Adjustable rotating cathode magnetic bar

Abstract

The utility model belongs to the technical field of vacuum coating, and discloses an adjustable rotating cathode magnetic bar which comprises a core tube, a base arranged on the bottom face of the core tube and a magnetic steel set arranged on the base, a placement groove is formed in the side wall of the core tube, and a threaded rod used for fixing the base is arranged in the placement groove. A screw cap is arranged on the side wall of the threaded rod, a plurality of water through grooves distributed at equal intervals are formed in the side wall of the threaded rod, a containing groove is formed in the inner wall of the placement groove, a sealing gasket is arranged in the containing groove, and an adjusting assembly used for adjusting the angles of the water through grooves is arranged on the core pipe. The screw mounting device has the effect of reducing the screw mounting difficulty of workers.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to an adjustable rotating cathode magnetic bar. Background Art

[0002] Vacuum coating technology is to bombard the target material with energetic particles, and the particles escaping from the target material are attached to the substrate to form a coating. The existing coating technology is mainly divided into flat cathode and rotating cathode. Compared with flat cathode, rotating cathode has great advantages, such as improved utilization of target material and improved process stability. However, the existing rotating cathode generally installs the magnet on a hollow tube, which is installed by screws. The screws generally penetrate the hollow tube, which is convenient for installation, but will hinder the water flow in the tube. If the screws are too thin, they will often bend under long-term water pressure. Therefore, the radius of the screws generally used is not small, reaching one-third of the radius of the hollow tube, so the obstruction is more obvious, and the water flow speed in the tube is difficult to increase, resulting in the overall cooling water replacement speed is not fast enough, and the cooling effect is not ideal.

[0003] A Chinese utility model patent with publication number CN213113479U discloses a magnetic bar for a rotating cathode, including a core tube and a base, wherein the base is in the shape of a plate and is mounted on the core tube by screws, the extension direction of the base is consistent with the core tube, the screw passes through the core tube and is connected to the base, a row of water holes is arranged at the position of the screw rod inside the core tube, the extension direction of the water holes is perpendicular to the screw rod, the arrangement direction of the water holes is consistent with the extension direction of the screw rod, a spiral water flow groove is arranged on the inner wall of the core tube, and a plurality of magnetic steel groups are installed on the base, and the magnetic steel groups are arranged along the extension direction of the base. The utility model has the advantage that a water flow hole is arranged on the screw passing through the core tube, and when the water flow hole faces the water flow direction, the cooling water flow in the core tube is increased, and a spiral water flow groove is arranged on the inner wall of the core tube, and eddy currents are generated during water circulation, which accelerates the flow rate of cooling water, increases the water flow as a whole, and improves the cooling effect.

[0004] With respect to the above-mentioned related technologies, the inventor believes that there are the following defects: the above-mentioned device reduces the blocking effect of the screw on the water flow by setting a water hole on the screw. During installation, the staff needs to make the extension direction of the water hole consistent with the direction of the water flow. However, in actual operation, due to tolerance and other issues, when the extension direction of the water hole is consistent with the direction of the water flow, the magnet cannot remain completely stable, and the staff can only continue to turn the screw. At this time, the extension direction of the water hole and the direction of the water flow are prone to form a certain angle, which is not conducive to extending the service life of the screw. Utility Model Content

[0005] In order to solve the above problems, the utility model provides an adjustable rotating cathode magnetic bar.

[0006] The above technical purpose of the utility model is achieved through the following technical scheme: an adjustable rotating cathode magnetic rod, including a core tube, a base arranged on the bottom surface of the core tube and a magnetic steel group arranged on the base, the side wall of the core tube is provided with a placement groove, a threaded rod for fixing the base is arranged in the placement groove, a nut is arranged on the side wall of the threaded rod, a plurality of water grooves distributed at equal intervals are provided on the side wall of the threaded rod, a receiving groove is provided on the inner wall of the placement groove, a sealing gasket is arranged in the receiving groove, and an adjustment component for adjusting the angle of the water groove is arranged on the core tube.

[0007] By adopting the above technical solution, when the staff needs to install the magnetic steel group, the staff needs to fix the magnetic steel group and the base to each other, and make the base close to the core tube, so that the base can be initially kept stable. Subsequently, the staff needs to make the threaded rod pass through the placement block and the placement groove, and rotate the threaded rod, so that the threaded rod can be threadedly connected with the base, and then the base can be kept stable under the action of the threaded rod. In this process, the angle between the axis of the water trough and the horizontal plane changes continuously with the rotation of the threaded rod. When the threaded rod cannot move further, there is a certain angle between the axis of the water trough and the horizontal plane. At this time, the staff can start the adjustment component to adjust the position of the slide bar, thereby adjusting the distance between the nut and the core tube, and then adjusting the position when the threaded rod cannot move further, that is, adjusting the angle between the axis of the water trough and the horizontal plane, thereby reducing the difficulty of operation for the staff. When the axis of the water trough is parallel to the horizontal plane, the staff only needs to inject water into the core tube, so that part of the water can pass through the water trough and pass over the threaded rod, thereby reducing the impact force on the threaded tube, thereby reducing the probability of bending of the threaded rod.

