Coating furnace body and coating equipment

Abstract

The utility model provides a coating furnace body and coating equipment. The coating furnace body comprises a cavity and a heating piece. And the heating pieces are uniformly distributed in the cavity. The heating element comprises a positioning part, a plurality of heating parts and a heat conduction part. The positioning part is arranged on the inner surface of the side wall of the cavity. The heating parts are used for generating heat and arranged on the side, close to the side wall, of the positioning part, and gaps are formed between the heating parts and the positioning part. The heat conduction part is arranged in the gap between the heating part and the positioning part and is used for uniformly conducting heat generated by the heating part to the positioning part, so that the temperature in the reaction cavity is uniformly distributed.

Description

Technical Field

[0001] The present application relates to the technical field of battery cell processing, and in particular to a coating furnace and coating equipment. Background Art

[0002] In the production process of solar cells, coating equipment can be used to complete the coating (thin film deposition) process. At present, the coating equipment has a cavity, which contains components such as a quartz boat, a boat support, a paddle, and a heating element. Among them, the film deposition rate during the coating process is closely related to the temperature in the cavity. That is, the higher the temperature in the cavity, the faster the film deposition rate. When the temperature of the thermal field in the cavity is uneven, it is easy to cause large differences in the coating effects of sheet materials located at different positions in the cavity, thereby affecting the power generation efficiency of the sheet materials. At the same time, it will also cause deformation and damage to the position where the temperature of the coating equipment is higher. Utility Model Content

[0003] In view of the above, it is necessary to provide a coating furnace body that can improve coating uniformity and extend the service life of coating equipment.

[0004] A coating furnace body, the coating furnace body comprising:

[0005] Cavity;

[0006] The heating elements are evenly distributed in the cavity; the heating elements include:

[0007] A positioning portion, disposed on the inner surface of the side wall of the cavity;

[0008] A plurality of heat generating parts for generating heat; the plurality of heat generating parts are arranged on a side of the positioning part close to the side wall and a gap is formed between the positioning part; and

[0009] The heat conducting part is arranged in the gap between the heating part and the positioning part, and is used for evenly conducting the heat generated by the heating part to the positioning part.

[0010] In some embodiments, the positioning portion includes a supporting plate and multiple side plates; the supporting plate is used to support the heat-conducting portion; the side plates are fixedly arranged on the side walls of the cavity and are connected to the supporting plate; the extension direction of the multiple heating portions is the same as the extension direction of the cavity; the multiple heating portions are fixedly arranged at one end of the side plate away from the supporting plate.

[0011] In some embodiments, the heat conductive part has a first surface and a second surface arranged opposite to each other, the first surface is arranged toward the heat generating part, and the first surface is greater than or equal to the heat generating area of ​​the heat generating part; the second surface is located on the supporting plate, and the second surface is less than or equal to the top surface of the supporting plate.

[0012] In some embodiments, the carrier plate is also used to conduct heat from the heat conductive part to the reaction chamber in the cavity; at high temperatures, the thermal stability of the heat conductive part is better than that of the carrier plate; the material of the heat conductive part is graphite, and the material of the carrier plate is metal.

[0013] In some embodiments, the positioning portion further includes a plurality of support beams; the support beams are disposed on the supporting plate and are located between the supporting plate and the heating portion; the support beams are engaged with the corresponding heating portion and support the heating portion.

[0014] In some embodiments, a plurality of heating portions are disposed parallel to each other, and each of the heating portions extends along an extension direction of the cavity.

[0015] In some embodiments, the heating portion is linear or wavy.

[0016] In some embodiments, the plurality of heating portions are arranged in a grid shape and partially overlap with each other.

[0017] In some embodiments, the cavity has a quadrilateral cross-section.

