Visual inspection device for mask plate
By designing a visual inspection device for mask plates including a moving clamp arm and a lifting support assembly, the problems of difficulty in observation and insufficient clamping torque during mask plate inspection are solved, and the operator's head-up observation and stable fixation of mask plates are achieved.
Patent Information
- Application Number
- CN202421738063.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-22
- Publication Date
- 2025-05-23
- Estimated Expiration
- 2034-07-22
AI Technical Summary
During the mask inspection, the operator needs to half-squat, bend or climb high to observe, resulting in poor field of view and high risk factors, especially difficult to effectively observe the bottom or bottom edge of the mask.
A mask plate visual inspection device is designed, including a slewing table and a mask plate fixing device mounted on the slewing table. The mask plate fixing device consists of two relatively arranged moving clamp arms and lifting support components. The moving clamp arms move actively according to the size of the mask plate. The lifting support components achieve stable fixation and high-level support of the mask plate through the servo cylinder and the support wheel.
Through this device, the operator can easily observe the mask plate, especially the bottom and bottom edge positions in a head-up state, which reduces the working strength, improves the inspection accuracy, and avoids the problem of insufficient clamping torque during long-term work of the mobile clamp arm.
Smart Images
Figure CN222896344U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of mask plate inspection auxiliary equipment, and more specifically to a mask plate visual inspection device. Background Art
[0002] A photomask, also known as a photomask or MASK, is a graphic transfer tool or template used in the microelectronics manufacturing process. It is used to produce the required microscopic graphics on a glass chrome plate through processes such as exposure, development, and etching. It is mainly used in microelectronics lithography.
[0003] The entire mask production process is roughly divided into chrome plate cleaning, photoresist coating, baking, film thickness measurement, photolithography, development, etching, film stripping cleaning, mirror cleaning, defect inspection, CD measurement, TP measurement, defect repair and other links. The entire mask production process is mostly carried out inside the automated dust-free equipment. The operator usually stands outside the equipment and observes through the glass doors and windows on the equipment. Even when inspecting the mask, the observation auxiliary equipment is installed inside the dust-free equipment, and then the mask installed by the auxiliary equipment is observed through the glass doors and windows on the equipment. Due to the internal layout and design of the automated dust-free equipment, and in order to adapt to the processing of more mask models, the installation height and position of the observation auxiliary equipment and the mask clamped thereon are not conducive to observation. When the operator observes, he often needs to half-squat, bend over or stand on an auxiliary stool, table and ladder to observe, with poor observation field of view and high risk factor. In particular, it is difficult to observe the bottom or bottom edge of the mask. Utility Model Content
[0004] The purpose of the utility model is to provide a mask visual inspection device to solve the problems of difficulty in observation during mask inspection in the prior art. At the same time, a mobile clamping arm for clamping the mask actively moves and stops according to the size of the mask, thereby avoiding excessive clamping torque of the mobile clamping arm on the mask to be inspected, resulting in insufficient torque provided during long-term clamping work, affecting the clamping effect.
[0005] The utility model technical solution is a mask visual inspection device, comprising a turntable and a mask fixing device installed on the turntable, wherein the mask fixing device comprises two relatively arranged movable clamping arms and a lifting support assembly arranged between the two movable clamping arms; the two movable clamping arms move toward each other according to the size of the mask to be inspected, and the distance between the two movable clamping arms is adapted to the size of the mask to be inspected;
[0006] The lifting support assembly includes a servo cylinder with an axis arranged in a vertical direction, a lifting plate fixedly connected to the top end of a cylinder push rod of the servo cylinder, and a plurality of support wheels installed on the lifting plate, wherein the axis of the support wheel is horizontal and perpendicular to the direction of a line connecting two movable clamping arms, and the outer circumferential surface of the support wheel is a supporting surface, which rises after the two movable clamping arms clamp the mask to be inspected and is supported by the bottom edge of the mask to be inspected.
[0007] Preferably, the mask fixing device comprises a mounting platform mounted on the turntable, the mounting platform is fixedly connected to the turntable, and the two movable clamping arms and the lifting support assembly are both mounted on the mounting platform.
