Control system of vacuum sintering furnace and vacuum sintering furnace

Abstract

The utility model relates to the technical field of sintering furnaces, and provides a control system of a vacuum sintering furnace, which is characterized in that a second output port of an upper computer is electrically connected with a coil of a second relay through a normally closed contact of a fourth relay; a third output port of the upper computer is electrically connected with a coil of a third relay through a normally closed contact of a fourth relay; a fourth output port of the upper computer is electrically connected in series with a normally closed contact of the third relay, a normally closed contact of the second relay and a coil of the fourth relay; the power supply, a normally open contact of the first relay, the first electromagnetic valve and the common terminal are electrically connected in series in sequence; the power supply, a normally open contact of the second relay, the second electromagnetic valve and the common terminal are electrically connected in series in sequence; the power supply, a normally open contact of the third relay, the third electromagnetic valve and the common terminal are electrically connected in series in sequence; and the power supply, a normally open contact of the fourth relay, the fourth electromagnetic valve and the common terminal are electrically connected in series in sequence. And the air outlet and the air inlet of the vacuum furnace cavity are interlocked to ensure safety.

Description

Technical Field

[0001] The utility model relates to the technical field of sintering furnaces, in particular to a control system and a vacuum sintering furnace for a vacuum sintering furnace. Background Art

[0002] When semiconductor chips are packaged, it needs to be carried out in a vacuum environment, which can generally be realized in the form of a vacuum furnace. Nitrogen and formic acid or a nitrogen-formic acid mixed gas need to be filled into the vacuum furnace. When filling the nitrogen-formic acid mixed gas, nitrogen is filled into the formic acid tank, and the air outlet of the formic acid tank is then connected to the vacuum furnace. There is a safety risk of excessive pressure when filling nitrogen into the formic acid tank, and there are risks of waste of formic acid and nitrogen and insufficient concentration of formic acid and nitrogen in the vacuum furnace cavity. It is necessary to interlock the air outlet and air inlet of the vacuum furnace cavity to ensure safety. Summary of the Invention

[0003] The utility model provides a control system and a vacuum sintering furnace for a vacuum sintering furnace, aiming to solve the problem of interlocking the air outlet and air inlet of the vacuum furnace cavity to ensure safety in the prior art.

[0004] A control system for a vacuum sintering furnace includes a host computer, a second relay, a third relay, a fourth relay, a second solenoid valve, a third solenoid valve, a fourth solenoid valve, a power supply and a common terminal; the second output port of the host computer is electrically connected to the coil of the second relay through the normally closed contact of the fourth relay; the third output port of the host computer is electrically connected to the coil of the third relay through the normally closed contact of the fourth relay; the fourth output port of the host computer is electrically connected in series with the normally closed contact of the third relay, the normally closed contact of the second relay and the coil of the fourth relay; the power supply, the normally open contact of the first relay, the first solenoid valve and the common terminal are sequentially connected in series; the power supply, the normally open contact of the second relay, the second solenoid valve and the common terminal are sequentially connected in series; the power supply, the normally open contact of the third relay, the third solenoid valve and the common terminal are sequentially connected in series; the power supply, the normally open contact of the fourth relay, the fourth solenoid valve and the common terminal are sequentially connected in series.

[0005] According to the control system of the vacuum sintering furnace of the utility model, it further includes a first relay, and the first output port of the host computer, the normally open contact of the second relay and the coil of the first relay are electrically connected in series.

[0006] According to the control system of the vacuum sintering furnace of the utility model, it further includes a first solenoid valve, and the power supply, the normally open contact of the first relay, the first solenoid valve and the common terminal are sequentially connected in series.

[0007] According to the control system of the vacuum sintering furnace of the utility model, the power supply is 24V and the common terminal is 0V.

[0008] A vacuum sintering furnace, comprising a control system of the vacuum sintering furnace, a vacuum sintering furnace cavity, a first gas tank and a formic acid tank; one end of a first electromagnetic valve is connected to the first gas tank, and the other end of the first electromagnetic valve is connected to the inlet end of the formic acid tank. One end of a second electromagnetic valve is connected to the outlet end of the formic acid tank, and the other end of the second electromagnetic valve is connected to the first inlet end of the vacuum sintering furnace cavity. One end of a third electromagnetic valve is connected to the first gas tank, and the other end of the third electromagnetic valve is connected to the second inlet end of the vacuum sintering furnace. A fourth electromagnetic valve is connected to the outlet end of the vacuum sintering furnace cavity.

[0009] According to the vacuum sintering furnace of the present utility model, the first gas tank is a nitrogen tank.

[0010] According to the vacuum sintering furnace of the present utility model, a pressure relief valve is included, and the vacuum sintering furnace cavity is provided with a pressure relief valve.

