Single crystal furnace evacuation pipeline with argon discharge

Abstract

The utility model belongs to the field of argon discharge, and particularly relates to a single crystal furnace evacuation pipeline with argon discharge, which comprises a mounting frame, a mounting seat is fixedly mounted at the top of the mounting frame, two inclined pipelines are communicated with the bottom of the mounting seat, a main pipeline is communicated with the bottoms of the inclined pipelines, and the main pipeline is communicated with the mounting seat. The two sides of the main pipeline are communicated with ash removal anti-explosion openings, the right side of the main pipeline is communicated with a three-way pipeline, the two sides of each ash removal anti-explosion opening are provided with drainage devices, each drainage device comprises a sealing cover plate, and each sealing cover plate is movably connected with the top of the corresponding ash removal anti-explosion opening through a hinge; according to the utility model, the sealing cover plate is pushed to lift up through the cylinder, so that the ash removal explosion-proof opening is communicated with the outside, argon in the furnace is conveyed to the main pipeline through the inclined pipeline, and the argon in the furnace is discharged under the action of self gravity, so that no inert gas exists in the furnace, subsequent personnel maintenance is facilitated, and accidents caused by suffocation of personnel are avoided.

Description

Technical Field

[0001] The utility model relates to the field of argon gas leakage, in particular to a single crystal furnace evacuation pipeline with argon gas leakage. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows dislocation-free single crystals using the Czochralski method.

[0003] The single crystal furnace needs to be cleaned after daily use. In order to meet production needs, argon is often filled into the furnace as a protective gas during use. After use, the weight of argon is greater than that of air, which causes argon to accumulate at the bottom of the furnace. Therefore, the argon at the bottom of the furnace needs to be desulfurized to prevent argon from accumulating at the bottom of the furnace during maintenance, which may cause suffocation to personnel, thereby affecting safety and failing to meet production needs. Utility Model Content

[0004] In order to meet production needs during the use of a single crystal furnace, argon is often filled into the furnace as a protective gas. After use, the weight of argon is greater than that of air, which causes argon to accumulate at the bottom of the furnace. When personnel are performing maintenance, the argon accumulation at the bottom of the furnace causes suffocation, which affects safety and cannot meet production needs. The utility model proposes a single crystal furnace evacuation pipe with argon gas discharge.

[0005] The utility model solves the technical problem by adopting the following technical solution: a single crystal furnace evacuation pipeline with argon gas leakage, comprising a mounting frame, a mounting seat is fixedly mounted on the top of the mounting frame, two inclined pipelines are connected at the bottom of the mounting seat, the bottom of the inclined pipeline is connected to the main pipeline, both sides of the main pipeline are connected to dust cleaning explosion-proof ports, the right side of the main pipeline is connected to a three-way pipeline, and both sides of the dust cleaning explosion-proof ports are provided with leakage devices;

[0006] The discharge device includes a sealing cover plate, which is movably connected to the top of the dust cleaning explosion-proof port via a hinge. A cylinder is fixedly installed inside the mounting frame, and the output end of the cylinder is movably connected to the bottom of the sealing cover plate.

[0007] Preferably, the right side of the three-way pipe is connected to a high vacuum pneumatic ball valve, the right side of the high vacuum pneumatic ball valve is connected to a tail three-way pipe, a pneumatic actuator is fixedly installed on the top of the high vacuum pneumatic ball valve, and the output end of the pneumatic actuator is fixedly connected to the top of the high vacuum pneumatic ball valve.

[0008] Preferably, a pressure measuring device is provided at the top of the three-way pipe, and the pressure measuring device includes a second vacuum gauge, and the second vacuum gauge is connected to the top of the three-way pipe.

[0009] Preferably, a first vacuum gauge is connected to the left side of the three-way pipe, and the first vacuum gauge is embedded with a data interface.

[0010] Preferably, a through cavity is provided inside the mounting seat, and a lifting device is fixedly installed inside the mounting frame and below the through cavity.