[0008] Furthermore, the adjustment component includes an accommodation block arranged on the side wall of the threaded rod, a sliding groove is opened on the side wall of the accommodation block, and the adjustment component also includes a sliding rod slidably arranged in the sliding groove, a return spring with one end fixed on the side wall of the sliding rod, a gasket fixed on the side wall of the sliding rod away from the return spring, and a driving device arranged on the accommodation block for driving the sliding rod, and the other end of the return spring is fixed on the inner wall of the sliding groove.

[0009] Furthermore, a thread groove is formed through the inner top wall of the slide groove, the driving device includes a screw threadedly connected in the thread groove and a driving block arranged on the upper surface of the screw, a movable groove is formed on the upper surface of the slide rod, and an inclined surface is formed on the edge where the inner wall of the movable groove away from the reset spring intersects with the upper surface of the slide rod.

[0010] By adopting the above technical solution, when the staff needs to adjust the distance between the nut and the core tube, the staff only needs to rotate the driving block to make the screw move downward under the action of the driving block, and then make the screw press against the inclined surface, so that the sliding rod moves away from the placement block under the action of the screw, and then adjust the position of the gasket, thereby adjusting the distance between the nut and the core tube, thereby reducing the difficulty of operation for the staff.

[0011] Furthermore, an annular plate is fixed on the side wall of the gasket close to the slide rod, an annular groove matching the annular plate is formed on the side wall of the placement block close to the gasket, and the annular plate is slidably connected to the annular groove.

[0012] By adopting the above technical solution, the stability of the gasket is improved, the probability of the gasket bending is reduced, and the user experience of the staff is improved.

[0013] Furthermore, a silicone block is provided on the bottom surface of the screw for reducing the probability of damage to the inclined surface.

[0014] Furthermore, an indicator arrow is provided on the side wall of the nut, and the direction of the indicator arrow is parallel to the axis of the water channel.

[0015] By adopting the above technical solution, when the staff turns the nut, the staff only needs to observe the direction of the indicating arrow to determine the direction of the axis of the water channel, thereby reducing the difficulty of operation for the staff.

[0016] Furthermore, the gasket includes a connecting sheet fixed to the annular plate and a silicone sheet fixed to the connecting sheet.

[0017] Furthermore, a water flow trough for accelerating the water flow rate is arranged on the inner wall of the core tube.

[0018] In summary, the utility model has the following beneficial effects:

[0019] 1. In this application, when the staff needs to install the magnetic steel group, the staff needs to fix the magnetic steel group and the base to each other, and make the base close to the core tube, so that the base can be initially kept stable. Subsequently, the staff needs to make the threaded rod pass through the placement block and the placement groove, and rotate the threaded rod, so that the threaded rod and the base are threadedly connected, so that the base can be kept stable under the action of the threaded rod. In this process, the angle between the axis of the water trough and the horizontal plane continues to change with the rotation of the threaded rod. When the threaded rod cannot move any further, there is a certain angle between the axis of the water trough and the horizontal plane. At this time, the staff can start the adjustment component to adjust the position of the sliding rod, thereby adjusting the distance between the nut and the core tube, and then adjusting the position when the threaded rod cannot move any further, that is, adjusting the angle between the axis of the water trough and the horizontal plane, thereby reducing the difficulty of operation for the staff. When the axis of the water trough and the horizontal plane are parallel to each other, the staff only needs to inject water into the core tube to allow part of the water to pass through the water trough and over the threaded rod, thereby reducing the impact force on the threaded tube, thereby reducing the probability of bending of the threaded rod;

[0020] 2. In the present application, when the staff needs to adjust the distance between the nut and the core tube, the staff only needs to rotate the driving block to make the screw move downward under the action of the driving block, thereby making the screw close to the inclined surface, so that the slide bar moves away from the placement block under the action of the screw, and then adjusts the position of the gasket, thereby adjusting the distance between the nut and the core tube, thereby reducing the difficulty of operation for the staff;

[0021] 3. In the present application, when the staff turns the nut, the staff only needs to observe the direction of the indicating arrow to determine the direction of the axis of the water channel, thereby reducing the difficulty of operation for the staff. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the utility model;

[0023] Figure 2 This is a schematic diagram of a magnetic steel group and its connection structure in an embodiment of the utility model;

[0024] Figure 3 This is a schematic diagram of a gasket and its connection structure in an embodiment of the utility model;

[0025] Figure 4 It is a schematic diagram of a driving device and its connection structure of an embodiment of the utility model.

