Adsorption type tail gas treatment equipment

Abstract

The utility model relates to the technical field of tail gas treatment, in particular to adsorption type tail gas treatment equipment, which can effectively improve the tail gas treatment efficiency, comprises an adsorption barrel, and is characterized in that a gas inlet is formed below the side wall of the adsorption barrel, a gas outlet is formed in the top of the adsorption barrel, the gas inlet is connected with a gas inlet pipe, and the gas outlet is connected with a gas outlet pipe; the air inlet pipe and the air outlet pipe are further connected with a bypass pipe, a control valve and a bypass adsorption barrel are arranged on the bypass pipe, a support is arranged at the bottom in the adsorption barrel, and the support comprises a disc with meshes and an annular plate fixed to the bottom of the disc. The lower part of the annular plate is supported on the inner wall of the bottom of the adsorption barrel, an air inlet round hole is formed in the side part of the annular plate, and an adsorbent is arranged above the bracket to form an adsorption area.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas treatment, in particular to an adsorption type tail gas treatment device. Background Art

[0002] Environmental protection has become a hot topic, and governments around the world are making every effort to protect the environment. In order to keep up with the trend of the times and achieve sustainable development, all walks of life are increasingly controlling pollution sources, especially industrial waste gas emissions.

[0003] In the semiconductor industry, a variety of special gases, a large amount of chemicals such as acids and alkalis, as well as organic solvents and volatile liquids are required. These industrial raw materials will produce waste gas in the semiconductor manufacturing process. Currently, chemical adsorption is one of the main means of waste gas treatment. This equipment mainly uses adsorbents to adsorb industrial raw materials into tail gas that meets emission standards and discharges it through the factory service end.

[0004] The existing adsorption-type exhaust gas treatment equipment is a top-down air intake method, which will cause gas to accumulate in the upper part of the adsorption cylinder, resulting in insufficient reaction and other problems, thereby reducing the exhaust gas treatment efficiency. Summary of the invention

[0005] In order to solve the above technical problems, the utility model provides an adsorption-type tail gas treatment device, which can effectively improve the tail gas treatment efficiency.

[0006] The technical solution is as follows: an adsorption-type exhaust gas treatment device, which includes an adsorption barrel, characterized in that an air inlet is opened at the lower side wall of the adsorption barrel and an air outlet is opened at the top, the air inlet is connected to the air inlet pipe, and the air outlet is connected to the air outlet pipe, the air inlet pipe and the air outlet pipe are also connected to a bypass pipe, and a control valve and a bypass adsorption cylinder are arranged on the bypass pipe, and a bracket is arranged at the bottom of the adsorption barrel, and the bracket includes a disc with a mesh and a circular plate fixed to the bottom of the disc, the lower part of the circular plate is supported on the bottom inner wall of the adsorption barrel and an air inlet circular hole is opened on the side, and an adsorbent is arranged above the bracket to form an adsorption area.

[0007] Its further feature is that an observation window is provided on the adsorption barrel, an elbow insert is provided in the observation window, and a plurality of small holes are provided below the elbow insert;

[0008] The air inlet pipe is equipped with a pressure detection gauge and a nitrogen valve;

[0009] A thermocouple sensor and a pressure relief valve are installed on the air outlet pipe;

[0010] The adsorption barrel is supported on a mobile platform with rollers at the bottom, and the top of the adsorption barrel is a detachable cover plate.

[0011] After adopting the utility model, the exhaust gas enters the adsorption barrel from the air inlet pipe, flows from bottom to top, does not cause exhaust gas stagnation, passes through the mesh holes on the circular plate and evenly enters the adsorption area above for adsorption, and is finally discharged from the exhaust pipe. When the adsorbent in the adsorption area is saturated, the exhaust gas can be switched to enter the bypass adsorption cylinder for adsorption, and the adsorbent in the adsorption area can be replaced without stopping the gas, thereby effectively improving the exhaust gas treatment efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the structure of the utility model;

[0013] Figure 2 It is a schematic diagram of the adsorption barrel structure;

[0014] Figure 3 for Figure 2 Middle AA section view;

[0015] Figure 4 for Figure 2 Enlarged view of the middle BB section;

[0016] Figure 5 is a schematic diagram of the support structure;

[0017] Figure 6 It is a schematic diagram of the elbow intubation structure. DETAILED DESCRIPTION

[0018] See Figures 1 to 6 As shown, an adsorption-type exhaust gas treatment device includes an adsorption barrel 1, an air inlet 2 is opened at the lower side wall of the adsorption barrel 1, and an air outlet 3 is opened at the top, the air inlet 2 is connected to the air inlet pipe 4, the air outlet 3 is connected to the air outlet pipe 5, the air inlet pipe 4 and the air outlet pipe 5 are also connected to the bypass pipe 6, the bypass pipe 6 is provided with a control valve and a bypass adsorption cylinder 7, the control valve includes a first butterfly valve 8 and a pneumatic valve 9, a bracket 10 is provided at the bottom of the adsorption barrel 1, the bracket 10 includes a disc 101 with a mesh and a circular plate 102 fixed to the bottom of the disc 101, the lower part of the circular plate 102 is supported on the bottom inner wall of the adsorption barrel 1 and an air inlet circular hole 103 is opened on the side, and an adsorbent is provided above the bracket 10 to form an adsorption area 11.

