Vacuum coating device

Abstract

The utility model belongs to the technical field of vacuum coating, and discloses a vacuum coating device. The vacuum coating device comprises a feeding mechanism, an evaporation mechanism, a second moving assembly, a valve and a first vacuumizing mechanism. The feeding mechanism comprises a first shell, a placing piece, a first moving assembly, at least one placing piece, a heating assembly and a plurality of storage pieces. The evaporation mechanism comprises a second shell and an evaporation heating piece. In the working process, the material storage piece is fed and preheated in the first shell, and then the material storage piece is moved to the second shell through the second moving assembly to be heated and evaporated. After evaporation, the first moving assembly moves the next preheated storage piece to the position closest to the opening of the first shell, and the second moving assembly continues to move the storage piece for next evaporation. According to the vacuum coating device, the evaporation operation is continuously carried out, the interval time from previous evaporation to next evaporation is short, the working efficiency is high, and the continuous fast-takt coating requirement can be met. In addition, the subsequent coating effect is good.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a vacuum coating device. Background Art

[0002] Vacuum evaporation coating is a technology that produces thin film materials by physical methods such as heating. It has been widely used in various fields. For example, it is used in the field of electronic equipment to coat semiconductors, displays and other electronic components to improve their performance and durability; it is used in the field of optics to manufacture optical coatings, reflectors, lenses and filters.

[0003] The existing vacuum coating device may include a feeding chamber and an evaporation chamber. The feeding chamber is used for adding and preheating the coating material, and the evaporation chamber is used for realizing vacuum evaporation of the film material. During operation, the film material is added to the material storage part and preheated at low temperature. After the preheating is completed, the material storage part is moved to the evaporation chamber by a moving mechanism. The film material in the material storage part is evaporated under the high temperature of the evaporation chamber, and finally deposited on the substrate to be plated to form a thin film. After the coating is completed, the moving mechanism moves the material storage part to the feeding chamber for re-feeding and subsequent operations to re-coat the substrate to be plated. After the evaporation of the aforementioned vacuum coating device is completed, the next round of feeding operation and subsequent operations are carried out. The interval from the previous evaporation to the next evaporation is long, the working efficiency is low, and it cannot keep up with the rhythm requirements of the continuity of the device. Therefore, a vacuum coating device is urgently needed to solve the above technical problems. Utility Model Content

[0004] The utility model aims to provide a vacuum coating device, which has a short interval from the previous evaporation to the next evaporation, high working efficiency, can meet the continuous fast-beat coating needs, and in addition, the subsequent coating effect is better.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] A vacuum coating device, comprising:

[0007] The feeding mechanism comprises a first shell, a placing member, a first moving assembly, at least one material discharging member, a heating assembly and a plurality of material storage members, wherein the placing member comprises a base and a plurality of accommodating seats arranged at intervals on the base, and a plurality of material storage members are arranged correspondingly on the plurality of accommodating seats; the output end of the first moving assembly is used to drive the placing member to drive the material storage member to move; at least one material discharging member is arranged in the first shell, and is used to add medicine into the material storage member; the heating assembly is arranged in the first shell, and is used to heat the material storage member after feeding;

[0008] The evaporation mechanism comprises a second shell and an evaporation heating element, wherein the inner cavity of the second shell is connected to the inner cavity of the first shell; the evaporation heating element is used to heat the medicinal material in the material storage element and evaporate it onto the surface of the substrate to be plated located in the second shell;

[0009] a second moving assembly, the second moving assembly being capable of moving the material storage member in the first housing into the second housing;

[0010] A valve, used to connect or disconnect the inner cavity of the first shell and the inner cavity of the second shell;

[0011] The first vacuum pumping mechanism is used to pump the inner cavity of the second shell into a vacuum.

[0012] Preferably, the output end of the second moving assembly can move the material storage member in the first shell into the second shell along the first direction.

[0013] Preferably, the feeding mechanism also includes a first lifting component, the accommodating seat is provided with a accommodating groove and a through hole, the through hole is connected to the accommodating groove, the material storage piece is arranged in the accommodating groove, and the output end of the first lifting component can pass through the through hole and lift the material storage piece; the output end of the second moving component is used to move the material storage piece along the first direction.

[0014] Preferably, the output end of the second movable component is provided with a lap joint, and the lap joint is provided with a groove. The second movable component can move the lap joint along the first direction so that the groove is surrounded by the storage member, and the output end of the first lifting component moves downward so that the storage member can be overlapped with the lap joint.

