Etching equipment of TOPCon battery

Abstract

The utility model relates to the technical field of etching equipment, and discloses etching equipment of a TOPCon battery, which comprises a main body and a bin door, the main body is hinged with the bin door, a baffle plate is fixedly arranged in the main body, the baffle plate divides the interior of the main body into an etching bin and a collecting bin, an etching mechanism is arranged in the etching bin, a collecting mechanism is arranged in the collecting bin, and the collecting mechanism is connected with the main body. The left side surface of the main body is provided with a placing groove, the right end of the placing groove extends into the etching bin, the left side surface of the baffle plate is provided with a driving groove, the back surface of the etching bin is provided with a sliding groove, and a limiting rod is fixedly arranged in the sliding groove; and a scraping frame is adjusted through a hydraulic rod, liquid left on the inner wall of the etching bin is cleaned through the scraping frame, the situation that next etching is affected by the left liquid is avoided, the accuracy of the device is improved, harmful gas in the device is collected, and the safety of the device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of etching equipment, in particular to etching equipment for a TOPCon battery. Background Art

[0002] Etching is the process of selectively corroding or stripping the substrate surface or the film covering the surface by chemical or physical methods. Currently, dry etching occupies an absolute mainstream position in semiconductor etching, accounting for more than 90% of the market.

[0003] A Chinese patent publication number CN218568777U discloses an etching device, including a chamber wall, a dielectric window and a first isolation plate, wherein the chamber wall and the dielectric window form a chamber for etching a structure to be etched in the chamber, the chamber wall having an opening, the opening being used for the first isolation plate to slide into the chamber from the opening along a first direction, so that the first isolation plate and the chamber wall form a sub-chamber, so that when etching in the sub-chamber for a long time, only the lower surface of the first isolation plate is contaminated, and the dielectric window is not contaminated due to the protection of the first isolation plate below it, and only the first isolation plate needs to be replaced or cleaned, and when replacing the first isolation plate, the first isolation plate can be slid out through the opening on the chamber wall, which is simple and convenient to operate, reduces the replacement time, and can improve the yield;

[0004] However, there are still the following disadvantages: when the device is in use, it is unable to collect harmful gases generated during the etching process, causing the harmful gases to enter the air and cause harm to the staff.

[0005] Therefore, an etching device for TOPCon cells is proposed. Utility Model Content

[0006] The purpose of the utility model is to provide an etching device for a TOPCon battery to solve the problems raised in the above background technology.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an etching device for a TOPCon battery, comprising a main body and a compartment door;

[0008] The main body and the chamber door are hinged, a baffle is fixedly arranged inside the main body, and the baffle divides the interior of the main body into an etching chamber and a collecting chamber. An etching mechanism is arranged inside the etching chamber, and a collecting mechanism is arranged inside the collecting chamber.

[0009] A placement groove is provided on the left side of the main body, the right end of which extends into the interior of the etching chamber, a driving groove is provided on the left side of the baffle, a slide groove is provided on the back of the etching chamber, and a limit rod is fixedly arranged inside the slide groove;

[0010] The etching mechanism includes an isolation part and an etching part;

[0011] The isolation portion is located above the etched portion.

[0012] Preferably, the isolation part includes a partition, the right end of the partition passes through the placement groove and extends to the inside of the etching chamber, a pulley is fixedly provided on the bottom surface of the partition, the pulley is located inside the slide groove, the lower end of the pulley is slidably connected to the limit rod, and a handle is fixedly provided on the left side of the partition, and the handle drives the partition to move.

[0013] Preferably, an air pipe is provided above the partition, and the right end of the air pipe passes through the main body and extends to the inside of the etching chamber. When the partition is closed, the air in the air pipe cannot enter the etching chamber.

[0014] Preferably, the etching part comprises an etching spray device, and fixing rods are fixedly provided at left and right ends of the etching spray device, and the side surfaces of the two fixing rods are respectively fixedly connected to the inner wall of the etching chamber and the baffle.

