Cavity and deposition equipment
By setting a plurality of heating plates and heating parts in the cavity of the deposition device to assist in heating and adjust the internal temperature of the cavity, the problem of poor heating uniformity of sheet materials in traditional equipment is solved, and the uniformity of coating thickness is achieved.
Patent Information
- Application Number
- CN202421927332.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-07
- Publication Date
- 2025-05-13
- Estimated Expiration
- 2034-08-07
AI Technical Summary
In traditional edge passivation deposition equipment, the heat uniformity of the sheet-like material inside the cavity is poor, which affects the uniformity of the coating thickness.
A cavity is designed, including a plurality of heating plates and a heating member, which at least partially coincides with the connection position through the orthogonal projection of the heating member at the connection position of the heating plate to assist in heating and adjusting the temperature inside the cavity.
The uniformity of the temperature inside the cavity is achieved, the uniformity of the heat received by the sheet material during the deposition process is ensured, and the uniformity of the coating thickness is avoided.
Smart Images
Figure CN222861637U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the fields of photovoltaics and semiconductors, and in particular to a chamber and a deposition device. Background Art
[0002] Edge passivation deposition is a technology used to improve the performance of solar cells and plays an important role in the production process of TOPCon shingled solar cells. Edge passivation deposition technology is mainly achieved through atomic layer deposition (ALD). ALD is a technology that can achieve high-precision thin film deposition. It deposits materials on the substrate surface layer by layer through chemical vapor deposition. In the application of solar cells, ALD can be used to deposit passivation materials such as Al2O3 in the edge area of the cell to improve the performance of the cell.
[0003] However, in traditional edge passivation deposition equipment, because there are many wafers in a single chamber and the sheet materials are stacked in one place, the heating process will cause poor heating uniformity of the sheet materials inside the chamber, thus affecting the uniformity of the coating thickness. Utility Model Content
[0004] In view of this, an embodiment of the present application provides a chamber and a deposition device, which solves the problem that during the deposition process, the sheet material placed inside the chamber is heated uniformly, affecting the uniformity of the coating thickness of the sheet material.
[0005] In a first aspect, an embodiment of the present application provides a cavity for use in a deposition device, comprising: a plurality of heating plates, the plurality of heating plates being adjacently arranged to form a hollow space, the hollow space being used to place a sheet material, the plurality of heating plates being configured to heat the sheet material during a deposition process of the deposition device; a heating element, the heating element partially extending into the hollow space, the orthographic projection of the heating element along the vertical direction at the connection position of adjacent heating plates at least partially overlapping with the connection position of the adjacent heating plates.
[0006] In some embodiments, the hollow space includes a sheet material placement area, and the heating plate extends along a first direction; wherein the size of the portion of the heating element extending into the hollow space in the first direction is adapted to the size of the sheet material placement area in the first direction.
[0007] In some embodiments, a first opening is enclosed at one end of the plurality of heating plates in the first direction; wherein the cavity further comprises: a sealing baffle configured to close or open the first opening.
[0008] In some embodiments, the cavity further includes a second opening arranged opposite to the first opening; wherein the cavity further includes: an exhaust pipe, the exhaust pipe is connected to the hollow space and the exhaust device through the second opening.
[0009] In some embodiments, there are four heating plates, which are connected end to end to form a hollow space.
[0010] In some embodiments, the cavity further includes: an exhaust connecting pipe, a first end of the exhaust connecting pipe being connected to the second opening, and a second end of the exhaust connecting pipe being connected to the exhaust device; wherein, in the first direction, the size of the cross-section of the first end of the exhaust connecting pipe is greater than the size of the cross-section of the second end of the exhaust connecting pipe.
[0011] In some embodiments, the cavity further includes: a plurality of first temperature measuring components, which are respectively disposed on a plurality of heating plates, wherein the plurality of first temperature measuring components are respectively configured to measure the temperatures of the plurality of heating plates.
[0012] In some embodiments, the cavity further includes: a second temperature measuring element, which is disposed at the portion of the heating element extending into the hollow space and is configured to measure the temperature of the portion of the heating element extending into the hollow space.
[0013] In some embodiments, the cavity further includes: a reinforcing component, which is fixed to a side of the heating plate close to the hollow space.
