Tail gas emission treatment device and boron diffusion equipment

Abstract

The embodiment of the utility model provides a tail gas emission treatment device and boron diffusion equipment. The tail gas emission treatment device comprises a first cooling mechanism, a washing and filtering assembly, a second cooling mechanism, a vacuum pump and a collector which are communicated in sequence, wherein the first cooling mechanism is used for receiving tail gas of a boron diffusion furnace and cooling the tail gas; the washing and filtering assembly is used for filtering the tail gas cooled by the first cooling mechanism; the second cooling mechanism is used for carrying out secondary cooling on the tail gas filtered by the washing and filtering assembly so as to obtain purified tail gas; and the collector is used for obtaining the purified tail gas from the second cooling mechanism through the vacuum pump. The tail gas emission treatment device disclosed by the embodiment of the utility model has a good filtering effect on boron diffusion tail gas, a pipeline of the tail gas emission treatment device is prevented from being blocked, and the pressure in the tail gas emission treatment device is ensured to be stable, so that the service life of the device is prolonged.

Description

Technical Field

[0001] The present application relates to the technical field of tail gas treatment, and in particular to a tail gas emission treatment device and a boron diffusion device. Background Art

[0002] At present, the tail exhaust system of the boron diffusion furnace mainly adopts cooling liquid bottles and fiber filters. The liquid bottles do not have enough capacity to allow the unreacted chemical sources to be adsorbed in the bottle, and the liquid bottles have a certain cooling effect, allowing a small amount of chemical substances to condense in the bottle, which is easy to cause blockage in the narrow space in the tail exhaust pipeline of the boron diffusion equipment. For fiber filters, as boron oxide particles accumulate, the fiber filter element is easily blocked by boron oxide, which puts pressure on the pump load; or in the early stage of filtration, due to the large fiber diameter and insufficient filtering capacity, dust is easily accumulated in the vacuum pump, causing the vacuum pump to jam. Utility Model Content

[0003] The embodiment of the present application provides an exhaust gas treatment device and a boron diffusion device to solve or alleviate one or more of the technical problems mentioned above. The exhaust gas treatment device of the embodiment of the present application has a good filtering effect on the boron diffused exhaust gas, avoids clogging the pipeline of the exhaust gas treatment device, ensures the pressure inside the exhaust gas treatment device is stable, and thus prolongs the service life of the device.

[0004] As one aspect of an embodiment of the present application, an embodiment of the present application provides an exhaust gas treatment device, comprising: a first cooling mechanism, a water washing filter assembly, a second cooling mechanism, a vacuum pump, and a collector connected in sequence; wherein:

[0005] The first cooling mechanism is used to receive the tail gas of the boron expansion furnace and cool the tail gas;

[0006] The water-washing filter assembly is used to filter the exhaust gas cooled by the first cooling mechanism;

[0007] The second cooling mechanism is used to perform secondary cooling on the tail gas filtered by the water-washing filter assembly to obtain purified tail gas;

[0008] The collector is used to obtain the purified exhaust gas from the second cooling mechanism through the vacuum pump.

[0009] Optionally, the water-washing filter assembly is provided with an air inlet pipe and an air outlet pipe;

[0010] Wherein, one end of the air inlet pipe extends out of the water-washing filter assembly, and the other end extends into the water below the water surface in the water-washing filter assembly;

[0011] One end of the air outlet pipe extends into the water-washing filter assembly and is located above the water surface in the water-washing filter assembly, and the other end extends out of the water-washing filter assembly.

[0012] Optionally, the water washing and filtering assembly is a first filter, a second filter and a third filter which are connected in sequence;

[0013] Wherein, the first filter is communicated with the outlet of the first cooling mechanism through a pipeline, and the third filter is communicated with the inlet of the second cooling mechanism.

[0014] Optionally, the tail gas emission treatment device further includes a water supply device;

[0015] The water supply device is connected to the water washing and filtering assembly, and is used to supply water to the water washing and filtering assembly.

[0016] Optionally, the exhaust gas emission treatment device further comprises a liquid accumulation tank;

[0017] The liquid collection tank is communicated with the water washing and filtering component, and the liquid collection tank is used to receive waste water discharged from the water washing and filtering component.

[0018] Optionally, the first cooling mechanism and the second cooling mechanism are both condensation bottles.

[0019] Optionally, the condensation bottle contains condensation material.

[0020] Optionally, the condensing material is liquid nitrogen or liquid helium.

[0021] Optionally, a condensation piece is provided on the surface of the condensation bottle.

