Tool facilitating platform scale replacement of sheet metal cabinet body

Abstract

The utility model relates to the technical field of semiconductors, in particular to a tool facilitating platform scale replacement of a metal plate cabinet, which comprises a cabinet, a processing barrel, a platform scale and a lifting mechanism, the platform scale is arranged on the cabinet, and the processing barrel is arranged on the platform scale; the lifting mechanism comprises a mounting frame, a fixing plate, an electric push rod and a supporting connecting plate, the mounting frame is fixedly connected with the cabinet, the fixing plate is fixed to the mounting frame through screws, the electric push rod is fixedly connected with the fixing plate, the output end of the electric push rod is fixedly connected with the supporting connecting plate, a plurality of threaded holes are formed in the processing barrel, and a plurality of through holes are formed in the supporting connecting plate. Screws penetrate through the through holes and are screwed on the corresponding threaded holes to fix the supporting connecting plate on the processing barrel, so that the technical problems that in the prior art, the mode of replacing a platform scale is not timely and dangerous, residual TCS may exist in Vessel in the dismounting process, and a small amount of TCS also has great harm to human bodies are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a tooling for facilitating the replacement of a weighing scale in a sheet metal cabinet. Background Technique

[0002] The TCS-BUBBLER cabinet belongs to the front-end equipment in the semiconductor industry and is responsible for supplying the special gas TCS to the semiconductor industry. The Vessel contains trichlorosilane TCS liquid. At the same time, the TCS-BUBBLER equipment needs to constantly detect the quality of trichlorosilane TCS in the Vessel, which requires the use of two detection devices, namely a liquid level gauge and a weighing scale. However, it is inevitable that the weighing scale is inaccurate or has problems, which requires the replacement of the weighing scale. Trichlorosilane has characteristics such as pungent odor, volatile, flammable, and highly toxic. At the same time, the TCS-BUBBLER is generally placed in a clean room, so manual replacement of the weighing scale with some simple tools is carried out.

[0003] However, the prerequisite for replacing the weighing scale in the above method is that the TCS liquid in the Vessel must be used up, and then the entire equipment is purged with N2 before replacement can be carried out. To replace, the bellows connecting the panel and the Vessel needs to be removed. This method has the problems of untimely and dangerous. During the removal process, there may be residual TCS in the Vessel, and a small amount of TCS is also extremely harmful to the human body. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a tooling for facilitating the replacement of a weighing scale in a sheet metal cabinet, aiming to solve the technical problems that the existing method of replacing the weighing scale has the problems of untimely and dangerous, and there may be residual TCS in the Vessel during the removal process, and a small amount of TCS is also extremely harmful to the human body.

[0005] To achieve the above purpose, a tooling for facilitating the replacement of a weighing scale in a sheet metal cabinet adopted by the utility model includes a cabinet, a processing barrel, a weighing scale, and a lifting mechanism. The weighing scale is placed on the cabinet, and the processing barrel is placed on the weighing scale;

[0006] The lifting mechanism includes a mounting frame, a fixing plate, an electric push rod, and a support connecting plate. The mounting frame is fixedly connected to the cabinet. The fixing plate is fixed on the mounting frame by screws. The electric push rod is fixedly connected to the fixing plate. The output end of the electric push rod is fixedly connected to the support connecting plate. The processing barrel has a plurality of threaded holes, and the support connecting plate has a plurality of through holes. The support connecting plate is fixed on the processing barrel by passing screws through the through holes and tightening them in the corresponding threaded holes.

[0007] Among them, the tooling for facilitating the replacement of the weighing scale of the sheet metal cabinet body further includes a guiding component. The guiding component includes two brackets, two hoop fasteners, and multiple round rods. Both of the two brackets are fixedly connected to the cabinet. The multiple round rods are respectively fixedly connected to the corresponding brackets. Both of the two hoop fasteners are arranged on the processing barrel. The hoop fastener has a guiding groove, and the guiding groove is slidably connected to the corresponding round rod.

[0008] Among them, the mounting bracket includes a vertical plate, a horizontal plate, and multiple connecting blocks. The vertical plate is fixedly connected to the cabinet. The horizontal plate is fixedly connected to the vertical plate. One ends of the multiple connecting blocks are all fixedly connected to the vertical plate, and the other ends of the multiple connecting blocks are all fixedly connected to the horizontal plate.

