Box opening mechanism for wafer box and wafer conveyor

Abstract

The utility model relates to the technical field of semiconductors, in particular to a box opening mechanism for a wafer box and a wafer conveyor, which comprises a door plate, a plurality of lock holes are arranged on the door plate, rotating parts are arranged in the lock holes, and two opposite sides on the door plate are respectively an installation side and a box opening side; the driving unit is arranged on the mounting side of the door plate; the output end of the driving unit is connected with the movable connecting rod, and a plurality of movable sliding grooves are formed in the movable connecting rod; a box opening key is arranged at one end of the eccentric connecting rod, one end of the box opening key is rotationally connected with the door plate through a rotating piece, the other end of the box opening key is located on the box opening side and used for opening the wafer box, a cam is arranged at the other end of the eccentric connecting rod, and the cam is located in the movable sliding groove; the eccentric connecting rods, the movable sliding grooves and the lock holes are arranged in a one-to-one correspondence mode. On the basis that the wafer box can be opened or unlocked, the whole structure is simple, and the maintenance operability is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and in particular to a wafer box opening mechanism and a wafer conveyor. Background Art

[0002] There are many procedures or steps in the manufacturing process of semiconductor wafers, and the wafers need to be placed in different locations and different machines due to these procedures or steps. Therefore, the wafers must be transported from one place to another during the process, and even stored for a period of time to cooperate with the necessary processes. Among them, the wafer carrier FOUP has both storage and transportation functions, and needs to be applicable to various forms of transportation and transmission devices, so it plays an extremely important role in the manufacturing process of semiconductor wafers.

[0003] In semiconductor manufacturing plants, wafers usually need to be efficiently transferred and positioned between different process modules on the production line. Wafer Sorter is the key equipment to complete this task. It is a bridge connecting different process modules and enables wafers to be accurately transferred without contamination.

[0004] Wafer Sorter at least includes a wafer box (Front Opening Unified Pod, abbreviated as FOUP) for storing wafers, a loading port (Load Port) for carrying the wafer box, and an operating robot for taking out and storing wafers from the wafer box. The loading port includes a door opener (or box opening mechanism) and a carrying mechanism. When the transport cart on the semiconductor production line moves the FOUP to the loading port, the wafer box is placed on the carrying mechanism of the loading port manually or by a robot, and then the door opener performs the opening action of the wafer box, and then the operating robot takes out the wafers in the wafer box and transfers them between different Load Ports.

[0005] The wafer box opening mechanism disclosed in the prior art has a relatively complex structure. Also, due to the complex structure, various components are blocked from each other, and it is not convenient to repair the internal components, resulting in poor repair operability. Utility Model Content

[0006] The utility model aims to provide a box opening mechanism for a wafer box, which can meet the requirements of opening or unlocking the wafer box, has a simple overall structure and improves maintenance operability.

[0007] The technical solution of the utility model is achieved in this way:

[0008] A wafer box opening mechanism, comprising:

[0009] A door panel, wherein a plurality of lock holes are provided on the door panel, a rotating member is installed in the lock holes, and two opposite sides of the door panel are respectively an installation side and a box opening side;

[0010] A driving unit, arranged on the installation side of the door panel;

[0011] A movable connecting rod, the output end of the driving unit is connected to the movable connecting rod, and a plurality of movable sliding grooves are provided on the movable connecting rod;

[0012] An eccentric connecting rod, one end of which is provided with an opening key, one end of which is rotatably connected to the door panel through the rotating member, the other end of which is located at the opening side and is used to open the wafer box, and the other end of which is provided with a cam, which is located in the movable slide groove;

[0013] Wherein, the eccentric connecting rod, the movable sliding groove and the locking hole are arranged in a one-to-one correspondence.

[0014] Furthermore, the movable connecting rod and the box opening key respectively have an initial position and a box opening position. When the box opening key is in the initial position, the wafer box cannot be opened; when the box opening key is in the box opening position, the wafer box can be opened.

[0015] The installation side of the door panel is also provided with a first in-place sensor and a second in-place sensor, wherein the first in-place sensor is used to detect whether the movable link is in an initial position; and the second in-place sensor is used to detect whether the movable link is in an opening position.

[0016] Furthermore, the rotating part adopts a bearing, the outer ring part of the bearing is fixedly connected to the door panel, one end of the box opening key is an assembly part, and the other end is an opening part, wherein the assembly part is assembled in the bearing and cooperated with the inner ring part of the bearing, and the opening part is used to open the wafer box.

[0017] Furthermore, the driving unit adopts a linear driving member to drive the movable connecting rod to move linearly.

