Sample table for film coating of film coating instrument

Abstract

The sample table comprises a shell with an opening in the upper end, two fixing rings are arranged at the upper end of the inner wall of the shell, a supporting plate is rotationally connected between the two fixing rings in a matched mode, a driving motor and a controller are installed at the bottom of the inner wall of the shell, and a plurality of first electric push rods are installed at the upper end of the supporting plate. A ball head assembly is arranged at the upper end of each first electric push rod, a placement plate is arranged at the upper end of each ball head assembly in a matched mode, a plurality of fixing assemblies are rotationally connected to the edge of the upper end of the placement plate, a second electric push rod is downwards installed in the middle of the lower end of the placement plate, and a positioning block is arranged at the lower end of the second electric push rod; a plurality of notches are downwards formed in the edge of the upper end of the positioning block in a penetrating mode, and a connecting rod is rotationally connected between each notch and the bottom of the corresponding fixing assembly in a matched mode. According to the utility model, samples can be rotated, the placement angle of the samples can be adjusted, and a plurality of samples can be processed at one time, so that the working efficiency is greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of experimental equipment, in particular to a sample table for coating of a coating instrument. Background Art

[0002] The ion sputtering coater is a sample pretreatment instrument in a scanning electron microscope. It mainly performs nano-scale coating on the sample by ion sputtering or thermal evaporation, so that the sample is evenly covered with a layer of metal film or C film to form a good grounding conductor. In order to make the sample surface more evenly covered with a layer of conductive film, the stage is usually tilted at a certain angle (10°~30°) after coating on the top, and the stage is rotated about 3 times for coating, so that the sample is evenly covered with a layer of nano-scale conductive film to complete the sample pretreatment.

[0003] According to patent number CN207537528U, a utility model patent for a sample platform of an ion sputtering instrument includes a spring transposition base, a rotating shaft, and a sample plate. The base is provided with a spring device, which can be wound up and store energy. The spring transposition drives a vertically upward rotating shaft, and the rotating shaft can rotate by itself under the drive of the spring device. The sample plate is connected to the upper end of the rotating shaft, and the angle between the rotating shaft and the rotating shaft is adjustable, that is, the sample plate can be tilted to a certain extent. As the spring transposition drives the rotating shaft to rotate, the rotating shaft drives the sample plate to rotate, and an all-round and uniform spraying effect can be obtained. Not only can the sample obtain an all-round and uniform spraying effect, although the above technical method can perform rotational uniform coating on the sample, it requires multiple manual winding and energy storage during coating. After the vertical coating is completed, the side of the sample needs to be coated. The method of multiple shutdowns and manual operations will not only affect the low work efficiency, but also cause uneven coating. Utility Model Content

[0004] The utility model aims to provide a sample stage for coating of a coating instrument, which can rotate and adjust the placement angle of samples without manual operation, and can process multiple samples at one time, thereby greatly improving work efficiency and achieving uniform coating.

[0005] The above technical objectives of the utility model are achieved through the following technical solutions:

[0006] A sample stage for coating a film coating apparatus, comprising a shell with an opening at the upper end, two fixing rings are arranged downwardly at the upper end of the inner wall of the shell, a support plate is rotatably connected between the two fixing rings, a driving motor is upwardly installed at the middle position of the bottom of the inner wall of the shell, a power output shaft of the driving motor is fixedly connected to the bottom of the support plate, a controller is arranged on one side of the bottom of the inner wall of the shell, a connecting line electrically connected to the controller and extending out of the outer wall of the shell is arranged on one side of the outer wall of the controller, a plurality of first electric push rods distributed at equal intervals are arranged at the upper end of the support plate near its edge, a ball head assembly is arranged on the upper end of each first electric push rod, and a placement plate is arranged in cooperation with the upper end of the ball head assembly;

[0007] A plurality of equally spaced fixing grooves are provided downwardly through the edge of the upper end of the placement plate, and a fixing component that can rotate up and down is rotatably connected between the left and right sides of the inner wall of each fixing groove. A second electric push rod is installed downwardly at the middle position of the lower end of the placement plate, and a positioning block is provided at the lower end of the second electric push rod. A plurality of notches corresponding to the fixing grooves are provided downwardly through the edge of the upper end of the positioning block, and an arc-shaped connecting rod is rotatably connected between each notch and the bottom of the corresponding fixing component. The drive motor, the first electric push rod and the second electric push rod are all electrically connected to the controller.

[0008] By adopting the above technical scheme, when using, the device is first installed in the ion sputtering coating instrument, and it is powered on and controlled through the connecting line. In the initial state, the fixed component is arranged in parallel with the fixed groove, and then the sample to be processed is placed on the fixed component and fixed, and then the coating instrument is operated to spray gold or coat the sample. The controller controls the drive motor to work, and the drive motor drives the support plate to rotate between the two fixed rings to facilitate uniform gold spraying on the upper end of the sample, and then the second electric push rod is operated to extend or shorten a certain length. At this time, the connecting rod in the slot will drive the fixed component in the fixed groove to rotate up and down. At the same time, the first electric push rod works separately to extend or shorten a certain length. With the cooperation of the ball head assembly, the placement plate is tilted to facilitate gold spraying or coating the side of the sample. Multiple samples can be processed at one time, and the work efficiency is greatly improved.

