Single crystal furnace auxiliary furnace lifting structure with limiting function

Abstract

The utility model discloses an auxiliary furnace lifting structure of a single crystal furnace with a limiting function, which relates to the field of single crystal furnaces and comprises a main furnace, an auxiliary furnace is arranged at the upper end of the main furnace, a support ring is connected to the lower end of the auxiliary furnace, and the auxiliary furnace is connected with the support ring. A limiting clamping mechanism is connected to the upper end of the supporting ring and comprises an annular shell. By arranging the limiting and clamping mechanism, a crystal bar produced in the auxiliary furnace can be limited and clamped, specifically, before the auxiliary furnace is lifted, a first motor is started to drive all toothed plates to move through a first gear, a toothed ring and a second gear, so that a limiting plate moves towards the interior of the auxiliary furnace, and the crystal bar is clamped and fixed; in this way, the stability of the device can be improved, and the situation that when the auxiliary furnace ascends and rotates, the crystal bar shakes and collides with the inner wall of the auxiliary furnace, and the auxiliary furnace or the crystal bar is possibly damaged is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a single crystal furnace auxiliary furnace lifting structure with a limiting function. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas environment (such as nitrogen and helium), and grows dislocation-free single crystals through the Czochralski method. It is a type of crystal growth equipment, mainly used to manufacture artificial crystals such as silicon, germanium, gallium arsenide, and YAG.

[0003] However, the auxiliary furnace of the existing single crystal furnace cannot limit the grown crystal rod. When the auxiliary furnace is raised and rotated to open the auxiliary furnace and remove the crystal rod, only the upper end of the crystal rod is connected, and the lower end will swing in the auxiliary furnace due to inertia, which may collide with the inner wall of the auxiliary furnace, thereby causing damage to the auxiliary furnace or the crystal rod.

[0004] In order to solve the technical problem, the utility model proposes a single crystal furnace auxiliary furnace lifting structure with a limiting function. Utility Model Content

[0005] The main purpose of the utility model is to provide a single crystal furnace auxiliary furnace lifting structure with a limiting function, which can effectively solve the problems mentioned in the background technology.

[0006] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0007] A single crystal furnace auxiliary furnace lifting structure with a limiting function comprises a main furnace, an auxiliary furnace is arranged at the upper end of the main furnace, a support ring is connected to the lower end of the auxiliary furnace, a limiting clamping mechanism is connected to the upper end of the support ring, the limiting clamping mechanism comprises an annular shell, an annular groove is arranged in the annular shell, a gear ring is rotatably connected in the annular groove, a No. 1 gear and a No. 2 gear are rotatably connected in the annular shell, a No. 1 motor is connected in the annular shell, a track plate is connected in the annular shell, a gear plate is slidably connected in the track plate, a limiting plate is connected to the side end of the gear plate, and a connecting groove is provided in the auxiliary furnace.

[0008] Preferably, the limit clamping mechanism is located at the outer end of the auxiliary furnace, the outer end of the gear ring is provided with teeth, the gear ring is meshed with gear No. 1, and the No. 1 motor driving end is connected to gear No. 1.

[0009] Preferably, teeth are arranged on the side end of the tooth plate, the second gear is respectively meshed with the gear ring and the tooth plate, a cotton pad is arranged on the side end of the limit plate, and an anti-slip groove is opened on the side end of the cotton pad.

[0010] Preferably, the limit plate is located in the connecting groove, the thickness of the limit plate is the same as that of the auxiliary furnace, and the material is the same, and a high temperature resistant sealing strip is provided at the connection between the limit plate and the connecting groove.

[0011] Preferably, the outer end of the auxiliary furnace is connected to a support frame, the side end of the auxiliary furnace is provided with a support column, the lower end of the support column is connected to a mounting plate, and the side end of the support column is connected to a No. 2 motor.

[0012] Preferably, the side end of the support column is connected to a fixed block, a rotating rod is rotatably connected inside the fixed block, the driving end of the second motor is connected to the rotating rod, the outer end of the rotating rod is connected to a support plate, and the support plate is located at the upper and lower ends of the support frame.