[0018] A coating device includes a material bearing structure and a coating furnace body; the material bearing structure is arranged in the coating furnace body for bearing materials; the coating furnace body has a reaction chamber, and the materials on the material bearing structure are coated in the reaction chamber. The coating furnace body includes:

[0019] Cavity;

[0020] The heating elements are evenly distributed in the cavity; the heating elements include:

[0021] A positioning portion, disposed on the inner surface of the side wall of the cavity;

[0022] A plurality of heat generating parts for generating heat; the plurality of heat generating parts are arranged on a side of the positioning part close to the side wall and a gap is formed between the positioning part; and

[0023] The heat conducting part is arranged in the gap between the heating part and the positioning part, and is used for evenly conducting the heat generated by the heating part to the positioning part.

[0024] With the coating furnace body and coating equipment provided by the present application, the corresponding heating part is received by the positioning part, and the received heating part is fixedly arranged on the side wall, and at the same time, the heat generated by the heating part is evenly conducted to the positioning part by the heat conducting part, thereby making the temperature distribution in the cavity uniform. In addition, the heat conducting part can also strengthen the strength of the positioning part and increase the service life of the positioning part. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a three-dimensional schematic diagram of the coating furnace body provided in this application.

[0026] Figure 2 for Figure 1 Schematic diagram of the cross section of the coating furnace body along the II-II direction.

[0027] Figure 3 A three-dimensional schematic diagram of the heating element provided in this application.

[0028] Figure 4 for Figure 3 Enlarged schematic diagram of part IV.

[0029] Figure 5 This is a schematic plan view of the heating portion of the second embodiment provided in the present application.

[0030] Figure 6 It is a schematic plan view of the heating portion of the third embodiment provided in the present application.

[0031] Figure 7 A schematic diagram of the modules of the coating equipment provided in this application.

[0032] Main component symbols

[0033] 100, coating furnace body; 10, cavity; 20, heating element; 11, side wall; 102, first end; 103, second end; 21, heating part; 23, positioning part; 101, reaction chamber; 25, heat conduction part; 231, side plate; 232, supporting plate; 234, supporting beam; 251, first surface; 252, second surface; 201, containing space; 1, coating equipment; material supporting structure 200.

[0034] The following specific implementation methods will further illustrate the present application in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0035] In the description of the embodiments of the present application, when an element is considered to be "connected" to another element, it may be directly connected to another element or there may be a centrally arranged element at the same time. When an element is considered to be "set" to another element, it may be directly set on another element or there may be a centrally arranged element at the same time. In the present application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected, or it may be indirectly connected through an intermediate medium, or it may be the internal connection of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present application can be understood according to the specific circumstances. The directional descriptions in this embodiment, such as "upper", "lower", "top", "bottom", etc., are all referenced to the direction of the product in the actual use scenario.

[0036] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0037] At present, in the production process of solar cells, coating equipment can be used to complete the coating (thin film deposition) process. At present, the coating equipment has a cavity, which contains components such as a quartz boat, a boat support, a paddle, and a heating element. Among them, the film deposition plastic during the coating process is closely related to the temperature in the cavity. That is, the higher the temperature in the cavity, the faster the film deposition rate. When the temperature of the thermal field in the cavity is uneven, it is easy to cause large differences in the coating effects of sheet materials located at different positions in the cavity, thereby affecting the power generation efficiency of the sheet materials. At the same time, it will also cause deformation and damage to the position where the temperature of the coating equipment is higher.

[0038] To this end, the embodiments of the present application provide a coating furnace body and a coating device, which can achieve the technical effect of improving the uniformity of coating and extending the service life of the coating equipment.

[0039] Figure 1 Schematic diagram of a coating furnace 100 provided in the present application. The coating furnace 100 can be applied to a coating device 1 (such as Figure 7 ) is used to provide a coating thermal field so that a thin film can be deposited on the surface of a sheet material (not shown) in the coating furnace body 100. The sheet material may be, but not limited to, a silicon wafer, and the process for depositing the thin film may be, but not limited to, low pressure chemical vapor deposition (LPCVD). The sheet material is the raw material of a solar cell, including, but not limited to, a silicon wafer, a silicon carbide wafer, and the like.

