Locking mechanism for wafer box and wafer conveyor

Abstract

The utility model relates to the technical field of semiconductors, in particular to a locking mechanism for a wafer box and a wafer transmission machine, comprising a bearing frame which comprises a bottom plate, a carrier plate and a plurality of support columns used for connecting the bottom plate and the carrier plate, and the carrier plate is used for bearing the wafer box; the hinge seat comprises a seat body and a first rotating shaft, the first rotating shaft is rotationally connected with the seat body, and the seat body is fixed to the bearing frame; one end of the linear driving unit is hinged to the bottom plate, and the other end of the linear driving unit is connected with the first rotating shaft; one end of the clamping jaw is hinged to the other end of the linear driving unit, the middle of the clamping jaw is connected with the first rotating shaft, and the other end of the clamping jaw is used for tightly holding the carrier plate; the in-place detection unit is arranged on the bearing frame and used for detecting whether the clamping jaw tightly holds the carrying plate or not. Whether the locking mechanism is in a locking state or not can be accurately detected, so that the overall operation condition of equipment is accurately known, and the overall stability and reliability of the equipment are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and in particular to a locking mechanism for a wafer box and a wafer conveyor. Background Art

[0002] There are many procedures or steps in the manufacturing process of semiconductor wafers, and the wafers need to be placed in different locations and different machines due to these procedures or steps. Therefore, the wafers must be transported from one place to another during the process, and even stored for a period of time to cooperate with the necessary processes. Among them, the wafer carrier FOUP has both storage and transportation functions, and needs to be applicable to various forms of transportation and transmission devices, so it plays an extremely important role in the manufacturing process of semiconductor wafers.

[0003] In semiconductor manufacturing plants, wafers usually need to be efficiently transferred and positioned between different process modules on the production line. Wafer Sorter is the key equipment to complete this task. It is a bridge connecting different process modules and enables wafers to be accurately transferred without contamination.

[0004] Wafer Sorter at least includes a wafer box (Front Opening Unified Pod, abbreviated as FOUP) for storing wafers, a loading port (Load Port) for carrying the wafer box, and an operating robot for taking out and storing wafers from the wafer box. The loading port includes a door opener and a carrying mechanism. When the transport cart on the semiconductor production line moves the FOUP to the loading port, the wafer box is placed on the carrying mechanism of the loading port manually or mechanically, and then the door opener performs the opening action of the wafer box, and then the operating robot takes out the wafers in the wafer box and transfers them between different Load Ports.

[0005] The locking mechanism for wafer boxes in the prior art cannot accurately detect whether the locking mechanism is in a locked state, thereby affecting the overall operation of the equipment, and the stability and reliability of the equipment are low. Utility Model Content

[0006] The utility model aims to provide a locking mechanism for a wafer box, which can accurately detect whether the locking mechanism is in a locked state, thereby accurately knowing the overall operation status of the equipment and improving the overall stability and reliability of the equipment.

[0007] Another object of the utility model is to provide a wafer conveyor, which can accurately detect whether the locking mechanism is in a locked state, thereby accurately knowing the overall operation status of the equipment and improving the overall stability and reliability of the equipment.

[0008] The technical solution of the utility model is achieved in this way:

[0009] A locking mechanism for a wafer box, comprising:

[0010] A carrier frame, comprising a base plate, a carrier plate and a plurality of pillars for connecting the base plate and the carrier plate, wherein the carrier plate is used to carry a wafer box;

[0011] An articulated seat, the articulated seat comprising a seat body and a first rotating shaft, the first rotating shaft is rotatably connected to the seat body, and the seat body is fixed to the supporting frame;

[0012] A linear drive unit, one end of which is hinged to the bottom plate, and the other end of which is connected to the first rotating shaft;

[0013] A clamping jaw, one end of which is hinged to the other end of the linear drive unit, the middle of which is connected to the first rotating shaft, and the other end of which is used to hold the carrier plate tightly;

[0014] The in-position detection unit is arranged on the carrier frame and is used to detect whether the clamping claw is tightly holding the carrier plate.

[0015] Furthermore, a slot is provided on the carrier plate, and the clamp is arranged corresponding to the slot. The linear drive unit can drive the clamp to move into the slot and hold the inner wall of the slot.

