Synchronous and same-direction double-half-piece precise screen printing machine

Abstract

A printing assembly comprises a slurry scraper and an ink reclaiming blade, two sets of UVW deviation rectifying and aligning mechanisms and a lifting module can synchronously ascend and descend or independently ascend and descend, two sets of X-axis modules and a set of Y-axis modules are installed at the lower ends of the two sets of UVW deviation rectifying and aligning mechanisms respectively, and the two sets of X-axis modules and the set of Y-axis modules are connected with the two sets of X-axis modules and the set of Y-axis modules respectively. The side edges of the UVW deviation rectifying and aligning mechanism are each provided with a scraper linear module, and the two printing suites synchronously move front and back on silk screens of the two silk screen mounting frames correspondingly. According to the synchronous and same-direction double-half-piece precise screen printing machine, by controlling parallel movement of three linear moving shafts of UVW and cooperating with a visual module, rotating movement with any point on a plane as the center and translation (X, Y and theta three-axis movement) in any direction can be achieved, alignment between a screen and a silicon wafer is met, and the precision of the synchronous and same-direction double-half-piece precise screen printing machine is improved. The two-side double-head integrated lifting mode structure and the two-side double-head independent lifting mode structure are included, double-half-piece printing is conducted synchronously in the same direction, and different from existing one-front-one-back printing, stress on the two sides is kept balanced.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer production, in particular to a synchronous and unidirectional double-half-wafer precision screen printing machine. Background Art

[0002] Photovoltaic solar silicon wafers (hereinafter referred to as silicon wafers) are the core part of the solar power generation system and the most valuable part of the solar power generation system. The function of the silicon wafer is to convert solar energy into electrical energy, which is stored by batteries or directly loaded for work. In the existing printing structure, the X-axis (controls left and right), Y-axis (controls front and back) and T-axis (controls rotation) are usually required to match the screen with the silicon wafer. Too many structures are used, resulting in poor precision. In addition, the forward and backward movement of the printing kit is controlled by a motor with a lead screw, which is inefficient and affects the process. In addition, the double-chip printing structure in the prior art is a staggered movement of front and back, and the movement of the scraper is not synchronized, resulting in uneven pressure on the screen holder and poor printing quality. Utility Model Content

[0003] One purpose of the utility model is to provide a synchronous and same-direction double-half-sheet precision screen printing machine, which reduces the T-axis structure and adopts two groups of X-axis modules and one group of Y-axis modules to be responsible for the rotation on the T-axis (independent left and right deviation correction), saving structure and replacing the existing motor drive at the same time. The linear module is directly used to control the movement of the printing kit to improve efficiency. The scrapers that move synchronously on both sides make the screen seat bear the force steadily and maintain good printing effect.

[0004] To achieve this purpose, the utility model adopts the following technical solutions:

[0005] A synchronous and same-direction double-half-sheet precision screen printing machine comprises a working platform, a lifting module, a UVW deflection correction and alignment mechanism and a screen installation frame, wherein the lifting modules are installed on both sides of the rear end of the working platform, the sides of the UVW deflection correction and alignment mechanism are connected to the driving end of the lifting module, two groups of X-axis modules and one group of Y-axis modules are installed at the lower end of the UVW deflection correction and alignment mechanism, the two screen installation frames are connected to the X-axis module and the Y-axis module, the sides of the UVW deflection correction and alignment mechanism are respectively installed with a group of scraper linear modules, each group of the scraper linear modules is connected to a printing kit, and the two printing kits are respectively moved forward and backward synchronously on the screens of the two screen installation frames.

[0006] As a preferred technical solution, it includes a front conveying rail, on which a snapping motor is installed, the driving end key of the snapping motor is connected to a snapping synchronous wheel, the snapping synchronous wheel is transmission-connected to a snapping synchronous belt, a snapping plate is fixed on the snapping synchronous belt, and the snapping plate is rotatably connected to the snapping wheel.

[0007] As a preferred technical solution, a turntable assembly is rotated in the middle of the working platform, and the turntable assembly includes a circular turntable, an electrical integrated slip ring and a turntable motor. Four groups of workstations are installed around the circular turntable, and each group of workstations is provided with two half-sheet printing positions. The driving end of the turntable motor is vertically connected to the electrical integrated slip ring, and the middle part of the circular turntable is connected to the electrical integrated slip ring.