[0011] The present utility model realizes that the inlet of the formic acid tank opens only when the outlet of the formic acid tank opens, ensuring that the formic acid tank is free from safety risks caused by excessive pressure. An interlock is achieved between the outlet and the inlet of the vacuum sintering furnace. On the one hand, nitrogen and formic acid are saved, and on the other hand, the concentrations of nitrogen and formic acid in the cavity are ensured, improving the product production quality. Description of the Drawings

[0012] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0013] 1. Figure 1 It is a schematic structural diagram of the vacuum sintering furnace;

[0014] 2. Figure 2 It is a schematic structural diagram of the control system of the vacuum sintering furnace Figure 1 ;

[0015] 3. Figure 3 It is a schematic structural diagram of the control system of the vacuum sintering furnace Figure 2 ;

[0016] 4. Figure 4 It is a schematic structural diagram of the control system of the vacuum sintering furnace Figure 3 ;

[0017] Reference numerals: 1. First electromagnetic valve; 2. Second electromagnetic valve; 3. Third electromagnetic valve; 4. Fourth electromagnetic valve; 5. Formic acid tank. Detailed Embodiments

[0018] The following further describes the embodiments of the present utility model in detail in conjunction with the accompanying drawings and embodiments. The following embodiments are used to illustrate the present utility model, but cannot be used to limit the scope of the present utility model.

[0019] In the description of the embodiments of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0020] In the description of the embodiments of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.

[0021] In the embodiments of the present utility model, unless otherwise clearly specified and defined, the first feature being "above" or "below" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "above", and "on" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "below", "below", and "under" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0022] In the description of this specification, the descriptions referring to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present utility model. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or at least one embodiment or example. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0023] The following combines Figures 1-4 Describe a control system of a vacuum sintering furnace according to an embodiment of the present utility model, including a host computer, a second relay K02, a third relay K03, a fourth relay K04, a second solenoid valve 2, a third solenoid valve 3, a fourth solenoid valve 4, a power supply, and a common terminal; the second output port of the host computer is electrically connected to the coil of the second relay K02 through the normally closed contact of the fourth relay K04; the third output port of the host computer is electrically connected to the coil of the third relay K03 through the normally closed contact of the fourth relay K04; the fourth output port of the host computer is electrically connected in series with the normally closed contact of the third relay K03, the normally closed contact of the second relay K02, and the coil of the fourth relay K04; the power supply, the normally open contact of the first relay K01, the first solenoid valve 1, and the common terminal are connected in series in sequence; the power supply, the normally open contact of the second relay K02, the second solenoid valve 2, and the common terminal are connected in series in sequence; the power supply, the normally open contact of the third relay K03, the third solenoid valve 3, and the common terminal are connected in series in sequence; the power supply, the normally open contact of the fourth relay K04, the fourth solenoid valve 4, and the common terminal are connected in series in sequence. In some embodiments, the host computer may not be required.

[0024] The second output port, the third output port, and the fourth output port of the host computer are high-level outputs, and the ports output a 24V control signal.

[0025] Relays K01~K04 are safety intermediate relays with a forced guiding function. The host computer controls the intermediate relay coil. The suction and disconnection of the intermediate relay coil determine the state of the relay contacts. The state of the relay contacts determines whether the solenoid valve is suctioned and energized. When the solenoid valve is suctioned and energized, the motive gas is connected, and the corresponding pneumatic valve of the gas path can be driven.

[0026] When the fourth output port of the host computer outputs a high level and the second solenoid valve 2 and the third solenoid valve 3 are closed, the coil of the fourth relay K04 is energized, the normally open contact of the fourth relay K04 is closed, and the fourth solenoid valve 4 is opened to exhaust the vacuum sintering furnace cavity. When the second output port of the host computer outputs a high level and the fourth solenoid valve 4 is closed, the coil of the second relay K02 is energized, the normally open contact of the second relay K02 is closed, and the second solenoid valve 2 is opened to allow the mixed gas of formic acid and nitrogen in the formic acid tank 5 to enter the vacuum sintering furnace cavity. When the third output port of the host computer outputs a high level and the fourth solenoid valve 4 is closed, the coil of the third relay K03 is energized, the normally open contact of the third relay K03 is closed, and the third solenoid valve 3 is opened to allow nitrogen from the nitrogen tank to enter the vacuum sintering furnace cavity. That is to say, when filling with nitrogen or a mixed gas of formic acid and nitrogen, the gas outlet of the vacuum sintering furnace cavity should be closed. When discharging the gas in the vacuum sintering furnace cavity, the valves for filling with nitrogen and the mixed gas of formic acid and nitrogen should both be closed to achieve an interlock relationship between discharging gas and entering gas.