[0015] Preferably, the feeding mechanism also includes a first sealing assembly, which includes a first sleeve and a first sealing ring, the first sleeve is passed through and fixed to the first shell, the first sealing ring is provided between the first sleeve and the first shell, the output end of the first lifting assembly is slidably connected to the first sleeve, and the first sealing ring is provided between the first sleeve and the output end of the first lifting assembly.

[0016] Preferably, the second moving assembly includes a first rotating driving member, a screw and a connecting arm, the output end of the first rotating driving member is connected to the screw in a transmission manner, the connecting arm is connected to the screw in a transmission manner, and the connecting arm is used to move the material storage member along the first direction.

[0017] Preferably, the heating assembly includes at least one heating element and a second lifting assembly, at least one of the heating elements is arranged in the first shell, and the second lifting assembly is arranged in the first shell for lifting and lowering the placement element and enabling the accommodating seat to contact the heating element.

[0018] Preferably, the heating element is a heating electrode rod, the accommodating seat comprises an insulating element and a conductive seat, the insulating element is fixed to the base, the conductive seat is fixed to the insulating element, the material storage element is arranged on the conductive seat, and the conductive seat is in contact with the heating element.

[0019] Preferably, the output end of the first moving component is used to drive the placement member to rotate, and a plurality of the accommodating seats are circumferentially spaced apart on the base.

[0020] Preferably, the second lifting component includes a lifting drive and a connecting component, the lifting drive is fixed to the first shell, the output end of the lifting drive is transmission connected to the connecting component, the first moving component is fixed to the connecting component, the output end of the first moving component passes through the bottom of the first shell and is transmission connected to the placement component.

[0021] Preferably, the first moving component includes a second rotating drive member, a magnetic fluid component and an outer sleeve, the second rotating drive member is fixed to the connecting component, the magnetic fluid component includes a rotating shaft and a magnetic fluid component, the output end of the second rotating drive member is transmission-connected to one end of the rotating shaft, the other end of the rotating shaft passes through the bottom of the first shell and is transmission-connected to the placing member, the magnetic fluid component is sleeved outside the rotating shaft and fixed to the connecting component; the outer sleeve is sleeved outside part of the rotating shaft, and one end of the outer sleeve is fixed to the connecting component, and the other end extends into the first shell.

[0022] Preferably, the feeding mechanism also includes a second sealing assembly, which includes a second sleeve and a second sealing ring, the second sleeve is fixed outside the first shell, the second sealing ring is provided between the second sleeve and the first shell, and the second sealing ring is provided between the second sleeve and the outer sleeve.

[0023] Preferably, a sliding member is provided outside the first shell, and the connecting assembly includes a first connecting member, the first connecting member is provided with a sliding hole, and the sliding member is slidably connected to the sliding hole.

[0024] Preferably, the vacuum coating device further comprises a second vacuum pumping mechanism, and the second vacuum pumping mechanism can evacuate the inner cavity of the first shell to a vacuum.

[0025] Preferably, the second moving component is arranged on the second shell, and the evaporation heating element is arranged on the second moving component.

[0026] Beneficial effects of the utility model:

[0027] The vacuum coating device provided by the utility model includes a feeding mechanism, an evaporation mechanism, a second moving component, a valve and a first vacuuming mechanism. The feeding mechanism includes a first shell, a placement member, a first moving component, at least one material discharge member, a heating component and a plurality of material storage members; the evaporation mechanism includes a second shell and an evaporation heating member. During operation, the material storage member on the placement member is fed and preheated in the first shell, and then the material storage member in the first shell is moved to the second shell by the second moving component for heating and evaporation. After the heating and evaporation are completed, the first moving component moves the next preheated material storage member to the position closest to the opening of the first shell, and the second moving component continues to move the material storage member for the next heating and evaporation operation. The heating and evaporation operation of the vacuum coating device is carried out continuously, the interval time from the previous evaporation to the next evaporation is shortened, the working efficiency is improved, and the continuous fast-beat coating requirements can be met. In addition, after the storage piece that has completed evaporation is removed from the second shell and moved back to a certain receiving seat on the placement piece, it can be cooled on the receiving seat without affecting the feeding, preheating and heating evaporation operations of other storage pieces, so as to achieve better subsequent coating effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a top view of the vacuum coating device provided by the utility model;

[0029] Figure 2 It is a schematic diagram of the assembly structure of the feeding mechanism (the material storage member is in a lifted state) and the valve involved in the utility model;

[0030] Figure 3 It is a schematic diagram of the assembly structure of the feeding mechanism (the material storage part is in a preheating state) and the valve involved in the utility model;

[0031] Figure 4 It is a half-section diagram of a part of the structure of the feeding mechanism provided by the utility model;

[0032] Figure 5 This is a structural schematic diagram of the vacuum coating device provided by the utility model from a first viewing angle;

[0033] Figure 6 It is a structural schematic diagram of the vacuum coating device provided by the utility model from a second viewing angle;

[0034] Figure 7 It is a structural schematic diagram of the placement piece involved in the utility model;

[0035] Figure 8 It is an exploded view of a part of the structure of the placement piece involved in the utility model.