[0008] As a preferred technical solution, the lower end of the circular turntable is rotatably connected to a paper roll transport component, and the paper roll transport component includes a unwinding shaft and a reeling shaft, and a paper roll is transmission-connected between the unwinding shaft and the reeling shaft. The paper roll passes through the half-sheet printing position and carries the silicon wafer, thereby transporting the silicon wafer. The paper roll is air permeable, and the paper roll transport component transports the silicon wafer to the work station of the circular turntable, and transports it to the printing position where the double half-sheet precision screen printing machine outputs the silicon wafer.

[0009] As a preferred technical solution, the positions between the four groups of workstations of the circular turntable form a fan-shaped area, which stores the discharger elements and control components together with the middle position of the circular turntable, and then is covered with a protective cover. Each of the half-sheet printing positions is provided with a breathable negative pressure plate, and a plurality of air holes are arranged on the breathable negative pressure plate. The air holes adsorb and fix the silicon wafer on the half-sheet printing position through the roll of paper.

[0010] As a preferred technical solution, the vision module on the working platform includes an entry board vision module and an exit board vision module. Two entry board cameras, one in front and one in the back, are arranged on each side of the entry board vision module. The upper end of the entry board camera is adjusted on the entry board vision module along the front-to-back direction. An exit board camera is arranged on each side of the exit board vision module. The upper end of the exit board camera is adjusted on the exit board vision module along the front-to-back direction.

[0011] As a preferred technical solution, the scraper linear modules on the left and right of the UVW correction and alignment mechanism include a profile base, an adapter plate and an electrical installation board, electrical components and drag chains are installed on the electrical installation board, the lower ends of the adapter plate slide along the front-to-back direction with the profile base through guide rails and sliders, the adapter plate is fixed on one side of the electrical installation board, and the adapter plate is locked with the side of the printing kit.

[0012] As a preferred technical solution, the lifting module includes a side bracket, a lifting servo motor is installed on the upper end of the side bracket, a lifting ball screw is connected to the driving end of the lifting servo motor, lifting plates are connected on both sides of the UVW correction and alignment mechanism, a lifting ball nut is fixed to the outer side of the lifting plate, the lifting ball screw is threadedly connected to the lifting ball nut, the lifting plate slides on the side bracket along the vertical direction, a lifting guide rail is installed on the side bracket, a lifting slider is fixed to the outer side of the lifting plate, and the lifting slider slides on the lifting guide rail.

[0013] As a preferred technical solution, the driving end of the scraper linear module is connected to a scraper forward and backward moving plate, the printing kit is fixed on one side of the scraper forward and backward moving plate, the lower end of the printing kit is connected to a slurry scraper, and the upper end of the printing kit is equipped with a scraper motor. The scraper motor controls the slurry scraper to move in a vertical direction through a ball screw and a ball nut. The lower end of the printing kit is also connected to an ink return knife, and the upper end of the printing kit is also equipped with an ink return motor. The ink return motor also controls the ink return knife seat with the ink return knife to move in a vertical direction through a ball screw and a ball nut, and the two ends of the ink return knife are respectively locked on the two ends of the ink return knife seat.

[0014] As a preferred technical solution, it includes a rear-section conveyor rail, on which a fragment lifting cylinder is installed, the driving end of the fragment lifting cylinder is upwardly connected to a fragment lifting plate, both sides of the fragment lifting plate are located on the outside of the rear-section conveyor rail, and a detection bracket is installed at the rear end of the rear-section conveyor rail, and a sensor is installed on the top of the detection bracket. The sensor is located above the rear-section conveyor rail, and the sensor is used to sense whether there is a fragment blockage in the rear reflow furnace.

[0015] As a preferred technical solution, the UVW deviation correction and alignment mechanism includes a left wire mesh assembly and a right wire mesh assembly, the left wire mesh assembly and the right wire mesh assembly are symmetrically arranged and work independently, a group of scraper linear modules are respectively arranged on the left wire mesh assembly and the right wire mesh assembly and are respectively connected to a group of lifting modules, an intermediate lifting assembly is arranged at the rear end of the working platform, the intermediate lifting assembly includes a front connecting bar and a rear connecting bar, a partition plate is fixed between the front connecting bar and the rear connecting bar, a left lifting screw module and a right lifting screw module are respectively arranged on both sides of the partition plate, a left jacking seat is connected to the driving end of the left lifting screw module, and a right jacking seat is connected to the driving end of the right lifting screw module, the upper end of the left jacking seat is connected to the bottom of the left wire mesh assembly, and the upper end of the right jacking seat is connected to the bottom of the right wire mesh assembly.