[0008] Preferably, a plurality of guide rails are arranged on the mounting platform, and the guide rails are parallel to the moving direction of the movable clamping arms; the bottoms of the two movable clamping arms are respectively mounted on the guide rails, and the two clamping arms are respectively connected to a transmission screw, and the transmission screw is parallel to the guide rails and one end of which is connected to a movable servo motor.
[0009] Preferably, two guide rails are provided and are respectively located at the front and rear sides of the lifting support assembly, and the two movable clamping arms are respectively located at the left and right sides of the lifting support assembly and are symmetrically arranged about the midline of the lifting support assembly;
[0010] The two transmission screws are respectively arranged on both sides of the lifting support assembly, one end of the transmission screw is far away from the lifting support assembly, and the other end is close to the conveying lifting support assembly. The mobile servo motor is fixed on the mounting platform and connected to the end of the transmission screw close to the lifting support assembly.
[0011] Preferably, a plurality of clamping blocks are respectively provided on the sides of the two movable clamping arms facing the mask to be inspected, and the clamping blocks are evenly distributed along the vertical direction of the movable clamping arms. The clamping blocks include a fixed surface fixedly connected to the movable clamping arm and a first limiting surface and a second limiting surface arranged on the front and rear sides of the fixed surface, and visual windows are respectively provided on the first limiting surface and the second limiting surface.
[0012] Preferably, the servo cylinder is arranged at the bottom of the mounting platform and is fixedly connected to a mounting plate, the mounting plate is mounted on the mounting platform, the lifting plate is placed on the upper part of the mounting platform, the cylinder push rod of the servo cylinder passes upward through the mounting platform and is fixedly connected to the lifting plate, an L-shaped plate is fixedly connected to the upper surface of the lifting plate, the L-shaped plate includes a horizontal plate fixedly connected to the lifting plate and a vertical plate fixedly connected to the horizontal plate, and the support wheel is fixedly connected to the vertical plate.
[0013] Preferably, the lifting support assembly further comprises a proximity switch, and the proximity switch is installed between any two support wheels, and the height position of the proximity switch is adapted to the height of the support surface.
[0014] Preferably, the turntable includes a base, a rotary servo motor installed on the base, an active rotary gear fixedly connected to the rotary servo motor, and a driven rotary gear meshing with the active rotary gear, and the mask fixing device is fixedly connected to the driven rotary gear; the diameter of the driven rotary gear is larger than the diameter of the active rotary gear.
[0015] The beneficial effects of a mask visual inspection device according to the technical solution of the utility model are:
[0016] 1. The mask to be inspected is clamped by two relatively arranged movable clamping arms to achieve the stability and fixation of the mask to be inspected in the horizontal direction. The mask to be inspected is stabilized and fixed in the vertical direction by the lifting support assembly, and the lifting support assembly ensures that the mask to be inspected is at a certain high position, which is convenient for the mask inspector to observe the mask inside the equipment, especially to conduct a basic horizontal inspection of the lower edge of the mask, changing the problem in the prior art that the inspector needs to climb or bend over to inspect, reducing the work intensity of the inspector and improving the accuracy of the mask inspection.
[0017] 2. In this technical solution, the two relatively arranged mobile clamping arms actively move to a position adapted to the size of the mask to be checked according to the size of the mask to be checked, that is, the two relatively arranged mobile clamping arms actively move and ensure that the distance between them actively adapts to the size of the mask to be checked, which effectively avoids the problem of excessive clamping torque caused by the passive stop of the mobile clamping arms after contacting the mask to be checked. That is, in this technical solution, the two relatively arranged mobile clamping arms are positioned according to the size of the clamped mask to be checked each time, ensuring that the mobile clamping arms move in place, ensuring that the mobile clamping arms can still maintain a high-precision adaptation relationship with the mask size after working for a long time, and ensuring that the mask fixing device stably fixes and clamps the mask to be checked. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 This is a front view of a mask visual inspection device according to the technical solution of the utility model.
[0019] Figure 2 The utility model is a top view of a mask visual inspection device according to the technical solution of the utility model.
[0020] Figure 3 for Figure 2 Enlarged view of point A in the middle.