[0011] Preferably, four evenly distributed heating electrodes are fixedly mounted on the top of the mounting seat, and four evenly distributed fixing seats are fixedly mounted on the outer edge of the mounting seat.

[0012] The utility model is beneficial in that:

[0013] The utility model uses a cylinder to push the sealing cover plate to lift up, thereby making the dust cleaning explosion-proof port conductive to the outside world, sending the argon gas inside the furnace to the main pipeline through the inclined pipeline, and discharging the argon gas in the furnace under the action of its own gravity, thereby making the furnace free of inert gas, facilitating subsequent maintenance by personnel and avoiding suffocation accidents. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0015] Figure 1 It is a schematic diagram of the structure of the utility model;

[0016] Figure 2 It is a left-side structural schematic diagram of the utility model;

[0017] Figure 3 For this utility model Figure 1 The enlarged structural diagram at A in the middle;

[0018] Figure 4 For this utility model Figure 2 Enlarged structural diagram at B in the middle.

[0019] In the figure: 1. mounting frame; 2. pressure measuring device; 201. first vacuum gauge; 202. second vacuum gauge; 3. pneumatic actuator; 4. tail three-way pipe; 5. high vacuum pneumatic ball valve; 6. three-way pipeline; 7. main pipeline; 8. inclined pipeline; 9. discharge device; 901. sealing cover plate; 902. cylinder; 10. mounting seat; 11. heating electrode; 12. lifting device; 13. through cavity; 14. fixing seat; 15. dust cleaning and explosion-proof port. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] The following is combined with Figure 1-4 To further explain this application in detail,

[0022] The present application embodiment discloses a single crystal furnace evacuation pipeline with argon gas leakage. Figure 1 , Figure 2 and Figure 4 A single crystal furnace evacuation pipeline with argon gas leakage comprises a mounting frame 1, a mounting seat 10 is fixedly mounted on the top of the mounting frame 1, two inclined pipelines 8 are connected to the bottom of the mounting seat 10, the bottom of the inclined pipeline 8 is connected to the main pipeline 7, both sides of the main pipeline 7 are connected to dust cleaning explosion-proof ports 15, the right side of the main pipeline 7 is connected to a three-way pipeline 6, and both sides of the dust cleaning explosion-proof port 15 are provided with leakage devices 9;

[0023] The discharge device 9 includes a sealing cover plate 901 , which is movably connected to the top of the dust cleaning explosion-proof port 15 via a hinge. A cylinder 902 is fixedly installed inside the mounting frame 1 , and the output end of the cylinder 902 is movably connected to the bottom of the sealing cover plate 901 .

[0024] Reference Figure 1 and Figure 2 The right side of the three-way pipe 6 is connected with a high vacuum pneumatic ball valve 5, and the right side of the high vacuum pneumatic ball valve 5 is connected with a tail three-way pipe 4. A pneumatic actuator 3 is fixedly installed on the top of the high vacuum pneumatic ball valve 5, and the output end of the pneumatic actuator 3 is fixedly connected to the top of the high vacuum pneumatic ball valve 5. The connection between the tail three-way pipe 4 and the three-way pipe 6 is realized by the setting of the high vacuum pneumatic ball valve 5. The opening and closing of the high vacuum pneumatic ball valve 5 is realized by the setting of the pneumatic actuator 3, and then the conduction between the tail three-way pipe 4 and the three-way pipe 6 is realized, so as to realize the vacuuming of the interior of the single crystal furnace, and the air inside is extracted to prevent the air from oxidizing the melted silicon. The model of the high vacuum pneumatic ball valve 5 in this scheme is TCH-SKT0001.

[0025] Reference Figure 1 and Figure 3 A pressure measuring device 2 is provided at the top of the three-way pipe 6. The pressure measuring device 2 includes a second vacuum gauge 202. The second vacuum gauge 202 is connected to the top of the three-way pipe 6. The second vacuum gauge 202 is used to display the pressure inside the three-way pipe 6.

[0026] Reference Figure 1 and Figure 3 The left side of the three-way pipe 6 is connected to a first vacuum gauge 201, which is embedded with a data interface. The pressure is converted into a signal through the setting of the second vacuum gauge 202 and sent out through the data interface for easy display, and displayed in related control equipment for easy monitoring by staff.