[0016] The beneficial effects of the utility model are as follows: a synchronous and unidirectional double-half-sheet precision screen printing machine is provided, which is used for screen printing of silicon wafers. The rotation effect of the T-axis is achieved through the linkage of a group of Y-axis modules and two groups of X-axis modules to meet the alignment between the screen and the silicon wafer. A scraper linear module is used to control the forward and backward movement of the printing kit, and the double half-sheets are printed synchronously in the same direction. Different from the existing one-front-one-back printing method, the force balance on both sides during printing is maintained, and the movement speed and accuracy of the printing kit are improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The utility model is further described in detail below based on the drawings and embodiments.

[0018] Figure 1 This is a schematic diagram of the overall structure of a synchronous and unidirectional double-half-sheet precision screen printing machine according to the first embodiment;

[0019] Figure 2 It is a front perspective view of the UVW deviation correction and alignment mechanism described in Example 1;

[0020] Figure 3 It is a flipped stereoscopic diagram of the UVW deviation correction and alignment mechanism described in Example 1;

[0021] Figure 4 This is a flip explosion diagram of the UVW deviation correction and alignment mechanism described in Example 1;

[0022] Figure 5 This is an exploded view of the X-axis module / Y-axis module described in Example 1;

[0023] Figure 6 It is a front perspective view of the scraper linear module described in Example 1;

[0024] Figure 7 An exploded view of the scraper linear module described in Example 1;

[0025] Figure 8 This is a schematic structural diagram of the front conveyor rail described in Example 1;

[0026] Fig. 9 It is a front perspective view of the turntable assembly described in Example 1;

[0027] Fig.10 It is a flipped stereoscopic view of the turntable assembly described in Example 1;

[0028] Fig.11 This is a middle flip diagram of the turntable assembly described in Example 1;

[0029] Fig.12 This is a schematic diagram of the structure of the air-permeable negative pressure plate described in Example 1;

[0030] Fig.13 It is a front view of the turntable assembly described in Example 1;

[0031] Fig.14 This is an overall structural diagram of the visual module described in Example 1;

[0032] Fig.15 This is a structural diagram of the board entry vision module described in Example 1;

[0033] Fig.16 This is a structural diagram of the board output vision module described in Example 1;

[0034] Fig.17 This is a structural schematic diagram of the lifting module described in Example 1;

[0035] Fig.18 It is a structural schematic diagram of the printing kit according to the first embodiment;

[0036] Fig.19 An exploded view of the printing kit according to the first embodiment;

[0037] Fig. 20 This is a schematic structural diagram of the rear conveyor rail described in Example 1;

[0038] Fig.21 This is a schematic diagram of the overall structure of a synchronous and unidirectional double-half-sheet precision screen printing machine described in Example 2;

[0039] Fig. 22 It is a front perspective view of the UVW deviation correction and alignment mechanism described in Example 2;

[0040] Fig.23 This is a flipped exploded view of the right screen assembly described in Example 2;

[0041] Fig.24 This is a flipped exploded view of the left screen assembly described in Example 2;

[0042] Fig.25 It is a three-dimensional structural diagram of the intermediate lifting assembly described in the second embodiment;

[0043] Fig.26 This is an exploded view of the intermediate lifting assembly described in Example 2.

[0044] Figures 1 to 26 middle:

[0045] 1. Working platform; 2. Front conveyor rail; 3. UVW deviation correction and alignment mechanism; 4. Screen installation frame; 5. Rear conveyor rail; 6. Scraper linear module; 7. Printing kit; 8. Snap-in synchronous wheel; 9. Snap-in plate; 10. Snap-in wheel; 11. Circular turntable; 12. Electrical integrated slip ring; 13. Turntable motor; 14. Half-sheet printing position; 15. Unwinding shaft; 16. Rewinding shaft; 17. Side bracket; 18. Lifting servo motor; 19. Lifting ball screw; 20. Lifting plate; 21. Lifting guide rail; 22. Scraper forward and backward moving plate; 23. Slurry scraper; 24. Scraper motor; 25. Fragment lifting cylinder; 26. Fragment lifting plate; 27. Detection bracket; 28. Sensor; 29. ​​X-axis module; 30. Y-axis module; 31. Module Bottom plate; 32. Module motor; 33. Adjustment screw rod; 34. Adjustment slide; 35. Connecting bearing; 36. Auxiliary bearing; 37. Slurry knife seat; 38. Ink return knife; 39. Ink return motor; 40. Ink return knife seat; 41. Profile base; 42. Adapter plate; 43. Electrical installation plate; 44. Drag chain; 45. Paper roll; 46. Protective cover; 47. Breathable negative pressure plate; 48. Board inlet vision module; 49. Board outlet vision module; 50. Board inlet camera; 51. Board outlet camera; 52. Left screen assembly; 53. Right screen assembly; 54. Middle lifting assembly; 55. Front connecting strip; 56. Rear connecting strip; 57. Partition plate; 58. Left lifting screw rod module; 59. Right lifting screw rod module; 60. Left lifting seat; 61. Right lifting seat. DETAILED DESCRIPTION