[0016] Further, the linear drive unit has a retracted state and an extended state;

[0017] When the linear drive unit is in a retracted state, the clamp is in an initial position or a released position, and the in-position detection unit can detect that the clamp is in the initial position or the released position;

[0018] When the linear drive unit is in an extended state, the clamp is in a clamping position or a locking position, and the in-position detection unit can detect that the clamp is in the clamping position or the locking position.

[0019] Furthermore, it also includes a stopper, wherein the stopper is fixedly connected to the clamping jaw;

[0020] The in-position detection unit is arranged corresponding to the stopper and is used for detecting the position of the stopper.

[0021] Further, the in-place detection unit includes a first in-place sensor and a second in-place sensor;

[0022] When the linear drive unit is in a retracted state, the stopper is located within the sensing range of the first in-position sensor;

[0023] When the linear drive unit is in an extended state, the stopper is located within the sensing range of the second in-position sensor.

[0024] Furthermore, the articulated seat includes two bearing seats arranged at the bottom of the carrier plate, and the first rotating shaft is simultaneously installed on the bearings of the two bearing seats.

[0025] Furthermore, the linear drive unit adopts a linear motor, an electric push rod, a hydraulic cylinder or a telescopic cylinder.

[0026] Furthermore, the linear drive unit adopts a telescopic cylinder, one end of which is rotatably connected to a cylinder base via a second rotating shaft, and the cylinder base is fixedly mounted on the bottom plate;

[0027] The other end of the telescopic cylinder is rotatably connected to one end of the clamp via a third rotating shaft, and the third rotating shaft, the second rotating shaft and the first rotating shaft have the same axial direction, or the other end of the telescopic cylinder is universally connected to one end of the clamp via a universal ball head assembly.

[0028] Furthermore, it also includes a platform bottom plate, and the bottom plate is arranged on the platform bottom plate.

[0029] A wafer conveyor comprises the locking mechanism for the wafer box.

[0030] Compared with the prior art, the beneficial effects of the utility model are:

[0031] The present application drives one end of the clamping jaw through the linear motion of the linear drive unit, causing the clamping jaw to rotate around the first rotating shaft, so that the clamping jaw can clamp onto the carrier plate to achieve locking. During this locking process, the position of the clamping jaw can always be detected by the in-place detection unit. For example, when the clamping jaw is in the position of clamping the carrier plate, it can enter the sensing range of the in-place detection unit and be detected by it. In this way, the in-place detection unit can accurately detect whether the clamping jaw is in the released position or the clamped position, indirectly reflecting that the locking mechanism is in the released position or the locked position, and transmitting the detected signal to the control system of the device, so that when the control system accurately knows that the locking mechanism is in the released position or the locked position, it can subsequently drive and control other mechanisms on the device, so that the entire device can proceed in an orderly manner, thereby improving the overall stability and reliability of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0033] Figure 1 It is a side view structural schematic diagram of the locking mechanism of the utility model when it is in the released position;

[0034] Figure 2 It is a schematic diagram of the axonometric structure of the locking mechanism of the utility model when it is in the released position;

[0035] Figure 3 It is a side view structural schematic diagram of the locking mechanism of the utility model when it is in the locking position;

[0036] Figure 4 It is a schematic diagram of the axonometric structure when the locking mechanism of the utility model is in the locking position;

[0037] Figure 5 This is a schematic diagram of the structure of the utility model after the locking mechanism hides the carrier plate;

[0038] Figure 6 It is a three-dimensional diagram of the stopper of the utility model;

[0039] Figure 7 It is a structural schematic diagram of the loading port (LP) of the utility model.