[0009] The utility model is further configured as follows: a gap is left between the two fixing rings, and edges at both upper and lower ends of the support plate are rotatably connected to a plurality of rollers which are distributed at equal intervals and are in contact with the fixing rings.

[0010] By adopting the above technical solution, not only the stability of the support plate between the two fixing rings during rotation can be improved, but also the smoothness of its rotation can be improved.

[0011] The utility model is further configured as follows: the ball head assembly comprises a ball head seat and a ball head rod rotatably connected to the ball head seat.

[0012] The utility model is further configured as follows: the fixing assembly comprises a box body with an opening at the upper end, a threaded rod threadedly connected to the rear end of the outer wall of the box body and extending into the interior thereof, and a fixing block in the box body and arranged at the front end of the threaded rod.

[0013] By adopting the above technical solution, samples of different shapes and types can be fixed, thereby improving its applicability.

[0014] The utility model is further configured as follows: a connecting sleeve having elastic force and capable of deformation is provided between the edge of the bottom of the placing plate and the edge of the upper end of the shell.

[0015] By adopting the above technical solution, the first electric push rod and the second electric push rod can be protected to a certain extent and the corresponding materials can be prevented from falling under the placement plate when the sample is sprayed with gold or plated.

[0016] In summary, the utility model has the following beneficial effects:

[0017] First, the utility model can rotate and adjust the placement angle of the sample without manual operation, and can process multiple samples at one time, which greatly improves the work efficiency and can also achieve uniform coating;

[0018] Second, the fixing assembly of the utility model can fix samples of different types and sizes, further improving its applicability;

[0019] Thirdly, the roller of the utility model can not only improve the stability of the support plate between the two fixing rings when the support plate rotates, but also improve the smoothness of the rotation. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0021] Figure 2 It is mainly used to show the position and connection relationship of each component;

[0022] Figure 3 It is a structural schematic diagram of the fixing assembly of the utility model;

[0023] Figure 4 It is mainly used to display the second electric push rod and the notch.

[0024] In the figure: 1. shell; 11. fixing ring; 12. support plate; 13. roller; 14. driving motor; 15. controller; 16. connecting line; 17. first electric push rod; 18. ball head assembly; 19. ball head seat; 2. ball head rod; 21. placement plate; 22. fixing groove; 23. fixing assembly; 24. box body; 25. threaded rod; 26. fixing block; 27. second electric push rod; 28. positioning block; 29. ​​notch; 3. connecting rod; 31. connecting sleeve. DETAILED DESCRIPTION

[0025] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0026] In the description of the present invention, it should be understood that the terms "upper", "lower", "left", "right", "front", "back", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0027] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0028] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0029] Example, see Figure 1-4A sample stage for coating of a coating instrument comprises a shell 1 with an opening at the upper end, two fixing rings 11 are arranged downwardly from the upper end of the inner wall of the shell 1, a gap is left between the two fixing rings 11, a supporting plate 12 is rotatably connected between the two fixing rings 11, a plurality of rollers 13 which are equidistantly distributed and in contact with the fixing rings 11 are rotatably connected to the edges of the upper and lower ends of the supporting plate 12, a driving motor 14 is installed upwardly from the middle position of the bottom of the inner wall of the shell 1, and a power output shaft of the driving motor 14 is fixedly connected to the bottom of the supporting plate 12 A controller 15 is provided on one side of the bottom of the inner wall of the shell 1, and a connecting line 16 electrically connected to the controller 15 and extending out of the outer wall of the shell 1 is provided on one side of the outer wall of the controller 15. Three first electric push rods 17 distributed at equal intervals in a circle are installed near the edge of the upper end of the support plate 12. A ball head assembly 18 is provided on the upper end of each first electric push rod 17. The ball head assembly 18 includes a ball head seat 19 and a ball head rod 2 rotatably connected to the ball head seat 19. A placement plate 21 is provided at the upper end of the ball head rod 2.

[0030] A plurality of fixing grooves 22 are provided downwardly through the edge of the upper end of the placement plate 21 and are distributed at equal intervals around the circumference. A fixing assembly 23 that can rotate up and down is connected to the left and right sides of the inner wall of each fixing groove 22 in cooperation with rotation. The fixing assembly 23 includes a box body 24 with an upper opening, a threaded rod 25 that is threadedly connected to the rear end of the outer wall of the box body 24 and extends into the interior thereof, and a fixing block 26 that is in the box body 24 and arranged at the front end of the threaded rod 25. A second electric push rod 27 is installed downwardly at the middle position of the lower end of the placement plate 21. The second electric push rod 27 is installed downwardly at the middle position of the lower end of the placement plate 21. A positioning block 28 is provided at the lower end of the electric push rod 27, and a plurality of notches 29 corresponding to the fixing grooves 22 are provided downwardly through the edge of the upper end of the positioning block 28, and each notch 29 is rotatably connected to the bottom of the corresponding fixing component 23 by an arc-shaped connecting rod 3, and an elastic and deformable connecting sleeve 31 is provided between the edge of the bottom of the placement plate 21 and the edge of the upper end of the shell 1, and the drive motor 14, the first electric push rod 17 and the second electric push rod 27 are all electrically connected to the controller 15.