[0014] In a second aspect, an embodiment of the present application provides a deposition device, comprising: any one of the chambers mentioned in the first aspect above; an exhaust device, which is connected to the chamber and is configured to discharge the gas generated by the deposition device during the deposition process.
[0015] In the embodiment of the present application, a heating element is arranged at the connection position of the heating plate, and the space of the cavity is auxiliary heated during the heating process, thereby realizing temperature regulation in the cavity. In addition, the orthographic projection of the heating element at the connection position of the adjacent heating plate at least partially overlaps with the connection position of the adjacent heating plate, and the temperature of the connection position with a lower temperature can be increased, thereby realizing temperature regulation of the space inside the cavity, and ensuring the uniformity of heating of the sheet material during the deposition process. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 Shown is a schematic structural diagram of a cavity provided in one embodiment of the present application.
[0017] Figure 2 Shown Figure 1 The cross-sectional schematic diagram of the cavity along the AA direction is shown.
[0018] Figure 3 Shown is a cross-sectional schematic diagram of a cavity provided in another embodiment of the present application.
[0019] Figure 4 Shown Figure 3 An enlarged schematic diagram of the structure at point B is shown.
[0020] Figure 5 Shown Figure 4 An enlarged schematic diagram of the structure at C is shown.
[0021] Figure 6 Shown is a cross-sectional structural diagram of a cavity provided in another embodiment of the present application.
[0022] Figure 7 Shown is a cross-sectional structural diagram of a cavity provided in another embodiment of the present application.
[0023] Figure 8 Shown is a cross-sectional structural diagram of a cavity provided in another embodiment of the present application.
[0024] Fig. 9 Shown is a cross-sectional structural diagram of a cavity provided in another embodiment of the present application.
[0025] Fig.10 Shown is a schematic structural diagram of a deposition device provided in one embodiment of the present application.
[0026] Reference numerals:
[0027] 100. Cavity; 110. Heating plate; 120. Heating element; 101. Sheet material; 102. Connection position; 103. Hollow space; 104. Sheet material placement area; 130. Sealing baffle; 111. First opening; 112. Second opening; 113. Exhaust pipe; 114. Exhaust connecting pipe; 140. First temperature measuring element; 150. Second temperature measuring element; 160. Reinforcement assembly; 200. Deposition equipment; 201. Exhaust device. DETAILED DESCRIPTION
[0028] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0029] Combine the following Figures 1 to 9 A brief introduction is given to the cavity provided in the embodiment of the present application.
[0030] Figure 1 Shown is a schematic structural diagram of a cavity provided in one embodiment of the present application. Figure 2 Shown Figure 1 The cross-sectional view of the cavity along the AA direction is shown in FIG. Figure 1 and Figure 2As shown, a chamber 100 provided in an embodiment of the present application is applied to a deposition device. The chamber 100 includes a plurality of heating plates 110 and a heating element 120 .
[0031] A plurality of heating plates 110 are arranged adjacent to each other to form a hollow space 103. The hollow space 103 is used to place the sheet material. The plurality of heating plates 110 are configured to heat the sheet material 101 during the deposition process of the deposition device. The heating element 120 partially extends into the hollow space 103. The heating element 120 extends in a vertical direction (such as Figure 2 The orthographic projection of the connection position 102 of the adjacent heating plate 110 (in the Y direction shown in FIG. 1 ) at the connection position 102 of the adjacent heating plate 110 at least partially overlaps with the connection position 102 of the adjacent heating plate 110 .
[0032] For example, Figure 1 The shape of the hollow space surrounded by the adjacent heating plates 110 of the cavity 100 is a rectangular parallelepiped. In actual application, multiple heating plates 110 can be adjacently arranged according to needs, and the shape of the enclosed hollow space 103 can be quasi-circular, that is, the cross section in the Y-axis direction is similar to a circle, and the circular edge is composed of the edges of multiple heating plates 110. The embodiment of the present application does not further limit the shape of the hollow space surrounded by the adjacent heating plates 110.
[0033] For example, the sheet material may be a silicon wafer, a glass substrate, a wafer, or the like.