[0021] Figure 4 This is a left view of a mask visual inspection device according to the technical solution of the utility model.
[0022] Figure 5 It is a schematic diagram of the structure of the clamping block on the movable clamping arm in the technical solution of the utility model.
[0023] Figure 6 It is a schematic diagram of the structure of the lifting support assembly in the technical solution of the utility model.
[0024] Figure 7 for Figure 6 Right view of .
[0025] Figure 8 This is a schematic diagram of the installation of the lifting support assembly and the installation platform in the technical solution of the utility model. DETAILED DESCRIPTION
[0026] In order to facilitate those skilled in the art to understand the technical solution of the utility model, the technical solution of the utility model is further described in conjunction with specific embodiments and the accompanying drawings of the specification.
[0027] In order to solve the problem that the mask needs to be climbed or bent when inspecting in the prior art, the utility model technical solution is proposed, which is a mask visual inspection device. At the same time, the solution of the mask visual inspection device also solves the problem of insufficient clamping torque caused by the mobile clamping arm 2 clamping a large number of masks to be inspected for a long time and the distance error between the two relative mobile clamping arms 2. In order to facilitate the understanding of the mask visual inspection device of the utility model technical solution by those skilled in the art, an embodiment of the mask visual inspection device is proposed below.
[0028] In the present embodiment, a mask visual inspection device includes a turntable 1 and a mask fixing device installed on the turntable 1. The mask fixing device includes two relatively arranged movable clamping arms 2 and a lifting support assembly 3 arranged between the two movable clamping arms 2. The two movable clamping arms 2 move toward each other according to the size of the mask to be inspected, and the distance between the two movable clamping arms 2 is adapted to the size of the mask to be inspected. The lifting support assembly 3 includes a servo cylinder 31 with an axis arranged in a vertical direction, a lifting plate 32 fixed to the top of the cylinder push rod of the servo cylinder 31, and a plurality of support wheels 33 installed on the lifting plate 32. The axis of the support wheel 33 is horizontal and perpendicular to the direction of the line connecting the two movable clamping arms 2, and the outer circumferential surface of the support wheel 33 is a support surface 331. The support surface 331 rises after the two movable clamping arms 2 clamp the mask to be inspected, and is supported by the bottom edge of the mask to be inspected.
[0029] Based on the scheme of the above-mentioned embodiment, the mask to be inspected is clamped by two relatively arranged movable clamping arms to achieve the stability and fixation of the mask to be inspected in the horizontal direction, the mask to be inspected is stabilized and fixed in the vertical direction by the lifting support assembly, and the lifting support assembly ensures that the mask to be inspected is at a certain high position, which is convenient for the mask inspector to observe the mask inside the equipment, especially to perform a basic horizontal inspection of the lower edge of the mask, thereby changing the problem in the prior art that the inspector needs to climb or bend over to inspect, reducing the work intensity of the inspector and improving the accuracy of the mask inspection.
[0030] Based on the scheme of the above embodiment, the two relatively arranged mobile clamping arms actively move to a position adapted to the size of the mask to be checked according to the size of the mask to be checked, that is, the two relatively arranged mobile clamping arms actively move and ensure that the distance between them actively adapts to the size of the mask to be checked, which effectively avoids the problem of excessive clamping torque caused by the passive stop of the mobile clamping arms after contacting the mask to be checked. That is, in this technical solution, the two relatively arranged mobile clamping arms are positioned according to the size of the clamped mask to be checked each time, ensuring that the mobile clamping arms move in place, ensuring that the mobile clamping arms can still maintain a high-precision adaptation relationship with the mask size after working for a long time, and ensuring that the mask fixing device stably fixes and clamps the mask to be checked.
[0031] Based on the solution of the above embodiment, when the mask visual inspection device is working:
[0032] First, the distance between the two relative moving clamping arms 2 is set according to the size of the mask to be inspected, and then the mask visual inspection device is driven first to make the two moving clamping arms move back and forth, and the distance between the two moving clamping arms is at the maximum state.
[0033] Then, the transport robot transports the mask to be inspected to the mask fixing device on the mask visual inspection device and is located between two opposite movable clamping arms.