[0027] In some embodiments, it further includes a first relay K01 and a first solenoid valve 1. The first output port of the host computer, the normally open contact of the second relay K02, and the coil of the first relay K01 are electrically connected in series. The second solenoid valve 2 is controlled by the fourth relay K04. When the fourth solenoid valve 4 is closed, that is, the normally closed contact of the fourth relay K04 is closed, and when the second output port of the host computer outputs a high potential of 24V, the coil of the second relay K02 is turned on, the normally open contact of the second relay K02 is closed, the coil of the first relay K01 is energized, the normally open contact of the first relay K01 is closed, and the first solenoid valve 1 is opened, realizing that after the outlet of the formic acid tank 5 is opened, the inlet of the formic acid tank 5 is also opened, preventing excessive pressure of nitrogen filling into the formic acid tank 5. The first output port of the host computer outputs a high level.

[0028] In some embodiments, the coil of the first relay K01 is connected in parallel with a series of a resistor and a capacitor, the coil of the second relay K02 is connected in parallel with a series of a resistor and a capacitor, the coil of the third relay K03 is connected in parallel with a series of a resistor and a capacitor, and the coil of the fourth relay K04 is connected in parallel with a series of a resistor and a capacitor. It realizes the functions of removing interference and filtering for the coils of the first solenoid valve 1, the second solenoid valve 2, the third solenoid valve 3, and the fourth solenoid valve 4.

[0029] In some embodiments, the power supply, the normally open contact of the first relay K01, the first solenoid valve 1, and the common terminal are electrically connected in series in sequence.

[0030] In some embodiments, the power supply is 24V and the common terminal is 0V.

[0031] A vacuum sintering furnace, comprising a control system of the vacuum sintering furnace, a vacuum sintering furnace cavity, a first gas tank and a formic acid tank 5; one end of a first solenoid valve 1 is connected to the first gas tank, and the other end of the first solenoid valve 1 is connected to the inlet end of the formic acid tank 5; one end of a second solenoid valve 2 is connected to the outlet end of the formic acid tank 5, and the other end of the second solenoid valve 2 is connected to the first inlet end of the vacuum sintering furnace cavity; one end of a third solenoid valve 3 is connected to the first gas tank, and the other end of the third solenoid valve 3 is connected to the second inlet end of the vacuum sintering furnace; a fourth solenoid valve 4 is connected to the outlet end of the vacuum sintering furnace cavity. The vacuum sintering furnace is a single-cavity vacuum sintering furnace or a multi-cavity vacuum sintering furnace.

[0032] In some embodiments, the first gas tank is a nitrogen tank.

[0033] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the present invention in each embodiment.

Claims

1. A control system for a vacuum sintering furnace, characterized in that: It includes a host computer, a second relay, a third relay, a fourth relay, a second solenoid valve, a third solenoid valve, a fourth solenoid valve, a power supply and a common wiring terminal; the second output port of the host computer is electrically connected to the coil of the second relay through the normally closed contact of the fourth relay; the third output port of the host computer is electrically connected to the coil of the third relay through the normally closed contact of the fourth relay; the fourth output port of the host computer is electrically connected in series with the normally closed contact of the third relay, the normally closed contact of the second relay and the coil of the fourth relay; the power supply, the normally open contact of the first relay, the first solenoid valve and the common wiring terminal are electrically connected in series in sequence; the power supply, the normally open contact of the second relay, the second solenoid valve and the common wiring terminal are electrically connected in series in sequence; the power supply, the normally open contact of the third relay, the third solenoid valve and the common wiring terminal are electrically connected in series in sequence; the power supply, the normally open contact of the fourth relay, the fourth solenoid valve and the common wiring terminal are electrically connected in series in sequence.

2. The control system of the vacuum sintering furnace according to claim 1, characterized in that: It also includes a first relay, and the first output port of the host computer, the normally open contact of the second relay and the coil of the first relay are electrically connected in series.

3. The control system of the vacuum sintering furnace according to claim 2, characterized in that: It also includes a first solenoid valve, a power supply, a normally open contact of a first relay, the first solenoid valve and a common terminal which are electrically connected in series in sequence.

4. The control system of the vacuum sintering furnace according to claim 1, characterized in that: The power supply is 24V, and the common terminal is 0V.

5. A vacuum sintering furnace, characterized in that: It includes a control system of a vacuum sintering furnace, a vacuum sintering furnace cavity, a first gas tank and a formic acid tank; one end of a first solenoid valve is connected to the first gas tank, the other end of the first solenoid valve is connected to the inlet end of the formic acid tank, one end of a second solenoid valve is connected to the outlet end of the formic acid tank, the other end of the second solenoid valve is connected to the first inlet end of the vacuum sintering furnace cavity, one end of a third solenoid valve is connected to the first gas tank, the other end of the third solenoid valve is connected to the second inlet end of the vacuum sintering furnace, and a fourth solenoid valve is connected to the outlet end of the vacuum sintering furnace cavity.

6. The vacuum sintering furnace according to claim 5, characterized in that: The first gas tank is a nitrogen tank.

7. The vacuum sintering furnace according to claim 5, characterized in that: A pressure relief valve is included, and the vacuum sintering furnace cavity is provided with a pressure relief valve.

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