[0034] Exemplarily, the heating plate 110 includes a heating plate body and a heating element, the heating element is located inside the heating plate body, during the deposition process of the deposition device, the heating element is heated, and the heat of the heating element is transferred to the inner wall of the heating plate body, so that the hollow space is heated, thereby achieving the purpose of heating the sheet material. It should be understood that when the sheet material enters the cavity, there is a carrier that carries the sheet material to complete the deposition. The sheet material carrier is a setting well known to those skilled in the art and will not be repeated here.
[0035] Exemplarily, the heating element 120 may be a tubular heating element, and the orthographic projection of the heating element 120 at the connection position of the adjacent heating plate 110 at least partially overlaps with the connection position of the adjacent heating plate 110 , so that the heating element 120 can assist in heating the connection position of the adjacent heating plate 110 .
[0036] For example, in actual application, by setting the temperature of the heating plate 110, the heating plate 110 is heated up, and the heat is transferred to the inside of the cavity. There is loss in the heat transfer process, especially at the connection position of the heating plate 110. The temperature at the connection position will deviate from the temperature of the plate surface. Therefore, the temperature can be adjusted by the heating element 120, and the temperature in the cavity can be adjusted by heating the heating element 120. Since the positive projection of the heating element 120 at the connection position 102 of the adjacent heating plate 110 at least partially overlaps with the connection position 102 of the adjacent heating plate 110, the connection position with a lower temperature can be heated up, and the temperature inside the cavity is balanced, thereby ensuring that the sheet material is heated evenly during the deposition process, and avoiding the problem of poor uniformity of the coating thickness due to temperature reasons.
[0037] In the embodiment of the present application, a heating element is provided, and the orthographic projection of the heating element at the connection position of the adjacent heating plate at least partially overlaps with the connection position of the adjacent heating plate. This can assist in heating while heating the connection position with a lower temperature, thereby achieving temperature regulation of the space inside the cavity and ensuring temperature uniformity, thereby ensuring uniform heating of the sheet material during the deposition process.
[0038] Figure 3 FIG. 1 is a schematic diagram of the structure of a cavity provided by another embodiment of the present application. Figure 2 Based on the embodiment shown, Figure 3 The embodiment shown is described below in detail. Figure 3 The embodiment shown and Figure 2 The differences between the embodiments shown are shown, and the similarities are not repeated. Figure 3 As shown, the hollow space 103 includes a sheet material placement area 104, and the heating plate 110 is arranged along a first direction (eg Figure 3 The heating element 120 extends in the first direction (in the X direction shown in the figure), wherein the size of the portion of the heating element 120 extending into the hollow space in the first direction is adapted to the size of the sheet material placement area in the first direction.
[0039] Exemplarily, a sheet material carrier, such as a boat, a material box, etc., is placed in the sheet material placement area to ensure that the sheet material can enter and exit the cavity. In actual application, the size of the sheet material placement area 104 is the same as the size of the sheet material carrier. Exemplarily, the size of the portion of the heating element 120 extending into the hollow space is adapted to the size of the sheet material placement area 104 in the first direction. In other words, the size of the portion of the heating element 120 extending into the hollow space is completely equal to the size of the sheet material placement area 104 in the first direction, or the size of the portion of the heating element 120 extending into the hollow space is approximately equal to the size of the sheet material placement area 104 in the first direction. For example, the size of the portion of the heating element 120 extending into the hollow space is slightly larger or slightly smaller than the size of the sheet material placement area 104 in the first direction. During the heating process, the size of the portion of the heating element 120 extending into the hollow space 103 is equal to the size of the sheet material placement area 104 in the first direction. The temperature of the sheet material placement area 104 can be adjusted to ensure that the temperature in the cavity of the sheet material area is uniform. In addition, temperature adjustment in unnecessary areas can be reduced, heating time can be saved, and heating efficiency can be improved.
[0040] The cavity provided in the embodiment of the present application sets the size of the heating element 120 to be the same as the size of the sheet material placement area 104, which can ensure that the temperature in the cavity in the area where the sheet material is located is uniform and improve the heating efficiency.
