Stable bearing graphite boat for silicon wafer production

Abstract

The utility model discloses a stable bearing graphite boat for silicon wafer production, which relates to the technical field of graphite boats, and comprises a graphite boat main body, a plurality of groups of graphite boat sheets are arranged in the graphite boat main body, two groups of conducting rods are connected between the adjacent graphite boat sheets distributed in the vertical direction, and the top ends of the two side walls of each group of graphite boat sheets are respectively provided with a chute. Two sets of sliding blocks are slidably connected into each set of sliding grooves, an upper limiting plate is installed on the outer wall of each set of sliding blocks, compression springs are arranged between each set of sliding blocks and the inner walls of the sliding grooves, and lower V-shaped frames are installed at the bottom ends of the two side walls of each set of graphite boat pieces. Through the sliding of the sliding blocks in the sliding grooves and the elasticity of the compression springs, the adjacent upper limiting plates can always keep the trend of moving in the opposite directions, the upper end position of the silicon wafer can be limited, the space of the lower V-shaped frame is gradually reduced from top to bottom, the lower end position of the silicon wafer can be limited, and the silicon wafer is prevented from being damaged. The silicon wafer is prevented from sliding when being coated in the graphite boat, and the capability of stably bearing the silicon wafer of the graphite boat is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of graphite boats, in particular to a stable bearing graphite boat for silicon wafer production. Background Art

[0002] Graphite boat is a device made of high-purity graphite. It is widely used in electronics, energy, environmental protection and other fields due to its high temperature resistance and corrosion resistance. It looks like a small boat and can be used to manufacture, transport and process materials. In the production of silicon wafers, graphite boats are required for coating. The high efficiency and environmental protection of graphite boats make them occupy an important position in modern industry.

[0003] Publication No. CN208923068U proposes a graphite boat. When the graphite boat in the utility model is used to coat a silicon wafer, it is not necessary to turn the wafer over, which can effectively reduce the scratches on the edge of the silicon wafer caused by multiple insertions of the silicon wafer.

[0004] In the above patent, when coating silicon wafers, the upper end of the silicon wafer is limited by the upper slot and the bottom is supported by the lower slot. However, the spacing between the upper slots is fixed and cannot be adjusted. When the thickness of the silicon wafer is less than the spacing between the upper slots, the silicon wafer is prone to sliding. The ability of the graphite boat to stably carry the silicon wafer is average, which in turn affects the effect of silicon wafer coating. For this reason, we propose a stable carrying graphite boat for silicon wafer production. Utility Model Content

[0005] The utility model aims to provide a stable bearing graphite boat for silicon wafer production, so as to solve the problem that the silicon wafer is prone to slipping and thus affects the coating effect of the silicon wafer mentioned in the above background technology.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A stable load-bearing graphite boat for silicon wafer production comprises a graphite boat main body, in which a plurality of groups of graphite boat sheets are installed, two groups of conductive rods are connected between adjacent graphite boat sheets distributed in a vertical direction, slide grooves are provided at the top ends of both side walls of each group of graphite boat sheets, two groups of sliders are slidably connected in each group of slide grooves, and upper limit plates are installed on the outer walls of each group of sliders, compression springs are provided between each group of sliders and the inner wall of the slide groove, and lower V-shaped frames are installed on the bottom ends of both side walls of each group of graphite boat sheets.

[0008] Furthermore: a slot for passing the silicon wafer is provided between adjacent upper limit plates.

[0009] Furthermore: each group of graphite boat sheets is connected with different electrodes.

[0010] Furthermore, the height of the graphite boat is 160mm-300mm, the spacing between the front and rear adjacent graphite boats is 5mm-20mm, and the spacing between the left and right adjacent graphite boats is 150mm-170mm.

[0011] Furthermore: a soft pad is arranged on one side of each set of upper limit plates close to the silicon wafer, and a soft pad is also arranged on the inner wall of the lower V-shaped frame.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] The utility model can make the adjacent upper limit plates always keep the tendency of moving in relative directions through the sliding of the slider in the slide groove and the elasticity of the compression spring, so as to limit the upper end position of the silicon wafer. The space of the lower V-shaped frame gradually becomes smaller from top to bottom, so as to limit the lower end position of the silicon wafer, thereby preventing the silicon wafer from sliding when being coated in the graphite boat, improving the ability of the graphite boat to stably carry the silicon wafer and improving the coating effect of the silicon wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the structure of the utility model;

[0015] Figure 2 This is a schematic diagram of the side structure of the graphite boat sheet of the utility model;

[0016] Figure 3 It is a cross-sectional schematic diagram of the top view of the connection structure between the graphite boat and the upper limit plate of the utility model.