[0009] Among them, the tooling for facilitating the replacement of the weighing scale of the sheet metal cabinet body further includes a pushing component, and the pushing component is arranged on the cabinet.

[0010] Among them, the pushing component includes an electric slide rail, a sliding sleeve, a right-angle rod, a connecting rod, and a pushing plate. The electric slide rail is installed on the cabinet. The sliding sleeve is adapted to the electric slide rail. The right-angle rod is fixedly connected to the sliding sleeve. One end of the connecting rod is fixedly connected to the right-angle rod, and the other end of the connecting rod is slidably connected to the cabinet. The pushing plate is fixedly connected to the connecting rod.

[0011] Among them, the pushing component further includes a protective part, and the protective part is arranged on the side of the pushing plate away from the connecting rod.

[0012] For a tooling for facilitating the replacement of the weighing scale of the sheet metal cabinet body of the present utility model, by setting the lifting mechanism, in specific use, the number of the lifting mechanisms can be two groups. The two groups of lifting mechanisms are symmetrically arranged. The other group of lifting mechanisms is installed at a designated position. The fixing plate is fixed on the mounting bracket by screws. The support connecting plate is fixed on the processing barrel by passing screws through the through holes and tightening them in the corresponding threaded holes. When replacing the weighing scale, start the electric push rod. The electric push rod drives one end of the support connecting plate, and the support connecting plate drives the processing barrel to move upward, so that it no longer contacts the weighing scale, thus facilitating the replacement of the weighing scale. In this way, the technical problems in the prior art that the method of replacing the weighing scale is not timely and dangerous, and there may be residual TCS in the Vessel during the removal process, and a small amount of TCS is also extremely harmful to the human body are solved. Description of the Drawings

[0013] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0014] Figure 1 It is a schematic structural diagram of the first embodiment of the present invention.

[0015] Figure 2 It is a partial structural diagram of the first embodiment of the present invention.

[0016] Figure 3 It is a partial structural diagram of the second embodiment of the present invention.

[0017] 101 - Cabinet, 102 - Processing barrel, 103 - Weighing scale, 104 - Fixed plate, 105 - Electric push rod, 106 - Support connecting plate, 107 - Bracket, 108 - Hoop, 109 - Round rod, 110 - Vertical plate, 111 - Horizontal plate, 112 - Connecting block, 113 - Threaded hole, 114 - Through hole, 201 - Electric slide rail, 202 - Sliding sleeve, 203 - Right-angle rod, 204 - Connecting rod, 205 - Pushing plate, 206 - Protective part. Detailed implementation manners

[0018] The following will describe in detail the embodiments of the present invention. The examples of the embodiments are shown in the drawings. The embodiments described below with reference to the drawings are exemplary and are intended to explain the present invention, and should not be construed as a limitation to the present invention.

[0019] The first embodiment of the present application is as follows:

[0020] Please refer to Figure 1 and Figure 2 where Figure 1 is a schematic structural diagram of the first embodiment of the present invention, Figure 2 is a partial structural diagram of the first embodiment of the present invention.

[0021] The present invention provides a tool for facilitating the replacement of the weighing scale 103 of a sheet metal cabinet, including a cabinet 101, a processing barrel 102, a weighing scale 103, and a lifting mechanism. The weighing scale 103 is placed on the cabinet 101, and the processing barrel 102 is placed on the weighing scale 103;

[0022] The lifting mechanism includes a mounting frame, a fixing plate 104, an electric push rod 105, and a support connecting plate 106. The mounting frame is fixedly connected to the cabinet 101. The fixing plate 104 is fixed to the mounting frame by screws. The electric push rod 105 is fixedly connected to the fixing plate 104. The output end of the electric push rod 105 is fixedly connected to the support connecting plate 106. The processing barrel 102 has a plurality of threaded holes 113, and the support connecting plate 106 has a plurality of through holes 114. Screws are passed through the through holes 114 and tightened into the corresponding threaded holes 113 to fix the support connecting plate 106 to the processing barrel 102.