[0046] The technical solution of the utility model is further explained below with reference to the accompanying drawings and through specific implementation methods.

[0047] Embodiment 1:

[0048] like Figure 1 and Figure 2 As shown, in this embodiment, a synchronous and unidirectional double-half-sheet precision screen printing machine includes a working platform 1, a front conveying rail 2, a turntable assembly, a lifting module, a UVW correction and alignment mechanism 3, a screen installation frame 4 and a rear conveying rail 5. The front conveying rail 2 and the rear conveying rail 5 are respectively located on both sides of the working platform 1, and the turntable assembly rotates in the middle of the working platform 1. Lifting modules are installed on both sides of the rear end of the working platform 1. The sides of the UVW correction and alignment mechanism 3 are connected to the driving end of the lifting module. Two groups of X-axis modules 29 and one group of Y-axis modules 30 are installed at the lower end of the UVW correction and alignment mechanism 3. The screen installation frame 4 is connected to the X-axis module 29 and the Y-axis module 30. The side of the UVW correction and alignment mechanism 3 is installed with a scraper linear module 6, and the scraper linear module 6 is connected to a printing kit 7.

[0049] The front end places the silicon wafer on the front conveyor rail 2, the front conveyor rail 2 transfers the silicon wafer to the turntable assembly, the turntable assembly rotates the silicon wafer to the rear side of the working platform 1, and the two groups of X-axis modules 29 and a group of Y-axis modules 30 on the UVW correction and alignment mechanism 3 control the alignment in the X-axis direction, the Y-axis direction and the T-axis direction, so that the screen mounting frame 4 with the screen is aligned with the position of the silicon wafer, the lifting module controls the screen to move down to the silicon wafer, the scraper linear module 6 controls the printing kit 7 to scrape the slurry onto the silicon wafer, and then after lifting the screen mounting frame 4, the turntable assembly transfers the silicon wafer to the rear conveyor rail 5 for output.

[0050] The UVW deflection correction and alignment mechanism 3 is a high-precision mobile structure specially designed for high-precision alignment equipment. It is also commonly referred to as an XXY platform. As a three-axis parallel motion mechanism, it can realize rotational motion centered on any point on the plane and translation in any direction (X, Y, and θ three-axis motion in the plane) by controlling the parallel motion of three linear moving structures. The UVW deflection correction and alignment mechanism 3 cooperates with the following visual module to realize high-precision alignment function and can be applied in the printing industry.

[0051] More specifically, the implementation process of the UVW correction and alignment mechanism 3 includes determining the transformation matrix from the camera coordinate system to the UVW platform coordinate system through a visual calibration method, and the coordinate value of the marker template based on the origin coordinate system on the UVW correction and alignment mechanism 3, and obtaining the x, y, and θ offsets between the marker template position and the marker to be corrected (based on the origin coordinate system of the UVW correction and alignment mechanism 3) through a visual module, and then entering the initial coordinates of the three axes according to the formula, setting the rotation center to (0, 0), and entering the θ offset to obtain new coordinate values ​​of the UVW three axes, the new coordinates of the object to be corrected, and the corresponding feed amounts of the three motors. This series of operations decomposes the motion process into translation and rotation parts, and calculates the motor feed amounts respectively, thereby achieving precise automatic positioning, and the alignment accuracy can reach the micron level.