[0015] Preferably, a scraper frame is arranged below the etching spray device, and the left and right ends of the scraper frame are sleeved on the outer surface of the fixed rod and are slidably connected to the fixed rod. A limit block is fixedly arranged on the side of the scraper frame, and the limit block is located inside the driving groove and is slidably connected to the inner wall of the driving groove. A hydraulic rod is fixedly arranged on the bottom surface of the rear end of the scraper frame, and the hydraulic rod drives the scraper frame to move.

[0016] Preferably, a placement plate and a collection bucket are sequentially arranged below the etching spray device, the placement plate is located above the collection bucket, and the collection bucket scrapes the impurities scraped by the scraping frame into the collection bucket.

[0017] Preferably, the collection mechanism includes a suction fan, which is located inside the collection bin, a placement seat is fixedly provided at the lower end of the suction fan, the placement seat is fixedly connected to the bottom surface of the inner wall of the collection bin, and air pipes are connected to both ends of the suction fan, so that the suction fan inhales harmful gases generated during the etching process.

[0018] Preferably, a first one-way valve is provided on the left side of the suction fan, and the first one-way valve is sleeved on the trachea. A second one-way valve is provided on the right side of the suction fan, and the second one-way valve is sleeved on the trachea. The first one-way valve and the second one-way valve allow harmful gases to move in only one direction.

[0019] Compared with the prior art, the utility model has the following beneficial effects: the etching device of the TOPCon battery,

[0020] 1) By pushing and pulling the handle, the partition can be moved left and right, which is easy to operate and convenient for the staff to replace the partition. The scraper rack is adjusted by the hydraulic rod, and the scraper rack is used to clean the liquid left on the inner wall of the etching chamber to avoid the remaining liquid affecting the next etching and improve the accuracy of the device;

[0021] 2) The first one-way valve and the second one-way valve are sequentially sleeved on the outer surface of the air pipe to ensure that the harmful gas can only move in one direction and will not cause the gas to flow back, so as to collect the harmful gas in the device and improve the safety of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a three-dimensional schematic diagram of the structure of the utility model;

[0023] Figure 2 This is a cross-sectional view of the structure of the utility model;

[0024] Figure 3 This is a cross-sectional view of the main body of the utility model;

[0025] Figure 4 This is a three-dimensional schematic diagram of the partition of the utility model;

[0026] Figure 5 It is a three-dimensional schematic diagram of the etching mechanism of the utility model;

[0027] Figure 6 It is a three-dimensional schematic diagram of the collection mechanism of the utility model.

[0028] In the figure: main body 1, etching chamber 11, collecting chamber 12, placement slot 13, driving slot 14, slide slot 15, limit rod 16, chamber door 2, baffle 3, air pipe 4, etching mechanism 5, partition 51, pulley 52, handle 53, etching spray device 54, fixing rod 55, scraping rack 56, limit block 57, hydraulic rod 58, collecting mechanism 6, suction fan 61, placement seat 62, air pipe 63, first one-way valve 64, second one-way valve 65, placement plate 7, collecting bucket 8. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] Embodiment 1:

[0031] See also Figure 1-Figure 6 , the utility model provides a technical solution: an etching device for a TOPCon battery, comprising a main body 1 and a compartment door 2;

[0032] The main body 1 and the chamber door 2 are hinged, and a baffle 3 is fixedly arranged inside the main body 1. The baffle 3 divides the interior of the main body 1 into two parts: an etching chamber 11 and a collecting chamber 12. An etching mechanism 5 is arranged inside the etching chamber 11, and a collecting mechanism 6 is arranged inside the collecting chamber 12.

[0033] A placement groove 13 is provided on the left side of the main body 1, and the right end of the placement groove 13 extends into the etching chamber 11. A driving groove 14 is provided on the left side of the baffle 3, and a slide groove 15 is provided on the back of the etching chamber 11. A limit rod 16 is fixedly arranged inside the slide groove 15.

