Photomask box carrying unit and photomask box carrying cabinet

Abstract

The utility model provides a photomask box carrying unit and a photomask box carrying cabinet, a height control structure can adjust the height of a bearing table on a drawer bottom plate, a limiting groove is fixed on the bearing table, and a control switch controls the height control structure to adjust the height of the bearing table. The height of the bearing table is adjusted through the control switch, the bearing table ascends to enable the photomask box to abut against the top panel of the supporting frame when the photomask box is conveyed, and abrasion caused by shaking of the photomask box in the conveying process is avoided through cooperation with the limiting grooves; meanwhile, the control switch controls the locking state of the drawer frame and the supporting frame, the height adjustment of the bearing table automatically corresponds to the action of taking, placing and locking the photomask box, and the taking and placing efficiency and safety of the photomask box are improved; in addition, synchronous control over the height of the bearing table and locking of the drawer frame by a control switch is achieved through an electric motor or mechanical linkage connection, and the control efficiency is improved; and finally, a limiter, a strap and a handheld handle are arranged on the carrying cabinet, so that the convenience and safety of carrying the photomask box are improved.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductor equipment, and particularly relates to a reticle box carrying unit and a reticle box carrying cabinet. Background Art

[0002] In the process of semiconductor production, a reticle transfer box (Reticle SIMF box) is an important tool for placing and transferring reticles. Due to special process requirements, sometimes it is necessary to borrow reticles from other wafer fabs, so it is necessary to transport the reticles to another wafer fab through a reticle transfer box.

[0003] In the prior art, the handling device for the reticle transfer box is a simple plastic box that can only hold 1-2 reticle transfer boxes. Therefore, when multiple reticle transfer boxes need to be transported, multiple transports are required, resulting in low transport efficiency. At the same time, the reticle transfer box is prone to shaking and friction in the handling device during transportation, resulting in easy wear of the reticle transfer box and easy damage to the reticle due to collision, resulting in low safety and reliability during transportation.

[0004] Therefore, there is an urgent need for a structure that can improve the handling efficiency and safety of the reticle transfer box.

[0005] It should be noted that the above introduction of the technical background is only for the convenience of clearly and completely explaining the technical solutions of the present application and facilitating the understanding of those skilled in the art. It cannot be considered that the above technical solutions are well-known to those skilled in the art just because these solutions are described in the background art part of the present application. Summary of the Utility Model

[0006] In view of the above-mentioned disadvantages of the prior art, the purpose of the present utility model is to provide a reticle box carrying unit and a reticle box carrying cabinet, which are used to solve the problems of low handling efficiency and poor handling safety of the reticle transfer box in the prior art.

[0007] To achieve the above purpose and other related purposes, the present utility model provides the following technical solutions:

[0008] In a first aspect, the present utility model provides a reticle box carrying unit, which at least includes: a support frame, a drawer frame, a limiting groove, a bearing table, a height control structure, and a control switch;

[0009] The drawer frame includes a drawer bottom plate and a drawer front panel that are joined face to face; the support frame includes side panels, a top panel, and a bottom support structure, and the bottom support structure supports the bottom surface of the drawer bottom plate so that the drawer frame can be pushed and pulled in the support frame; one end of the height control structure is fixedly connected to the drawer bottom plate, and the other end of the height control structure is fixedly connected to the carrier table. The height control structure can adjust the height of the carrier table on the drawer bottom plate, and the carrier table is used for placing a photomask box; the limit slot is fixed on the carrier table, and the limit slot is used for defining the relative position of the photomask box on the carrier table; the control switch is located on the drawer front panel, and the control switch controls the adjustment of the height of the carrier table by the height control structure.

[0010] Optionally, the bottom support structure includes drawer slides and slide rail limiters, and the slide rail limiters are located on both sides of the drawer slides; pulleys are arranged at positions corresponding to the drawer slides on the bottom surface of the drawer bottom plate, and the drawer bottom plate and the support frame are slidably connected through the pulleys and the drawer slides.