[0052] like Figures 3 to 5As shown, more specifically, the X-axis module 29 and the Y-axis module 30 adopt the same module mechanism, which includes a module base plate 31, a module motor 32, an adjustment screw 33 and an adjustment slide 34. The driving end of the module motor 32 is transmission-connected with the adjustment screw 33, and the adjustment screw 33 is threadedly connected with the adjustment nut under the adjustment slide 34. The adjustment slide 34 slides along the length direction of the adjustment screw 33, and the adjustment slide 34 is provided with a connecting bearing 35, which slides on the adjustment slide 34, and the moving direction of the connecting bearing 35 is perpendicular to the moving direction of the adjustment slide 34. The edge of the mounting frame 4 is locked in the connecting bearing 35, and two groups of X-axis modules 29 plus a group of Y-axis modules 30 jointly control the T-axis steering of a wire mesh mounting frame 4, and an auxiliary bearing 36 is also arranged at the front end of the wire mesh mounting frame 4, and an auxiliary X-axis slide rail is arranged on the UVW deviation correction and alignment mechanism 3, an auxiliary X-axis slider is slid on the auxiliary X-axis slide rail, an auxiliary Y-axis slider is fixed on the auxiliary X-axis slider, the auxiliary Y-axis slider is slidably connected with the auxiliary Y-axis slide rail, and the auxiliary bearing 36 is installed on the auxiliary Y-axis slide rail, and cooperates with the two groups of X-axis modules 29 plus a group of Y-axis modules 30 to adjust the T-axis of the wire mesh mounting frame 4.

[0053] like Figure 6 and Figure 7 As shown, the scraper linear modules 6 on the left and right of the UVW correction and alignment mechanism 3 include a profile base 41, an adapter plate 42 and an electrical installation plate 43, and the electrical installation plate 43 is installed with electrical components and a drag chain 44. The lower ends of the adapter plate 42 slide along the front-to-back direction with the profile base 41 through guide rails and sliders. The adapter plate 42 is fixed on one side of the electrical installation plate 43, and the adapter plate 42 is locked with the side of the printing kit 7.

[0054] like Figure 8 As shown, a snapping motor is installed on the front conveying rail 2, and the driving end key of the snapping motor is connected to the snapping synchronous wheel 8, and the snapping synchronous wheel 8 is transmission-connected to the snapping synchronous belt, and a snapping plate 9 is fixed on the snapping synchronous belt, and the snapping plate 9 is rotatably connected to the snapping wheel 10.

[0055] When the silicon wafer transported from the front is not in a flat position, the snapping motor controls the snapping synchronous wheel 8 to rotate, and links the snapping synchronous belt transmission, so that the snapping plates 9 on both sides of the front conveying rail 2 move closer to the middle, and the silicon wafer is flattened in the middle position of the front conveying rail 2. The snapping wheel 10 reduces the hard collision between the snapping plates 9 and the side of the silicon wafer.

[0056] like Figures 9 to 13As shown, the turntable assembly includes a circular turntable 11, an electrical integrated slip ring 12 and a turntable motor 13. Four groups of workstations are installed around the circular turntable 11, and two half-sheet printing positions 14 are arranged on each group of workstations. The driving end of the turntable motor 13 is vertically connected to the electrical integrated slip ring 12, and the middle part of the circular turntable 11 is connected to the electrical integrated slip ring 12. The lower end of the circular turntable 11 is rotatably connected with a roll paper transport component, and the roll paper transport component includes a unwinding shaft 15 and a winding shaft 16. A roll paper 45 is transmission-connected between the unwinding shaft 15 and the winding shaft 16. The roll paper 45 passes through the half-sheet printing position 14 and carries the silicon wafer, so as to transport the silicon wafer. The roll paper 45 is air permeable, and the roll paper transport component transports the silicon wafer to the workstation of the circular turntable 11, and to the printing position where the double half-sheet precision screen printer outputs the silicon wafer.

[0057] On the circular turntable 11, the positions between the four groups of workstations form a fan-shaped area, which stores the discharger elements and control components together with the middle position of the circular turntable 11, and then is covered with a protective cover 46. Each of the half-sheet printing positions 14 is provided with a breathable negative pressure plate 47, and the breathable negative pressure plate 47 is provided with a plurality of air holes. The air holes pass through the roll paper 45 to adsorb and fix the silicon wafer on the half-sheet printing position 14.

[0058] The silicon wafer on the front conveyor rail 2 is placed at the half-sheet printing position 14, and the turntable motor 13 provides power to control the electrical integrated slip ring 12 to link the circular turntable 11 to rotate in the horizontal direction, driving the silicon wafer to move to the bottom of the screen mounting frame 4. At the same time, the printed silicon wafer is moved from the bottom of the screen mounting frame 4 to the front of the rear conveyor rail 5, and the winding shaft 16 and the unwinding shaft 15 rotate synchronously to wipe the half-sheet printing position 14 with the clean roll of paper.

