly restricted here.

[0093] To summarize, the wafer box switch adjustment pin of the utility model includes a pin body, a moving part and a telescopic part, wherein the pin body has a cavity and the end is provided with an opening connected to the cavity; the end of the moving part has an inward corner; the telescopic part is located in the cavity and is connected or in contact with the moving part, and the moving part is driven to operate by the extension or rebound of the telescopic part to adjust the distance between the end of the moving part and the opening.

[0094] The wafer box switch adjustment pin of the utility model can improve the matching degree between the lock pin and the lock hole, solve the size difference problem between the FOUP lock hole and the FOUP lock pin manufactured by the equipment manufacturer, and reduce the debugging difficulty of the FOUP Opener, expand the scope of application, and improve the convenience of operation. Therefore, the utility model effectively overcomes various shortcomings in the prior art and has a high industrial utilization value.

[0095] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. A wafer box switch adjustment pin, characterized in that: The wafer box switch adjustment pin includes: A pin body, the pin body comprising a first end and a second end arranged opposite to each other, the pin body having a cavity therein, and the first end and the second end of the pin body both being provided with an opening communicating with the cavity; A moving member, the moving member comprising a first end and a second end which are arranged opposite to each other, and the second end of the moving member has an inward turning corner; A telescopic member, comprising a first end and a second end arranged opposite to each other, the telescopic member is located in the cavity, and the first end and the second end of the telescopic member are respectively connected to or in contact with the first end of the movable member; and the movable member is driven to operate by the telescopic movement or rebound of the telescopic member to adjust the distance between the second end of the movable member and the opening.

2. The wafer box switch adjustment pin according to claim 1, characterized in that: The wafer box switch adjustment pin is an axisymmetric structure.

3. A wafer box switch adjustment pin, characterized in that: The wafer box switch adjustment pin includes: A pin body, the pin body comprising a first end and a second end arranged opposite to each other, the pin body having a cavity therein, and the first end of the pin body being provided with an opening communicating with the cavity; A moving member, the moving member comprising a first end and a second end which are arranged opposite to each other, and the second end of the moving member has an inward turning corner; A telescopic member, the telescopic member includes a first end and a second end that are relatively arranged, the telescopic member is located in the cavity, and the first end of the telescopic member is connected or in contact with the first end of the movable member, and the second end of the telescopic member is fixed on the pin body; and the movable member is driven to operate through the telescopic movement or rebound of the telescopic member to adjust the distance between the second end of the movable member and the opening.

4. The wafer box switch adjustment pin according to claim 1 or 3, characterized in that: The cross-sectional shape of the second end of the moving member includes an arc, a trapezoid or a triangle.

5. The wafer box switch adjustment pin according to claim 1 or 3, characterized in that: The telescopic member comprises a telescopic spring or a telescopic cylinder.

6. The wafer box switch adjustment pin according to claim 1 or 3, characterized in that: It also includes a traction limiting member, which is located in the cavity and connected to the first end of the moving member.

7. The wafer box switch adjustment pin according to claim 1 or 3, characterized in that: The moving member is provided with a limiting protrusion which is larger than the opening width.

8. The wafer box switch adjustment pin according to claim 7, characterized in that: The same moving member includes one or two limiting protrusions.

9. The wafer box switch adjustment pin according to claim 1 or 3, characterized in that: The wafer box switch adjustment pin also includes a rotating pin seat, and the rotating pin seat is connected to the pin body.

10. The wafer box switch adjustment pin according to claim 1 or 3, characterized in that: The range in which the second end of the movable member is driven by the telescopic member to move includes 1mm to 10mm.

Images