[0022] As another aspect of an embodiment of the present application, an embodiment of the present application provides a boron diffusion device, comprising: a boron expansion furnace and an exhaust gas emission treatment device of any one of the above embodiments; the exhaust gas emission port of the boron expansion furnace is connected to the exhaust gas emission treatment device.

[0023] The above technical solution adopted in the embodiment of the present application may have the following advantages:

[0024] The exhaust gas treatment device of the embodiment of the present application includes a water-washing filter assembly, and cooling mechanisms (first cooling mechanism and second cooling mechanism) are arranged before and after the water-washing filter assembly. 2 O 3 The tail gas of the exhaust gas and chlorine is passed into the exhaust gas emission treatment device. When the tail gas passes through the first cooling mechanism, boron oxide powder is precipitated. The boron oxide powder enters the water washing and filtering component with the gas and fully contacts with the water in the water washing and filtering component. The boron oxide powder and chlorine are dissolved and absorbed by the water, thereby avoiding B 2 O 3The accumulation of white powder blocks the pipeline and prevents chlorine and boric oxide from leaking into the air to release micro-boric acid and hydrogen chloride gas, thereby reducing the rust and corrosion of metal parts in the exhaust gas treatment device, and accelerating the electrical aging rate. The exhaust gas filtered by the water-washing filter assembly enters the second cooling mechanism for secondary cooling, and the boric oxide powder precipitated again is deposited at the bottom of the second cooling mechanism, so that the exhaust gas is further purified. The exhaust gas treatment device of the embodiment of the present application has a good filtering effect on boron-diffused exhaust gas, avoids clogging the pipeline of the exhaust gas treatment device, stabilizes the pressure in the exhaust gas treatment device, and extends the service life of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the multiple drawings represent the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings only depict some embodiments disclosed in the present application and should not be regarded as limiting the scope of the present application.

[0026] Figure 1 It is a structural schematic diagram of an exhaust gas emission treatment device provided in one embodiment of the present application;

[0027] Figure 2 is a structural schematic diagram of an exhaust gas emission treatment device provided by another embodiment of the present application;

[0028] Figure 3 It is a structural schematic diagram of an exhaust emission treatment device provided in yet another embodiment of the present application.

[0029] Description of reference numerals:

[0030] 10. First cooling mechanism; 20. Water-washing filter assembly; 21. First filter; 22. Second filter; 23. Third filter; 24. Air inlet pipe; 25. Air outlet pipe; 30. Second cooling mechanism; 11, 31. Condensation bottle; 12, 32. Condensation material; 13, 33. Condensation element; 40. Vacuum pump; 50. Collector; 60. Water supply device; 70. Liquid accumulation tank; 80. Boron expansion furnace. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the present application more clear, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be noted that the embodiments and features in the embodiments of the present application can be combined with each other without conflict. The present application will be described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.

[0032] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the terms used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein, for example. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0033] Hereinafter, exemplary embodiments according to the present application will be described in more detail with reference to the accompanying drawings. It should be noted that these exemplary embodiments can be implemented in many different forms and should not be construed as being limited to the embodiments described herein.

[0034] like Figures 1 to 3 As shown, the exhaust gas emission treatment device of the embodiment of the present application includes: a first cooling mechanism 10, a water washing filter assembly 20, a second cooling mechanism 30, a vacuum pump 40, and a collector 50 which are connected in sequence.

[0035] The structures and coordination relationships of the first cooling mechanism 10, the water-washing filter assembly 20, the second cooling mechanism 30, the vacuum pump 40, and the collector 50 are described below.

[0036] The first cooling mechanism 10 is used to receive and cool the tail gas from the boron expansion furnace 80. The boron expansion furnace 80 is a high-temperature environment device, and the tail gas it discharges contains gaseous boron oxide and chlorine. The tail gas enters the first cooling mechanism 10 through the tail exhaust pipeline, and the tail gas is cooled by the first cooling zone mechanism, and a large amount of gaseous boron oxide is precipitated to become boron oxide powder.

[0037] The water-washing and filtering component 20 is used to filter the exhaust gas cooled by the first cooling mechanism 10. After the exhaust gas is cooled by the first cooling mechanism 10, boron oxide powder is precipitated. The exhaust gas (containing chlorine) cooled by the first cooling mechanism 10 carries the boron oxide powder into the water-washing and filtering component 20. The water-washing and filtering component 20 has liquid water. Water has a good solubility for boron oxide powder and chlorine. The boron oxide powder and chlorine are dissolved in the water in the water-washing and filtering component 20, thereby greatly reducing the content of boron oxide and chlorine in the exhaust gas. In addition, the powdered boron oxide is in direct contact with water, which can improve the filtering effect.