[0034] After that, the mask visual inspection device is started again, and the two relative moving clamping arms 2 move toward each other, and stop when the distance between them reaches the set value. At this time, the moving clamping arms 2 just clamp the mask to be inspected from the left and right sides of the mask to be inspected, but at this time, the two moving clamping arms only clamp and stabilize the mask in the horizontal direction. At this time, the moving clamping arms do not need to apply too much clamping torque to the mask to be inspected, and the mask to be inspected cannot be kept stable and fixed only under the clamping of the two moving clamping arms. Because the position of the moving clamping arms is set according to the size of the mask to be inspected, it is not passively stopped because the moving clamping arms clamp the mask to be inspected, and the mask to be inspected does not need the moving clamping arms to provide a large enough clamping torque to keep the mask as a whole clamped and stable. In this way, during the inspection process of the masks of the same model and batch, the two relative moving clamping arms will repeatedly move back and forth and towards each other, and after each movement towards each other, the distance between the two moving clamping arms is consistent, thus avoiding the problem that the clamping torque applied by the moving clamping arms to the mask is insufficient during long-term operation and loses the fixing function on the mask to be inspected. That is, in the present embodiment, the two relative moving clamping arms move to a size that is adapted to the size of the mask to be inspected according to the size of the mask to be inspected, which can ensure that the moving clamping arms can still maintain a high-precision adaptation relationship with the size of the mask after long-term operation, and ensure that the mask fixing device can stably fix and clamp the mask to be inspected.
[0035] Then, the lifting support assembly 3 rises, and the lifting support assembly 3 supports the mask to be inspected that has been clamped by the two movable clamping arms. That is, at this time, the mask is supported by the lifting support assembly 3 and clamped by the two movable clamping arms. At this time, the mask to be inspected can remain stable, and the handling robot withdraws. Enter the inspector to observe the inspection step.
[0036] After the inspection is completed, the handling robot first enters the mask fixing device to clamp and fix the mask that has been inspected, and then the lifting support assembly 3 and the two movable clamping arms withdraw from the mask to be inspected and reset themselves. The handling robot can then carry the mask that has been inspected out.
[0037] In this embodiment, the mask fixing device includes a mounting platform 4 mounted on the turntable 1, the mounting platform 4 is fixedly connected to the turntable 1, and the two movable clamping arms 2 and the lifting support assembly 3 are all mounted on the mounting platform 4. The mounting platform 4 provides sufficient mounting space for the lifting support assembly 3 and the movable clamping arms 2, and realizes the transfer with the turntable 1, so that the turntable can drive the movable clamping arms 2 and the lifting support assembly 3 to rotate as a whole through the mounting platform, so as to realize the flipping of the mask to be inspected.
[0038] In this embodiment, a plurality of guide rails 22 are arranged on the mounting platform 4, and the guide rails 22 are parallel to the moving direction of the movable clamping arms 2. The bottoms of the two movable clamping arms 2 are respectively sleeved on the guide rails 22, and a transmission screw 23 is respectively connected to the two clamping arms, and the transmission screw 23 is parallel to the guide rail 22 and one end of which is connected to a movable servo motor 24. The two movable clamping arms 2 share the guide rail, which is convenient for the arrangement and installation of the guide rail. The movable servo motor 24 is controlled by a programmable controller, and the movable servo motor 24 drives the transmission screw to rotate. The two transmission screws are respectively screwed with the two movable clamping arms, and the two transmission screws rotate in opposite directions, and the two movable clamping arms rotate relative to or in opposite directions. The size of the mask is set on the programmable controller, that is, the distance between the two movable clamping arms is set, so that the movable clamping arms stop after moving toward each other to the set distance.