[0036] In the figure:

[0037] 1. Feeding mechanism; 11. First shell; 111. Sliding member; 12. Placement member; 121. Base; 122. Accommodation seat; 1221. Accommodation groove; 1222. Through hole; 1223. Insulation member; 1224. Conductive seat; 1225. Guide groove; 1226. Guide protrusion; 1227. Through groove; 13. First moving component; 131. Second rotating driving member; 132. Magnetic fluid component; 1321. Rotating shaft; 1322. Magnetic fluid member; 133. Outer sleeve; 134. Flange; 135. Inner sleeve; 136. Bearing; 137. Inner sealing ring; 14. Discharging member ; 15, heating component; 151, heating element; 152, second lifting component; 1521, lifting drive member; 1522, connecting component; 1523, first connecting member; 1524, sliding hole; 1525, second connecting member; 1526, third connecting member; 16, material storage member; 17, first lifting component; 18, first sealing component; 181, first sleeve; 182, first sealing ring; 10, second sealing component; 101, second sleeve; 102, second sealing ring; 100, feeding position; 200, first preheating position; 300, second preheating position; 400, lifting position;

[0038] 2. Evaporation mechanism; 21. Second housing; 22. Second moving assembly; 221. Bridge member; 2211. Groove; 222. First rotating driving member; 223. Lead screw; 224. Connecting arm;

[0039] 3. Valve. DETAILED DESCRIPTION

[0040] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0041] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0042] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0043] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0044] like Figures 1 to 8 As shown, the utility model provides a vacuum coating device, including a feeding mechanism 1, a vapor deposition mechanism 2, a second moving component 22, a valve 3 and a first vacuum pumping mechanism, the feeding mechanism 1 includes a first shell 11, a placement member 12, a first moving component 13, at least one material discharge member 14, a heating component 15 and a plurality of material storage members 16, the placement member 12 includes a base 121 and a plurality of accommodating seats 122 spaced apart from each other on the base 121, and the plurality of material storage members 16 are correspondingly arranged on the plurality of accommodating seats 122; the output end of the first moving component 13 is used to drive the placement member 12 to drive the accommodating seat 122 to move; at least one material discharge member 14 is arranged on the first shell 11, Used to add medicinal materials into the material storage part 16; the heating component 15 is arranged on the first shell 11, and is used to heat the material storage part 16 after the addition of materials; the evaporation mechanism 2 includes a second shell 21 and an evaporation heating element, and the inner cavity of the second shell 21 is connected with the inner cavity of the first shell 11; the evaporation heating element is used to heat the medicinal materials in the material storage part 16 and evaporate them onto the surface of the plated substrate located in the second shell 21; the second moving component 22 can move the material storage part 16 in the first shell 11 to the second shell 21; the valve 3 is used to connect or isolate the inner cavity of the first shell 11 and the inner cavity of the second shell 21; the first vacuum mechanism is used to evacuate the inner cavity of the second shell 21 to a vacuum.

[0045] When the vacuum coating device is working, the medicine is added to the storage part 16 on the placement part 12 through the material placing part 14, and the storage part 16 containing the medicine is preheated through the heating component 15, and then the first moving component 13 moves the preheated storage part 16 to the position closest to the opening of the first shell 11; then the valve 3 is opened, and the second moving component 22 moves the storage part 16 at this position to the second shell 21, and then the valve 3 is closed, and the inner cavity of the second shell 21 is evacuated to a specified vacuum degree through the first vacuum pumping mechanism to ensure the vacuum environment required for coating, and then the medicine is heated and evaporated by the evaporation heating component. After the heating and evaporation is completed, the second moving component 22 moves the heated and evaporated storage part 16 back to the placement part 12, and then the first moving component 13 moves the next preheated storage part 16 to the position closest to the opening of the first shell 11, and the second moving component 22 continues to move the storage part 16 for the next heating and evaporation operation. The heating and evaporation operation of the vacuum coating device is continuously performed, the interval time from the previous evaporation to the next evaporation is shortened, the working efficiency is improved, and the continuous fast-beat coating requirements can be met. In addition, after the storage member 16 that has completed evaporation and is removed from the second shell 21 is moved back to a certain storage seat 122 of the placement member 12, the heat can be dissipated on the storage seat 122 without affecting the feeding, preheating and heating evaporation operations of other storage members 16, so that the subsequent coating effect is better.