[0011] Optionally, the control switch also controls the locking state of the drawer frame and the support frame; the control switch can control the existence of a locking connection between the drawer front panel and the support frame, and at the same time control the height of the carrier table to rise until the top of the photomask box on the carrier table abuts against the top panel of the corresponding support frame; the control switch can also control the unlocking of the locking connection between the drawer front panel and the support frame, and at the same time control the height of the carrier table to drop until the top of the photomask box on the carrier table is lower than the top panel of the corresponding support frame.

[0012] Optionally, the height control structure is an electric motor, and the electric motor can drive the carrier table to rise or fall.

[0013] Optionally, a latch tongue access opening is provided on the side panel of the support frame close to the drawer front panel, and an electric latch tongue is provided on the drawer front panel; the control switch can control the electric latch tongue to insert into the latch tongue access opening for locking, and at the same time control the electric motor to drive the carrier table to rise; the control switch can also control the electric latch tongue to be withdrawn from the latch tongue access opening for unlocking, and at the same time control the electric motor to drive the carrier table to fall.

[0014] Optionally, there is a mechanical linkage connection between the control switch and the carrier table, and the control switch can move mechanically to control the rise or fall of the carrier table.

[0015] Optionally, a latch tongue access opening is provided on the side panel of the support frame close to the drawer panel. The height control structure is an elastic member. The control switch includes a knob structure, a positioning rod, a driving rod, and a pressing rod.

[0016] The knob structure includes a knob base and a knob cover. The knob base is fixed to the drawer panel, and the knob cover is rotatably connected to the knob base. The knob cover includes a driving portion, a connecting portion, and a rotating portion. The driving portion is located on the side of the drawer panel close to the carrying platform. The connecting portion penetrates through the drawer panel, and the rotating portion is located on the side of the drawer panel away from the carrying platform.

[0017] The driving portion or the rotating portion of the knob cover is fixedly connected to the positioning rod, and the positioning rod is parallel to the drawer panel. The driving portion of the knob cover is fixedly connected to the driving rod. The driving rod is parallel to the drawer panel and forms a preset angle with the positioning rod. The preset angle is greater than 0°. The angle between the connection line of the latch tongue access opening and the knob cover and the positioning rod is smaller than the angle between the connection line of the latch tongue access opening and the knob cover and the driving rod. The driving rod is fixedly connected to the pressing rod, and the pressing rod is perpendicular to the drawer panel.

[0018] When the knob cover rotates to drive the positioning rod and the pressing rod to rotate, when the pressing rod presses the carrying platform supported by the elastic member, the elastic member is compressed under the compressive stress and the positioning rod rotates outside the latch tongue access opening. When the knob cover rotates to the positioning rod is engaged and locked in the latch tongue access opening, the pressing rod does not press the carrying platform, and the compressive stress of the elastic member is released.

[0019] Optionally, a latch tongue access opening is provided on each of the two side panels of the support frame close to the drawer panel. A control switch is provided at each position close to the two latch tongue access openings. The positioning rod of each control switch can be engaged and locked with the corresponding latch tongue access opening.

[0020] In a second aspect, the present invention provides a photomask cassette carrier cabinet, which includes two or more of the above-mentioned photomask cassette carrier units stacked in sequence. The support frames of the photomask cassettes are integrally formed to form a cubic outer shell including a top surface, a bottom surface, and four side surfaces. One of the side surfaces is a frame with a drawer panel placed thereon.

[0021] Optionally, limiters and straps are respectively arranged on two opposite sides of the cubic housing where the drawer panel is not placed, and the strap passes through the limiter; and / or handheld handles are respectively fixed on two opposite sides of the cubic housing where the drawer panel is not placed.