[0017] In the figure: 10, graphite boat body; 101, graphite boat sheet; 102, conductive rod; 103, upper limit plate; 104, lower V-shaped frame; 105, slide groove; 106, slider; 107, compression spring. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] Embodiment 1:

[0020] See also Figure 1-3The utility model provides a technical solution: a stable bearing graphite boat for silicon wafer production, comprising a graphite boat body 10, a plurality of groups of graphite boat sheets 101 are installed in the graphite boat body 10, two groups of conductive rods 102 are connected between adjacent graphite boat sheets 101 distributed in a vertical direction, a slide groove 105 is provided at the top of the two side walls of each group of graphite boat sheets 101, two groups of sliders 106 are slidably connected in each group of slide grooves 105, and an upper limit plate 103 is installed on the outer wall of each group of sliders 106, a compression spring 107 is provided between each group of sliders 106 and the inner wall of the slide groove 105, and a lower V-shaped frame 104 is installed at the bottom of the two side walls of each group of graphite boat sheets 101;

[0021] The graphite boat body 100 is an existing device, and its specific structure and working principle are not described here. Among them, coating a silicon wafer with the graphite boat body 100 is a technology disclosed in a graphite boat with publication number CN208923068U, which is not described here. When the silicon wafer is placed on the graphite boat body 10 for coating, the silicon wafer is vertically placed between the left and right adjacent upper limit plates 103, and the bottom is limited by the left and right adjacent lower V-shaped frames 104. Through the sliding of the slider 106 in the slide groove 105 and the elasticity of the compression spring 107, the adjacent upper limit plates 103 (fixedly connected to the slider 106) can always maintain a tendency to move in relative directions, and the upper end position of the silicon wafer can be limited. The space of the lower V-shaped frame 104 gradually decreases from top to bottom, and the lower end position of the silicon wafer can be limited to avoid the silicon wafer from sliding when coating in the graphite boat body 10, thereby improving the ability of the graphite boat to stably carry the silicon wafer and improving the effect of silicon wafer coating.

[0022] Preferably, slots for passing silicon wafers are provided between adjacent upper limit plates 103 ; the size of the slots is adjusted according to the movement of the upper limit plates 103 , so that silicon wafers of different thicknesses can be limited.

[0023] Preferably, each group of graphite boats 101 is connected to different electrodes.

[0024] Preferably, the height of the graphite boat 101 is 160 mm-300 mm, the spacing between the front and rear adjacent graphite boats 101 is 5 mm-20 mm, and the spacing between the left and right adjacent graphite boats 101 is 150 mm-170 mm.

[0025] Embodiment 2:

[0026] Reference Figure 2 This embodiment is different from the first embodiment in that a soft pad is provided on a side of each set of upper limit plates 103 close to the silicon wafer, and a soft pad is also provided on the inner wall of the lower V-shaped frame 104; the soft pad plays a protective role, preventing the silicon wafer from being worn due to contact with the upper limit plates 103 and the inner wall of the lower V-shaped frame 104 during coating, thus having a good protective effect on the silicon wafer and improving the yield rate of the silicon wafer after coating.

[0027] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A stable bearing graphite boat for silicon wafer production, comprising a graphite boat body (10), wherein a plurality of groups of graphite boat sheets (101) are installed in the graphite boat body (10), and two groups of conductive rods (102) are connected between adjacent graphite boat sheets (101) distributed in a vertical direction, characterized in that: The top ends of the two side walls of each group of graphite boat sheets (101) are provided with sliding grooves (105), and two groups of sliding blocks (106) are slidably connected in each group of sliding grooves (105). An upper limit plate (103) is installed on the outer wall of each group of sliding blocks (106), and a compression spring (107) is installed between each group of sliding blocks (106) and the inner wall of the sliding groove (105). A lower V-shaped frame (104) is installed on the bottom ends of the two side walls of each group of graphite boat sheets (101).

2. The stable bearing graphite boat for silicon wafer production according to claim 1, characterized in that: A slot for passing the silicon wafer is provided between adjacent upper limit plates (103).

3. The stable bearing graphite boat for silicon wafer production according to claim 1, characterized in that: Each group of graphite boat sheets (101) is connected to different electrodes.

4. The stable bearing graphite boat for silicon wafer production according to claim 1, characterized in that: The height of the graphite boat (101) is 160 mm to 300 mm.

5. The stable bearing graphite boat for silicon wafer production according to claim 1, characterized in that: The distance between the front and rear adjacent graphite boat sheets (101) is 5 mm to 20 mm.

6. The stable bearing graphite boat for silicon wafer production according to claim 1, characterized in that: The distance between the left and right adjacent graphite boat sheets (101) is 150 mm to 170 mm.

7. The stable bearing graphite boat for silicon wafer production according to claim 1, characterized in that: A soft pad is provided on one side of each set of upper limit plates (103) close to the silicon wafer, and a soft pad is also provided on the inner wall of the lower V-shaped frame (104).

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