[0046] Optionally, in this embodiment, there is one material discharge member 14. Such a configuration saves costs, and the first moving component 13 drives the material storage member 16 to move, so that all material discharge members 14 on the placement member 12 can be fed. In other embodiments, there are multiple material discharge members 14, and the multiple material discharge members 14 are arranged in a one-to-one correspondence with the multiple accommodating seats 122. Optionally, in this embodiment, the coating material adopts liquid coating material, and the material discharge member 14 drips the liquid medicine into the material storage member 16 for coating. In other embodiments, the coating material can also adopt solid coating material.

[0047] Optionally, in this embodiment, the second moving assembly 22 is disposed on the second housing 21, and the evaporation heating element is disposed on the second moving assembly 22. This arrangement facilitates the heating evaporation operation.

[0048] Optionally, in this embodiment, the vacuum coating device further includes a second vacuum pumping mechanism, which can evacuate the inner cavity of the first shell 11 to a vacuum state. In this process, before adding materials, the inner cavity of the first shell 11 is placed in a vacuum state by the second vacuum pumping mechanism. When adding materials, the inner cavity of the first shell 11 is placed in an atmospheric state by closing the second vacuum pumping mechanism, and the feeding operation is performed; after the feeding is completed, the inner cavity of the first shell 11 is restored to a vacuum state. In addition to the feeding operation, the inner cavity of the first shell 11 and the inner cavity of the second shell 21 are both kept in a vacuum state by evacuating the second vacuum pumping mechanism. With such a configuration, the second moving component 22 ensures the vacuum state of the inner cavity of the second shell 21 for the next evaporation when entering the first shell 11 and moving the material storage member 16 to the second shell 21, without the need for re-evacuation, thereby improving work efficiency.

[0049] Optionally, in this embodiment, the material storage member 16 is a crucible, and the crucible has the characteristic of high temperature resistance.

[0050] Optionally, in this embodiment, the output end of the second moving assembly 22 can move the material storage member 16 in the first housing 11 into the second housing 21 along the first direction. Figure 1 As shown, the first direction is the length direction of the second shell 21. With such an arrangement, the moving path is short, time is saved, and work efficiency is high.

[0051] Optionally, in this embodiment, if Figure 1 , Figure 2 and Figure 4As shown, the feeding mechanism 1 also includes a first lifting assembly 17, a receiving seat 122 is provided with a receiving groove 1221 and a perforated hole 1222, the perforated hole 1222 is communicated with the receiving groove 1221, the material storage member 16 is arranged in the receiving groove 1221, and the output end of the first lifting assembly 17 can pass through the perforated hole 1222 and lift the material storage member 16; the output end of the second moving assembly 22 is used to move the material storage member 16 along the first direction. The receiving seat 122 is provided with a receiving groove 1221, and the material storage member 16 is arranged in the receiving groove 1221, which plays a limiting role on the position of the material storage member 16. After the material storage member 16 is turned to the position closest to the opening of the first shell 11, the output end of the first lifting assembly 17 passes through the perforated hole 1222 and lifts the material storage member 16, so that the bottom surface of the material storage member 16 is higher than the top surface of the receiving seat 122, and then the material storage member 16 is moved along the first direction through the output end of the second moving assembly 22. Optionally, in the present embodiment, the output end of the second moving assembly 22 is provided with a bridging member 221, and the bridging member 221 is provided with a groove 2211, and the second moving assembly 22 can move the bridging member 221 along the first direction so that the groove 2211 surrounds the storage member 16, and the output end of the first lifting assembly 17 moves downward so that the storage member 16 overlaps the bridging member 221. After the output end of the first lifting assembly 17 moves upward to lift the storage member 16, the bridging member 221 is moved along the first direction by the second moving assembly 22 so that the groove 2211 on the bridging member 221 surrounds the storage member 16, and then the output end of the first lifting assembly 17 moves downward so that the storage member 16 overlaps the bridging member 221, and finally the storage member 16 is moved along the first direction into the second housing 21 by the second moving assembly 22. With such a configuration, the structure is simple and the operation process is simple. In other embodiments, the output end of the second moving assembly 22 may also be provided with a clamping claw, through which the material storage member 16 is clamped, thereby moving the material storage member 16. Optionally, in this embodiment, the evaporation heating element is disposed in the bridge member 221, and heat is transferred to the material storage member 16 through the evaporation heating element.