[0019] An observation window 12 is provided on the adsorption barrel 1, an elbow insert 13 is provided in the observation window 12, and a plurality of small holes are provided below the elbow insert 13;

[0020] A pressure detection gauge 14 and a nitrogen valve 15 are installed on the air inlet pipe 4. The nitrogen valve 15 is used to connect external nitrogen. Before replacing the adsorption barrel, nitrogen is flushed into the adsorption barrel 1 to purge the adsorption barrel 1 and the relevant pipeline sections to drive out the residual gas in the barrel to ensure the safety of the engineer. It can also be used to detect whether there is a leak. Nitrogen is filled into the adsorption barrel 1 to make the interior in a positive pressure state, and then the pressure is maintained to see if there is a leak.

[0021] A thermocouple sensor 16 and a pressure relief valve 17 are installed on the air outlet pipe 5 .

[0022] The adsorption barrel 1 is supported on a mobile platform 18 with rollers at the bottom. The top of the adsorption barrel 1 is a detachable cover plate 19, which can facilitate the transfer of the adsorption barrel 1, and the inside of the adsorption barrel 1 can be cleaned and replaced by opening the cover plate 19.

[0023] The exhaust gas is sent from the intake pipe 4. Under normal circumstances, the first butterfly valve 8 and the pneumatic valve 9 are both closed, that is, the bypass pipe 6 is in a closed state, and the second butterfly valve 20 at the intake port 2 is opened, and all the exhaust gas is sent into the adsorption barrel 1. After passing through the mesh disc 101, the gas is evenly sent to the adsorption area for adsorption, and the clean exhaust gas after adsorption is sent out through the outlet port 3 and the outlet pipe 5; when the adsorbent in the adsorption area is adsorbed to a saturated state, the second butterfly valve 20 is closed, and the first butterfly valve 8 and the pneumatic valve 9 are opened to allow the exhaust gas to pass through the bypass adsorption cylinder 7 for adsorption treatment. At this time, the adsorbent in the adsorption barrel 1 can be replaced. To facilitate replacement, a non-metallic expansion joint 21 is provided on the outlet pipe 5 directly connected to the outlet 3. One end of the outlet pipe 5 is integrated with the bypass pipe 6, and the other end forms an elbow and is directly inserted into the outlet 3. A sealing ring is provided in the outlet 3, which is interference fit with the end of the outlet pipe 5 to ensure that no leakage occurs. When replacing, the end of the outlet pipe 5 is directly pulled out from the outlet 3, and then the cover plate 19 is removed, the saturated adsorbent inside is taken out, and then new adsorbent is put in, and the cover plate 19 is covered. Finally, the outlet pipe 5 is reinserted into the outlet. At this time, the first butterfly valve 8 and the pneumatic valve 9 can be closed, and the second butterfly valve 20 can be opened to allow the exhaust gas to continue to enter the adsorption barrel 1 for adsorption.

Claims

1. An adsorption-type tail gas treatment device, comprising an adsorption barrel, characterized in that: An air inlet is provided at the lower part of the side wall of the adsorption barrel, and an air outlet is provided at the top, the air inlet is connected to the air inlet pipe, and the air outlet is connected to the air outlet pipe, the air inlet pipe and the air outlet pipe are also connected to a bypass pipe, and a control valve and a bypass adsorption cylinder are provided on the bypass pipe, a bracket is provided at the bottom of the adsorption barrel, the bracket includes a disc with mesh holes and a circular ring plate fixed to the bottom of the disc, the lower part of the circular ring plate is supported on the bottom inner wall of the adsorption barrel and an air inlet circular hole is provided on the side, and an adsorbent is provided above the bracket to form an adsorption area.

2. The adsorption-type tail gas treatment equipment according to claim 1, characterized in that: An observation window is provided on the adsorption barrel, an elbow insert is arranged in the observation window, and a plurality of small holes are provided below the elbow insert.

3. The adsorption-type tail gas treatment equipment according to claim 1, characterized in that: A pressure detection gauge and a nitrogen valve are installed on the air inlet pipe.

4. The adsorption-type tail gas treatment equipment according to claim 1, characterized in that: A thermocouple sensor and a pressure relief valve are installed on the air outlet pipe.

5. The adsorption-type tail gas treatment equipment according to claim 1, characterized in that: The adsorption barrel is supported on a mobile platform with rollers at the bottom, and the top of the adsorption barrel is a detachable cover plate.

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