[0018] Furthermore, the linear drive member adopts a linear motor, an electric push rod, a hydraulic cylinder or a pneumatic cylinder.

[0019] Furthermore, the eccentric connecting rod is a Z-type connecting rod, which includes a main core plate portion, a turning portion and an eccentric plate portion connected in sequence, the main core plate portion is fixedly connected to one end of the box opening key, and the eccentric plate portion is fixedly connected to the cam.

[0020] Furthermore, the main core plate portion is provided with an assembly groove, one end of the box opening key is correspondingly assembled in the assembly groove, and the box opening key is connected to the main core plate portion by a plurality of screws.

[0021] Furthermore, the eccentric plate portion is provided with an axial hole, the camshaft of the cam is assembled in the axial hole, and the axis of the cam and the axis of the lock hole are parallel to each other and not colinear.

[0022] Furthermore, the number of the eccentric connecting rod, the movable sliding groove and the locking hole is two respectively, and the two eccentric connecting rods are respectively located on two opposite sides of the driving unit.

[0023] A wafer conveyor comprises a loading port for carrying a wafer box and a box opening door frame arranged at one side of the loading port. The loading port comprises an opening mechanism and a carrying mechanism for the wafer box, and the box opening mechanism for the wafer box is arranged correspondingly at the box opening door frame.

[0024] Compared with the prior art, the beneficial effects of the utility model are:

[0025] The present application utilizes a driving unit to drive the movement of a movable connecting rod, and a cam of the eccentric connecting rod is movably assembled in a movable slide groove. When the movable connecting rod moves, the cam slides relatively along the movable slide groove, thereby driving the rotation of the eccentric connecting rod, and the box opening key at the other end of the eccentric connecting rod can be rotated to open the wafer box, thereby realizing the operation of unlocking or opening the wafer box. The overall structure of the box opening mechanism for the wafer box is simple, and each component is exposed to the outside, without cross-blocking between each other, and will not affect the maintenance of the components, thereby improving the maintenance operability. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 It is a structural schematic diagram of the installation side view of the opening mechanism for the wafer box of the utility model;

[0028] Figure 2 It is a structural schematic diagram of the box opening mechanism for the wafer box of the utility model from the box opening side view;

[0029] Figure 3 It is a schematic diagram of the structure of the connection and transmission between the cylinder, the movable connecting rod and the eccentric connecting rod of the utility model;

[0030] Figure 4 This is a schematic diagram of the structure of the eccentric connecting rod of the utility model (wherein the left side is its front view and the right side is its axonometric view);

[0031] Figure 5It is an axonometric view of the box opening key of the utility model;

[0032] Figure 6 This is a front view of the box opening key of the utility model;

[0033] Figure 7 It is a schematic diagram of the overall structure of the loading port (LP) of the utility model.

[0034] In the figure:

[0035] 1-door panel; 100-lock hole; 101-installation side; 102-opening side; 103-bearing;

[0036] 2-movable connecting rod; 201-movable slide;

[0037] 3-eccentric connecting rod; 301-main core plate; 3011-assembly groove; 302-turning part; 303-eccentric plate; 3031-shaft hole;

[0038] 4-opening key; 401-assembly department; 402-opening department;

[0039] 5- cam; 6- first in-position sensor; 7- second in-position sensor;

[0040] 8-photoelectric switch sensor; 9-suction cup mounting plate; 10-suction cup;

[0041] 11- driving unit; 12- bracket; 13- mapping component;

[0042] 14-wafer box; 15-carrying mechanism; 16-box opening mechanism for wafer box; 17-box opening door frame. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0044] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0045] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0046] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0047] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0048] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0049] In conjunction with the accompanying drawings, some embodiments of the present invention are described in detail below. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0050] Example 1

[0051] Reference Figure 1-Figure 7 This embodiment provides a wafer box opening mechanism 16, including:

[0052] A door panel 1, wherein a plurality of lock holes 100 are provided on the door panel 1, wherein a rotating member is installed in the lock hole 100, and two opposite sides of the door panel 1 are respectively a mounting side 101 and a box opening side 102;

[0053] A driving unit 11 is arranged on the installation side 101 of the door panel 1;

[0054] The movable connecting rod 2, the output end of the driving unit 11 is connected to the movable connecting rod 2, the driving unit 11 is used to drive the movable connecting rod 2 to move, and the movable connecting rod 2 is provided with a plurality of movable sliding grooves 201;

[0055] An eccentric connecting rod 3, one end of which is provided with a box opening key 4, one end of which is rotatably connected to the door panel 1 through the rotating member, the other end of which is located at the box opening side 102 and is used to open the wafer box 14, and the other end of which is provided with a cam 5, which is located in the movable slide groove 201;

[0056] Among them, the eccentric connecting rod 3, the movable sliding groove 201 and the locking hole 100 are arranged in a one-to-one correspondence.