[0040] The coating furnace body 100 includes a cavity 10 and at least two heating elements 20. In at least one embodiment of the present application, the coating furnace body 100 includes four heating elements 20. In other embodiments, the coating furnace body 100 includes two heating elements 20 or more heating elements 20.

[0041] The cavity 10 is used to accommodate the heating element 20. In at least one embodiment of the present application, the cavity 10 is a substantially hollow rectangular parallelepiped structure and extends along the first direction X. That is, the cross-section of the cavity 10 is a rectangle. By designing the cavity 10 as a rectangular parallelepiped, the amount of material contained in the cavity 10 can be increased, thereby increasing the production capacity of the coating furnace body 100. In other embodiments, the cavity 10 can be designed into other shapes according to needs, such as a circular tube shape.

[0042] Please also read Figure 2 , which is a schematic cross-sectional view of the coating furnace body 100 along the II-II direction. The cavity 10 includes a plurality of side walls 11. The plurality of side walls 11 are connected end to end. The number of heating elements 20 is less than or equal to the number of side walls 11, and the number of heating elements 20 is an even number. In the first direction X, the cavity 10 is further defined with a first end 102 and a second end 103 opposite to the first end 102. In at least one embodiment of the present application, the first end 102 can be used as an air inlet, and the second end 103 can be used as an air outlet.

[0043] The positioning portion 23 of each heating element 20 corresponds to a side wall 11. The heating element 20 is fixed on the inner surface of the side wall 11. The positioning portion 23 at one end of the heating element 20 extends out of the cavity 10 from the first end 102, so that one end of the heating element 20 is exposed relative to the cavity 10. The heating element 20 includes a plurality of heating portions 21, a positioning portion 23 and a heat conducting portion 25. In at least one embodiment of the present application, when the cross-section of the cavity 10 is rectangular, the length of the side wall 11 arranged along the second direction Y and the length of the side wall 11 arranged along the third direction Z are different. That is, the width and height of the cavity 10 are different. At this time, the two heating elements 20 arranged parallel to the third direction Z have the same number of heating portions 21, and the number of heating portions 21 in the heating element 20 arranged parallel to the second direction Y is different. For example, when the length of the side wall 11 arranged parallel to the third direction Z is less than the length of the side wall 11 arranged parallel to the second direction Y, the number of the heating parts 21 in the two heating elements 20 arranged parallel to the third direction Z is the same, and may be less than the number of the heating parts 21 in the two heating elements 20 arranged parallel to the second direction Y. In other words, since the length of the side wall 11 arranged parallel to the third direction Z is less than the length of the side wall 11 arranged parallel to the second direction Y, the uniform distribution of the temperature in the reaction chamber 101 can be further ensured by adjusting the number of the heating parts 21 in the heating elements 20. In other embodiments, when the cross section of the cavity 10 is square, the four heating elements 20 have the same number of heating parts 21.

[0044] The plurality of heating parts 21 extend along the first direction X and are evenly distributed. The heating parts 21 are used to generate heat when powered. In at least one embodiment of the present application, the heating parts 21 are heating resistor wires. In the first embodiment, as Figure 4 The multiple heating parts 21 shown are all cylindrical and arranged parallel to each other, and any two adjacent heating parts 21 are arranged at a predetermined distance. Figure 5 As shown in FIG. 1 , the heating portion 21 is wavy. Figure 6As shown, the heating portion 21 may also form a grid structure. In other embodiments, the heating portion 21 may also be bent into other shapes, which may not overlap each other or may partially overlap each other.

[0045] The positioning portion 23 is fixedly disposed on the inner surface of the side wall 11, and is used to position the plurality of heat generating portions 21 on one side of the positioning portion 23 close to the side wall 11. The positioning portion 23 is also used to conduct the heat generated by the heat generating portion 21 to the reaction chamber 101. In at least one embodiment of the present application, when the number of the positioning portions 23 is the same as the number of the side walls 11, the plurality of positioning portions 23 enclose a reaction chamber 101. That is, any two adjacent positioning portions 23 are in contact. In other embodiments, when the number of the positioning portions 23 is less than the number of the side walls 11, the plurality of positioning portions 23 cooperate with the side walls 11 on which the positioning portions 23 are not provided to enclose the reaction chamber 101.