[0022] As described above, the photomask box carrier unit and the photomask box carrier cabinet of the present utility model have the following beneficial effects:

[0023] The present utility model sets a control switch to adjust the height of the bearing platform. When transporting the photomask box, the bearing platform rises so that the photomask box abuts against the top panel of the support frame. Cooperating with the limit groove, it avoids abrasion caused by the shaking of the photomask box during transportation;

[0024] The present utility model controls the locking state of the drawer frame and the support frame by a control switch, and the height adjustment of the bearing platform automatically corresponds to the action of taking and placing and locking the photomask box, improving the taking and placing efficiency and safety of the photomask box;

[0025] The present utility model realizes the synchronous control of the height of the bearing platform and the locking of the drawer frame by the control switch through an electric motor or a mechanical linkage connection, improving the control efficiency;

[0026] The present utility model sets limiters, straps and handheld handles on the carrier cabinet, improving the convenience and safety of transporting the photomask box. Description of the Drawings

[0027] Figure 1 It shows a schematic top view of the photomask box carrier unit in Embodiment 1 of the present utility model.

[0028] Figure 2 It shows a schematic side view of the photomask box carrier unit in Embodiment 1 of the present utility model.

[0029] Figure 3 It shows a schematic front view of the photomask box carrier unit in Embodiment 1 of the present utility model.

[0030] Figure 4 It shows a schematic front view of the photomask box carrier unit in Embodiment 2 of the present utility model.

[0031] Figure 5 It shows a schematic top view of the photomask box carrier unit in Embodiment 2 of the present utility model.

[0032] Figure 6 It shows a schematic side view of the photomask box carrier unit in Embodiment 2 of the present utility model.

[0033] Figure 7 It shows a schematic side view of the photomask box carrier cabinet in Embodiment 3 of the present utility model.

[0034] Figure 8 Shown is a front view schematic diagram of the photomask cassette carrier cabinet in Embodiment 3 of the present utility model.

[0035] Figure 9 Shown is a side view schematic diagram of the photomask cassette carrier cabinet in an example of Embodiment 3 of the present utility model.

[0036] Element number description

[0037] 1. Drawer frame; 11. Drawer bottom plate; 12. Drawer panel; 2. Carrying platform; 21. Limiting groove; 22. Height control structure; 221. Electric motor; 222. Elastic member; 3. Control switch; 31. Knob structure; 311. Knob base; 312. Knob cover; 32. Positioning rod; 33. Driving rod; 34. Pressing rod; 4. Support frame; 41. Side panel; 42. Latch tongue access port; 431. Drawer slide rail; 432. Slide rail limiter; 5. Cuboid housing; 51. Limiter; 52. Shoulder strap; 53. Handheld handle. Detailed implementation manners

[0038] The following uses specific specific examples to illustrate the implementation manners of the present utility model. Those skilled in the art can easily understand other advantages and effects of the present utility model from the content disclosed in this specification. The present utility model can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present utility model.

[0039] When detailing the embodiments of the present utility model, for ease of description, the schematic diagrams showing the device structure will be enlarged locally in a non-general proportion, and the schematic diagrams are only examples and should not limit the protection scope of the present utility model here. In addition, in actual production, three-dimensional spatial dimensions including length, width, and depth should be included.

[0040] For the sake of convenience of description, spatial relationship terms such as "beneath", "below", "lower than", "under", "above", "on" etc. may be used here to describe the relationship between one element or feature shown in the drawings and other elements or features. It will be understood that these spatial relationship terms are intended to include other directions of the device in use or operation besides the directions depicted in the drawings.

[0041] In the context of the present application, the structure where the first feature is "above" the second feature may include an embodiment where the first and second features are formed in direct contact, and may also include an embodiment where additional features are formed between the first and second features, such that the first and second features may not be in direct contact.

[0042] It should be noted that the illustrations provided in this embodiment only schematically illustrate the basic concept of the present utility model. Therefore, only the components related to the present utility model are shown in the illustrations, rather than being drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and ratio of each component in actual implementation can be arbitrarily changed, and the component layout type may also be more complex.