[0041] Figure 4 Shown Figure 3 The cross-sectional schematic diagram of the cavity along the BB direction is shown in FIG. Figure 4 As shown, in some embodiments, one end of the plurality of heating plates 110 in the first direction encloses a first opening 111. The chamber 100 further includes a sealing baffle 130, which is configured to close or open the first opening 111.
[0042] For example, the first opening 111 is provided to facilitate the entry and exit of the sheet material carrier. In addition, the sealing baffle 130 is provided to open or close the first opening 111 when the sheet material enters and exits, thereby improving the sealing of the cavity and further ensuring the processing conditions of the sheet material.
[0043] Exemplarily, a sealing ring may be provided between the sealing baffle 130 and the first opening 111 to further improve the sealing effect. The sealing baffle 130 is connected to the first opening 111 through conventional opening and closing accessories to ensure that the sealing baffle 130 can be opened and closed normally. The opening and closing accessories include but are not limited to telescopic cylinders, power connecting rods, telescopic power devices, transmission wheels, support wheels, and positioning parts, etc. The embodiments of the present application do not further limit the specific types of opening and closing accessories.
[0044] The cavity provided in the embodiment of the present application is provided with a first opening, which facilitates the sheet material to enter and exit with the sheet material carrier. In addition, the sealing baffle can open or close the first opening when the sheet material enters and exits, thereby improving the sealing of the cavity, further ensuring the processing conditions of the sheet material, and realizing the processing of the sheet material.
[0045] like Figure 5 As shown, the cavity 100 further includes a second opening 112 disposed opposite to the first opening 111. The cavity 100 further includes an exhaust pipe 113, which communicates with the hollow space 103 and the exhaust device 201 through the second opening 112.
[0046] Exemplarily, the exhaust device 201 is well known to those skilled in the art, such as an exhaust device such as an air pump, which can exhaust and / or process the gas generated during the heating process of the sheet material, and will not be described in detail here. In actual application, the exhaust device 201 matches the size of the exhaust pipe 113, so that the gas generated during the heating process can be discharged along a specified path and enter the exhaust device 201.
[0047] The cavity provided in the embodiment of the present application is provided with a second opening, and includes an exhaust pipe connected to the hollow space and the exhaust device through the second opening to discharge the gas generated during the heating process, which can further ensure the stability of the internal environment of the cavity.
[0048] In some embodiments, the number of the heating plates 110 is four, and the four heating plates 110 are connected end to end to form a hollow space 103 .
[0049] Exemplarily, the hollow space 103 formed by four heating plates 110 connected end to end is a rectangle. By connecting four heating plates 110 end to end to form a hollow space 103, the use requirements of the deposition equipment can be met. At the same time, the hollow space 103 formed by fewer heating plates 110 can save processing costs. In addition, the area of a single heating plate 110 is large, the heating plates 110 are connected at fewer locations, and the uniformity of the overall temperature of the cavity during the heating process is higher. In addition, the temperature can be adjusted by fewer heating elements 120, and the efficiency of the heating element 120 in adjusting the temperature is higher, and the production cost is lower.
[0050] The cavity provided in the embodiment of the present application uses a hollow space formed by four heating plates connected end to end, uses fewer heating plates to form the cavity, and uses fewer heating elements to adjust the temperature, thereby reducing production costs. In addition, since the heating plates 110 have fewer connection positions, the heating element 120 has a higher efficiency in adjusting the temperature uniformity.
[0051] Figure 6 FIG. 1 is a cross-sectional view of a cavity provided by another embodiment of the present application. Figure 2Based on the embodiment shown, Figure 6 The embodiment shown is described below in detail. Figure 6 The embodiment shown and Figure 2 The differences and similarities of the illustrated embodiments are not described in detail.
[0052] like Figure 6 As shown, in some embodiments, the chamber 100 further includes: an exhaust connection pipe 114, a first end of the exhaust connection pipe 114 is connected to the second opening 112, and a second end of the exhaust connection pipe 114 is connected to the exhaust device. In the first direction, the size of the cross section of the first end of the exhaust connection pipe 114 is greater than the size of the cross section of the second end of the exhaust connection pipe 114.