[0059] like Figures 14 to 16 As shown, the vision module on the working platform 1 includes a board entry vision module 48 and a board exit vision module 49, and two board entry cameras 50 are arranged on each side of the board entry vision module 48, one in front and one in the back, and the upper end of the board entry camera 50 is adjusted on the board entry vision module 48 along the front-to-back direction, and an exit camera 51 is arranged on each side of the board exit vision module 49, and the upper end of the exit camera 51 is adjusted on the board exit vision module 49 along the front-to-back direction.

[0060] The silicon wafer conveyed from the front conveyor track 2 is brought to the half-sheet printing position 14 by the rolling action of the paper roll 45, and the upper board feeding vision module 48 photographs and locates the silicon wafer. According to the position of the silicon wafer, the two groups of screens on the UVW correction and alignment mechanism 3 are independently adjusted in the XYT direction to meet the position requirements of the silicon wafer. When the board is out, the board out vision module 49 photographs the printing of the silicon wafer again. After completion, the paper roll 45 assists in driving the silicon wafer to leave the half-sheet printing position 14 and enter the rear conveyor track 5.

[0061] like Fig.17 As shown, the lifting module includes a side bracket 17, a lifting servo motor 18 is installed on the upper end of the side bracket 17, and a lifting ball screw 19 is connected to the driving end of the lifting servo motor 18. Lifting plates 20 are connected to both sides of the UVW deviation correction and alignment mechanism 3. Lifting ball nuts are fixed to the outer side of the lifting plate 20. The lifting ball screw 19 is threadedly connected to the lifting ball nut. The lifting plate 20 slides on the side bracket 17 along the vertical direction. A lifting guide rail 21 is installed on the side bracket 17. A lifting slider is fixed to the outer side of the lifting plate 20, and the lifting slider slides on the lifting guide rail 21.

[0062] When controlling the lifting and lowering of the UVW deviation correction and alignment mechanism 3, the lifting servo motor 18 controls the rotation of the lifting ball screw 19, and the lifting plate 20 with the lifting ball nut drives the steel wire XYT assembly to move along the direction of the lifting guide rail 21, so the accuracy is improved and the moving speed is also faster.

[0063] like Fig.18 and Fig.19 As shown, the driving end of the scraper linear module 6 is connected to the scraper forward and backward moving plate 22, the printing kit 7 is fixed on one side of the scraper forward and backward moving plate 22, the lower end of the printing kit 7 is connected to the slurry scraper 23, and the upper end of the printing kit 7 is installed with a scraper motor 24. The scraper motor 24 controls the slurry knife seat 37 with the slurry scraper 23 to move in the vertical direction through a screw rod and a nut, and the middle part of the slurry scraper 23 is locked at the lower end of the slurry knife seat 37.

[0064] When scraping the slurry, the scraper motor 24 controls the slurry scraper 23 to move down to the screen, and the scraper linear module 6 moves the printing kit 7 through the forward and backward movement of the scraper forward and backward moving plate 22, so that the slurry scraper 23 scrapes the slurry from the screen to the silicon wafer when moving forward and backward.

[0065] The lower end of the printing kit 7 is also connected to an ink return knife 38, and the upper end of the printing kit 7 is also installed with an ink return motor 39. The ink return motor 39 also controls the ink return knife seat 40 with the ink return knife 38 to move in the vertical direction through a ball screw and a ball nut. The two ends of the ink return knife 38 are respectively locked on the two ends of the ink return knife seat 40.

[0066] like Fig. 20 As shown, a fragment lifting cylinder 25 is installed on the rear conveying rail 5, and the driving end of the fragment lifting cylinder 25 is upwardly connected to a fragment lifting plate 26, and both sides of the fragment lifting plate 26 are located on the outside of the rear conveying rail 5. A detection bracket 27 is installed at the rear end of the rear conveying rail 5, and a sensor 28 is installed on the top of the detection bracket 27. The sensor 28 is located above the rear conveying rail 5.

[0067] When the silicon wafer needs to be transferred or inspected on the rear conveyor rail 5, the wafer lifting plate 26 can be lifted by the wafer lifting cylinder 25 to operate the silicon wafer independently. The sensor 28 is used at the end of the rear conveyor rail 5 to sense the presence of the silicon wafer in preparation for subsequent docking.