[0043] Embodiment 1:

[0044] This embodiment provides a photomask box carrying unit. As Figures 1-3 shown are the top view, side view, and front view of the photomask box carrying unit respectively. The photomask box carrying unit at least includes: a support frame 4 (not shown in the figure), a drawer frame 1, a limiting groove 21, a carrying platform 2, a height control structure 22, and a control switch 3;

[0045] The drawer frame 1 includes a drawer bottom plate 11 and a drawer panel 12 that are joined face to face differently; the support frame 4 includes a side panel 41, a top panel, and a bottom support structure. The bottom support structure supports the bottom surface of the drawer bottom plate 11 so that the drawer frame 1 can be pushed and pulled in the support frame 4; one end of the height control structure 22 is fixedly connected to the drawer bottom plate 11, and the other end of the height control structure 22 is fixedly connected to the carrying platform 2. The height control structure 22 can adjust the height of the carrying platform 2 on the drawer bottom plate 11. The carrying platform 2 is used to place the photomask box; the limiting groove 21 is fixed on the carrying platform 2, and the limiting groove 21 is used to define the relative position of the photomask box on the carrying platform 2; the control switch 3 is located on the drawer panel 12, and the control switch 3 controls the adjustment of the height of the carrying platform 2 by the height control structure 22.

[0046] The present utility model controls the adjustment of the height of the carrying platform 2 by the height control structure 22 through the control switch 3, so that when the drawer frame 1 is placed in the support frame 4, the carrying platform 2 can be raised until the photomask box on the carrying platform 2 abuts against the top panel of the support frame 4, thereby avoiding the up and down shaking of the photomask box in the photomask box carrying unit. When it is necessary to take out or place the photomask box, the carrying platform 2 can be controlled to descend until the photomask box on the carrying platform 2 can be taken out from the support frame 4, which is convenient for taking out and placing; at the same time, the limiting groove 21 on the carrying platform 2 can limit the relative position of the photomask box on the carrying platform 2, thereby avoiding the left and right, front and back shaking of the photomask box in the photomask box carrying unit; thus, the photomask box is stably placed in the photomask box carrying unit without shaking, which can reduce the wear of the photomask box, and also reduce the risk of the photomask being damaged by collision, improve the safety and reliability of photomask handling, and ensure the efficiency of photomask box handling at the same time.

[0047] Specifically, the limiting groove 21 enables the photomask box to be just put in and there is no gap between the photomask box and the limiting groove 21.

[0048] In one embodiment, the drawer panel 12 is perpendicular to the drawer bottom plate 11. Specifically, the drawer panel 12 and the drawer bottom plate 11 can also be set at an appropriate angle according to requirements.

[0049] In one embodiment, as Figure 9 shown, the bottom surface support structure includes drawer slides 431 and slide rail limiters 51432, and the slide rail limiters 51432 are located on both sides of the drawer slides 431; pulleys are provided at positions corresponding to the drawer slides 431 on the bottom surface of the drawer bottom plate 11, and the drawer bottom plate 11 and the support frame 4 are slidably connected to the drawer slides 431 through the pulleys.

[0050] The utility model realizes the sliding connection by arranging the drawer slides 431 and the slide rail limiters 51432 and the pulleys of the drawer bottom plate 11, so that the drawer frame 1 can be drawn out more smoothly and conveniently, and the efficiency of taking and placing the photomask box can be improved.

[0051] In one embodiment, the bottom surface support structure is provided with panels only at the positions where the drawer slides 431 and the slide rail limiters 51432 are arranged, and the bottom surface support structure is a hollow structure with panels arranged on both sides.

[0052] In one embodiment, the bottom surface support structure is an entire panel, and the drawer slides 431 and the slide rail limiters 51432 are arranged on the panel of the bottom surface support structure.

[0053] Specifically, the bottom surface support structure can also be other suitable structures to meet the functions in the solution of the utility model.

[0054] In one embodiment, the control switch 3 also controls the locking state of the drawer frame 1 and the support frame 4; the control switch 3 can control that there is a locking connection between the drawer panel 12 and the support frame 4, and at the same time control the height of the carrier 2 to rise until the top of the photomask box on the carrier 2 abuts against the top panel of the corresponding support frame 4; the control switch 3 can also control the unlocking of the locking connection between the drawer panel 12 and the support frame 4, and at the same time control the height of the carrier 2 to drop until the top of the photomask box on the carrier 2 is lower than the top panel of the corresponding support frame 4.