[0034] The etching mechanism 5 includes an isolation part and an etching part;

[0035] The isolation portion is located above the etched portion;

[0036] The isolation part includes a partition 51, the right end of the partition 51 passes through the placement groove 13 and extends to the inside of the etching chamber 11, a pulley 52 is fixedly arranged on the bottom surface of the partition 51, the pulley 52 is located inside the slide groove 15, and the lower end of the pulley 52 is slidably connected to the limit rod 16, a handle 53 is fixedly arranged on the left side of the partition 51, and an air supply pipe 4 is arranged above the partition 53, and the right end of the air supply pipe 4 passes through the main body 1 and extends to the inside of the etching chamber 11;

[0037] The etching part includes an etching spray device 54, and fixed rods 55 are fixedly provided at the left and right ends of the etching spray device 54. The sides of the two fixed rods 55 are fixedly connected to the inner wall of the etching chamber 11 and the baffle 3 respectively. A scraping frame 56 is provided below the etching spray device 54. The left and right ends of the scraping frame 56 are sleeved on the outer surface of the fixed rods 55 and are slidably connected to the fixed rods 55. A limit block 57 is fixedly provided on the side of the scraping frame 56. The limit block 57 is located inside the driving groove 14 and is slidably connected to the inner wall of the driving groove 14. A hydraulic rod 58 is fixedly provided on the bottom surface of the rear end of the scraping frame 56. A placing plate 7 and a collecting bucket 8 are sequentially arranged below the etching spray device 54, and the placing plate 7 is located above the collecting bucket 8.

[0038] Furthermore, in this embodiment, the TOPCon battery to be etched is placed on the placement plate 7, and the TOPCon battery is etched by the etching spray device 54. The partition 51 can be moved left and right by pushing and pulling the handle 53. The operation is convenient, and it is convenient for the staff to replace the partition 51. When the partition 51 is closed, the air in the air pipe 4 cannot enter the etching chamber 11 below, so as to avoid the influence of air on the etching process of the TOPCon battery. After the etching is completed, the scraping frame 56 is adjusted by the hydraulic rod 58, and the liquid left on the inner wall of the etching chamber 11 is cleaned by the scraping frame 56.

[0039] Furthermore, in this embodiment, the partition 51 can be moved left and right by pushing and pulling the handle 53, which is easy to operate and convenient for the staff to replace the partition 51. The scraper frame 56 is adjusted by the hydraulic rod 58, and the scraper frame 56 is used to clean the liquid left on the inner wall of the etching chamber 11 to avoid the remaining liquid affecting the next etching, thereby improving the accuracy of the device;

[0040] Embodiment 2

[0041] See also Figure 1-Figure 6 , and on the basis of the first embodiment, it is further obtained that: the collection mechanism 6 includes a suction fan 61, the suction fan 61 is located inside the collection bin 12, a placement seat 62 is fixedly provided at the lower end of the suction fan 61, the placement seat 62 is fixedly connected to the bottom surface of the inner wall of the collection bin 12, both ends of the suction fan 61 are connected to an air pipe 63, a first one-way valve 64 is provided on the left side of the suction fan 61, the first one-way valve 64 is sleeved on the air pipe 63, and a second one-way valve 65 is provided on the right side of the suction fan 61, and the second one-way valve 65 is sleeved on the air pipe 63;

[0042] Furthermore, the suction fan 61 of this embodiment collects harmful gases in the etching chamber 11, and the outer surface of the gas pipe 63 is sequentially sleeved with a first one-way valve 64 and a second one-way valve 65 to ensure that the harmful gases can only move in one direction and will not cause gas backflow;

[0043] Furthermore, in this embodiment, a first one-way valve 64 and a second one-way valve 65 are sequentially sleeved on the outer surface of the air pipe 63 to ensure that harmful gases can only move in one direction and will not cause gas backflow, thereby collecting harmful gases in the device and improving the safety of the device.

