CUP (central processing unit) structure for collecting waste liquid after development

Abstract

The utility model belongs to the technical field of semiconductor developing equipment, and particularly relates to a post-developing waste liquid collecting CUP structure which comprises a CUP main body and an annular outer check ring, an annular inner blocking edge is arranged in the middle of the inner side face of the CUP main body in a protruding mode towards the inner side, a wafer penetrating opening A is formed in the inner side of the annular inner blocking edge, the inner side face of the annular inner blocking edge serves as a first-layer liquid blocking face, and the inner side face of the annular inner blocking edge serves as a second-layer liquid blocking face. The annular outer check ring is installed on the CUP body and located above the annular inner blocking edge, a wafer penetrating opening B is formed in the inner side of the annular outer check ring, and the inner side face of the annular outer check ring serves as a second-layer liquid blocking face. According to the waste liquid collection CUP structure, through the structural design of forming two layers of liquid blocking surfaces, splashing waste liquid can be fully blocked, the height of the whole structure can be relatively lower than that of an existing waste liquid collection CUP structure with a single layer of liquid blocking surface, the waste liquid is effectively prevented from flying out of the waste liquid collection CUP structure to be splashed into a developing cavity, and the developing efficiency is improved. And the developing device is simple in structure and reliable to use.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor developing equipment, and particularly relates to a waste liquid collection CUP structure after development. Background Art

[0002] In the current semiconductor developing process, the waste liquid after development is thrown off from the wafer very fast. Since the current waste liquid collection CUP generally only has a single-layer liquid retaining surface, the waste liquid collection CUP itself needs to be very high to ensure that the waste liquid does not fly out of the CUP and splash into the developing cavity. If the height of the developing cavity itself is limited and the existing waste liquid collection CUP structure with a single-layer liquid retaining surface of lower height is adopted, it is difficult to ensure the cleanliness and humidity of the developing cavity. Content of the Utility Model

[0003] Aiming at the above problems, the purpose of the utility model is to provide a waste liquid collection CUP structure after development.

[0004] The purpose of the utility model is realized by the following technical solutions:

[0005] A waste liquid collection CUP structure after development includes a CUP main body and an annular outer retaining ring. The CUP main body is annular. The middle part of the inner side surface of the CUP main body protrudes inward to form an annular inner retaining edge. A wafer passing opening A is formed inside the annular inner retaining edge. The inner side surface of the annular inner retaining edge serves as the first-layer liquid retaining surface. The annular outer retaining ring is installed on the CUP main body. The annular outer retaining ring is located above the annular inner retaining edge. A wafer passing opening B is formed inside the annular outer retaining ring. The inner side surface of the annular outer retaining ring serves as the second-layer liquid retaining surface.

[0006] An outer connecting edge A protrudes from the outer periphery of the CUP main body, and the outer connecting edge A is used for connecting with an external CUP lifting driving structure.

[0007] An outer connecting edge B protrudes from the outer periphery of the annular outer retaining ring. The outer connecting edge B is used for passing screws. The annular outer retaining ring is fixed to the CUP main body through the screws passed through the outer connecting edge B.

[0008] The lowermost end of the inner side surface of the annular outer retaining ring is connected to the inner side surface of the CUP main body.

[0009] A plurality of liquid drainage ports are formed at the joint of the outermost part of the annular inner retaining edge and the inner side surface of the CUP main body. Each liquid drainage port has an upper opening and a lower opening. The upper openings of each liquid drainage port are communicated with the space above the annular inner retaining edge, and the lower openings of each liquid drainage port are communicated with the space below the annular inner retaining edge.

[0010] On one side of the lower opening of each liquid drainage port, there is an inclined surface that gradually slopes downward from the inside to the outside.

[0011] On the lower part of the inner side surface of the CUP main body, there is a circular guide convex platform protruding inward, and the circular guide convex platform is located below the circular inner retaining edge.

[0012] The axial center line of the wafer through hole A is collinear with the axial center line of the wafer through hole B.

[0013] The opening size of the wafer through hole A is less than or equal to the opening size of the wafer through hole B.

[0014] On the wafer through hole B of the circular outer retaining ring, there is a nozzle groove recessed, and the nozzle groove is used to leave enough space for the nozzle when the nozzle temporarily moves to this place.