[0040] In the figure:

[0041] 1-carrier board; 101-card slot;

[0042] 2-base plate; 3-pillar;

[0043] 4- telescopic cylinder; 5- cylinder base; 6- clamping claw; 7- bearing seat; 8- first rotating shaft; 9- second rotating shaft; 10- third rotating shaft; 11- first in-position sensor; 12- second in-position sensor; 13- stopper; 14- platform bottom plate;

[0044] 15-door opener; 16-wafer box; 17-support; 18-mapping assembly; 19-locking mechanism for wafer box. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0046] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0047] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0048] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0049] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0050] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0051] In conjunction with the accompanying drawings, some embodiments of the present invention are described in detail below. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0052] Example 1

[0053] Reference Figure 1-Figure 7 This embodiment provides a wafer box locking mechanism 19, including:

[0054] The support frame includes a base plate 2, a carrier plate 1 and a plurality of pillars 3 for connecting the base plate 2 and the carrier plate 1. The carrier plate 1 is located on the base plate 2 and is used to support a wafer box 16. The pillars 3 are threaded columns, and the top and bottom ends of the threaded columns are respectively connected to the carrier plate 1 and the base plate 2 by threads.

[0055] An articulated seat, the articulated seat comprising a seat body and a first rotating shaft 8, the first rotating shaft 8 is rotatably connected to the seat body, and the seat body is fixed to the supporting frame;

[0056] A linear drive unit, one end of which is hinged to the base plate 2, and the other end of which is connected to the first rotating shaft 8;

[0057] A clamping jaw 6, one end of which is hinged to the other end of the linear drive unit, the middle of which is connected to the first rotating shaft 8, and the other end of which is used to hold the carrier plate 1;

[0058] The in-position detection unit is arranged on the carrier frame and is used to detect whether the clamping claw 6 is tightly holding the carrier plate 1 .

[0059] The working principle of this part is:

[0060] Through the linear motion of the linear drive unit, one end of the clamp 6 is driven to rotate around the first rotating shaft 8, so that the clamp 6 can be tightly clamped to the carrier 1 to achieve locking. During this locking process, the position of the clamp 6 can always be detected by the in-position detection unit.

[0061] Specifically, a slot 101 is further provided on the carrier 1 , and the clamp 6 is arranged corresponding to the slot 101 . The linear drive unit can drive the clamp 6 to move into the slot 101 and hold the inner wall of the slot 101 , thereby holding the carrier 1 .

[0062] The linear drive unit has a retracted state and an extended state;

[0063] When the linear drive unit is in a retracted state, the clamp 6 is in an initial position or a released position, which belong to the same position, both indicating the position of the clamp 6 when the linear drive unit is not running. When the clamp 6 is in the initial position or the released position, it indicates that the locking mechanism as a whole is in the released position; and the in-place detection unit can detect that the clamp 6 is in the initial position or the released position, that is, when the clamp 6 is in the initial position or the released position, it is within the sensing range of the in-place detection unit.

[0064] When the linear drive unit is in the extended state, and after the linear drive unit is extended to a certain length, the clamp 6 is just tightly clamped to the carrier 1. At this time, the clamp 6 is in the clamping position or the locking position, which also indicates that the locking mechanism as a whole is in the locking position. The in-place detection unit can detect that the clamp 6 is in the clamping position or the locking position, that is, when the clamp 6 is in the clamping position or the locking position, it is also within the sensing range of the in-place detection unit.

[0065] In this embodiment, a stopper 13 is further included, wherein the stopper 13 is fixedly connected to the clamp 6, and the stopper 13 moves together with the clamp 6. The in-position detection unit is arranged corresponding to the stopper 13, and the in-position detection unit indirectly detects the position of the stopper 13 by detecting the position of the stopper 13, thereby detecting whether the stopper 13 is in a released position or a locked position.

[0066] In this embodiment, the in-place detection unit includes a first in-place sensor 11 and a second in-place sensor 12; when the linear drive unit is in a retracted state, the block 13 is located within the sensing range of the first in-place sensor 11, and the first in-place sensor 11 is used to detect whether the block 13 and the clamp 6 are in a released position; when the linear drive unit is in an extended state, the block 13 is located within the sensing range of the second in-place sensor 12, and the second in-place sensor 12 is used to detect whether the block 13 and the clamp 6 are in a locked position.

[0067] The first in-position sensor 11 and the second in-position sensor 12 are both photoelectric in-position sensors.

[0068] In this embodiment, the articulated seat includes two bearing seats 7 arranged at the bottom of the carrier plate 1, and the first rotating shaft 8 is simultaneously installed on the bearings of the two bearing seats 7, and the first rotating shaft 8 is rotatably connected to the bearing seats 7 through the bearings.