[0046] In at least one embodiment of the present application, the coating furnace body 100 includes four positioning portions 23. The spacing between two positioning portions 23 symmetrically arranged along the second direction Y is equal to the length of two positioning portions 23 symmetrically arranged along the third direction Z; the spacing between two positioning portions 23 symmetrically arranged along the third direction Z is equal to the length of two positioning portions 23 symmetrically arranged along the second direction Y. The second direction Y is perpendicular to the first direction X and the third direction Z, and the third direction Z is perpendicular to the first direction X and the second direction Y. That is, the first direction X, the second direction Y and the third direction Z form a rectangular coordinate system. In at least one embodiment of the present application, the positioning portion 23 is made of metal material.

[0047] The positioning portion 23 includes a carrier plate 232 and a plurality of side plates 231. The carrier plate 232 is arranged parallel to the corresponding side wall 11. The carrier plate 232 is roughly in the shape of a rectangular parallelepiped plate. The length of the carrier plate 232 is less than the length of the corresponding side wall 11. In at least one embodiment of the present application, when the length of the carrier plate 232 is closer to the length of the corresponding side wall 11, the number of heating parts 21 that can be accommodated in the positioning portion 23 is more, and the size of the reaction chamber 101 is larger; on the contrary, when the length of the carrier plate 232 is less than the length of the corresponding side wall 11, the number of heating parts 21 that can be accommodated in the positioning portion 23 is less, and the size of the reaction chamber 101 is smaller. The carrier plate 232 also has a heat conduction function, which can conduct the heat generated by the corresponding heating part 21 to the reaction chamber 101.

[0048] The side plate 231 is formed by the edge of the carrier plate 232 extending vertically in the direction away from the carrier plate 232. Multiple side plates 231 cooperate with the corresponding carrier plate 232 to enclose the receiving space 201. The receiving space 201 is used to receive the corresponding heating part 21. The side plate 231 is used to fix the carrier plate 232 and the corresponding heating part 21 on the corresponding side wall 11. At the same time, the two side plates 231 arranged in parallel along the third direction Z are further used to fix the multiple heating parts 21 to one end of the side plate 231 away from the carrier plate 232. In at least one embodiment of the present application, a blind hole (not shown) is provided on the side plate 231 located at the first end 102, and a through hole is provided on the side plate 231 located at the second end 103. The end of the heating part 21 located at the first end 102 is accommodated in the corresponding side plate 231 and is not exposed relative to the cavity 10, and the end of the heating part 21 located at the second end 103 passes through the corresponding side plate 231 to be exposed relative to the cavity 10. That is, when looking into the cavity 10 from the first end 102, the heating part 21 is not visible, and when looking into the cavity 10 from the second end 103, the heating part 21 is visible and is partially located outside the cavity 10. In other embodiments, a plurality of through holes (not shown) are provided on the side panels 231 located at the first end 102 and the second end 103. Each through hole corresponds to a heating part 21. The end of the heating part 21 located at the first end 102 is accommodated in the corresponding side panel 231 and is not exposed relative to the cavity 10, and the end of the heating part 21 located at the second end 103 passes through the corresponding side panel 231 to be exposed relative to the cavity 10.