[0023] For this specific embodiment, by providing the lifting mechanism, in actual use, the number of the lifting mechanisms can be two groups. The two groups of lifting mechanisms are symmetrically arranged. The other group of lifting mechanisms is installed at a specified position. The fixing plate 104 is fixed to the mounting frame by screws. Screws are passed through the through holes 114 and tightened into the corresponding threaded holes 113 to fix the support connecting plate 106 to the processing barrel 102. When replacing the weighing scale 103, the electric push rod 105 is started. The electric push rod 105 drives one end of the support connecting plate 106, and the support connecting plate 106 drives the processing barrel 102 to move upward, so that it no longer contacts the weighing scale 103, facilitating the replacement of the weighing scale 103. In this way, the technical problems in the prior art that the method of replacing the weighing scale 103 is not timely and dangerous, and there may be residual TCS in the Vessel during the removal process, and a small amount of TCS is also extremely harmful to the human body are solved.

[0024] Wherein, the tool for facilitating the replacement of the weighing scale 103 of the sheet metal cabinet further includes a guiding component. The guiding component includes two brackets 107, two hoop fasteners 108, and multiple round rods 109. Both of the two brackets 107 are fixedly connected to the cabinet 101. The multiple round rods 109 are respectively fixedly connected to the corresponding brackets 107. Both of the two hoop fasteners 108 are arranged on the processing barrel 102. The hoop fastener 108 has a guiding groove, and the guiding groove is slidably connected to the corresponding round rod 109.

[0025] For this specific embodiment, when the processing barrel 102 moves upward, it drives the guiding groove to slide on the outer wall of the corresponding round rod 109, thereby improving the stability when lifting the processing barrel 102.

[0026] Secondly, the mounting bracket includes a vertical plate 110, a horizontal plate 111 and multiple connecting blocks 112. The vertical plate 110 is fixedly connected to the cabinet 101, the horizontal plate 111 is fixedly connected to the vertical plate 110, one ends of the multiple connecting blocks 112 are fixedly connected to the vertical plate 110, and the other ends of the multiple connecting blocks 112 are fixedly connected to the horizontal plate 111.

[0027] For this specific embodiment, the vertical plate 110 is used to connect the horizontal plate 111 to the cabinet 101. The connecting blocks 112 improve the stability of the horizontal plate 111, and the horizontal plate 111 is used to mount the fixing plate 104 and the electric push rod 105.

[0028] When using a tool for facilitating the replacement of the weighing scale 103 of a sheet metal cabinet according to this embodiment, by providing the lifting mechanism, in specific use, the number of the lifting mechanisms can be two groups. The two groups of lifting mechanisms are symmetrically arranged, and the other group of lifting mechanisms is installed at a specified position. The fixing plate 104 is fixed to the mounting bracket by screws. The support connecting plate 106 is fixed to the processing barrel 102 by passing screws through the through holes 114 and tightening them in the corresponding threaded holes 113. When replacing the weighing scale 103, start the electric push rod 105. The electric push rod 105 drives one end of the support connecting plate 106, and the support connecting plate 106 drives the processing barrel 102 to move upward and no longer contact the weighing scale 103, so as to facilitate the replacement of the weighing scale 103. In this way, the technical problems in the prior art that the method of replacing the weighing scale 103 is not timely and dangerous, and there may be residual TCS in the vessel during the removal process, and a small amount of TCS is also extremely harmful to the human body are solved.

[0029] The second embodiment of this application is as follows:

[0030] Based on the first embodiment, please refer to Figure 3 , Figure 3 which is a partial structural schematic diagram of the second embodiment of the present utility model.

[0031] The present utility model provides a tool for facilitating the replacement of the weighing scale 103 of a sheet metal cabinet, which further includes a material pushing component. The material pushing component is arranged on the cabinet 101. The material pushing component includes an electric slide rail 201, a sliding sleeve 202, a right-angle rod 203, a connecting rod 204, a pushing plate 205 and a protective component 206. The sliding sleeve 202 is adapted to the electric slide rail 201. The right-angle rod 203 is fixedly connected to the sliding sleeve 202. One end of the connecting rod 204 is fixedly connected to the right-angle rod 203. The other end of the connecting rod 204 is slidably connected to the cabinet 101. The pushing plate 205 is fixedly connected to the connecting rod 204.