[0069] In this embodiment, the linear drive unit can be a linear motor, an electric push rod, a hydraulic cylinder or a telescopic cylinder 4. Preferably, the linear drive unit uses a telescopic cylinder 4, one end of the telescopic cylinder 4 is rotatably connected to the cylinder base 5 through the second rotating shaft 9, and the cylinder base 5 is fixed on the bottom plate 2, and the other end of the telescopic cylinder 4 is rotatably connected to one end of the clamp 6 through the third rotating shaft 10, and the axial directions of the third rotating shaft 10, the second rotating shaft 9 and the first rotating shaft 8 are the same, so that the telescopic cylinder 4 drives the clamp 6 to rotate around the first rotating shaft 8, and then moves the other end (clamping end) of the clamp 6 into the slot 101 and presses against the inner wall of the slot 101, so as to achieve the clamping of the carrier 1, such as Figure 3 and Figure 4 shown.

[0070] In this embodiment, it also includes a platform bottom plate 14, which is also called a table bottom plate, and the bottom plate 2 is arranged on the platform bottom plate 14. It should be noted here that in the prior art, the installation, debugging and maintenance of the locking mechanism are all performed under the carrier plate 1, which is not ergonomic, has poor operability, and brings great inconvenience to the operator; while in this application, due to the provision of the bottom plate 2, the cylinder base 5 and the cylinder connecting rod (the cylinder connecting rod is the telescopic rod end structure of the cylinder) are fixed on different bottom plates, and the operator can operate from the top of the equipment, which is ergonomic and convenient for installation, debugging and maintenance.

[0071] A plurality of positioning posts are also provided on the upper portion of the carrier plate 1 for positioning and placing the wafer box 16 .

[0072] Example 2

[0073] The present embodiment provides a locking mechanism 19 for a wafer box, which differs from Embodiment 1 in that: in the present embodiment, the other end of the telescopic cylinder 4 is universally connected to one end of the clamp 6 via a universal ball head assembly (the design of the third rotating shaft 10 is cancelled), and the telescopic cylinder 4 and the clamp 6 are universally connected, which can also achieve the purpose of the telescopic cylinder 4 driving the clamp 6 to flip and clamp the carrier 1.

[0074] Example 3

[0075] The present embodiment provides a wafer transfer machine (referred to as the equipment), including a loading port (Load Port, LP for short) for carrying a wafer box 16, an operating robot for taking out and storing wafers from the wafer box 16 and into the wafer box 16, and a control system. The loading port (Load Port) is also called a loading platform. The loading port (Load Port) includes a door opener 15 and a carrying mechanism, and the carrying mechanism includes the locking mechanism 19 for the wafer box described in Example 1 or Example 2. The wafer box 16 can be positioned on the carrier plate 1 through positioning columns.

[0076] The load port may further include a bracket 17 for supporting the door opener 15, and a mapping component 18 disposed on the door opener 15, such as Figure 7 shown.

[0077] When the transport cart on the semiconductor production line moves the FOUP to the loading port, the wafer box 16 is positioned and placed on the carrier 1 manually or by a robot, and the in-position detection unit accurately detects whether the clamp 6 is in the released position or the clamped position, indirectly reflecting that the locking mechanism is in the released position or the locked position, and transmits the detected signal to the control system of the equipment so that the control system can accurately know the information that the locking mechanism is in the released position or the locked position, and subsequently drive and control other mechanisms on the equipment, so that the entire equipment can be operated in an orderly manner, thereby improving the overall stability and reliability of the equipment.

[0078] Compared with the prior art, the present invention has at least the following beneficial effects:

[0079] 1. The driving unit in the locking mechanism in the prior art often adopts a cylinder, and uses the magnetic sensor inside the cylinder to judge the state of the locking mechanism, which is not reliable enough and causes the equipment to run unsteadily. The present application adds a photoelectric in-position sensor, which is more reliable and stable than the magnetic sensor inside the cylinder, thereby improving the reliability and stability of the equipment.