[0068] Embodiment 2:

[0069] The difference between this embodiment and the first embodiment is that:

[0070] like Figure 21 to Figure 26 As shown, the UVW deviation correction and alignment mechanism 3 includes a left screen component 52 and a right screen component 53, which are symmetrically arranged on the left and right and work independently. A group of scraper linear modules 6 are respectively arranged on the left screen component 52 and the right screen component 53 and are respectively connected to a group of lifting modules. An intermediate lifting component 54 is arranged at the rear end of the working platform 1. The intermediate lifting component 54 includes a front connecting bar 55 and a rear connecting bar 56. A partition plate 57 is fixed between the front connecting bar 55 and the rear connecting bar 56. A left lifting screw module 58 and a right lifting screw module 59 are respectively arranged on both sides of the partition plate 57. A left lifting seat 60 is connected to the driving end of the left lifting screw module 58, and a right lifting seat 61 is connected to the driving end of the right lifting screw module 59. The upper end of the left lifting seat 60 is connected to the bottom of the left screen component 52, and the upper end of the right lifting seat 61 is connected to the bottom of the right screen component 53.

[0071] Compared with the integrated UVW deflection correction and alignment mechanism 3 in the first embodiment, the UVW deflection correction and alignment mechanism 3 in the second embodiment is divided into two, forming two groups of left and right screen components. Under the action of the visual module, the scraper linear modules 6 on both sides follow the independent lifting, and the printing of the two groups of half-wafers forms independent printing. The height control of the screen can be separated and different. The screen component on each side is controlled by the outer lifting module and the middle lifting component 54 on the rear side. The two sides of the middle lifting component 54 are also independently controlled, and each is controlled by a group of lifting screw modules to control the lifting, so that the double half-sheet printing on both sides is more accurate.

[0072] It should be stated that the above-mentioned specific implementation methods are only preferred embodiments of the present utility model and the technical principles used. Within the technical scope disclosed by the present utility model, any changes or substitutions that can be easily thought of by technicians familiar with this technical field should be included in the protection scope of the present utility model.

Claims

1. A synchronous and same-direction double-half-sheet precision screen printing machine, characterized in that: It includes a working platform, a lifting module, a UVW deflection correction and alignment mechanism and a screen installation frame. The lifting modules are installed on both sides of the rear end of the working platform. The sides of the UVW deflection correction and alignment mechanism are connected to the driving end of the lifting module. Two groups of X-axis modules and one group of Y-axis modules are installed at the lower end of the UVW deflection correction and alignment mechanism. The two screen installation frames are connected to the X-axis module and the Y-axis module. A group of scraper linear modules are installed on the sides of the UVW deflection correction and alignment mechanism. Each group of scraper linear modules is connected to a printing kit. The two printing kits move synchronously back and forth on the screens of the two screen installation frames.

2. The synchronous and same-direction double-half-sheet precision screen printing machine according to claim 1, characterized in that: It includes a front conveying rail, on which a snapping motor is installed. The driving end key of the snapping motor is connected to a snapping synchronous wheel, and the snapping synchronous wheel is transmission-connected to a snapping synchronous belt. A snapping plate is fixed on the snapping synchronous belt, and the snapping plate is rotatably connected to the snapping wheel.

3. The synchronous and same-direction double-half-sheet precision screen printing machine according to claim 1, characterized in that: A turntable assembly is rotatably arranged in the middle of the working platform, and the turntable assembly includes a circular turntable, an electrical integrated slip ring and a turntable motor. Four groups of workstations are installed around the circular turntable, and each group of the workstations is provided with two half-sheet printing positions. The driving end of the turntable motor is vertically connected to the electrical integrated slip ring, and the middle of the circular turntable is connected to the electrical integrated slip ring. A paper roll transport component is rotatably connected to the lower end of the circular turntable, and the paper roll transport component includes a unwinding shaft and a winding shaft. A paper roll is transmission-connected between the unwinding shaft and the winding shaft. The paper roll passes through the half-sheet printing position and carries the silicon wafer, thereby transporting the silicon wafer. The paper roll is air permeable, and the paper roll transport component transports the silicon wafer to the workstation of the circular turntable, and to the printing position where the double half-sheet precision screen printer outputs the silicon wafer.