[0015] The advantages and positive effects of the present utility model are as follows:

[0016] The waste liquid collection CUP structure of the present utility model can fully block the splashing waste liquid through the structural design of forming a two-layer liquid retaining surface. The height of the overall structure can be made relatively lower compared with the existing waste liquid collection CUP structure with a single-layer liquid retaining surface, effectively avoiding the waste liquid flying out of the waste liquid collection CUP structure and splashing onto the developing cavity, ensuring the cleanliness and humidity of the developing cavity, and being more suitable for the working conditions where the height of the developing cavity itself is limited. The structure is simple and compact, and the use is reliable. Brief Description of the Drawings

[0017] Figure 1 It is a three-dimensional structural schematic diagram when the whole of the present utility model is used in cooperation with the base;

[0018] Figure 2 It is a sectional structural schematic diagram when the whole of the present utility model is used in cooperation with the base;

[0019] Figure 3 It is a three-dimensional structural schematic diagram of the CUP main body of the present utility model;

[0020] Figure 4 It is a sectional structural schematic diagram of the CUP main body of the present utility model;

[0021] Figure 5 It is a three-dimensional structural schematic diagram of the circular outer retaining ring of the present utility model;

[0022] Figure 6 It is a schematic diagram of the liquid drainage port of the present utility model.

[0023] In the figure: 1 is the CUP main body, 101 is the circular inner retaining edge, 102 is the outer connection edge A, 103 is the liquid drainage port, 1031 is the inclined surface, 104 is the circular guide convex platform;

[0024] 2 is an annular outer retaining ring, 201 is an outer connection edge B, and 202 is a nozzle groove;

[0025] 3 is a base, 301 is an annular recovery groove, and 302 is a waste discharge port. Specific embodiments

[0026] The following will further describe the present utility model in conjunction with the attached Figure 1-6 drawings.

[0027] A waste liquid collection CUP structure after development, as Figure 1-6 shown, includes a CUP main body 1 and an annular outer retaining ring 2. The CUP main body 1 is annular. The middle part of the inner side surface of the CUP main body 1 protrudes inward to form an annular inner retaining edge 101. A wafer passing port A is formed inside the annular inner retaining edge 101. The CUP main body 1 and the annular inner retaining edge 101 are an integral structure. The annular outer retaining ring 2 is installed on the CUP main body 1. The annular outer retaining ring 2 is located above the annular inner retaining edge 101. A wafer passing port B is formed inside the annular outer retaining ring 2. The inner side surface of the annular inner retaining edge 101 serves as the first liquid retaining surface, and the inner side surface of the annular outer retaining ring 2 serves as the second liquid retaining surface. The waste liquid collection CUP structure in this embodiment, that is, the main body composed of the CUP main body 1 and the annular outer retaining ring 2, is the same as the existing waste liquid collection CUP structure with a single-layer liquid retaining surface and is disposed directly above a base 3 having an annular recovery groove 301 in a developing device (as Figure 1 and Figure 2 shown). A plurality of waste discharge ports 302 communicating with the annular recovery groove 301 are formed on the base 3. The structure of the base 3 itself is prior art. The waste liquid collection CUP structure in this embodiment can fully block the splashing waste liquid through the structural design with two layers of liquid retaining surfaces, and the overall height of the structure can be made relatively lower than that of the existing waste liquid collection CUP structure with a single-layer liquid retaining surface.

[0028] Specifically, in this embodiment, an outer connection edge A 102 protrudes from the outer periphery of the CUP main body 1. The outer connection edge A 102 is used to connect with an external CUP lifting drive structure, and the waste liquid collection CUP structure as a whole can be driven to lift by the external CUP lifting drive structure, so as to adjust the overall height position of the waste liquid collection CUP structure.

[0029] Specifically, as Figure 2 shown, in this embodiment, an outer connection edge B 201 protrudes from the outer periphery of the annular outer retaining ring 2. The outer connection edge B 201 is used to pass screws. The annular outer retaining ring 2 is fixed to the CUP main body 1 through the screws passed through the outer connection edge B 201, and the disassembly and assembly are easy.

[0030] Specifically, in this embodiment, the lowermost end of the inner side surface of the annular outer retaining ring 2 is in contact with the inner side surface of the CUP body 1, which can smoothly drain the waste liquid splashed onto the inner side surface of the annular outer retaining ring 2. As Figure 3 and Figure 4 shown, in this embodiment, a plurality of liquid drainage ports 103 are uniformly formed in the circumferential direction at the joint where the outermost part of the annular inner retaining edge 101 is in contact with the inner side surface of the CUP body 1. Each liquid drainage port 103 has an upper opening and a lower opening. The upper openings of each liquid drainage port 103 communicate with the space above the annular inner retaining edge 101, and the lower openings of each liquid drainage port 103 communicate with the space below the annular inner retaining edge 101. This can enable the waste liquid in the space above the annular inner retaining edge 101 to smoothly flow through each liquid drainage port 103 to the space below the annular inner retaining edge 101 and enter the annular recovery groove 301 of the base 3 and be discharged from the waste discharge port 302, thereby realizing the full recovery of the waste liquid blocked by the two liquid retaining surfaces. As Figure 6 shown, in this embodiment, an inclined surface portion 1031 that gradually slopes downward from the inside to the outside is formed on one side of the lower opening of each liquid drainage port 103, which can effectively prevent the part of the liquid with a very fast flow rate below the lower opening of each liquid drainage port 103 from flowing back to the upper side of the annular inner retaining edge 101 along the liquid drainage port 103. In this embodiment, the inclination angle between the inclined surface portion 1031 and the horizontal plane is 45 degrees.