[0031] Method of use: When in use, first install the device in the ion sputtering coating instrument, and power it on and control it through the connecting line 16. In the initial state, the box body 24 of the fixing component 23 is arranged parallel to the fixing groove 22 on the placement plate 21, and then the sample to be processed is placed at the front end of the box body 24, and then the threaded rod 25 is rotated to allow the fixing block 26 to fix the sample in the box body 24, and then the coating instrument is operated to spray gold or coat the sample. The controller 15 controls the drive motor 14 to work, and the drive motor 14 drives the support plate 12 to rotate between the two fixing rings 11. When the support plate 12 rotates, the roller 13 is always in contact with the corresponding fixing ring 11, which can not only improve the stability of the support plate 12 during rotation, but also improve its smoothness during rotation, so as to facilitate uniform gold spraying or coating of the upper end of the sample.

[0032] Then let the second electric push rod 27 work, extend or shorten a certain length, at this time, the connecting rod 3 in the notch 29 on the positioning block 28 will drive the fixing component 23 in the fixing groove 22 to rotate upward or downward a certain angle, and at the same time, the three first electric push rods 17 work respectively, extend or shorten a certain length, and with the cooperation of the ball head component 18, the ball head rod 2 is rotated in the ball head seat 19 to realize the tilting setting of the placement plate 21 at different positions and angles. At the same time, in the rotating state, it is convenient to spray gold or plate the side of the sample, so that multiple samples can be processed at one time, and the work efficiency is greatly improved. There is no need to stop the machine to operate when adjusting the angle. When processing the sample, the connecting sleeve 31 can prevent the working material from entering the bottom of the placement plate 21 to a certain extent.

[0033] This specific embodiment is merely an explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed, but such modifications are protected by patent law as long as they are within the scope of the claims of the present invention.

Claims

1. A sample stage for coating a film in a coating apparatus, comprising a housing (1) with an upper opening, characterized in that: Two fixing rings (11) are arranged downwardly at the upper end of the inner wall of the shell (1), and a support plate (12) is rotatably connected between the two fixing rings (11). A driving motor (14) is installed upwardly at the middle position of the bottom of the inner wall of the shell (1), and the power output shaft of the driving motor (14) is fixedly connected to the bottom of the support plate (12). A controller (15) is arranged on one side of the bottom of the inner wall of the shell (1), and a connecting line (16) electrically connected to the controller (15) and extending out of the outer wall of the shell (1) is arranged on one side of the outer wall of the controller (15). A plurality of first electric push rods (17) distributed at equal intervals are installed at the upper end of the support plate (12) near its edge, and a ball head assembly (18) is arranged at the upper end of each first electric push rod (17), and a placement plate (21) is arranged at the upper end of the ball head assembly (18); A plurality of fixed grooves (22) distributed at equal intervals are provided downwardly through the edge of the upper end of the placement plate (21); a fixed assembly (23) that can rotate up and down is rotatably connected between the left and right sides of the inner wall of each fixed groove (22); a second electric push rod (27) is installed downwardly at the middle position of the lower end of the placement plate (21); a positioning block (28) is provided at the lower end of the second electric push rod (27); a plurality of notches (29) corresponding to the fixed grooves (22) are provided downwardly through the edge of the upper end of the positioning block (28); a connecting rod (3) arranged in an arc shape is rotatably connected between each notch (29) and the bottom of the corresponding fixed assembly (23); the drive motor (14), the first electric push rod (17) and the second electric push rod (27) are all electrically connected to the controller (15).

2. The sample stage for coating of a coating apparatus according to claim 1, characterized in that: A gap is left between the two fixing rings (11), and the edges of the upper and lower ends of the support plate (12) are rotatably connected to a plurality of rollers (13) which are distributed at equal intervals and are in contact with the fixing rings (11).

3. The sample stage for coating of a coating apparatus according to claim 1, characterized in that: The ball head assembly (18) comprises a ball head seat (19) and a ball head rod (2) rotatably connected to the ball head seat (19).

4. The sample stage for coating of a coating apparatus according to claim 1, characterized in that: The fixing assembly (23) comprises a box body (24) with an opening at the upper end, a threaded rod (25) threadedly connected to the rear end of the outer wall of the box body (24) and extending into the interior thereof, and a fixing block (26) inside the box body (24) and arranged at the front end of the threaded rod (25).

5. The sample stage for coating of a coating apparatus according to claim 1, characterized in that: A connecting sleeve (31) having elastic force and capable of deformation is provided between the edge of the bottom of the placement plate (21) and the edge of the upper end of the shell (1).

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