[0038] The second cooling mechanism 30 is used to perform secondary cooling on the tail gas after being filtered by the water-washing and filtering component 20 to obtain purified tail gas. After the tail gas is filtered by the water-washing and filtering component 20, a large amount of boron oxide is removed, but a small amount of boron oxide still exists in the filtered tail gas. The tail gas filtered by the water-washing and filtering component 20 enters the second cooling mechanism 30, is cooled for the second time, and continues to precipitate boron oxide powder, which is adsorbed at the bottom of the second cooling mechanism 30, so that the tail gas is further purified. The tail gas cooled by the second cooling mechanism 30 does not contain or contains a trace amount of boron oxide.

[0039] The collector 50 is used to obtain the purified tail gas from the second cooling mechanism 30 through the vacuum pump 40. During the tail gas treatment process, the vacuum pump 40 is operated to make the tail gas discharged from the boron expansion furnace 80 pass through the first cooling mechanism 10, the water washing filter assembly 20 and the second cooling mechanism 30 in sequence, so that the tail gas is filtered and purified to reduce or remove boron oxide in the tail gas. The filtered and purified tail gas enters the collector 50 through the vacuum pump 40 and can be recycled.

[0040] The exhaust gas treatment device of the embodiment of the present application includes a water-washing filter assembly 20, and cooling mechanisms (respectively a first cooling mechanism 10 and a second cooling mechanism 30) are provided before and after the water-washing filter assembly 20. 2 O 3 The tail gas of the exhaust gas and chlorine is passed into the exhaust gas treatment device. When the tail gas passes through the first cooling mechanism 10, boron oxide powder is precipitated. The boron oxide powder enters the water washing and filtering component 20 with the gas and is fully contacted with the water in the water washing and filtering component 20. The boron oxide powder and chlorine are dissolved and absorbed by the water, thereby avoiding B 2 O 3 The accumulation of white powder blocks the pipeline and prevents chlorine and boric oxide from leaking into the air to release micro-boric acid and hydrogen chloride gas, thereby reducing the rust and corrosion of metal parts in the exhaust gas treatment device, accelerating electrical aging, etc. The exhaust gas filtered by the water washing filter assembly 20 enters the second cooling mechanism 30 for secondary cooling, and the precipitated boric oxide powder is deposited at the bottom of the second cooling mechanism 30, so that the exhaust gas is further purified.

[0041] In an alternative embodiment, if Figure 1 As shown, the water washing filter assembly 20 is provided with an air inlet pipe 24 and an air outlet pipe 25 .

[0042] In the water-washing filter assembly 20, one end of the air inlet pipe 24 extends out of the water-washing filter assembly 20, and the other end extends below the water surface in the water-washing filter assembly 20. One end of the air inlet pipe 24 extends out of the water-washing filter assembly 20 to receive the exhaust gas to be filtered; the other end of the air inlet pipe 24 extends below the water surface in the water-washing filter assembly 20, so that the exhaust gas to be filtered can pass into the water in the water-washing filter assembly 20, so that the exhaust gas to be filtered can be fully contacted with the water, thereby improving the dissolution effect of boron oxide in water.

[0043] In the water-washing filter assembly 20, one end of the air outlet pipe 25 extends into the water-washing filter assembly 20 and is located above the water surface in the water-washing filter assembly 20, and the other end extends out of the water-washing filter assembly 20. One end of the air outlet pipe 25 extends into the water-washing filter assembly 20 and is located above the water surface in the water-washing filter assembly 20, which can prevent the liquid water in the water-washing filter assembly 20 from entering the second cooling mechanism 30 through the air outlet pipe, thereby avoiding reducing the cooling performance of the second cooling mechanism 30; the other end of the air outlet pipe 25 extends out of the water-washing filter assembly 20, and the pipe opening of the air outlet pipe is located above the water surface, which is used to transport the filtered exhaust gas to the next treatment mechanism in the exhaust gas emission treatment device.

[0044] In some embodiments, the water-washing filter assembly 20 includes at least two filters connected in sequence. When the tail gas cooled by the first cooling mechanism 10 enters the water-washing filter assembly 20, it is filtered by at least two filters, so that the tail gas cooled by the first cooling mechanism 10 is dissolved in water multiple times, and the boron oxide content in the tail gas cooled by the first cooling mechanism 10 is gradually reduced, so that more boron oxide is dissolved and absorbed by water, thereby improving the filtering effect.