[0013] Preferably, a threaded rod is rotatably connected inside the support plate, the threaded rod is threadedly connected inside the support frame, the upper end of the threaded rod is connected to a turbine, the turbine is located at the upper end of the support plate, and the upper end of the support plate is connected to the No. 3 motor.

[0014] Preferably, a vortex rod is connected to the driving end of the No. 3 motor, and the vortex rod is meshed with the turbine. A track rod is connected inside the support plate, and the track rod is slidably connected in the support frame. A laser rangefinder pen is provided at the side end of the support plate, and the laser rangefinder pen is connected to the No. 3 motor through a wire, and the laser rangefinder pen projects a laser onto the upper surface of the support frame.

[0015] Compared with the prior art, the utility model has the following beneficial effects:

[0016] In the utility model, by setting a limited clamping mechanism, the crystal rods produced in the auxiliary body furnace can be limited and clamped to prevent them from shaking. Specifically, before lifting the auxiliary body furnace, starting the No. 1 motor will drive all the tooth plates to move through the No. 1 gear, the gear ring and the No. 2 gear, so that the limit plate moves toward the inside of the auxiliary body furnace, so that the crystal rods are clamped and fixed by the limit plate. This limiting method can improve the stability of the device and avoid the crystal rods shaking and colliding with the inner wall of the auxiliary body furnace when the auxiliary body furnace rises and rotates, which may cause damage to the auxiliary body furnace or the crystal rods.

[0017] In the utility model, a turbine, a worm rod and a laser distance measuring pen are provided, and starting the No. 3 motor will drive the worm rod to rotate. The rotation of the worm rod and the action of the turbine will drive the threaded rod to rotate. Under the action of the threaded rod and the track rod, the support frame will be able to move upward, and the laser distance measuring pen can measure the rising distance of the support frame, so that the rising distance of the auxiliary body furnace can be known. When the auxiliary body furnace rises to the set height, the laser distance measuring pen will transmit the information to the No. 3 motor, so that it can stop running, and the turbine and the worm rod can achieve self-locking, so that the threaded rod can be effectively prevented from rotating, and the height of the support frame and the auxiliary body furnace can be locked, so that the height of the auxiliary body furnace can be limited. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the auxiliary furnace lifting structure of the single crystal furnace with a limiting function of the utility model;

[0019] Figure 2 It is a schematic diagram of the connecting groove structure of the auxiliary furnace lifting structure of the single crystal furnace with a limiting function of the utility model;

[0020] Figure 3 It is a schematic cross-sectional structure diagram of a position limiting clamping mechanism of a lifting structure of a single crystal furnace auxiliary furnace with a position limiting function according to the utility model;

[0021] Figure 4 It is a schematic diagram of the annular groove structure of the auxiliary furnace lifting structure of the single crystal furnace with a limiting function of the utility model;

[0022] Figure 5 The utility model is a single crystal furnace auxiliary furnace lifting structure with a limiting function Figure 2 Schematic diagram of area A.

[0023] In the figure: 1. main furnace; 2. auxiliary furnace; 3. support ring; 4. limit clamping mechanism; 5. annular shell; 6. annular groove; 7. gear ring; 8. gear No. 1; 9. gear No. 2; 10. motor No. 1; 11. track plate; 12. gear plate; 13. limit plate; 14. connecting groove; 15. support frame; 16. support column; 17. motor No. 2; 18. fixing block; 19. rotating rod; 20. support plate; 21. threaded rod; 22. turbine; 23. motor No. 3; 24. vortex rod; 25. track rod; 26. laser rangefinder. DETAILED DESCRIPTION

[0024] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.

[0025] like Figure 1-5 As shown, a single crystal furnace auxiliary furnace lifting structure with a limiting function comprises a main furnace 1, an auxiliary furnace 2 is arranged on the upper end of the main furnace 1, a support ring 3 is connected to the lower end of the auxiliary furnace 2, and a limiting clamping mechanism 4 is connected to the upper end of the support ring 3. The limiting clamping mechanism 4 can clamp and limit the crystal rod that has been grown and cooled in the auxiliary furnace 2. The limiting clamping mechanism 4 is located at the outer end of the auxiliary furnace 2, and the support ring 3 is used to support and fix the limiting clamping mechanism 4.