4. The synchronous and same-direction double-half-sheet precision screen printing machine according to claim 3, characterized in that: The positions between the four groups of workstations of the circular turntable form a fan-shaped area, which stores the discharger elements and control components together with the middle position of the circular turntable, and then is covered with a protective cover. Each half-sheet printing position is provided with a breathable negative pressure plate, and a plurality of breathable holes are arranged on the breathable negative pressure plate. The breathable holes pass through the roll of paper to adsorb and fix the silicon wafer on the half-sheet printing position.

5. The synchronous and same-direction double-half-sheet precision screen printing machine according to claim 1, characterized in that: The vision module on the working platform includes an in-board vision module and an out-board vision module. Two in-board cameras, one in front and one in the back, are arranged on each side of the in-board vision module. The upper ends of the in-board cameras are adjusted on the in-board vision module along the front-to-back direction. An out-board camera is arranged on each side of the out-board vision module. The upper ends of the out-board cameras are adjusted on the out-board vision module along the front-to-back direction.

6. The synchronous and same-direction double-half-sheet precision screen printing machine according to claim 1, characterized in that: The scraper linear modules on the left and right of the UVW deviation correction and alignment mechanism each include a profile base, an adapter plate and an electrical installation board, electrical components and a drag chain are installed on the electrical installation board, the lower ends of the adapter plate slide along the front-to-back direction with the profile base via guide rails and sliders, the adapter plate is fixed on one side of the electrical installation board, and the adapter plate is locked with the side of the printing kit.

7. The synchronous and same-direction double-half-sheet precision screen printing machine according to claim 1, characterized in that: The lifting module includes a side bracket, a lifting servo motor is installed on the upper end of the side bracket, a lifting ball screw is connected to the driving end of the lifting servo motor, lifting plates are connected on both sides of the UVW deviation correction and alignment mechanism, a lifting ball nut is fixed to the outer side of the lifting plate, the lifting ball screw is threadedly connected to the lifting ball nut, the lifting plate slides on the side bracket along the vertical direction, a lifting guide rail is installed on the side bracket, a lifting slider is fixed to the outer side of the lifting plate, and the lifting slider slides on the lifting guide rail.

8. The synchronous and same-direction double-half-sheet precision screen printing machine according to claim 1, characterized in that: The driving end of the scraper linear module is connected to a scraper forward and backward moving plate, the printing kit is fixed on one side of the scraper forward and backward moving plate, the lower end of the printing kit is connected to a slurry scraper, and the upper end of the printing kit is equipped with a scraper motor, and the scraper motor controls the slurry scraper to move in a vertical direction through a ball screw and a ball nut, the lower end of the printing kit is also connected to an ink return knife, and the upper end of the printing kit is also equipped with an ink return motor, and the ink return motor also controls the ink return knife seat with the ink return knife to move in a vertical direction through a ball screw and a ball nut, and the two ends of the ink return knife are respectively locked on the two ends of the ink return knife seat.

9. The synchronous and same-direction double-half-sheet precision screen printing machine according to claim 1, characterized in that: It includes a rear-section conveying rail, on which a fragment lifting cylinder is installed, a driving end of the fragment lifting cylinder is upwardly connected to a fragment lifting plate, both sides of the fragment lifting plate are located on the outside of the rear-section conveying rail, a detection bracket is installed at the rear end of the rear-section conveying rail, a sensor is installed on the top of the detection bracket, the sensor is located above the rear-section conveying rail, and the sensor is used to sense whether there is a fragment blockage in the rear reflow furnace.

10. The synchronous and same-direction double-half-sheet precision screen printing machine according to claim 1, characterized in that: The UVW deviation correction and alignment mechanism includes a left wire mesh component and a right wire mesh component, which are symmetrically arranged on the left and right and work independently. A group of scraper linear modules are respectively arranged on the left and right wire mesh components and are respectively connected to a group of lifting modules. An intermediate lifting component is arranged at the rear end of the working platform, and the intermediate lifting component includes a front connecting bar and a rear connecting bar. A partition plate is fixed between the front connecting bar and the rear connecting bar, and a left lifting screw module and a right lifting screw module are respectively arranged on both sides of the partition plate. A left jacking seat is connected to the driving end of the left lifting screw module, and a right jacking seat is connected to the driving end of the right lifting screw module. The upper end of the left jacking seat is connected to the bottom of the left wire mesh component, and the upper end of the right jacking seat is connected to the bottom of the right wire mesh component.

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