Graphite heater

Abstract

The utility model provides a graphite heater which comprises a graphite heater body, the graphite heater body is provided with a separation groove, and the separation groove is provided with a first opening facing the inner side of the graphite heater body and a second opening facing the outer side of the graphite heater body. The separation groove is further provided with a first side wall and a second side wall which are opposite, the second side wall is located on the outer side of the first side wall, and the first opening and the second opening are located between the first side wall and the second side wall and located at the two ends. In a vertical plane of the graphite heater body, the projection of the first opening in the vertical plane is included in the projection of the second side wall in the vertical plane. The influence of the graphite heater separation groove on the thermal field distribution of the graphite heater can be improved, so that the stability of the thermal field distribution of the graphite heater is improved, and the crystal growth quality is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a graphite heater. Background Art

[0002] Graphite heaters have high thermal conductivity, high temperature resistance, chemical stability and durability and are often used in crystal growth equipment as heating elements.

[0003] In the prior art, in order to optimize the current path of the graphite heater, grooves are generally separated on the graphite heater.

[0004] However, the separation grooves on the existing graphite heaters are directly set through, which is unreasonable in design. The separation grooves will affect the thermal radiation and thermal convection in the graphite heater, and further affect the thermal field distribution in the graphite heater, thereby affecting the growth quality of the crystal. Utility Model Content

[0005] The utility model aims to provide a graphite heater, which can improve the influence of the graphite heater separation groove on the thermal field distribution of the graphite heater, thereby improving the stability of the thermal field distribution of the graphite heater, thereby improving the quality of crystal growth.

[0006] The embodiment of the utility model is achieved as follows:

[0007] The present application provides a graphite heater, comprising a graphite heater body, wherein the graphite heater body is provided with a separation groove, wherein the separation groove has a first opening toward the inner side of the graphite heater body and a second opening toward the outer side of the graphite heater body;

[0008] The separation groove further has a first side wall and a second side wall opposite to each other, and the second side wall is located outside the first side wall, and the first opening and the second opening are located between the first side wall and the second side wall and at two ends;

[0009] In a vertical plane of the graphite heater body, a projection of the first opening in the vertical plane is included in a projection of the second side wall in the vertical plane.

[0010] In an optional embodiment, the dividing groove is spirally arranged on the graphite heater body, and the first side wall and the second side wall are both inclined.

[0011] In an optional embodiment, on a vertical cross section of the graphite heater body, the cross section of the separation groove is inclined upward in a direction from the first opening toward the second opening.

[0012] In an optional embodiment, on a vertical cross section of the graphite heater body, the cross section of the separation groove is inclined downward in a direction from the first opening toward the second opening.

[0013] In an optional embodiment, the first side wall and the second side wall are arranged in parallel.

[0014] In an optional embodiment, on a vertical cross section of the graphite heater, the inclination angles of the first side wall and the second side wall range from 10° to 170°.

[0015] In an optional embodiment, the dividing groove is a step groove, a first boss is provided on the side of the first side wall corresponding to the second opening, a second boss is provided on the side of the second side wall corresponding to the first opening, the first boss and the second boss are radially spaced apart on the graphite heater body, the first boss is used to block the corresponding first opening, and the second boss is used to block the second opening.

[0016] In an optional embodiment, the first boss and the second boss partially overlap in the height direction of the graphite heater body.

[0017] In an optional embodiment, the separation groove includes a first spiral groove, a second spiral groove and a third spiral groove;

[0018] The first spiral groove is spirally arranged on the outer periphery of the graphite heater body, and the second spiral groove is arranged on the inner periphery of the graphite heater body, and the first spiral groove and the second spiral groove are staggered in the height direction, the first opening is communicated with the second spiral groove, and the second opening is communicated with the first spiral groove;

[0019] The third spiral groove is spirally arranged in the middle of the graphite heater body in the thickness direction and is located between the first spiral groove and the second spiral groove in the height direction. One end of the third spiral groove is connected to the first spiral groove, and the other end is connected to the second spiral groove.

[0020] In an optional embodiment, the graphite heater body is cylindrical.

[0021] The beneficial effects of the graphite heater provided by the embodiment of the utility model include:

[0022] The present application includes the projection of the first opening of the separation groove in the vertical plane of the graphite heater body in the projection of the second side wall in the vertical plane of the graphite heater body, so that the second side wall corresponds to the first opening, so that the second side wall can block the first opening in the horizontal direction. This arrangement can reduce the efficiency of heat exchange between the inside and outside of the graphite heater body. Secondly, the second side wall can also radiate heat, and can reflect the heat dissipated by the separation groove back to the inside of the graphite heater body. Thereby, the influence of the separation groove on the thermal field distribution in the graphite heater body is improved as a whole. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 A schematic cross-sectional view of a graphite heater provided in an embodiment of the utility model;

[0025] Figure 2 A schematic cross-sectional view of another graphite heater provided in an embodiment of the utility model;

[0026] Figure 3 A schematic cross-sectional view of another graphite heater provided in an embodiment of the utility model.