[0057] When the driving unit 11 drives the movable link 2 to move from the initial position, since the cam 5 of the eccentric link 3 is movably assembled in the movable slide groove 201, when the movable link 2 moves, the cam 5 slides relatively along the inner wall of the movable slide groove 201, thereby driving the rotation of the eccentric link 3, and the box opening key 4 at the other end of the eccentric link 3 can be rotated to the unlocking position to open the wafer box 14, thereby realizing the operation of unlocking or opening the wafer box 14. The overall structure of the wafer box opening mechanism 16 is simple, and each component is exposed to the outside. There is no cross-obstruction between each other, which will not affect the maintenance of the components. It can be directly repaired on the machine without disassembly, thereby improving the maintenance operability.

[0058] In this embodiment, the movable connecting rod 2 and the opening box key 4 have an initial position and an opening box position, respectively. The initial position is the initial state. When the opening box key 4 is in the initial position, the wafer box 14 cannot be opened; the opening box position is the unlocking position or the opening box position, that is, the position for opening the wafer box 14. When the opening box key 4 is in the opening box position, the wafer box 14 can be opened. Since the movable connecting rod 2 and the eccentric connecting rod 3 move together, the opening box key 4 on the movable connecting rod 2 and the eccentric connecting rod 3 are both in the initial position or the opening box position, but the difference is that the movable connecting rod 2 can realize the transition from the initial position to the opening box position by its own rotation or linear displacement, while the opening box key 4 can only realize the transition from the initial position to the opening box position by its own rotation.

[0059] The installation side 101 of the door panel 1 is used for installing various components, so the drive unit 11, the movable connecting rod 2, and the eccentric connecting rod 3 are all installed on the installation side 101 of the door panel 1. Only the opening key 4 passes through the lock hole 100 and extends to the opening side 102 of the door panel 1 to open the wafer box 14.

[0060] The installation side 101 of the door panel 1 is also provided with a first in-position sensor 6 and a second in-position sensor 7. The first in-position sensor 6 is used to detect whether the movable link 2 is in the initial position; the second in-position sensor 7 is used to detect whether the movable link 2 is in the box opening position. Specifically, when the movable link 2 is in the initial position, the first in-position sensor 6 can sense and send a signal to the control system, and the control system receives the electrical signal that the movable link 2 is in the initial position; when the movable link 2 moves to the box opening position, the second in-position sensor 7 can sense and send a signal to the control system, and the control system receives the electrical signal that the movable link 2 is in the box opening position. The control system receives the information that the movable link 2 is in the initial position or the box opening position, and can control other related mechanisms to operate according to the set program to improve the degree of automation.

[0061] In this embodiment, the rotating part adopts a bearing 103, and the outer ring part of the bearing 103 is fixedly connected to the door panel 1, and preferably the outer ring part of the bearing 103 is connected to the door panel 1 by multiple screws, one end of the opening key 4 is an assembly part 401, and the other end is an opening part 402, wherein the assembly part 401 is assembled in the bearing 103 and is matched with the inner ring part of the bearing 103, and the opening part 402 is used to open the wafer box 14.

[0062] The lock hole 100 is designed as a round hole, and the assembly part 401 of the key 4 is designed as a round rod structure, and the assembly part 401 and the inner ring of the bearing 103 can be interference fit or transition fit. Preferably, the assembly part 401 and the inner ring of the bearing 103 are interference fit.

[0063] In this embodiment, the driving unit 11 adopts a linear driving member to drive the movable connecting rod 2 to move linearly. The linear driving member can be a linear motor, an electric push rod, a hydraulic cylinder or a pneumatic cylinder. Preferably, the driving unit 11 of this embodiment adopts a pneumatic cylinder, and the number of the eccentric connecting rod 3, the movable slide groove 201 and the lock hole 100 is two respectively, and the two eccentric connecting rods 3 are respectively located on opposite sides of the driving unit 11, such as Figure 1 As shown. The cylinder body of the cylinder is fixed to the mounting side 101 of the door panel 1, and the telescopic rod of the cylinder is connected and fixed to the movable connecting rod 2 by a plurality of screws. The two lock holes 100 are arranged at the same height, and the movable slide groove 201 on the movable connecting rod 2 and the eccentric connecting rod 3 correspond to it one by one. Preferably, the movable slide groove 201 is a through groove structure, or called a through hole, and the through direction of the through hole is consistent with the axial direction of the lock hole 100, and the through direction of the through hole and the axial direction of the lock hole 100 are defined as the y direction, and the rotation direction of the eccentric connecting rod 3 and the cam 5 is Ry (Ry is the direction of rotation around the y direction).