[0052] Optionally, in this embodiment, if Figure 1 As shown, the second moving assembly 22 comprises a first rotating driving member 222, a lead screw 223 and a connecting arm 224, the output end of the first rotating driving member 222 is transmission-connected with the lead screw 223, the connecting arm 224 is transmission-connected with the lead screw 223, and the connecting arm 224 is used to move the material storage member 16 along the first direction. Such arrangement has a simple structure and can realize accurate positioning of the moving position of the material storage member 16. Optionally, in the present embodiment, the bridging member 221 is fixed on the connecting arm 224.

[0053] Optionally, in this embodiment, if Figure 4As shown, the feeding mechanism 1 also includes a first sealing component 18, the first sealing component 18 includes a first sleeve 181 and a first sealing ring 182, the first sleeve 181 is fixed to the first housing 11, a first sealing ring 182 is provided between the first sleeve 181 and the first housing 11, the output end of the first lifting component 17 is slidably connected to the first sleeve 181, and a first sealing ring 182 is provided between the first sleeve 181 and the output end of the first lifting component 17. By providing the first sealing ring 182 between the first sleeve 181 and the first housing 11, and providing the first sealing ring 182 between the first sleeve 181 and the output end of the first lifting component 17, the airtightness of the inner cavity of the first housing 11 is ensured. Optionally, in this embodiment, the first lifting component 17 is a cylinder, which is low in cost and easy to operate. In other embodiments, the first lifting component 17 can be a hydraulic cylinder or an electric push rod. Optionally, in this embodiment, the output end of the first lifting component 17 is slidably connected to the penetration hole 1222. Such arrangement plays a guiding role when the output end of the first lifting assembly 17 moves. Optionally, the first sealing ring 182 is an O-ring. In addition, three first sealing rings 182 are arranged between the first sleeve 181 and the output end of the first lifting assembly 17, and the sealing effect is better.

[0054] Optionally, in this embodiment, the heating component 15 includes at least one heating element 151 and a second lifting component 152, wherein the at least one heating element 151 is disposed in the first housing 11, and the second lifting component 152 is disposed in the first housing 11, and is used to lift and lower the placement element 12, and enable the receiving seat 122 to contact the heating element 151. The placement element 12 is lifted and lowered by the second lifting component 152 so that the receiving seat 122 contacts the heating element 151, and the medicinal material in the storage element 16 is preheated.

[0055] Optionally, in this embodiment, if Figure 7 As shown, the heating element 151 is a heating electrode rod, and the accommodating seat 122 includes an insulating member 1223 and a conductive seat 1224. The insulating member 1223 is fixed to the base 121, and the conductive seat 1224 is fixed to the insulating member 1223. The material storage member 16 is arranged on the conductive seat 1224, and the conductive seat 1224 is in contact with the heating element 151. The conductive seat 1224 is electrically heated by the heating electrode rod, and the conductive seat 1224 transfers heat to the material storage member 16, so as to preheat the medicine in the material storage member 16, and the heating is convenient. The insulating member 1223 is arranged between the base 121 and the conductive seat 1224 to prevent the base 121 from being charged. Optionally, in this embodiment, as Figure 4As shown, the bottom of the conductive seat 1224 is provided with a through slot 1227, and the upper end of the heating electrode rod is in contact with the inner wall of the through slot 1227. By providing the through slot 1227, the contact area between the heating electrode rod and the conductive seat 1224 is increased, so that the heating effect is better. Optionally, two through slots 1227 are provided, and two corresponding heating electrode rods are provided, which increases the speed of the preheating operation.

[0056] Optionally, in this embodiment, if Figure 6 As shown, the insulating member 1223 is fixed to the base 121 by screws, and the conductive seat 1224 is fixed to the insulating member 1223 by screws, which is convenient for installation. Optionally, the insulating member 1223 is provided with a guide groove 1225, and the conductive seat 1224 is provided with a guide protrusion 1226, and the guide protrusion 1226 is slidably connected to the guide groove 1225. In this way, when the conductive seat 1224 is installed on the insulating member 1223, it plays a guiding and limiting role.

[0057] Optionally, in this embodiment, the output end of the first moving component 13 is used to drive the placement member 12 to rotate, and a plurality of accommodating seats 122 are circumferentially spaced and arranged on the base 121. In this way, the first housing 11 can be made smaller as a whole, saving space and having a compact structure. In other embodiments, the output end of the first moving component 13 is used to drive the placement member 12 to reciprocate along a second direction, and the second direction is perpendicular to the first direction.