[0027] Icons: 100 - graphite heater; 110 - graphite heater body; 111 - partition groove; 112 - first opening; 113 - second opening; 114 - first side wall; 115 - second side wall; 116 - vertical plane; 117 - first boss; 118 - second boss; 119 - first spiral groove; 121 - second spiral groove; 122 - third spiral groove. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0029] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0031] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship described in the drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0032] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0033] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] Example

[0035] Please refer to Figures 1 to 3The present embodiment provides a graphite heater 100 including a graphite heater body 110, wherein the graphite heater body 110 is provided with a partition groove 111, wherein the partition groove 111 has a first opening 112 facing the inside of the graphite heater body 110 and a second opening 113 facing the outside of the graphite heater body 110. The partition groove 111 also has a first side wall 114 and a second side wall 115 opposite to each other, and the second side wall 115 is located outside the first side wall 114, the first opening 112 and the second opening 113 are located between the first side wall 114 and the second side wall 115, and are located at both ends and in a vertical plane 116 of the graphite heater body 110, and the projection of the first opening 112 in the vertical plane 116 is included in the projection of the second side wall 115 in the vertical plane 116.

[0036] In this embodiment, the projection of the first opening 112 of the separation groove 111 in the vertical plane 116 of the graphite heater body 110 is included in the projection of the second side wall 115 in the vertical plane 116 of the graphite heater body 110, so that the second side wall 115 corresponds to the first opening 112, so that the second side wall 115 can block the first opening 112 in the horizontal direction. This arrangement can reduce the efficiency of heat exchange between the inside and outside of the graphite heater body 110. Secondly, the second side wall 115 can also radiate heat and reflect the heat dissipated by the separation groove 111 back to the inside of the graphite heater body 110. Thereby, the influence of the separation groove 111 on the thermal field distribution in the graphite heater body 110 is improved as a whole.

[0037] Please refer to Figure 1 and Figure 2 In some embodiments of the present application, the separation groove 111 is spirally disposed on the graphite heater body 110 , and the first side wall 114 and the second side wall 115 are both inclined.

[0038] In this example, the first side wall 114 and the second side wall 115 are both tilted, so that the second side wall 115 can better shield the first opening 112 and facilitate the manufacture of the graphite heater body 110.

[0039] It should be noted that the first side wall 114 and the second side wall 115 are inclined from the inside to the outside, that is, in the width direction of the first side wall 114 and the second side wall 115 .

[0040] Please refer to Figure 1 and Figure 2Furthermore, on the vertical cross section of the graphite heater body 110, the cross section of the separation groove 111 is inclined upward from the first opening 112 to the second opening 113. Of course, it is also possible that on the vertical cross section of the graphite heater body 110, the cross section of the separation groove 111 is inclined downward from the first opening 112 to the second opening 113.

[0041] The first and second side walls 115 are inclined so that the first opening 112 cannot be directly seen through the partition groove 111 from the outside of the graphite heater body 110 , and the second opening 113 cannot be seen through the partition groove 111 from the inside of the graphite heater 100 .

[0042] It can be understood that, in the vertical section of the graphite heater 100 , the cross section of the separation groove 111 is a quadrilateral, and the bottom and top sides of the quadrilateral are inclined.

[0043] Please refer to Figure 1 and Figure 2 In this embodiment, the first side wall 114 and the second side wall 115 are arranged in parallel, which is convenient for manufacturing and forming equal-width gaps. In the vertical section of the graphite heater 100, the section of the separation groove 111 is a parallelogram, and the bottom and top sides of the quadrilateral are inclined.

[0044] Furthermore, in a vertical cross section of the graphite heater 100 , the inclination angles of the first side wall 114 and the second side wall 115 range from 10° to 170°.

[0045] Please refer to Figure 3 In some other embodiments of the present application, the dividing groove 111 is a step groove, a first boss 117 is provided on a side of the first side wall 114 corresponding to the second opening 113, and a second boss 118 is provided on a side of the second side wall 115 corresponding to the first opening 112. The first boss 117 and the second boss 118 are radially spaced apart on the graphite heater body 110, the first boss 117 is used to block the corresponding first opening 112, and the second boss 118 is used to block the second opening 113.

[0046] The present application provides a first boss 117 and a second boss 118 on the first side wall 114 and the second side wall 115 , respectively, and utilizes the mutual shielding between the first boss 117 and the second boss 118 to improve the problem of heat loss from the separation groove 111 .

[0047] Furthermore, the first boss 117 and the second boss 118 partially overlap in the direction of the graphite heater body 110. The cross section of the separation groove 111 formed in this way is roughly Z-shaped, so that heat preservation can be better achieved.