[0026] In the figure: 1. core tube; 11. base; 2. magnetic steel group; 21. mounting groove; 3. threaded rod; 31. nut; 4. water trough; 41. receiving groove; 5. sealing gasket; 6. adjustment assembly; 61. mounting block; 62. slide rod; 63. return spring; 64. gasket; 641. connecting piece; 642. silicone sheet; 65. slide groove; 66. threaded groove; 7. driving device; 71. screw rod; 72. driving block; 73. moving groove; 8. annular plate; 81. annular groove; 82. silicone block; 83. indicator arrow; 9. water trough. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application; obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments, and all other embodiments obtained by ordinary technicians in this field based on the embodiments in the present application without making creative work are within the scope of protection of the present application.

[0028] like Figure 1-4 As shown, the embodiment of the present application discloses an adjustable rotating cathode magnetic rod, including a core tube 1, a base 11, a magnetic steel group 2, a threaded rod 3, a nut 31, a sealing gasket 5, an adjustment component 6, an annular plate 8, a silicone block 82 and an indication arrow 83. The base 11 is a rectangular plate-like structure, and the base 11 is arranged on the bottom surface of the core tube 1. The magnetic steel group 2 is arranged on the base 11, and a placement groove 21 is provided on the side wall of the core tube 1. The threaded rod 3 is arranged in the placement groove 21 for fixing the base 11. The nut 31 is arranged on the side wall of the threaded rod 3, and a plurality of water-passing grooves 4 distributed at equal intervals are provided on the side wall of the threaded rod 3. A receiving groove 41 is provided on the inner wall of the placement groove 21, and the sealing gasket 5 is arranged in the receiving groove 41.

[0029] The adjustment assembly 6 is arranged on the core tube 1 and is used to adjust the angle of the water channel 4. The adjustment assembly 6 includes a placement block 61, a slide bar 62, a return spring 63, a gasket 64 and a driving device 7. The placement block 61 is a block structure, and the placement block 61 is arranged on the side wall of the threaded rod 3. A slide groove 65 is provided on the side wall of the placement block 61. The slide bar 62 is a rectangular rod structure, and the slide bar 62 is slidably arranged in the slide groove 65. One end of the return spring 63 is fixed to the side wall of the slide bar 62, and the other end of the return spring 63 is fixed to the inner wall of the slide groove 65.

[0030] The gasket 64 is fixed on the side wall of the slide bar 62 away from the return spring 63, and the gasket 64 includes a connecting piece 641 and a silicone sheet 642. The connecting piece 641 is a sheet structure with a circular ring cross section, and the connecting piece 641 and the annular plate 8 are fixed to each other. The silicone sheet 642 is a sheet structure with a circular ring cross section, and the silicone sheet 642 and the connecting piece 641 are fixed to each other.

[0031] A thread groove 66 is formed on the inner top wall of the slide groove 65. The driving device 7 is arranged on the placement block 61 and is used to drive the slide rod 62. The driving device 7 includes a screw rod 71 and a driving block 72. The screw rod 71 is threadedly connected in the thread groove 66. A moving groove 73 is formed on the upper surface of the slide rod 62. An inclined surface is formed on the edge where the inner wall of the moving groove 73 away from the reset spring 63 intersects with the upper surface of the slide rod 62. The driving block 72 is a block-shaped structure and is arranged on the upper surface of the screw rod 71.

[0032] When the staff needs to adjust the distance between the nut 31 and the core tube 1, the staff only needs to rotate the driving block 72 to make the screw 71 move downward under the action of the driving block 72, and then make the screw 71 press against the inclined surface, so that the slide rod 62 moves away from the placement block 61 under the action of the screw 71, and then adjust the position of the gasket 64, thereby adjusting the distance between the nut 31 and the core tube 1, thereby reducing the difficulty of operation for the staff.

[0033] The annular plate 8 is a plate-shaped structure with a square ring cross section. The annular plate 8 is fixed on the side wall of the gasket 64 close to the slide rod 62. The side wall of the placement block 61 close to the gasket 64 is provided with an annular groove 81 that matches the annular plate 8, and the annular plate 8 is slidably connected to the annular groove 81. The annular plate 8 improves the stability of the gasket 64, reduces the probability of the gasket 64 being bent, and thus improves the use experience of the staff.

[0034] In order to extend the service life of the slide rod 62 , a silicone block 82 is provided on the bottom surface of the screw rod 71 to reduce the probability of damage to the inclined surface.