[0049] Please also read Figure 3 , which is a three-dimensional schematic diagram and a partially enlarged schematic diagram of the heating element 20. The positioning portion 23 also includes a plurality of support beams 234. The support beams 234 are arranged on the bearing plate 232 and are located between the bearing plate 232 and the heating portion 21. The support beams 234 are engaged with the corresponding heating portion 21 to assist in supporting the heating portion 21 and to enhance the strength of the positioning portion 23. The extension direction of the support beams 234 is perpendicular to the extension direction of the heating portion 21. In at least one embodiment of the present application, a plurality of support beams 234 are arranged on the bearing plate 232 at equal intervals and are located between the side plates 231 that are relatively arranged along the first direction X. A groove (not shown) may be provided on the support beam 234 to carry the corresponding heating portion 21. That is, the heating portion 21 is clamped on the corresponding support beam 234. In other embodiments, a through hole may also be provided on the support beam 234. That is, the heating portion 21 is arranged through the corresponding support beam 234.

[0050] The heat conducting part 25 is placed on the carrier plate 232 and is located between the heating part 21 and the carrier plate 232. The heat conducting part 25 is used to evenly conduct the heat generated by the heating part 21 to the carrier plate 232, thereby making the temperature distribution in the reaction chamber 101 uniform, reducing the probability of thermal deformation of the carrier plate 232, and thus improving the service life of the positioning part 23. At the same time, the heat conducting part 25 is also used to enhance the strength of the positioning part 23. Among them, at high temperatures, the thermal stability of the heat conducting part 25 is better than the thermal stability of the carrier plate 232, so that the heat generated by the heating part 21 can be quickly and evenly conducted to the carrier plate 232. In at least one embodiment of the present application, the heat conducting part 25 is made of graphite and the carrier plate 232 is made of metal. In at least one embodiment of the present application, the heat conducting part 25 may be in contact with the heating part 21.

[0051] The heat conducting portion 25 has a first surface 251 and a second surface 252 which are arranged opposite to each other. The first surface 251 is arranged toward the heat generating portion 21, and the first surface 251 is larger than or equal to the heat generating area of ​​the heat generating portion 21. The second surface 252 is located on the carrier plate 232, and the second surface 252 is smaller than or equal to the top surface of the carrier plate 232 (the top surface refers to the surface where the carrier plate 232 and the heat conducting portion 25 are in contact). With such an arrangement, the heat generated by the heat generating portion 21 can be better conducted to the positioning portion 23, thereby improving the utilization rate of the heat.

[0052] The above-mentioned coating furnace body 100 receives the corresponding heating part 21 through the positioning part 23, and fixes the received heating part 21 on the corresponding side wall 11. At the same time, the heat generated by the heating part 21 is evenly transferred to the positioning part 23 by the heat conducting part 25, thereby making the temperature distribution in the reaction chamber 101 uniform. In addition, the heat conducting part 25 can also strengthen the strength of the positioning part 23 and improve the service life of the positioning part 23. Furthermore, by designing the cavity 10 as a square structure, the amount of material contained in the cavity 10 can be increased, thereby improving the production capacity of the coating furnace body 100.

[0053] See also Figure 7 In a second aspect, the present application provides a coating device 1, which includes a coating furnace body 100 as described above. Figures 1 to 6As shown, at least two heating elements 20 are arranged in the coating furnace body 100. The cavity 10 includes a plurality of side walls 11. The heating element 20 is fixed on the inner surface of the side wall 11. The heating element 20 includes a plurality of heating parts 21, a positioning part 23 and a heat conducting part 25. The positioning part 23 is fixedly arranged on the inner surface of the side wall 11, and is used to position the plurality of heating parts 21 on the side of the positioning part 23 close to the side wall 11. One end of the heating part 21 extends out of the cavity 10 from the first end 102 through the corresponding positioning part 23, so that one end of the heating part 21 is exposed relative to the cavity 10. The positioning part 23 includes a bearing plate 232 and a plurality of side plates 231. The bearing plate 232 also has a heat conducting function, and can conduct the heat generated by the corresponding heating part 21 to the reaction chamber 101. The heat conducting part 25 is placed on the bearing plate 232 and is located between the heating part 21 and the bearing plate 232. The heat conducting portion 25 is used to evenly conduct the heat generated by the heating element 20 to the carrier plate 232 , thereby making the temperature distribution in the reaction chamber 101 uniform, reducing the probability of thermal deformation of the carrier plate 232 , and thus increasing the service life of the positioning portion 23 .