[0064] In this embodiment, the eccentric connecting rod 3 is a Z-type connecting rod, which includes a main core plate portion 301, a turning portion 302 and an eccentric plate portion 303 connected in sequence, the main core plate portion 301 is fixedly connected to one end (assembly portion 401) of the box opening key 4, and the eccentric plate portion 303 is fixedly connected to the cam 5.

[0065] Specifically, a first cutting surface, a second cutting surface, a third cutting surface and a fourth cutting surface are formed by cutting at the end of the assembly portion 401, and the first cutting surface, the second cutting surface, the third cutting surface and the fourth cutting surface are distributed in a circular array around the central axis of the assembly portion 401. Among them, the first cutting surface is parallel to the third cutting surface, the second cutting surface is parallel to the fourth cutting surface, the first cutting surface is perpendicular to the second cutting surface, and the cutting depth, cutting thickness and area of ​​the first cutting surface, the second cutting surface, the third cutting surface and the fourth cutting surface are all the same.

[0066] Correspondingly, an assembly groove 3011 is opened on the assembly surface of the main core plate portion 301, and the shape of the assembly groove 3011 is exactly the same as the shape of the end of the assembly portion 401, so that the assembly portion 401 is correspondingly embedded in the assembly groove 3011, and then the end of the assembly portion 401 is connected and fixed to the main core plate portion 301 by multiple bolts or screws to achieve positioning assembly.

[0067] An axial hole 3031 is opened in the eccentric plate part 303, and the camshaft of the cam 5 is assembled in the axial hole 3031 and the two are connected and fixed by bolts or screws. The axis of the cam 5 and the axis of the locking hole 100 are parallel to each other and not colinear, so as to realize the eccentric function.

[0068] In this embodiment, at least one photoelectric switch sensor 8 is further provided on the movable link 2 to sense whether the wafer box 14 exists, so as to determine whether the wafer box 14 is in place.

[0069] In this embodiment, at least one suction cup mounting plate 9 is further provided on the mounting side 101 of the door panel 1, a suction cup 10 mounting hole is opened on the door panel 1 corresponding to the position of each mounting plate, a suction cup 10 is provided on the opening side 102 of the door panel 1, and the suction cup 10 is installed on the suction cup mounting plate 9 through the suction cup 10 mounting hole.

[0070] Since the wafer box opening mechanism 16 provided in this embodiment has various components connected in a detachable manner, it is convenient to disassemble the various components and also convenient to remove the components for maintenance, thereby improving the maintenance operability.

[0071] Example 2

[0072] A wafer conveyor includes a loading port (Load Port, LP for short) for carrying a wafer box 14, a box opening door frame 17 arranged on one side of the loading port, and an operating robot for taking out and storing wafers from the wafer box 14 into the wafer box 14. The loading port (Load Port) is also called a loading platform. The loading port (Load Port) includes a box opening mechanism 16 for the wafer box and a carrying mechanism 15. The box opening mechanism 16 for the wafer box is correspondingly arranged at the box opening door frame 17, and the door panel 1 corresponds to the wafer box 14. In addition to being adsorbed and fixed to the box opening door frame 17 by a suction cup 10, the door panel 1 can also be detachably connected and fixed to the box opening door frame 17 by magnetic attraction or bolt connection. The loading port (Load Port) can also include a bracket 12 for supporting the box opening mechanism 16 for the wafer box, and a mapping component 13 (mapping component) arranged on the box opening mechanism, such as Figure 7 shown.

[0073] When the transport cart on the semiconductor production line moves the FOUP to the loading port, the wafer box 14 is placed on the carrying mechanism 15 of the loading port manually or by a robot, and then the wafer box opening mechanism 16 performs the opening action of the wafer box 14, and then the operating robot takes out the wafers in the wafer box 14 and transfers them between different loading ports.

[0074] The beneficial effects of the technical solution of the utility model are:

[0075] 1. The wafer box opening mechanism 16 provided in the present application is driven by a cylinder, and the cam 5 of the eccentric connecting rod 3 cooperates with the movable slide groove 201 of the movable connecting rod 2 to form a mechanical transmission, and drives the opening key 4 to switch between the initial position and the opening position, and the overall operation is stable; at the same time, the cylinder drive method replaces the motor drive method in the prior art, and the driving stroke and displacement are more accurate, and the overall structure of the cylinder drive box transmission is simpler;

[0076] 2. The assembly portion 401 of the opening key 4 is correspondingly embedded in the assembly groove 3011 of the eccentric connecting rod 3 to achieve positioning assembly, and the assembly is stable and reliable;

[0077] 3. Based on the simple overall structure of the box opening mechanism, there will be no intersection or obstruction between the components, which is not only convenient for direct maintenance of parts on the machine and improves the maintenance operability, but also the components are detachably connected, which is convenient for disassembly and maintenance of the components, thereby improving the maintenance operability.