[0035] The indicator arrow 83 is arranged on the side wall of the nut 31, and the direction of the indicator arrow 83 is parallel to the axis of the water channel 4. When the staff turns the nut 31, the staff only needs to observe the direction of the indicator arrow 83 to judge the direction of the axis of the water channel 4, thereby reducing the difficulty of operation for the staff.

[0036] In order to improve the cooling effect of the cooling water, a water flow groove 9 for accelerating the water flow rate is arranged on the inner wall of the core tube 1 .

[0037] The use principle of an adjustable rotating cathode magnetic bar in this embodiment is as follows: when the staff needs to install the magnetic steel group 2, the staff needs to fix the magnetic steel group 2 and the base 11 to each other, and make the base 11 close to the core tube 1, so that the base 11 can be initially kept stable. Subsequently, the staff needs to make the threaded rod 3 pass through the placement block 61 and the placement groove 21, and rotate the threaded rod 3, so that the threaded rod 3 and the base 11 are threadedly connected, and then the base 11 is kept stable under the action of the threaded rod 3. In this process, the angle between the axis of the water trough 4 and the horizontal plane changes continuously with the rotation of the threaded rod 3. When the threaded rod 3 is completely unable to move further, there is a certain angle between the axis of the water trough 4 and the horizontal plane. At this time, the staff can start the adjustment component 6 to adjust the position of the slide rod 62, thereby adjusting the distance between the nut 31 and the core tube 1, and then adjusting the position when the threaded rod 3 is completely unable to move further, that is, adjusting the angle between the axis of the water trough 4 and the horizontal plane, thereby reducing the difficulty of operation for the staff. When the axis of the water channel 4 is parallel to the horizontal plane, the staff only needs to inject water into the core tube 1 to allow part of the water to pass through the water channel 4 over the threaded rod 3, thereby reducing the impact force on the threaded tube and the probability of the threaded rod 3 bending.

[0038] The above is only a preferred embodiment of the present invention. The protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. An adjustable rotating cathode magnetic bar, comprising a core tube (1), a base (11) interconnected with the core tube (1), and a magnetic steel group (2) arranged on the base (11), wherein: The core tube (1) has a side wall provided with a placement groove (21), a threaded rod (3) for fixing the base (11) is arranged in the placement groove (21), a nut (31) is arranged on the side wall of the threaded rod (3), a plurality of water-passing grooves (4) distributed at equal intervals are arranged on the side wall of the threaded rod (3), a receiving groove (41) is arranged on the inner wall of the placement groove (21), a sealing gasket (5) is arranged in the receiving groove (41), and an adjusting component (6) for adjusting the angle of the water-passing groove (4) is arranged on the core tube (1); The adjusting assembly (6) comprises a placement block (61) arranged on the side wall of the threaded rod (3), a slide groove (65) is provided on the side wall of the placement block (61), the adjusting assembly (6) further comprises a slide rod (62) slidably arranged in the slide groove (65), a return spring (63) with one end fixed on the side wall of the slide rod (62), a gasket (64) fixed on the side wall of the slide rod (62) away from the return spring (63), and a driving device (7) arranged on the placement block (61) for driving the slide rod (62), the other end of the return spring (63) being fixed on the inner wall of the slide groove (65); A thread groove (66) is formed on the inner top wall of the slide groove (65), the driving device (7) comprises a screw rod (71) threadedly connected in the thread groove (66) and a driving block (72) arranged on the upper surface of the screw rod (71), a moving groove (73) is formed on the upper surface of the slide rod (62), and an inclined surface is formed on the edge where the inner wall of the moving groove (73) away from the reset spring (63) intersects with the upper surface of the slide rod (62).

2. The adjustable rotating cathode magnetic bar according to claim 1, characterized in that: An annular plate (8) is fixed on the side wall of the gasket (64) close to the slide rod (62), and an annular groove (81) matching with the annular plate (8) is formed on the side wall of the placement block (61) close to the gasket (64), and the annular plate (8) is slidably connected to the annular groove (81).

3. The adjustable rotating cathode magnetic bar according to claim 2, characterized in that: The bottom surface of the screw (71) is provided with a silica gel block (82) for reducing the probability of damage to the inclined surface.

4. The adjustable rotating cathode magnetic bar according to claim 3, characterized in that: An indicating arrow (83) is provided on the side wall of the nut (31), and the direction of the indicating arrow (83) is parallel to the axis of the water channel (4).

5. The adjustable rotating cathode magnetic bar according to claim 4, characterized in that: The gasket (64) comprises a connecting sheet (641) fixed to the annular plate (8) and a silicone sheet (642) fixed to the connecting sheet (641).

6. The adjustable rotating cathode magnetic bar according to claim 5, characterized in that: The inner wall of the core tube (1) is provided with a water flow groove (9) for accelerating the water flow speed.

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