[0054] The coating device 1 further includes a material carrying structure 200. A plurality of sheet materials are carried on the material carrying structure 200. In at least one embodiment of the present application, the material carrying structure 200 may be a graphite boat or a quartz boat, and the sheet materials may be, but are not limited to, silicon wafers, silicon carbide wafers, and the like.

[0055] The coating furnace body 100 of the coating device 1 accommodates the corresponding heating part 21 through the positioning part 23, and the accommodated heating part 21 is fixedly arranged on the corresponding side wall 11. At the same time, the heat generated by the heating part 21 is evenly conducted to the positioning part 23 by the heat conducting part 25, thereby making the temperature distribution in the reaction chamber 101 uniform. In addition, the heat conducting part 25 can also strengthen the strength of the positioning part 23 and improve the service life of the positioning part 23. Furthermore, by designing the cavity 10 as a square structure, the amount of material contained in the cavity 10 can be increased, thereby improving the production capacity of the coating furnace body 100.

[0056] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present application and are not intended to limit it. Although the present application has been described in detail with reference to the preferred embodiments, a person of ordinary skill in the art should understand that the technical solution of the present application may be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the present application.

Claims

1. A coating furnace body, characterized in that: The coating furnace body comprises: Cavity; The heating elements are evenly distributed in the cavity; each of the heating elements comprises: A positioning portion, disposed on the inner surface of the side wall of the cavity; a plurality of heat generating parts for generating heat, wherein the plurality of heat generating parts are arranged on a side of the positioning part close to the side wall and a gap is formed between the plurality of heat generating parts and the positioning part; and A heat conducting portion is disposed in the gap between the heat generating portion and the positioning portion, and is used for uniformly conducting the heat generated by the heat generating portion to the positioning portion.

2. The coating furnace body according to claim 1, characterized in that: The positioning part includes a supporting plate and a plurality of side plates; the supporting plate is used to support the heat-conducting part; the side plates are fixedly arranged on the side walls of the cavity and connected to the supporting plate; the extension direction of the plurality of heating parts is the same as the extension direction of the cavity; the plurality of heating parts are fixedly arranged at one end of the side plate away from the supporting plate.

3. The coating furnace body according to claim 2, characterized in that: The heat conducting part has a first surface and a second surface which are arranged opposite to each other, wherein the first surface is arranged toward the heat generating part and is larger than or equal to the heat generating area of ​​the heat generating part; and the second surface is located on the supporting plate and is smaller than or equal to the top surface of the supporting plate.

4. The coating furnace body according to claim 2, characterized in that: The carrier plate is also used to conduct the heat on the heat-conducting part to the reaction chamber in the cavity; at high temperatures, the thermal stability of the heat-conducting part is better than that of the carrier plate; the material of the heat-conducting part is graphite, and the material of the carrier plate is metal.

5. The coating furnace body according to claim 2, characterized in that: The positioning portion further includes a plurality of support beams; the support beams are disposed on the bearing plate and located between the bearing plate and the heating portion; the support beams are engaged with the corresponding heating portion and support the heating portion.

6. The coating furnace body according to claim 1, characterized in that: The plurality of heating parts are arranged parallel to each other, and each heating part extends along the extension direction of the cavity.

7. The coating furnace body according to claim 6, characterized in that: The heating portion is in a straight line or a wave shape.

8. The coating furnace body according to claim 1, characterized in that: The plurality of heating parts are arranged in a grid shape and partially overlap each other.

9. The coating furnace body according to claim 1, characterized in that: The cross section of the cavity is quadrilateral, and the cavity includes four heating elements.

10. A coating device, characterized in that: It comprises a material bearing structure and a coating furnace body as described in any one of claims 1 to 9, wherein the material bearing structure is arranged in the coating furnace body for bearing materials; the coating furnace body has a reaction chamber, and the material on the material bearing structure is coated in the reaction chamber.

Images