[0026] The limit clamping mechanism 4 includes an annular shell 5, an annular groove 6 is provided in the annular shell 5, a gear ring 7 is rotatably connected in the annular groove 6, a No. 1 gear 8 and a No. 2 gear 9 are rotatably connected in the annular shell 5, teeth are provided at the outer end of the gear ring 7, the gear ring 7 meshes with the No. 1 gear 8, a No. 1 motor 10 is connected in the annular shell 5, and the driving end of the No. 1 motor 10 is connected to the No. 1 gear 8, a track plate 11 is connected in the annular shell 5, a gear plate 12 is slidably connected in the track plate 11, the track plate 11 is used to support the gear plate 12, teeth are provided at the side ends of the gear plate 12, the No. 2 gear 9 meshes with the gear ring 7 and the gear plate 12 respectively, a limit plate 13 is connected to the side end of the gear plate 12, a cotton pad is provided at the side end of the limit plate 13, an anti-skid groove is provided at the side end of the cotton pad, the cotton pad is used to prevent the limit plate 13 from damaging the crystal rod, and the anti-skid groove can improve its clamping and fixing effect.

[0027] Starting the No. 1 motor 10 will drive the No. 1 gear 8 at the driving end to rotate. The rotation of the No. 1 gear 8 will act on the gear ring 7, causing the gear ring 7 to rotate in the annular groove 6. The rotation of the gear ring 7 will act on all the No. 2 gears 9 to rotate. The No. 2 gear 9 will act on the tooth plate 12, causing the tooth plate 12 to drive the limit plate 13 to move, thereby clamping and limiting the crystal rod in the auxiliary furnace 2.

[0028] A connecting groove 14 is provided in the auxiliary body furnace 2, and a limiting plate 13 is located in the connecting groove 14. The thickness of the limiting plate 13 is the same as that of the auxiliary body furnace 2 and the material is the same. When the limiting plate 13 is not working, it is connected to the auxiliary body furnace 2 as a whole. A high-temperature resistant sealing strip is provided at the connection between the limiting plate 13 and the connecting groove 14 to increase the sealing of the two and avoid interference with the auxiliary body furnace 2 by external airflow when the auxiliary body furnace 2 is working.

[0029] A support frame 15 is connected to the outer end of the auxiliary body furnace 2, and a support column 16 is arranged at the side end of the auxiliary body furnace 2. A mounting plate is connected to the lower end of the support column 16 for fixing the support column 16 on the ground. A No. 2 motor 17 is connected to the side end of the support column 16. A fixing block 18 is connected to the side end of the support column 16. A rotating rod 19 is rotatably connected inside the fixing block 18. The fixing block 18 is used to support the rotating rod 19. The driving end of the No. 2 motor 17 is connected to the rotating rod 19. The outer end of the rotating rod 19 is connected to a support plate 20. The support plate 20 is located at the upper and lower ends of the support frame 15.

[0030] A threaded rod 21 is rotatably connected inside the support plate 20, and the threaded rod 21 is threadedly connected inside the support frame 15. A turbine 22 is connected to the upper end of the threaded rod 21, and the turbine 22 is located at the upper end of the support plate 20. The upper end of the support plate 20 is connected to the No. 3 motor 23, and a vortex rod 24 is connected to the driving end of the No. 3 motor 23, and the vortex rod 24 is meshed with the turbine 22. A track rod 25 is connected inside the support plate 20, and the track rod 25 is slidably connected inside the support frame 15. The track rod 25 is used to constrain the support frame 15. A laser rangefinder 26 is provided at the side end of the support plate 20, and the laser rangefinder 26 is connected to the No. 3 motor 23 through a wire. The laser rangefinder 26 projects a laser on the upper surface of the support frame 15, so that the rising height of the support frame 15 can be measured, thereby knowing the rising height of the auxiliary furnace 2.