[0045] When the water-washing filter assembly 20 includes at least two filters connected in sequence, each filter is provided with an air inlet pipe and an air outlet pipe. One end of the air inlet pipe extends out of the corresponding filter, and the other end extends below the water surface in the corresponding filter; one end of the air outlet pipe extends into the corresponding filter and is located above the water surface in the corresponding filter, and the other end extends out of the corresponding filter.

[0046] In an alternative embodiment, if Figure 1 As shown, the water washing filter assembly 20 is a first filter 21, a second filter 22 and a third filter 23 which are connected in sequence; wherein the first filter 21 is connected to the outlet of the first cooling mechanism 10 through a pipeline, and the third filter 23 is connected to the inlet of the second cooling mechanism 30.

[0047] When there are multiple water-washing and filtering components 20, the exhaust gas cooled by the first cooling mechanism 10 can be filtered at multiple stages, so that a large amount of boron oxide and chlorine in the exhaust gas can be dissolved and absorbed by water, thereby improving the filtering effect; however, if there are too many filters, the amount of boron oxide and chlorine dissolved and absorbed by the subsequent filters is very small, which will cause waste of resources and increase the cost of exhaust gas treatment. When the water-washing and filtering components 20 are set to three, namely, the first filter 21, the second filter 22 and the third filter 23 that are connected in sequence, both the filtering effect and the exhaust gas treatment cost can be taken into account.

[0048] In an alternative embodiment, if Figure 1 As shown, the exhaust gas treatment device further includes a water supply device 60; the water supply device 60 is connected to the water washing filter assembly 20, and the water supply device 60 is used to supply water to the water washing filter assembly 20. The water supply device 60 supplies water to the water washing filter assembly 20 through the water inlet of the water washing filter assembly 20, and a switch valve is provided between the water supply device 60 and the water inlet. Before the exhaust gas enters the exhaust gas treatment device, the switch valve is opened, and the water supply device 60 passes water into the water washing filter assembly 20. When there is enough water in the water washing filter assembly 20, the switch valve is closed to perform exhaust gas treatment.

[0049] In an optional embodiment, the exhaust gas emission treatment device further includes a liquid sump 70; the liquid sump 70 is connected to the bottom of the water-washing filter assembly 20, and the liquid sump 70 is used to receive wastewater discharged from the water-washing filter assembly 20. After the exhaust gas is treated by the exhaust gas emission treatment device, the wastewater dissolved with boron oxide in the water-washing filter assembly 20 enters the liquid sump 70 through the drain port of the water-washing filter assembly 20, and a switch valve is provided between the drain port and the liquid sump 70. During the exhaust gas filtering process, the switch valve is in a closed state. After the exhaust gas is treated by the exhaust gas emission treatment device, the switch valve is opened, and the wastewater in the water-washing filter assembly 20 enters the liquid sump 70.

[0050] In an alternative embodiment, if Figure 2 As shown, the first cooling mechanism 10 and the second cooling mechanism 30 are both condensation bottles, the first cooling mechanism 10 is a condensation bottle 11, and the second cooling mechanism 30 is a condensation bottle 31. Using a condensation bottle as a cooling mechanism not only has a good condensation effect on the exhaust gas and can precipitate more boron oxide powder, but also can prevent exhaust gas leakage and avoid environmental pollution.

[0051] In order to further improve the condensation effect of the first cooling mechanism 10 and / or the second cooling mechanism 30, in some embodiments, as Figure 2 As shown, a condensation material 12 is provided in the condensation bottle 11, and a condensation material 32 is provided in the condensation bottle 31. In some embodiments, a condensation member 13 is provided on the surface of the condensation bottle 11, and a condensation member 33 is provided on the surface of the condensation bottle 31. In other embodiments, as Figure 3As shown, a condensation material 12 is arranged in the condensation bottle 11, and a condensation material 32 is arranged in the condensation bottle 31; at the same time, a condensation member 13 is arranged on the surface of the condensation bottle 11, and a condensation member 33 is arranged on the surface of the condensation bottle 31. The condensation materials 12 and 32 include but are not limited to liquid nitrogen or liquid helium.

[0052] In the embodiment of the present application, the exhaust gas emission treatment device needs to be cleaned after being used multiple times. If a condensing material is used, the condensing material needs to be replaced regularly.