[0053] For example, in actual application, the size of the exhaust connection pipe 114 can be selected according to the installation requirements. The size of the cross section of the first end of the exhaust connection pipe 114 is larger than the size of the cross section of the second end of the exhaust connection pipe 114, which can meet the size requirements of different usage scenarios, thereby expanding the application range of the cavity.
[0054] The embodiment of the present application provides that the cross-sectional size of the first end of the exhaust connecting pipe is larger than the cross-sectional size of the second end of the exhaust connecting pipe, which can meet the size requirements of different usage scenarios, so that the cavity has a wider range of applications and can adapt to more usage scenarios.
[0055] Figure 7 FIG. 1 is a cross-sectional view of a cavity provided by another embodiment of the present application. Figure 2 Based on the embodiment shown, Figure 7 The embodiment shown is described below in detail. Figure 7 The embodiment shown and Figure 2 The differences and similarities of the illustrated embodiments are not described in detail.
[0056] like Figure 7 As shown, the cavity 100 further includes: a plurality of first temperature measuring elements 140 , which are respectively disposed on the plurality of heating plates 110 , wherein the plurality of first temperature measuring elements 140 are respectively configured to measure the temperatures of the plurality of heating plates 110 .
[0057] Exemplarily, a plurality of first temperature measuring elements 140 are respectively disposed on a plurality of heating plates 110, and can measure the temperature of the heating plates 110. Since the heating plates 110 heat the hollow space of the cavity by heat transfer after heating, the heating process of the sheet material is realized. Therefore, there is a deviation between the temperature inside the cavity and the temperature of the heating plates 110. Through the measurement of the first temperature measuring element 140, the temperature of the heating plates 110 can be grasped, and it is determined that the heating plates 110 reach the specified temperature, and the heating time at a specific temperature is guaranteed, thereby ensuring the heating effect.
[0058] The cavity provided in the embodiment of the present application includes a plurality of first temperature measuring components, which can determine that the heating plate has reached a specified temperature and ensure the heating effect.
[0059] Figure 8 FIG. 1 is a cross-sectional view of a cavity provided by another embodiment of the present application. Figure 7 Based on the embodiment shown, Figure 8 The embodiment shown is described below in detail. Figure 8 The embodiment shown and Figure 7 The differences and similarities of the illustrated embodiments are not described in detail.
[0060] like Figure 8 As shown, the cavity 100 further includes: a second temperature measuring element 150 , which is disposed at the portion of the heating element 120 extending into the hollow space 103 and is configured to measure the temperature of the portion of the heating element 120 extending into the hollow space 103 .
[0061] For example, since the second temperature measuring element 150 is disposed at the portion of the heating element 120 extending into the hollow space, the temperature of the space inside the cavity can be measured, thereby obtaining the temperature of the space inside the cavity. In actual application, the temperature of the space inside the cavity measured by the second temperature measuring element 150 can be compared with the temperature measured by the first temperature measuring element 140 to determine the difference between the temperature measured by the first temperature measuring element 140 and the temperature measured by the second temperature measuring element 150. The temperature value of the heating element 120 is adjusted according to the difference to achieve the balance of the temperature inside the cavity and ensure the uniformity of the temperature.
[0062] For example, in order to ensure the accuracy of temperature measurement and the uniformity of temperature control, each heating element 120 may be provided with a second temperature measuring element 150 .
[0063] For example, during the set temperature heating process, the heating plate 110 and the heating element 120 can be heated simultaneously to improve the heating efficiency. In addition, according to the temperature measured by the first temperature measuring element 140 and the temperature measured by the second temperature measuring element 150, the temperature unevenness can be adjusted in time during the heating process. The temperature in the cavity can be adjusted by adjusting the temperature of the heating plate 110 and / or the heating element 120, thereby achieving the purpose of temperature uniformity in the cavity.
[0064] The cavity provided in the embodiment of the present application is provided with a second temperature measuring component, which cooperates with the first temperature measuring component, and adjusts the temperature value of the heating component according to the temperature difference between the two temperature measuring components, so as to balance the temperature inside the cavity and ensure temperature uniformity.
[0065] Fig. 9 FIG. 1 is a cross-sectional view of a cavity provided by another embodiment of the present application. Figure 6Based on the embodiment shown, Fig. 9 The embodiment shown is described below in detail. Fig. 9 The embodiment shown and Figure 6 The differences and similarities of the illustrated embodiments are not described in detail.