[0039] In this embodiment, Figure 1 This is the front view of the mask visual inspection device. Figure 2 The top view of the mask visual inspection device is shown in Figure 2. Figure 1 and Figure 2 For example, Figure 2 In the figure, the up-down direction is the front-to-back direction of the lifting support assembly 3, and the left-to-right direction is the left-to-right direction of the lifting support assembly 3. In the present embodiment, two guide rails 22 are provided, and are respectively located on the front and rear sides of the lifting support assembly 3, and the two movable clamping arms 2 are respectively located on the left and right sides of the lifting support assembly 3 and are symmetrically arranged about the center line of the lifting support assembly 3. The two transmission screws 23 are respectively arranged on both sides of the lifting support assembly 3. One end of the transmission screw 23 is away from the lifting support assembly 3, and the other end is close to the conveying lifting support assembly 3. The mobile servo motor 24 is fixed on the mounting platform 4 and is connected to the end of the transmission screw 23 close to the lifting support assembly 3. The use of this technical solution makes the two transmission screws 23 and the two movable servo motors 24 compactly arranged, which can indirectly reduce the volume of the mask fixing device, especially reduce the length dimension of the mask fixing device in the direction parallel to the guide rails.
[0040] In this embodiment, a plurality of clamping blocks 21 are respectively provided on the sides of the two movable clamping arms 2 facing the mask to be checked. The clamping blocks 21 are evenly distributed on the movable clamping arms 2 along the vertical direction. The clamping block 21 includes a fixed surface 211 fixed to the movable clamping arm 2 and a first limiting surface 212 and a second limiting surface 213 provided on the front and rear sides of the fixed surface 211, and a visual window 214 is respectively provided on the first limiting surface 212 and the second limiting surface 213. The first limiting surface 212 and the second limiting surface 213 on the clamping block are used to limit the mask to prevent the mask from tilting and falling. The setting of the visual window 214 allows the clamped mask to be observed, and the distance between the two relative movable clamping arms and the size of the mask to be checked can be corrected and calibrated to ensure that the distance between the two movable clamping arms is adapted to the size of the mask, thereby avoiding input errors when the size of the mask is input into the controller.
[0041] In this embodiment, the servo cylinder 31 is arranged at the bottom of the mounting platform 4 and is fixedly connected to the mounting plate 35, and the mounting plate 35 is installed with the mounting platform 4. The lifting plate 32 is placed on the upper part of the mounting platform 4, and the cylinder push rod of the servo cylinder 31 passes through the mounting platform 4 upward and is fixedly connected to the lifting plate 32. An L-shaped plate 34 is fixedly connected to the upper surface of the lifting plate 32, and the L-shaped plate 34 includes a horizontal plate fixedly connected to the lifting plate 32 and a vertical plate 341 fixedly connected to the horizontal plate 342, and the support wheel 33 is fixedly connected to the vertical plate 341. The servo cylinder 31 is arranged at the lower part of the mounting platform 4, providing sufficient space above the mounting platform 4 to ensure that more heights and models of masks can be inspected. The setting of the horizontal plate 342 protects the mask. For example, when the mask tilts and slides due to improper setting of the distance between the two moving clamping arms, the mask slides down to the lifting support assembly 3. At this time, the setting of the wider horizontal plate 342 can catch the sliding mask and reduce the risk of falling.
[0042] In this embodiment, the lifting support assembly 3 further includes a proximity switch 36, which is installed between any two support wheels 33, and the height of the proximity switch 36 is adapted to the height of the support surface 331. The proximity switch 36 is a photoelectric switch, an infrared switch, or a pressure switch. After the proximity switch 36 contacts the mask supported by the lifting support assembly 3, it indicates that the lifting support assembly 3 has completed the support operation on the mask, and the handling robot can be evacuated at this time. The setting of the proximity switch 36 ensures that the mask clamping and docking are reliable.
[0043] In this embodiment, the turntable 1 includes a base 11, a rotary servo motor mounted on the base 11, an active rotary gear 13 fixedly connected to the rotary servo motor, and a driven rotary gear 12 meshing with the active rotary gear 13, and the mask fixing device is fixedly connected to the driven rotary gear 12; the diameter of the driven rotary gear 12 is larger than the diameter of the active rotary gear 13. The rotary servo motor drives the driven rotary gear 12 to rotate through the active rotary gear 13, that is, drives the mask fixing device to rotate, and after the mask fixing device rotates 180°, the mask to be inspected is turned over, and the mask to be inspected is automatically turned over for inspection, thereby improving the inspection efficiency.