[0080] 2. In the prior art, the installation, debugging and maintenance of the locking mechanism are all performed under the carrier plate 1, which is not ergonomic and has poor operability, causing great inconvenience to the operator. However, in the present application, due to the provision of the base plate 2, the cylinder base 5 and the cylinder connecting rod (the cylinder connecting rod is the telescopic rod end structure of the cylinder) are fixed to different base plates, and the operator can operate from the top of the equipment, which is ergonomic and convenient for installation, debugging and maintenance.

[0081] 3. The locking mechanism of the present application has a simple structure, better driveability, and more stable operation of the overall structure.

[0082] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

[0083] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A wafer box locking mechanism (19), characterized in that: include: A carrier frame, comprising a base plate (2), a carrier plate (1), and a plurality of pillars (3) for connecting the base plate (2) and the carrier plate (1), wherein the carrier plate (1) is used for carrying a wafer box (16); An articulated seat, the articulated seat comprising a seat body and a first rotating shaft (8), the first rotating shaft (8) being rotatably connected to the seat body, and the seat body being fixed to the supporting frame; A linear drive unit, one end of which is hinged on the base plate (2), and the other end of which is connected to the first rotating shaft (8); A clamping jaw (6), one end of the clamping jaw (6) is hinged to the other end of the linear drive unit, the middle part of the clamping jaw (6) is connected to the first rotating shaft (8), and the other end of the clamping jaw (6) is used to hold the carrier plate (1); An in-position detection unit is arranged on the carrier frame and is used to detect whether the clamping claw (6) is tightly holding the carrier plate (1).

2. The wafer box locking mechanism (19) according to claim 1, characterized in that: The carrier plate (1) is also provided with a slot (101), the clamping claw (6) is arranged corresponding to the slot (101), and the linear drive unit can drive the clamping claw (6) to move into the slot (101) and hold the inner wall of the slot (101).

3. The wafer box locking mechanism (19) according to claim 1, characterized in that: The linear drive unit has a retracted state and an extended state; When the linear drive unit is in a retracted state, the clamping jaw (6) is in an initial position or a released position, and the in-position detection unit can detect that the clamping jaw (6) is in the initial position or the released position; When the linear drive unit is in an extended state, the clamping jaw (6) is in a clamping position or a locking position, and the in-position detection unit can detect that the clamping jaw (6) is in the clamping position or the locking position.

4. The wafer box locking mechanism (19) according to claim 3, characterized in that: It also includes a blocking member (13), wherein the blocking member (13) is fixedly connected to the clamping jaw (6); The in-position detection unit is arranged corresponding to the stopper (13) and is used to detect the position of the stopper (13).

5. The wafer box locking mechanism (19) according to claim 4, characterized in that: The in-place detection unit comprises a first in-place sensor (11) and a second in-place sensor (12); When the linear drive unit is in a retracted state, the stopper (13) is located within the sensing range of the first in-position sensor (11); When the linear drive unit is in an extended state, the stopper (13) is located within the sensing range of the second in-position sensor (12).

6. The wafer box locking mechanism (19) according to claim 1, characterized in that: The hinge seat comprises two bearing seats (7) arranged at the bottom of the carrier plate (1), and the first rotating shaft (8) is simultaneously mounted on the bearings of the two bearing seats (7).

7. The wafer box locking mechanism (19) according to claim 1, characterized in that: The linear drive unit adopts a linear motor, an electric push rod, a hydraulic cylinder or a telescopic cylinder (4).

8. The wafer box locking mechanism (19) according to claim 7, characterized in that: The linear drive unit adopts a telescopic cylinder (4), one end of which is rotatably connected to a cylinder base (5) via a second rotating shaft (9), and the cylinder base (5) is fixedly mounted on the bottom plate (2); The other end of the telescopic cylinder (4) is rotatably connected to one end of the clamp (6) via a third rotating shaft (10); the third rotating shaft (10), the second rotating shaft (9) and the first rotating shaft (8) have the same axial direction; or, the other end of the telescopic cylinder (4) is universally connected to one end of the clamp (6) via a universal ball head assembly.

9. The wafer box locking mechanism (19) according to claim 1, characterized in that: It also comprises a platform bottom plate (14), and the bottom plate (2) is arranged on the platform bottom plate (14).

10. A wafer transfer machine, characterized in that: It comprises a wafer box locking mechanism (19) as claimed in any one of claims 1 to 9.

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