[0032] For this specific embodiment, after the processing barrel 102 is lifted, the electric slide rail 201 is started. The electric slide rail 201 drives the sliding sleeve 202 to move. The sliding sleeve 202 drives the right-angle rod 203 to move. The right-angle rod 203 drives the connecting rod 204 to move. The connecting rod 204 drives the push plate 205 to push out the weighing scale 103, eliminating the need for workers to take out the weighing scale 103 from the bottom of the processing barrel 102, thus improving safety.

[0033] Wherein, the pushing component further includes a protective member 206, and the protective member 206 is arranged on the side of the push plate 205 away from the connecting rod 204.

[0034] For this specific embodiment, the protective member 206 can prevent the push plate 205 from damaging the weighing scale 103.

[0035] When using a tool for facilitating the replacement of the weighing scale 103 of a sheet metal cabinet body according to this embodiment, during actual use, after the processing barrel 102 is lifted, the electric slide rail 201 is started. The electric slide rail 201 drives the sliding sleeve 202 to move. The sliding sleeve 202 drives the right-angle rod 203 to move. The right-angle rod 203 drives the connecting rod 204 to move. The connecting rod 204 drives the push plate 205 to push out the weighing scale 103, eliminating the need for workers to take out the weighing scale 103 from the bottom of the processing barrel 102, thus improving safety.

[0036] What is disclosed above is only a preferred embodiment of the present invention. Of course, it cannot be used to limit the scope of the rights of the present invention. Those of ordinary skill in the art can understand the entire or partial processes of implementing the above embodiments, and the equivalent changes made according to the claims of the present invention still fall within the scope covered by the present invention.

Claims

1. A tool for facilitating the replacement of scales in sheet metal cabinets, characterized in that: It comprises a cabinet, a processing barrel, a scale and a lifting mechanism, wherein the scale is placed on the cabinet and the processing barrel is placed on the scale; The lifting mechanism includes a mounting frame, a fixing plate, an electric push rod and a supporting connecting plate. The mounting frame is fixedly connected to the cabinet, the fixing plate is fixed to the mounting frame by screws, the electric push rod is fixedly connected to the fixing plate, and the output end of the electric push rod is fixedly connected to the supporting connecting plate. The processing barrel is provided with a plurality of threaded holes, and the supporting connecting plate is provided with a plurality of through holes. The supporting connecting plate is fixed to the processing barrel by passing screws through the through holes and tightening them on the corresponding threaded holes.

2. The tooling for facilitating replacement of scales of sheet metal cabinets as claimed in claim 1, characterized in that: The tooling that facilitates the replacement of the scale of the sheet metal cabinet also includes a guide assembly, which includes two brackets, two hoops and multiple round rods. The two brackets are fixedly connected to the cabinet, and the multiple round rods are respectively fixedly connected to the corresponding brackets. The two hoops are both arranged on the processing barrel, and the hoops have guide grooves, which are slidably connected to the corresponding round rods.

3. The tooling for facilitating replacement of scales of sheet metal cabinets as claimed in claim 2, characterized in that: The mounting frame includes a vertical plate, a horizontal plate and a plurality of connecting blocks, the vertical plate is fixedly connected to the cabinet, the horizontal plate is fixedly connected to the vertical plate, one end of the plurality of connecting blocks is fixedly connected to the vertical plate, and the other end of the plurality of connecting blocks is fixedly connected to the horizontal plate.

4. The tooling for facilitating replacement of scales of sheet metal cabinets as claimed in claim 3, characterized in that: The tooling for facilitating replacement of the scale of the sheet metal cabinet also includes a material pushing component, and the material pushing component is arranged on the cabinet.

5. The tooling for facilitating replacement of scales of sheet metal cabinets as claimed in claim 4, characterized in that: The pusher assembly includes an electric slide rail, a sliding sleeve, a right-angle rod, a connecting rod and a push plate. The electric slide rail is installed on the cabinet, the sliding sleeve is adapted to the electric slide rail, the right-angle rod is fixedly connected to the sliding sleeve, one end of the connecting rod is fixedly connected to the right-angle rod, the other end of the connecting rod is slidably connected to the cabinet, and the push plate is fixedly connected to the connecting rod.

6. The tooling for facilitating replacement of scales of sheet metal cabinets as claimed in claim 5, characterized in that: The pusher assembly also includes a protective member, which is arranged on a side of the push plate away from the connecting rod.

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