[0058] Optionally, in this embodiment, if Figure 1 As shown, the feeding mechanism 1 is arranged around the base 121 with equal spacing in sequence with a feeding position 100, a first preheating position 200, a second preheating position 300 and a lifting position 400, a discharge member 14 is located at the feeding position 100, two heating members 151 are located at the first preheating position 200, two heating members 151 are located at the second preheating position 300, and the first lifting assembly 17 is located at the lifting position 400. In this way, the feeding, preheating and lifting operations of the storage member 16 are realized in sequence. Two preheating positions are set to increase the speed of the preheating operation. In addition, the two positions from the lifting position 400 to the feeding position 100 in a clockwise direction are the placement positions. During the operation of the device, the two placement positions are used to place the storage member 16 that has been removed from the second housing 21 and has completed evaporation. The storage member 16 that has completed evaporation is radiated in the placement position. When the temperature of the aforementioned storage member 16 drops to a suitable temperature, the storage member 16 will be rotated to the feeding position 100. The storage member 16 that has completed evaporation is cooled in the placement position to dissipate heat, which will make the subsequent coating effect better. In addition, by controlling the distance between the feeding port of the discharge member 14 and the placement member 12 and the distance between the placement member 12 and the heating component 15, the feeding operation and the preheating operation can be carried out simultaneously while ensuring that the medicine is not added outside the storage member 16.

[0059] Optionally, in this embodiment, if Figures 4 to 6 As shown, the second lifting assembly 152 includes a lifting drive member 1521 and a connecting assembly 1522. The lifting drive member 1521 is fixed to the first shell 11, and the output end of the lifting drive member 1521 is connected to the connecting assembly 1522 in a transmission manner. The first moving assembly 13 is fixed to the connecting assembly 1522, and the output end of the first moving assembly 13 passes through the bottom of the first shell 11 and is connected to the placement member 12 in a transmission manner. When the placement member 12 needs to be rotated, the first moving assembly 13 is driven to drive the placement member 12 to rotate. When preheating operation is required to make the accommodating seat 122 contact with the heating assembly 15, the lifting drive member 1521 drives the connecting assembly 1522 to move downward, the connecting assembly 1522 drives the first moving assembly 13 to move downward, and the first moving assembly 13 drives the placement member 12 to move downward, thereby achieving the contact between the accommodating seat 122 and the heating assembly 15. Such a configuration is compact in structure and saves space.

[0060] Optionally, in this embodiment, a sliding member 111 is provided outside the first housing 11, and the connecting assembly 1522 includes a first connecting member 1523, the first connecting member 1523 is provided with a sliding hole 1524, and the sliding member 111 is slidably connected to the sliding hole 1524. Such a configuration plays a guiding role when the lifting drive member 1521 drives the connecting assembly 1522 to move. Optionally, the connecting assembly 1522 also includes a second connecting member 1525 and a third connecting member 1526, the output end of the lifting drive member 1521 is fixedly connected to the second connecting member 1525, the first connecting member 1523 is fixed to the second connecting member 1525, the third connecting member 1526 is clamped and fixed to the second connecting member 1525, and the first lifting assembly 17 is fixed to the third connecting member 1526. Optionally, the sliding member 111 is a guide shaft, the first connecting member 1523 is provided with a linear bearing, the linear bearing has a sliding hole 1524, and the guide shaft is slidably connected to the sliding hole 1524 of the linear bearing.

[0061] Optionally, in this embodiment, if Figure 4As shown, the first moving component 13 includes a second rotating driving member 131, a magnetic fluid component 132 and an outer sleeve 133, the second rotating driving member 131 is fixed to the connecting component 1522, the magnetic fluid component 132 includes a rotating shaft 1321 and a magnetic fluid component 1322, the output end of the second rotating driving member 131 is drivingly connected to one end of the rotating shaft 1321, the other end of the rotating shaft 1321 passes through the bottom of the first shell 11 and is drivingly connected to the placing member 12, the magnetic fluid component 1322 is sleeved outside the rotating shaft 1321 and fixed to the connecting component 1522; the outer sleeve 133 is sleeved outside a part of the rotating shaft 1321, and one end of the outer sleeve 133 is fixed to the connecting component 1522, and the other end extends into the first shell 11. The magnetic fluid component 132 is provided to ensure the airtightness of the inner cavity of the first shell 11. When the inner cavity of the first shell 11 is in a vacuum state, one end of the rotating shaft 1321 is located in the inner cavity of the first shell 11 and is in a vacuum state, the other end of the rotating shaft 1321 is located outside the first shell 11 and is in an atmospheric state, and the magnetic fluid component 1322 is located in the middle of the rotating shaft 1321, which can isolate the atmospheric side from the vacuum side to ensure the airtightness of the inner cavity of the first shell 11. The magnetic fluid component 1322 belongs to a mature technology in the relevant field, and this embodiment will not be repeated. An outer sleeve 133 is provided to protect the rotating shaft 1321. Optionally, in this embodiment, an inner sealing ring 137 is provided between the outer sleeve 133 and the connecting assembly 1522 to seal and ensure that one end of the rotating shaft 1321 is in a vacuum state. Specifically, the second rotating drive member 131 is fixed to the second connecting member 1525, and the magnetic fluid component 1322 and the outer sleeve 133 are fixed to the third connecting member 1526.