[0031] Specifically, in this embodiment, an annular guide convex platform 104 is convexly provided on the inner side surface of the lower part of the CUP body 1 and extends inward. The annular guide convex platform 104 is located below the annular inner retaining edge 101. Through the setting of the annular guide convex platform 104, the waste liquid can flow smoothly from the inner side surface of the CUP body 1 to the annular recovery groove 301 of the base 3.

[0032] Specifically, in this embodiment, the axial centerlines of the wafer through holes A and B are collinear, the opening size of the wafer through hole A is smaller than the opening size of the wafer through hole B, and a nozzle groove 202 is recessed in the wafer through hole B of the annular outer retaining ring 2. The nozzle groove 202 is used to leave enough space for the nozzle when the nozzle is temporarily moved to this position, facilitating the normal progress of the process.

Claims

1. A post-development waste liquid collection CUP structure, characterized in that: The invention comprises a CUP body (1) and an annular outer retaining ring (2), wherein the CUP body (1) is annular, an annular inner retaining edge (101) is protruding inwardly from the middle of the inner side surface of the CUP body (1), the inner side of the annular inner retaining edge (101) forms a wafer passing opening A, the inner side surface of the annular inner retaining edge (101) serves as a first layer of liquid retaining surface, the annular outer retaining ring (2) is mounted on the CUP body (1), the annular outer retaining ring (2) is located above the annular inner retaining edge (101), the inner side of the annular outer retaining ring (2) forms a wafer passing opening B, and the inner side surface of the annular outer retaining ring (2) serves as a second layer of liquid retaining surface.

2. A post-development waste liquid collection CUP structure according to claim 1, characterized in that: An outer connection edge A (102) is convexly provided on the outer periphery of the CUP body (1), and the outer connection edge A (102) is used to connect with an external CUP lifting drive structure.

3. A post-development waste liquid collection CUP structure according to claim 1, characterized in that: The outer periphery of the annular outer retaining ring (2) is convexly provided with an outer connecting edge B (201), and the outer connecting edge B (201) is used to penetrate screws. The annular outer retaining ring (2) is fixed to the CUP body (1) by means of the screws penetrated by the outer connecting edge B (201).

4. A post-development waste liquid collection CUP structure according to claim 1, characterized in that: The lowermost end of the inner side surface of the annular outer retaining ring (2) is connected to the inner side surface of the CUP body (1).

5. The post-development waste liquid collection CUP structure according to claim 1, characterized in that: A plurality of liquid discharge ports (103) are provided at the junction of the outermost portion of the annular inner baffle (101) and the inner side surface of the CUP body (1), each of the liquid discharge ports (103) having an upper opening and a lower opening, the upper opening of each of the liquid discharge ports (103) communicating with the space on the upper side of the annular inner baffle (101), and the lower opening of each of the liquid discharge ports (103) communicating with the space on the lower side of the annular inner baffle (101).

6. A post-development waste liquid collection CUP structure according to claim 5, characterized in that: A sloped portion (1031) which gradually slopes downward from the inside to the outside is formed on one side of the lower opening of each of the accumulated liquid discharge ports (103).

7. The post-development waste liquid collection CUP structure according to claim 1, characterized in that: An annular flow-guiding boss (104) is protruding inwardly from the lower portion of the inner side surface of the CUP body (1), and the annular flow-guiding boss (104) is located below the annular inner stop edge (101).

8. The post-development waste liquid collection CUP structure according to claim 1, characterized in that: The axial centerline of the wafer passing through the port A is collinear with the axial centerline of the wafer passing through the port B.

9. The post-development waste liquid collection CUP structure according to claim 1, characterized in that: The opening size of the wafer through-port A is smaller than or equal to the opening size of the wafer through-port B.

10. The post-development waste liquid collection CUP structure according to claim 1, characterized in that: A nozzle groove (202) is concavely provided on the wafer passing opening B of the annular outer retaining ring (2), and the nozzle groove (202) is used to reserve sufficient space for the nozzle when the nozzle is temporarily moved to that position.

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