[0044] When in use, place the TOPCon battery to be etched on the placement plate 7, and etch the TOPCon battery through the etching spray device 54. Push and pull the handle 53 to move the partition 51 left and right. The operation is convenient, and it is convenient for the staff to replace the partition 51. When the partition 51 is closed, the air in the air pipe 4 cannot enter the etching chamber 11 below, so as to avoid the influence of air on the etching process of the TOPCon battery. After the etching is completed, the scraper rack 56 is adjusted by the hydraulic rod 58, and the liquid left on the inner wall of the etching chamber 11 is cleaned by the scraper rack 56 to avoid the influence of the remaining liquid on the next etching, thereby improving the accuracy of the device. The harmful gas in the etching chamber 11 is collected by the suction fan 61. The outer surface of the air pipe 63 is sequentially provided with a first one-way valve 64 and a second one-way valve 65 to ensure that the harmful gas can only move in one direction and will not cause the gas to flow back. The harmful gas in the device is collected to improve the safety of the device.

[0045] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A TOPCon battery etching device, comprising a main body (1) and a compartment door (2); The main body (1) and the door (2) are hinged, and are characterized in that: A baffle (3) is fixedly arranged inside the main body (1), and the baffle (3) divides the interior of the main body (1) into two parts, an etching chamber (11) and a collecting chamber (12); an etching mechanism (5) is arranged inside the etching chamber (11), and a collecting mechanism (6) is arranged inside the collecting chamber (12); A placement groove (13) is provided on the left side of the main body (1), the right end of the placement groove (13) extends into the interior of the etching chamber (11), a driving groove (14) is provided on the left side of the baffle (3), a slide groove (15) is provided on the back side of the etching chamber (11), and a limit rod (16) is fixedly arranged inside the slide groove (15); The etching mechanism (5) comprises an isolation part and an etching part; The isolation portion is located above the etched portion.

2. The etching device for TOPCon cells according to claim 1, characterized in that: The isolation portion comprises a partition (51), the right end of the partition (51) passes through the placement groove (13) and extends to the inside of the etching chamber (11), a pulley (52) is fixedly arranged on the bottom surface of the partition (51), the pulley (52) is located inside the slide groove (15), the lower end of the pulley (52) is slidably connected to the limit rod (16), and a handle (53) is fixedly arranged on the left side of the partition (51).

3. The etching device for a TOPCon cell according to claim 2, characterized in that: An air supply pipe (4) is arranged above the partition plate (51), and the right end of the air supply pipe (4) penetrates the main body (1) and extends to the interior of the etching chamber (11).

4. The etching device for a TOPCon cell according to claim 1, characterized in that: The etching section comprises an etching spray device (54), and fixed rods (55) are fixedly arranged at the left and right ends of the etching spray device (54), and the side surfaces of the two fixed rods (55) are respectively fixedly connected to the inner wall of the etching chamber (11) and the baffle (3).

5. The etching device for TOPCon cells according to claim 4, characterized in that: A scraper frame (56) is provided below the etching spray device (54), the left and right ends of the scraper frame (56) are sleeved on the outer surface of the fixed rod (55) and are slidably connected to the fixed rod (55), a limit block (57) is fixedly provided on the side of the scraper frame (56), the limit block (57) is located inside the driving groove (14) and is slidably connected to the inner wall of the driving groove (14), and a hydraulic rod (58) is fixedly provided on the bottom surface of the rear end of the scraper frame (56).

6. The etching device for TOPCon battery according to claim 4, characterized in that: A placement plate (7) and a collection bucket (8) are sequentially arranged below the etching spray device (54), and the placement plate (7) is located above the collection bucket (8).

7. The etching device for TOPCon battery according to claim 1, characterized in that: The collecting mechanism (6) comprises a suction fan (61), the suction fan (61) is located inside the collecting bin (12), a placement seat (62) is fixedly provided at the lower end of the suction fan (61), the placement seat (62) is fixedly connected to the bottom surface of the inner wall of the collecting bin (12), and both ends of the suction fan (61) are connected to air pipes (63).

8. The etching device for TOPCon cells according to claim 7, characterized in that: A first one-way valve (64) is arranged on the left side of the suction fan (61), and the first one-way valve (64) is sleeved on the air pipe (63). A second one-way valve (65) is arranged on the right side of the suction fan (61), and the second one-way valve (65) is sleeved on the air pipe (63).

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