[0055] The present utility model controls the locking state of the drawer frame 1 and the support frame 4 by setting the control switch 3, so that when the drawer frame 1 is within the support frame 4, the drawer panel 12 and the support frame 4 can be locked and connected, and at the same time, the carrier 2 rises, and the photomask box abuts against the top panel of the support frame 4, further ensuring that the drawer frame 1 will not slide out of the support frame 4 due to shaking during the transportation of the photomask box, improving the safety and reliability of the photomask box handling.

[0056] Specifically, the method of using the photomask box transportation unit is as follows: after placing the photomask box in the limit slot 21 of the carrier 2 on the drawer frame 1, push the drawer panel 12 to make the drawer frame 1 located within the support frame 4, operate the control switch 3, control the locking of the drawer panel 12 and the support frame 4, and at the same time control the carrier 2 to rise until the top of the photomask box abuts against the top panel of the support frame 4, and then the photomask box transportation unit can be carried; when it is necessary to take out the photomask box, operate the control switch 3, control the unlocking of the drawer panel 12 and the support frame 4, and at the same time control the carrier 2 to descend until the top of the photomask box is lower than the top panel of the support frame 4 and can be taken out from the support frame 4, pull out the drawer panel 12, pull out the drawer frame 1 partially out of the support frame 4, and take out the photomask box.

[0057] In one embodiment, as Figures 1-3 shown, the height control structure 22 is an electric motor 221, and the electric motor 221 can drive the carrier 2 to rise or fall.

[0058] In one embodiment, a latch tongue access port 42 is provided on the side panel 41 of the support frame 4 close to the drawer panel 12, and an electric latch tongue is provided on the drawer panel 12; the control switch 3 can control the electric latch tongue to insert into the latch tongue access port 42 for locking, and at the same time control the electric motor 221 to drive the carrier 2 to rise; the control switch 3 can also control the electric latch tongue to be withdrawn from the latch tongue access port 42 for unlocking, and at the same time control the electric motor 221 to drive the carrier 2 to descend.

[0059] By providing the electric motor 221 and the electric latch tongue, the present utility model can reduce manual operation and improve the handling efficiency.

[0060] In one embodiment, the locking structure between the electric latch tongue and the latch tongue access port 42 can be a magnetic attraction structure, a clamping structure or other suitable locking structures.

[0061] Embodiment 2:

[0062] This embodiment provides a photomask box transportation unit, which is basically the same as that in Embodiment 1, and the difference lies in:

[0063] There is a mechanical linkage connection between the control switch 3 and the carrier table 2, and the control switch 3 can move mechanically to control the rise or fall of the carrier table 2.

[0064] By setting the mechanical linkage connection, the reliability of the control switch 3 is improved, energy is saved and emissions are reduced, and accidents such as power outages are prevented from causing the mask box transportation unit to be unusable.

[0065] In one embodiment, as Figures 4-6 shown are respectively the front view, top view and side view of the mask box transportation unit with the drawer panel 12 removed. A latch tongue access port 42 is provided on the side panel 41 of the support frame 4 close to the drawer panel 12. The height control structure 22 is an elastic member 222. The control switch 3 includes a knob structure 31, a positioning rod 32, a driving rod 33 and a pressing rod 34;

[0066] The knob structure 31 includes a knob base 311 and a knob cover 312. The knob base 311 is fixed to the drawer panel 12, and the knob cover 312 is rotatably connected to the knob base 311. The knob cover 312 includes a driving part, a connecting part and a rotating part. The driving part is located on the side of the drawer panel 12 close to the carrier table 2. The connecting part penetrates through the drawer panel 12, and the rotating part is located on the side of the drawer panel 12 away from the carrier table 2;