[0062] Optionally, the first moving assembly 13 further includes a flange 134, an inner sleeve 135 and a bearing 136. The rotating shaft 1321 is provided with a keyway, and the rotating shaft 1321 is transmission-connected to the flange 134 through the keyway. The flange 134 is fixedly connected to the inner sleeve 135, and the inner sleeve 135 is fixedly connected to the base 121. The bearing 136 is arranged between the inner sleeve 135 and the outer sleeve 133. When the second rotating driving member 131 drives the rotating shaft 1321 to rotate, the rotating shaft 1321 drives the flange 134 to rotate. Since the flange 134 is fixedly connected to the inner sleeve 135, and the inner sleeve 135 is fixedly connected to the base 121, the base 121 is rotated. Such an arrangement can ensure stability during rotation.

[0063] Optionally, in the present embodiment, the feeding mechanism 1 further comprises a second sealing assembly 10, the second sealing assembly 10 comprises a second sleeve 101 and a second sealing ring 102, the second sleeve 101 is fixed outside the first housing 11, a second sealing ring 102 is provided between the second sleeve 101 and the first housing 11, and a second sealing ring 102 is provided between the second sleeve 101 and the outer sleeve 133. By providing the second sealing ring 102 between the second sleeve 101 and the first housing 11, and providing the second sealing ring 102 between the second sleeve 101 and the outer sleeve 133, the air tightness of the inner cavity of the first housing 11 is ensured. Optionally, the second sealing ring 102 is an O-ring. In addition, three second sealing rings 102 are provided between the second sleeve 101 and the outer sleeve 133, and the sealing effect is better.

[0064] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. A vacuum coating device, characterized in that: include: A feeding mechanism (1) comprises a first shell (11), a placement member (12), a first moving assembly (13), at least one material discharge member (14), a heating assembly (15) and a plurality of material storage members (16); the placement member (12) comprises a base (121) and a plurality of accommodating seats (122) arranged at intervals on the base (121); the plurality of material storage members (16) are arranged correspondingly on the plurality of accommodating seats (122); the output end of the first moving assembly (13) is used to drive the placement member (12) to drive the material storage member (16) to move; at least one material discharge member (14) is arranged in the first shell (11) and is used to add medicinal materials into the material storage member (16); the heating assembly (15) is arranged in the first shell (11) and is used to heat the material storage member (16) after feeding; The evaporation mechanism (2) comprises a second shell (21) and an evaporation heating element, wherein the inner cavity of the second shell (21) is connected to the inner cavity of the first shell (11); the evaporation heating element is used to heat the medicinal material in the material storage element (16) and evaporate it onto the surface of the substrate to be plated located in the second shell (21); A second moving assembly (22), wherein the second moving assembly (22) is capable of moving the material storage member (16) in the first shell (11) into the second shell (21); A valve (3) for connecting or disconnecting the inner cavity of the first shell (11) and the inner cavity of the second shell (21); The first vacuum pumping mechanism is used to pump the inner cavity of the second shell (21) into a vacuum.

2. The vacuum coating device according to claim 1, characterized in that: The output end of the second moving component (22) can move the material storage member (16) in the first shell (11) into the second shell (21) along a first direction.

3. The vacuum coating device according to claim 2, characterized in that: The feeding mechanism (1) further comprises a first lifting component (17); the accommodating seat (122) is provided with an accommodating groove (1221) and a through hole (1222); the through hole (1222) is communicated with the accommodating groove (1221); the material storage member (16) is arranged in the accommodating groove (1221); the output end of the first lifting component (17) can pass through the through hole (1222) and lift up the material storage member (16); and the output end of the second moving component (22) is used for moving the material storage member (16) along the first direction.