[0031] After the limit clamping mechanism 4 clamps the crystal rod in the auxiliary furnace 2 to a certain position, start the No. 3 motor 23, which will act on the turbine 22 through the worm rod 24 at the driving end, so that the turbine 22 can drive the threaded rod 21 to rotate, so that the threaded rod 21 will act on the support frame 15, and the support frame 15 will be able to move upward under the action of the threaded rod 21 and the track rod 25, so as to lift the auxiliary furnace 2, and then start the No. 2 motor 17 to drive the rotating rod 19 to rotate, thereby driving the support plate 20 to rotate, thereby driving the support frame 15 and the auxiliary furnace 2 to rotate, so that the auxiliary furnace 2 is misaligned with the main furnace 1, thereby facilitating the staff to take out the crystal rod from the auxiliary furnace 2.

[0032] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A single crystal furnace auxiliary furnace lifting structure with a limiting function, comprising a main furnace (1), characterized in that: The main furnace (1) is provided with an auxiliary furnace (2) at the upper end, the auxiliary furnace (2) is connected with a support ring (3) at the lower end, the support ring (3) is connected with a limit clamping mechanism (4) at the upper end, the limit clamping mechanism (4) comprising an annular shell (5), an annular groove (6) is provided in the annular shell (5), a gear ring (7) is rotatably connected in the annular groove (6), a first gear (8) and a second gear (9) are rotatably connected in the annular shell (5), a first motor (10) is connected in the annular shell (5), a track plate (11) is connected in the annular shell (5), a gear plate (12) is slidably connected in the track plate (11), a side end of the gear plate (12) is connected with a limit plate (13), and a connecting groove (14) is provided in the auxiliary furnace (2).

2. The single crystal furnace auxiliary furnace lifting structure with a limiting function according to claim 1 is characterized in that: The limit clamping mechanism (4) is located at the outer end of the auxiliary furnace (2), the outer end of the gear ring (7) is provided with teeth, the gear ring (7) is meshed with a number one gear (8), and the driving end of the number one motor (10) is connected to the number one gear (8).

3. The single crystal furnace auxiliary furnace lifting structure with a limiting function according to claim 1 is characterized in that: The tooth plate (12) is provided with teeth at its side end, the second gear (9) is meshed with the gear ring (7) and the tooth plate (12) respectively, and the limit plate (13) is provided with a cotton pad at its side end, and an anti-slip groove is provided at the side end of the cotton pad.

4. The lifting structure of the auxiliary furnace of a single crystal furnace with a limiting function according to claim 1 is characterized in that: The limit plate (13) is located in the connecting groove (14); the limit plate (13) has the same thickness and material as the auxiliary furnace (2); and a high temperature resistant sealing strip is provided at the connection between the limit plate (13) and the connecting groove (14).

5. The single crystal furnace auxiliary furnace lifting structure with a limiting function according to claim 1 is characterized in that: The outer end of the auxiliary furnace (2) is connected to a support frame (15), the side end of the auxiliary furnace (2) is provided with a support column (16), the lower end of the support column (16) is connected to a mounting plate, and the side end of the support column (16) is connected to a second motor (17).

6. The single crystal furnace auxiliary furnace lifting structure with a limiting function according to claim 5 is characterized in that: The side end of the support column (16) is connected to a fixed block (18), a rotating rod (19) is rotatably connected inside the fixed block (18), a driving end of the second motor (17) is connected to the rotating rod (19), an outer end of the rotating rod (19) is connected to a support plate (20), and the support plate (20) is located at the upper and lower ends of the support frame (15).

7. The single crystal furnace auxiliary furnace lifting structure with a limiting function according to claim 6 is characterized in that: A threaded rod (21) is rotatably connected inside the support plate (20), the threaded rod (21) is threadedly connected inside the support frame (15), the upper end of the threaded rod (21) is connected to a turbine (22), the turbine (22) is located at the upper end of the support plate (20), and the upper end of the support plate (20) is connected to a third motor (23).

8. The single crystal furnace auxiliary furnace lifting structure with a limiting function according to claim 7 is characterized in that: The driving end of the third motor (23) is connected to a worm gear (24), the worm gear (24) meshes with the turbine (22), the support plate (20) is internally connected to a track rod (25), the track rod (25) is slidably connected to the support frame (15), a laser distance measuring pen (26) is provided at the side end of the support plate (20), the laser distance measuring pen (26) is connected to the third motor (23) via a wire, and the laser distance measuring pen (26) projects a laser onto the upper surface of the support frame (15).

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