[0044] The technical solution of the utility model is described above in combination with the embodiments and drawings. It is obvious that the specific implementation of the utility model is not limited to the above-mentioned method. As long as various non-substantial improvements are made by adopting the method concept and technical solution of the utility model, or the concept and technical solution of the utility model are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.
Claims
1. A mask visual inspection device, characterized in that: The invention comprises a rotating table and a mask fixing device installed on the rotating table, wherein the mask fixing device comprises two movable clamping arms arranged opposite to each other and a lifting support assembly arranged between the two movable clamping arms; the two movable clamping arms move toward each other according to the size of the mask to be checked, and the distance between the two movable clamping arms is adapted to the size of the mask to be checked; The lifting support assembly includes a servo cylinder with an axis arranged in a vertical direction, a lifting plate fixedly connected to the top end of a cylinder push rod of the servo cylinder, and a plurality of support wheels installed on the lifting plate, wherein the axis of the support wheel is horizontal and perpendicular to the direction of a line connecting two movable clamping arms, and the outer circumferential surface of the support wheel is a supporting surface, which rises after the two movable clamping arms clamp the mask to be inspected and is supported by the bottom edge of the mask to be inspected.
2. The mask visual inspection device according to claim 1, characterized in that: The mask fixing device comprises a mounting platform mounted on the turntable, the mounting platform is fixedly connected to the turntable, and the two movable clamping arms and the lifting support assembly are both mounted on the mounting platform.
3. The mask visual inspection device according to claim 2, characterized in that: A plurality of guide rails are arranged on the mounting platform, and the guide rails are parallel to the moving direction of the movable clamping arms; the bottoms of the two movable clamping arms are respectively mounted on the guide rails, and the two clamping arms are respectively connected to a transmission screw, which is parallel to the guide rails and has one end connected to a movable servo motor.
4. The mask visual inspection device according to claim 3, characterized in that: The guide rails are provided with two and are respectively located at the front and rear sides of the lifting support assembly, and the two movable clamping arms are respectively located at the left and right sides of the lifting support assembly and are symmetrically arranged about the midline of the lifting support assembly; The two transmission screws are respectively arranged on both sides of the lifting support assembly, one end of the transmission screw is far away from the lifting support assembly, and the other end is close to the conveying lifting support assembly. The mobile servo motor is fixed on the mounting platform and connected to the end of the transmission screw close to the lifting support assembly.
5. The mask visual inspection device according to claim 1, characterized in that: A plurality of clamping blocks are respectively arranged on the sides of the two movable clamping arms facing the mask to be inspected, and the clamping blocks are evenly distributed along the vertical direction of the movable clamping arms. The clamping blocks include a fixed surface fixedly connected to the movable clamping arm and a first limiting surface and a second limiting surface arranged on the front and rear sides of the fixed surface, and visual windows are respectively arranged on the first limiting surface and the second limiting surface.
6. The mask visual inspection device according to claim 2, characterized in that: The servo cylinder is arranged at the bottom of the mounting platform and is fixedly connected to a mounting plate, the mounting plate is mounted on the mounting platform, the lifting plate is placed on the upper part of the mounting platform, the cylinder push rod of the servo cylinder passes upward through the mounting platform and is fixedly connected to the lifting plate, an L-shaped plate is fixedly connected to the upper surface of the lifting plate, the L-shaped plate includes a horizontal plate fixedly connected to the lifting plate and a vertical plate fixedly connected to the horizontal plate, and the support wheel is fixedly connected to the vertical plate.
7. The mask visual inspection device according to claim 1, characterized in that: The lifting support assembly also includes a proximity switch, which is installed between any two support wheels, and the height position of the proximity switch is adapted to the height of the support surface.
8. The mask visual inspection device according to claim 1, characterized in that: The turntable includes a base, a rotary servo motor installed on the base, an active rotary gear fixedly connected to the rotary servo motor, and a driven rotary gear meshing with the active rotary gear, the mask fixing device is fixedly connected to the driven rotary gear; the diameter of the driven rotary gear is larger than the diameter of the active rotary gear.