[0078] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

[0079] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A wafer box opening mechanism (16), characterized in that: include: A door panel (1), wherein a plurality of lock holes (100) are provided on the door panel (1), a rotating member is installed in the lock hole (100), and two opposite sides of the door panel (1) are respectively a mounting side (101) and a box opening side (102); A drive unit (11) is arranged on a mounting side (101) of the door panel (1); A movable connecting rod (2), the output end of the driving unit (11) is connected to the movable connecting rod (2), and a plurality of movable sliding grooves (201) are provided on the movable connecting rod (2); An eccentric connecting rod (3), a box opening key (4) is arranged at one end of the eccentric connecting rod (3), one end of the box opening key (4) is rotatably connected to the door panel (1) via the rotating member, the other end of the box opening key (4) is located at the box opening side (102) and is used to open the wafer box (14), and a cam (5) is arranged at the other end of the eccentric connecting rod (3), and the cam (5) is located in the movable slide groove (201); Wherein, the eccentric connecting rod (3), the movable sliding groove (201) and the locking hole (100) are arranged in a one-to-one correspondence.

2. The wafer box opening mechanism (16) according to claim 1, characterized in that: The movable connecting rod (2) and the box opening key (4) respectively have an initial position and a box opening position. When the box opening key (4) is in the initial position, the wafer box (14) cannot be opened; when the box opening key (4) is in the box opening position, the wafer box (14) can be opened. The installation side (101) of the door panel (1) is also provided with a first in-position sensor (6) and a second in-position sensor (7), wherein the first in-position sensor (6) is used to detect whether the movable connecting rod (2) is in an initial position; and the second in-position sensor (7) is used to detect whether the movable connecting rod (2) is in an opening position.

3. The wafer box opening mechanism (16) according to claim 1, characterized in that: The rotating part adopts a bearing (103), the outer ring part of the bearing (103) is fixedly connected to the door panel (1), one end of the box opening key (4) is an assembly part (401), and the other end is an opening part (402), wherein the assembly part (401) is assembled in the bearing (103) and is matched with the inner ring part of the bearing (103), and the opening part (402) is used to open the wafer box (14).

4. The wafer box opening mechanism (16) according to claim 1, characterized in that: The driving unit (11) adopts a linear driving member, which is used to drive the movable connecting rod (2) to move linearly.

5. The wafer box opening mechanism (16) according to claim 4, characterized in that: The linear drive member is a linear motor, an electric push rod, a hydraulic cylinder or a pneumatic cylinder.

6. The wafer box opening mechanism (16) according to claim 1, characterized in that: The eccentric connecting rod (3) is a Z-shaped connecting rod, comprising a main core plate portion (301), a turning portion (302) and an eccentric plate portion (303) connected in sequence, the main core plate portion (301) being fixedly connected to one end of the box opening key (4), and the eccentric plate portion (303) being fixedly connected to the cam (5).

7. The wafer box opening mechanism (16) according to claim 6, characterized in that: The main core plate (301) is provided with an assembly groove (3011), one end of the box opening key (4) is correspondingly assembled in the assembly groove (3011), and the box opening key (4) is connected to the main core plate (301) by a plurality of screws.

8. The wafer box opening mechanism (16) according to claim 6, characterized in that: The eccentric plate portion (303) is provided with an axial hole (3031), the camshaft of the cam (5) is assembled in the axial hole (3031), and the axis of the cam (5) and the axis of the locking hole (100) are parallel to each other and not colinear.

9. The wafer box opening mechanism (16) according to claim 1, characterized in that: The number of the eccentric connecting rod (3), the movable sliding groove (201) and the locking hole (100) is two respectively, and the two eccentric connecting rods (3) are respectively located on two opposite sides of the driving unit (11).

10. A wafer transfer machine, comprising a loading port for carrying a wafer box (14), and a box opening door frame (17) arranged on one side of the loading port, characterized in that: It also comprises a wafer box opening mechanism (16) and a supporting mechanism (15) as described in any one of claims 1 to 9, and the wafer box opening mechanism (16) is correspondingly arranged at the opening door frame (17).

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