[0027] Reference Figure 1 and Figure 2 A through cavity 13 is provided inside the mounting seat 10, and a lifting device 12 is fixedly installed inside the mounting frame 1 and below the through cavity 13. The through cavity 13 is provided to connect the lifting device 12 to the furnace bottom, which facilitates the lifting and lowering of the furnace.

[0028] Reference Figure 1 and Figure 2 Four evenly distributed heating electrodes 11 are fixedly installed on the top of the mounting seat 10, and four evenly distributed fixing seats 14 are fixedly installed at the outer edge of the mounting seat 10. The heating electrodes 11 are used to heat the furnace, and the fixing seats 14 are used to fix the furnace body relative to the mounting seat 10.

[0029] Working principle: After the furnace cover is removed, the pressure inside the furnace chamber is made the same as the external pressure. At this time, the cylinder 902 is driven to open by the control device, and the sealing cover plate 901 is pushed to rotate by the cylinder 902, thereby making the main pipeline 7, the dust cleaning explosion-proof port 15, the inclined pipeline 8 and the furnace body conductive. The argon gas inside the furnace body is discharged through the main pipeline 7, the dust cleaning explosion-proof port 15 and the inclined pipeline 8 under the action of its own gravity, thereby making the external air enter the interior of the furnace body, so that the subsequent personnel will not suffocate and cause danger when entering for inspection and cleaning.

[0030] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected.

Claims

1. A single crystal furnace evacuation pipeline with argon gas leakage, characterized in that: The invention comprises a mounting frame (1), a mounting seat (10) being fixedly mounted on the top of the mounting frame (1), two inclined pipes (8) being connected to the bottom of the mounting seat (10), a main pipe (7) being connected to the bottom of the inclined pipe (8), both sides of the main pipe (7) being connected to dust cleaning explosion-proof ports (15), the right side of the main pipe (7) being connected to a three-way pipe (6), and both sides of the dust cleaning explosion-proof ports (15) being provided with flow discharge devices (9); The discharge device (9) comprises a sealing cover plate (901), wherein the sealing cover plate (901) is movably connected to the top of the dust cleaning explosion-proof port (15) via a hinge, and a cylinder (902) is fixedly installed inside the mounting frame (1), and the output end of the cylinder (902) is movably connected to the bottom of the sealing cover plate (901).

2. The single crystal furnace evacuation pipeline with argon gas leakage according to claim 1, characterized in that: The right side of the three-way pipe (6) is connected to a high vacuum pneumatic ball valve (5), the right side of the high vacuum pneumatic ball valve (5) is connected to a tail three-way pipe (4), a pneumatic actuator (3) is fixedly installed on the top of the high vacuum pneumatic ball valve (5), and the output end of the pneumatic actuator (3) is fixedly connected to the top of the high vacuum pneumatic ball valve (5).

3. The single crystal furnace evacuation pipeline with argon gas leakage according to claim 1, characterized in that: A pressure measuring device (2) is provided at the top of the three-way pipeline (6), and the pressure measuring device (2) comprises a second vacuum gauge (202), and the second vacuum gauge (202) is connected to the top of the three-way pipeline (6).

4. The single crystal furnace evacuation pipeline with argon gas leakage according to claim 3, characterized in that: The left side of the three-way pipe (6) is connected to a first vacuum gauge (201), and the first vacuum gauge (201) is embedded with a data interface.

5. The single crystal furnace evacuation pipeline with argon gas leakage according to claim 1, characterized in that: A through cavity (13) is provided inside the mounting seat (10), and a lifting device (12) is fixedly installed inside the mounting frame (1) and below the through cavity (13).

6. The single crystal furnace evacuation pipeline with argon gas leakage according to claim 1, characterized in that: Four evenly distributed heating electrodes (11) are fixedly mounted on the top of the mounting seat (10), and four evenly distributed fixing seats (14) are fixedly mounted on the outer edge of the mounting seat (10).

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