[0053] The present application also provides a boron diffusion device, such as Figure 1 As shown, it includes: a boron expansion furnace 80 and an exhaust gas emission treatment device of any one of the above embodiments; the exhaust gas emission port of the boron expansion furnace 80 is connected to the exhaust gas emission treatment device.

[0054] The other components of the boron diffusion equipment in the above embodiment may be adopted by various technical solutions known to ordinary technicians in this field now and in the future, and will not be described in detail here.

[0055] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprising" and / or "including" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0056] For the convenience of description, the orientation or position relationship indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, vertical, horizontal" and "top, bottom" is usually based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description. Unless otherwise stated, these directional words do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present application; the directional words "inside and outside" refer to the inside and outside relative to the outline of each component itself. For example, if the device in the drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Therefore, the exemplary term "above..." can include both "above..." and "below..." orientations. The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used here are interpreted accordingly.

[0057] Unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0058] Unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is lower in level than the second feature.

[0059] Unless otherwise specifically stated, the relative arrangement, numerical expressions and numerical values ​​of the parts and steps set forth in these embodiments do not limit the scope of the present application. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, method and equipment known to those of ordinary skill in the relevant field may not be discussed in detail, but in appropriate cases, the technology, method and equipment should be considered as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so that once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0060] It should also be noted that "one embodiment", "another embodiment", "embodiment", etc. mentioned in this specification refer to the specific features, structures or characteristics described in conjunction with the embodiment included in at least one embodiment generally described in this application. The same expression appearing in multiple places in the specification does not necessarily refer to the same embodiment. Further, when describing a specific feature, structure or characteristic in conjunction with any embodiment, it is claimed that the realization of such feature, structure or characteristic in conjunction with other embodiments also falls within the scope of this application.

[0061] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0062] It should also be noted that the above are only preferred embodiments of the present application, and the patent protection scope of the present application is not limited thereto. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly used in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. An exhaust gas treatment device, characterized in that: include: A first cooling mechanism, a water washing and filtering assembly, a second cooling mechanism, a vacuum pump, and a collector are connected in sequence; wherein: The first cooling mechanism is used to receive the tail gas of the boron expansion furnace and cool the tail gas; The water-washing filter assembly is used to filter the exhaust gas cooled by the first cooling mechanism; The second cooling mechanism is used to perform secondary cooling on the tail gas filtered by the water-washing filter assembly to obtain purified tail gas; The collector is used to obtain the purified exhaust gas from the second cooling mechanism through the vacuum pump.

2. The exhaust gas treatment device according to claim 1, characterized in that: The water-washing filter assembly is provided with an air inlet pipe and an air outlet pipe; Wherein, one end of the air inlet pipe extends out of the water-washing filter assembly, and the other end extends into the water below the water surface in the water-washing filter assembly; One end of the air outlet pipe extends into the water-washing filter assembly and is located above the water surface in the water-washing filter assembly, and the other end extends out of the water-washing filter assembly.

3. The exhaust gas treatment device according to claim 1, characterized in that: The water washing and filtering assembly comprises a first filter, a second filter and a third filter which are connected in sequence; Wherein, the first filter is communicated with the outlet of the first cooling mechanism through a pipeline, and the third filter is communicated with the inlet of the second cooling mechanism.

4. The exhaust gas treatment device according to any one of claims 1 to 3, characterized in that: It also includes a water supply device; The water supply device is connected to the water washing and filtering assembly, and is used to supply water to the water washing and filtering assembly.

5. The exhaust gas treatment device according to any one of claims 1 to 3, characterized in that: Also includes a sump tank; The liquid collection tank is communicated with the bottom of the water washing and filtering assembly, and the liquid collection tank is used to receive waste water discharged from the water washing and filtering assembly.

6. The exhaust gas treatment device according to any one of claims 1 to 3, characterized in that: The first cooling mechanism and the second cooling mechanism are both condensation bottles.

7. The exhaust gas treatment device according to claim 6, characterized in that: The condensation bottle contains condensation material.

8. The exhaust gas treatment device according to claim 7, characterized in that: The condensing material is liquid nitrogen or liquid helium.

9. The exhaust gas treatment device according to claim 6, characterized in that: The surface of the condensation bottle is provided with a condensation piece.

10. A boron diffusion device, characterized in that: include: A boron expansion furnace and an exhaust gas emission treatment device according to any one of claims 1 to 9; the exhaust gas emission port of the boron expansion furnace is connected to the exhaust gas emission treatment device.

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