[0066] like Fig. 9 As shown, the cavity 100 further includes: a reinforcing component 160 , which is fixed to a side of the heating plate 110 close to the hollow space.
[0067] Exemplarily, the reinforcing component 160 is a reinforcing rib fixed to a side of the heating plate 110 close to the hollow space, so as to increase the strength of the cavity 100 and prevent the cavity 100 from being deformed due to poor strength.
[0068] For example, in order to ensure the stability of the installation, a cavity support block is provided outside the cavity, and is fixed to the use platform during use to ensure the stability of the cavity. The cavity support block can prevent the cavity from being displaced during use. In addition, the support block and the reinforcing rib can be made of the same material to simplify the processing process.
[0069] The cavity provided in the embodiment of the present application ensures the strength of the cavity by providing a reinforcing component, thereby avoiding the situation where the cavity is deformed due to low strength and the function is affected.
[0070] Fig.10 FIG. 1 is a schematic diagram of the structure of a deposition device provided in one embodiment of the present application. Fig.10 As shown, a deposition device 200 provided in an embodiment of the present application includes: a chamber 100 and an exhaust device 201. The exhaust device 201 is connected to the chamber 100 and is configured to exhaust the gas generated by the deposition device 200 during the deposition process.
[0071] The beneficial effects of the deposition equipment provided in the embodiment of the present application are consistent with the beneficial effects of the above-mentioned chamber, and will not be repeated here.
[0072] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.
[0073] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).
[0074] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.
[0075] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.
[0076] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.
Claims
1. A chamber, applied to a deposition device, characterized in that: include: A plurality of heating plates, wherein the plurality of heating plates are adjacently arranged to enclose a hollow space, wherein the hollow space is used to place a sheet material, and the plurality of heating plates are configured to heat the sheet material during a deposition process of the deposition device; A heating element, wherein a portion of the heating element extends into the hollow space, and an orthographic projection of the heating element at a connection position of an adjacent heating plate in a vertical direction at least partially overlaps with a connection position of an adjacent heating plate.
2. The cavity according to claim 1, characterized in that: The hollow space includes a sheet material placement area, and the heating plate extends along a first direction; Wherein, the size of the portion of the heating element extending into the hollow space in the first direction is adapted to the size of the sheet material placement area in the first direction.
3. The cavity according to claim 2, characterized in that: One end of the plurality of heating plates in the first direction encloses a first opening; Wherein, the cavity further comprises: A sealing baffle is configured to close or open the first opening.
4. The cavity according to claim 3, characterized in that: Also comprising a second opening disposed opposite to the first opening; Wherein, the cavity further comprises: An exhaust pipe is connected with the hollow space and the exhaust device through the second opening.
5. The cavity according to claim 4, characterized in that: There are four heating plates, and the four heating plates are connected end to end to form the hollow space.
6. The cavity according to claim 4, characterized in that: Also includes: an exhaust connecting pipe, wherein a first end of the exhaust connecting pipe is in communication with the second opening, and a second end of the exhaust connecting pipe is in communication with the exhaust device; Wherein, in the first direction, the size of the cross section of the first end of the exhaust connecting pipe is greater than the size of the cross section of the second end of the exhaust connecting pipe.
7. The cavity according to any one of claims 1 to 6, characterized in that: Also includes: A plurality of first temperature measuring components are respectively arranged on the plurality of heating plates, wherein the plurality of first temperature measuring components are respectively configured to measure the temperature of the plurality of heating plates.
8. The cavity according to claim 7, characterized in that: Also includes: The second temperature measuring element is disposed at the portion of the heating element extending into the hollow space and is configured to measure the temperature of the portion of the heating element extending into the hollow space.
9. The cavity according to any one of claims 1 to 6, characterized in that: Also includes: A reinforcing component is fixed to a side of the heating plate close to the hollow space.
10. A deposition device, characterized in that: include: The chamber according to any one of claims 1 to 9; An exhaust device is communicated with the chamber and is configured to exhaust gas generated by the deposition equipment during a deposition process.