4. The vacuum coating device according to claim 3, characterized in that: The output end of the second moving component (22) is provided with a bridging piece (221), and the bridging piece (221) is provided with a groove (2211). The second moving component (22) can move the bridging piece (221) along a first direction so that the groove (2211) surrounds the material storage component (16), and the output end of the first lifting component (17) moves downward so that the material storage component (16) can overlap the bridging piece (221).

5. The vacuum coating device according to claim 3, characterized in that: The feeding mechanism (1) further comprises a first sealing assembly (18), the first sealing assembly (18) comprising a first sleeve (181) and a first sealing ring (182), the first sleeve (181) being inserted and fixed to the first shell (11), the first sealing ring (182) being arranged between the first sleeve (181) and the first shell (11), the output end of the first lifting assembly (17) being slidably connected to the first sleeve (181), and the first sealing ring (182) being arranged between the first sleeve (181) and the output end of the first lifting assembly (17).

6. The vacuum coating device according to claim 2, characterized in that: The second moving assembly (22) comprises a first rotating driving member (222), a lead screw (223) and a connecting arm (224); the output end of the first rotating driving member (222) is transmission-connected to the lead screw (223); the connecting arm (224) is transmission-connected to the lead screw (223); and the connecting arm (224) is used to move the material storage member (16) along the first direction.

7. The vacuum coating device according to claim 1, characterized in that: The heating component (15) comprises at least one heating element (151) and a second lifting component (152); at least one of the heating elements (151) is arranged in the first shell (11); the second lifting component (152) is arranged in the first shell (11) and is used to lift the placement element (12) and enable the accommodating seat (122) to contact the heating element (151).

8. The vacuum coating device according to claim 7, characterized in that: The heating element (151) is a heating electrode rod, the accommodating seat (122) comprises an insulating element (1223) and a conductive seat (1224), the insulating element (1223) is fixed to the base (121), the conductive seat (1224) is fixed to the insulating element (1223), the material storage element (16) is arranged on the conductive seat (1224), and the conductive seat (1224) is in contact with the heating element (151).

9. The vacuum coating device according to claim 7, characterized in that: The output end of the first moving component (13) is used to drive the placement member (12) to rotate, and a plurality of the accommodating seats (122) are circumferentially spaced apart and arranged on the base (121).

10. The vacuum coating device according to claim 9, characterized in that: The second lifting component (152) comprises a lifting drive member (1521) and a connecting component (1522); the lifting drive member (1521) is fixed to the first shell (11); the output end of the lifting drive member (1521) is transmission-connected to the connecting component (1522); the first moving component (13) is fixed to the connecting component (1522); the output end of the first moving component (13) passes through the bottom of the first shell (11) and is transmission-connected to the placing member (12).

11. The vacuum coating device according to claim 10, characterized in that: The first moving component (13) comprises a second rotating driving component (131), a magnetic fluid component (132) and an outer sleeve (133); the second rotating driving component (131) is fixed to the connecting component (1522); the magnetic fluid component (132) comprises a rotating shaft (1321) and a magnetic fluid component (1322); the output end of the second rotating driving component (131) is drivingly connected to one end of the rotating shaft (1321); the other end of the rotating shaft (1321) passes through the bottom of the first shell (11) and is drivingly connected to the placing component (12); the magnetic fluid component (1322) is sleeved outside the rotating shaft (1321) and fixed to the connecting component (1522); the outer sleeve (133) is sleeved outside a portion of the rotating shaft (1321); one end of the outer sleeve (133) is fixed to the connecting component (1522), and the other end extends into the first shell (11).

12. The vacuum coating device according to claim 11, characterized in that: The feeding mechanism (1) further comprises a second sealing assembly (10), the second sealing assembly (10) comprising a second sleeve (101) and a second sealing ring (102), the second sleeve (101) being fixed to the outside of the first shell (11), the second sealing ring (102) being provided between the second sleeve (101) and the first shell (11), and the second sealing ring (102) being provided between the second sleeve (101) and the outer sleeve (133).

13. The vacuum coating device according to claim 10, characterized in that: A sliding member (111) is provided outside the first shell (11), and the connecting assembly (1522) comprises a first connecting member (1523), the first connecting member (1523) is provided with a sliding hole (1524), and the sliding member (111) is slidably connected to the sliding hole (1524).

14. The vacuum coating device according to any one of claims 1 to 13, characterized in that: The vacuum coating device further comprises a second vacuum pumping mechanism, which can pump the inner cavity of the first shell (11) into a vacuum.

15. The vacuum coating device according to any one of claims 1 to 13, characterized in that: The second moving component (22) is arranged on the second shell (21), and the evaporation heating element is arranged on the second moving component (22).

Images