[0048] Please refer to Figure 3 , further, the separation groove 111 includes a first spiral groove 119, a second spiral groove 121 and a third spiral groove 122. The first spiral groove 119 is spirally arranged on the outer periphery of the graphite heater body 110, and the second spiral groove 121 is arranged on the inner periphery of the graphite heater body 110, and the first spiral groove 119 and the second spiral groove 121 are staggered in the height direction, the first opening 112 is connected to the second spiral groove 121, and the second opening 113 is connected to the first spiral groove 119. The third spiral groove 122 is spirally arranged in the middle of the graphite heater body 110 in the thickness direction, and is located between the first spiral groove 119 and the second spiral groove 121 in the height direction, and one end of the third spiral groove 122 is connected to the first spiral groove 119, and the other end is connected to the second spiral groove 121.

[0049] In this way, the heat loss from the separation grooves 111 can be better avoided and the radiation effect can be improved.

[0050] In this embodiment, the graphite heater body 110 is cylindrical and is provided with electrodes to supply power to the graphite heater 100 .

[0051] In summary, the working principle and beneficial effects of the graphite heater 100 provided by the embodiment of the utility model include:

[0052] In this embodiment, the projection of the first opening 112 of the separation groove 111 in the vertical plane 116 of the graphite heater body 110 is included in the projection of the second side wall 115 in the vertical plane 116 of the graphite heater body 110, so that the second side wall 115 corresponds to the first opening 112, so that the second side wall 115 can block the first opening 112 in the horizontal direction. This arrangement can reduce the efficiency of heat exchange between the inside and outside of the graphite heater body 110. Secondly, the second side wall 115 can also radiate heat and reflect the heat dissipated by the separation groove 111 back to the inside of the graphite heater body 110. Thereby, the influence of the separation groove 111 on the thermal field distribution in the graphite heater body 110 is improved as a whole.

[0053] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may be subject to various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A graphite heater, characterized in that: The invention comprises a graphite heater body (110), wherein the graphite heater body (110) is provided with a separation groove (111), wherein the separation groove (111) has a first opening (112) facing the inside of the graphite heater body (110) and a second opening (113) facing the outside of the graphite heater body (110); The separation groove (111) further comprises a first side wall (114) and a second side wall (115) which are opposite to each other, and the second side wall (115) is located outside the first side wall (114), and the first opening (112) and the second opening (113) are located between the first side wall (114) and the second side wall (115), and are located at both ends; In a vertical plane (116) of the graphite heater body (110), a projection of the first opening (112) in the vertical plane (116) is included in a projection of the second side wall (115) in the vertical plane (116).

2. The graphite heater according to claim 1, characterized in that: The separation groove (111) is arranged in a spiral shape on the graphite heater body (110), and the first side wall (114) and the second side wall (115) are both arranged obliquely.

3. The graphite heater according to claim 2, characterized in that: On a vertical cross section of the graphite heater body (110), the cross section of the separation groove (111) is arranged to be inclined upward in a direction from the first opening (112) toward the second opening (113).

4. The graphite heater according to claim 2, characterized in that: On a vertical cross section of the graphite heater body (110), the cross section of the separation groove (111) is inclined downward in a direction from the first opening (112) toward the second opening (113).

5. The graphite heater according to any one of claims 1 to 4, characterized in that: The first side wall (114) and the second side wall (115) are arranged in parallel.

6. The graphite heater according to any one of claims 2 to 4, characterized in that: On a vertical cross section of the graphite heater, the inclination angles of the first side wall (114) and the second side wall (115) range from 10° to 170°.

7. The graphite heater according to claim 1, characterized in that: The dividing groove (111) is a stepped groove, a first boss (117) is provided on a side of the first side wall (114) corresponding to the second opening (113), and a second boss (118) is provided on a side of the second side wall (115) corresponding to the first opening (112), the first boss (117) and the second boss (118) are arranged at intervals in the radial direction of the graphite heater body (110), the first boss (117) is used to cover the corresponding first opening (112), and the second boss (118) is used to cover the second opening (113).

8. The graphite heater according to claim 7, characterized in that: The first boss (117) and the second boss (118) partially overlap in the height direction of the graphite heater body (110).

9. The graphite heater according to claim 7, characterized in that: The separation groove (111) comprises a first spiral groove (119), a second spiral groove (121) and a third spiral groove (122); The first spiral groove (119) is spirally arranged on the outer periphery of the graphite heater body (110), and the second spiral groove (121) is arranged on the inner periphery of the graphite heater body (110), and the first spiral groove (119) and the second spiral groove (121) are staggered in the height direction, the first opening (112) is communicated with the second spiral groove (121), and the second opening (113) is communicated with the first spiral groove (119); The third spiral groove (122) is spirally arranged in the middle of the graphite heater body (110) in the thickness direction, and is located between the first spiral groove (119) and the second spiral groove (121) in the height direction. One end of the third spiral groove (122) is connected to the first spiral groove (119), and the other end is connected to the second spiral groove (121).

10. The graphite heater according to claim 1, characterized in that: The graphite heater body (110) is cylindrical.

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