[0067] The driving part or the rotating part of the knob cover 312 is fixedly connected to the positioning rod 32, and the positioning rod 32 is parallel to the drawer panel 12. The driving part of the knob cover 312 is fixedly connected to the driving rod 33. The driving rod 33 is parallel to the drawer panel 12 and forms a preset angle with the positioning rod 32. The preset angle is greater than 0°. The angle between the connection line of the latch tongue access port 42 and the knob cover 312 and the positioning rod 32 is smaller than the angle between the connection line of the latch tongue access port 42 and the knob cover 312 and the driving rod 33. The driving rod 33 is fixedly connected to the pressing rod 34, and the pressing rod 34 is perpendicular to the drawer panel 12;

[0068] When the knob cover 312 rotates to drive the positioning rod 32 and the pressing rod 34 to rotate, when the knob cover 312 rotates to the pressing rod 34 pressing the carrier table 2 supported by the elastic member 222, the elastic member 222 is compressed under the compressive stress, and the positioning rod 32 rotates out of the latch tongue access port 42. When the knob cover 312 rotates to the positioning rod 32 being engaged and locked in the latch tongue access port 42, the pressing rod 34 does not press the carrier table 2, and the compressive stress of the elastic member 222 is released.

[0069] The utility model drives the rotation of the positioning rod 32 and the pressing rod 34 by setting a button cover. When the positioning rod 32 is locked in the latch tongue access port 42 of the door latch, the compression stress of the spring is automatically released, causing the carrier platform 2 to rise, so that the photomask box abuts against the top panel of the support frame 4. When the positioning rod 32 rotates outside the latch tongue access port 42 of the door latch, the carrier platform 2 is automatically pressed down, so that the photomask box can be taken out, realizing the automatic coordination of the height adjustment of the carrier platform 2 and the locking state of the drawer panel 12, and improving the operation efficiency.

[0070] Specifically, the method of using the photomask box carrying unit is as follows: after placing the photomask box in the limit groove 21 of the carrier platform 2 of the drawer frame 1, push the drawer panel 12 to make the drawer frame 1 located in the support frame 4, rotate the knob cover 312, drive the positioning rod 32 to insert into the latch tongue access port 42 on the support frame 4, and the drawer panel 12 is locked with the support frame 4. At the same time, the knob cover 312 drives the pressing rod 34 to lift from the carrier platform 2, and the elastic member 222 releases the compression stress, and the carrier platform 2 rises until the top of the photomask box abuts against the top panel of the support frame 4, and then the photomask box carrying unit can be carried; when the photomask box needs to be taken out, rotate the knob cover 312, drive the pressing rod 34 to press down the carrier platform 2, the elastic member 222 is subjected to the compression stress, the carrier platform 2 descends until the top of the photomask box is lower than the top panel of the support frame 4 and can be taken out from the support frame 4. At the same time, the knob cover 312 drives the positioning rod 32 to leave the latch tongue access port 42, the drawer panel 12 is unlocked from the support frame 4, and the drawer frame 1 is partially pulled out of the support frame 4 to take out the photomask box.

[0071] In one embodiment, the knob structure 31 can also be replaced with other suitable mechanical structures for controlling locking and pressing down the elastic member 222, such as a push-pull structure, etc. The specific mechanical linkage connection can be improved and adjusted according to requirements, and all are within the protection scope of the present utility model.

[0072] Specifically, it is necessary to set the height of the height control structure 22 so that when the elastic member 222 is released, the photomask box can abut against the top panel of the support frame 4, and when the elastic member 222 is compressed by the pressing rod 34, it can be compressed until the photomask box can be taken out from the support frame 4.

[0073] Specifically, it is necessary to set the length of the pressing rod 34 so that when the pressing rod 34 presses down on the carrier platform 2, it will not contact the photomask box, so as not to affect the safety of the photomask box.

[0074] In one embodiment, the elastic member 222 can be a spring, a spring sheet, a sponge or other suitable elastic members 222.

[0075] In one embodiment, the preset angle between the driving rod 33 and the positioning rod 32 is 90°. Specifically, other suitable preset angles can also be set according to requirements to meet the functions of the positioning rod 32 locking the drawer panel 12 and the driving rod 33 pressing down the bearing platform 2.

[0076] In one embodiment, Figures 4-5 As shown, the two side panels 41 of the support frame 4 close to the drawer panel 12 are each provided with a latch tongue access port 42, and a control switch 3 is respectively provided near the two latch tongue access ports 42, and the positioning rod 32 of each control switch 3 can be engaged and locked with the corresponding latch tongue access port 42.

[0077] The utility model arranges two door latch tongue access ports 42 and two control switches 3 on both sides of the drawer panel 12 to improve the pressing stability when pressing down the supporting platform 2, avoids the problem that only one side can be pressed down while the other side is tilted and still cannot take out the mask box, and improves the convenience of taking and placing the mask box.

[0078] Embodiment 3:

[0079] This embodiment provides a photomask box carrier cabinet, wherein the photomask box carrier cabinet includes two or more photomask box carrier units described in any one of Embodiment 1 or Embodiment 2, such as Figures 7-8 The figures are a side view and a front view of the reticle box carrier cabinet, respectively, and each of the reticle box carrier units is stacked in sequence; the support frame 4 of each of the reticle boxes is integrally formed to form a cubic shell 5 including a top surface, a bottom surface and four side surfaces, one of which is a frame on which a drawer panel 12 is placed. Specifically, a control switch 3 is provided on the drawer panel 12 of each reticle box carrier unit, and the rotation of the control switch 3 controls the locking or unlocking of the drawer panel 12 and the cubic shell 5.

[0080] In one embodiment, Figure 9 As shown, the two opposite sides of the cube shell 5 where the drawer panel 12 is not placed are respectively provided with a limiter 51 and a shoulder strap 52, and the shoulder strap 52 passes through the limiter 51; and / or as Figure 9 As shown, hand-held handles 53 are respectively fixed on two opposite sides of the cube shell 5 where the drawer panel 12 is not placed.

[0081] In one embodiment, the stopper 51 is located at the center of the side surface.

[0082] In one embodiment, the hand-held handle 53 is located at the center of the side surface, and the hand-held handle 53 forms a preset angle with the drawer panel 12 .

[0083] In one embodiment, the limiter 51 is a dust-free limiter 51.

[0084] In one embodiment, the strap 52 is a dust-free strap 52.

[0085] In one embodiment, the strap 52 can be a cross-body, lifting or X-shaped strap 52.

[0086] By setting the limiter 51 and the strap 52 and their positions, the present utility model restricts the strap 52 through the limiter 51, so that it can be more stable when carrying the photomask cassette carrier cabinet; by setting the hand-held handle 53 and its position, it can be smoothly moved when carrying the photomask cassette carrier cabinet, making the handling more convenient and improving the handling efficiency and convenience.

[0087] In one embodiment, the overall material of the photomask cassette carrier cabinet is an anti-static material, not limited to doped plastics, carbon fibers, PVC (polyvinyl chloride) anti-static plates, anti-static polyesters and other materials.

[0088] In summary, for the photomask cassette carrier unit and the photomask cassette carrier cabinet of the present utility model, a control switch can be set to adjust the height of the carrier table. When transporting the photomask cassette, the carrier table rises so that the photomask cassette abuts against the top panel of the support frame, and in cooperation with the limit groove, it avoids abrasion caused by the shaking of the photomask cassette during transportation; at the same time, the control switch controls the locking state of the drawer frame and the support frame, and the height adjustment of the carrier table automatically corresponds to the action of taking and placing and locking the photomask cassette, improving the taking and placing efficiency and safety of the photomask cassette; in addition, the control switch synchronously controls the height of the carrier table and the locking of the drawer frame through an electric motor or mechanical linkage connection, improving the control efficiency; finally, a limiter, a strap and a hand-held handle are provided on the carrier cabinet to improve the convenience and safety of carrying the photomask cassette.

[0089] Therefore, the present utility model effectively overcomes various disadvantages in the prior art and has high industrial utilization value.

[0090] The above embodiments are only illustrative of the principles and effects of the present utility model, and are not used to limit the present utility model. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present utility model. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed by the present utility model should still be covered by the claims of the present utility model.

Claims

1. A mask box carrier unit, characterized in that: The mask box carrying unit at least includes: a support frame, a drawer frame, a limit slot, a bearing platform, a height control structure and a control switch; The drawer frame includes a drawer bottom plate and a drawer panel that are connected to each other in different surfaces; the support frame includes a side panel, a top panel and a bottom support structure, the bottom support structure supports the bottom surface of the drawer bottom plate so that the drawer frame can be pushed and pulled in the support frame; one end of the height control structure is fixedly connected to the drawer bottom plate, and the other end of the height control structure is fixedly connected to the supporting platform, the height control structure can adjust the height of the supporting platform on the drawer bottom plate, and the supporting platform is used to place a mask box; the limit groove is fixed on the supporting platform, and the limit groove is used to limit the relative position of the mask box on the supporting platform; the control switch is located on the drawer panel, and the control switch controls the height control structure to adjust the height of the supporting platform.

2. The reticle box carrier unit according to claim 1, characterized in that: The bottom support structure includes drawer slide rails and slide rail limiters, and the slide rail limiters are located on both sides of the drawer slide rails; pulleys are provided at positions on the bottom surface of the drawer bottom plate corresponding to the drawer slide rails, and the drawer bottom plate and the support frame are slidably connected to the drawer slide rails through the pulleys.

3. The reticle box carrier unit according to claim 1 or 2, characterized in that: The control switch also controls the locking state of the drawer frame and the supporting frame; the control switch can control the existence of a locking connection between the drawer panel and the supporting frame, and at the same time control the height of the carrier to rise until the top of the mask box on the carrier is against the corresponding top panel of the supporting frame; the control switch can also control the unlocking of the locking connection between the drawer panel and the supporting frame, and at the same time control the height of the carrier to drop until the top of the mask box on the carrier is lower than the corresponding top panel of the supporting frame.

4. The reticle box carrier unit according to claim 1 or 2, characterized in that: The height control structure is an electric motor, and the electric motor can drive the supporting platform to rise or fall.

5. The reticle box carrier unit according to claim 4, characterized in that: The side panel of the support frame close to the drawer panel is provided with a latch tongue access port, and the drawer panel is provided with an electric latch tongue; the control switch can control the electric latch tongue to be inserted into the latch tongue access port for locking, and at the same time control the electric motor to drive the supporting platform to rise; the control switch can also control the electric latch tongue to be pulled out from the latch tongue access port for unlocking, and at the same time control the electric motor to drive the supporting platform to descend.

6. The reticle box carrier unit according to claim 1 or 2, characterized in that: There is a mechanical linkage connection between the control switch and the carrying platform, and the control switch can be mechanically moved to control the carrying platform to rise or fall.

7. The reticle box carrier unit according to claim 6, characterized in that: The side panel of the support frame close to the drawer panel is provided with a latch tongue access port, the height control structure is an elastic member, and the control switch includes a knob structure, a positioning rod, a driving rod and a pressing rod; The knob structure comprises a knob seat and a knob cover, wherein the knob seat is fixed to the drawer panel, and the knob cover is rotatably connected to the knob seat; the knob cover comprises a driving part, a connecting part and a rotating part, wherein the driving part is located on a side of the drawer panel close to the bearing platform, the connecting part passes through the drawer panel, and the rotating part is located on a side of the drawer panel away from the bearing platform; The driving part or rotating part of the knob cover is fixedly connected to the positioning rod, and the positioning rod is parallel to the drawer panel; the driving part of the knob cover is fixedly connected to the driving rod, and the driving rod is parallel to the drawer panel and forms a preset angle with the positioning rod, and the preset angle is greater than 0°, and the angle between the line connecting the door latch tongue access port and the knob cover and the positioning rod is smaller than the angle between the line connecting the door latch tongue access port and the knob cover and the driving rod; the driving rod is fixedly connected to the pressing rod, and the pressing rod is perpendicular to the drawer panel; The rotation of the knob cover can drive the positioning rod and the pressing rod to rotate; when the knob cover is rotated until the pressing rod presses down the supporting platform supported by the elastic member, the elastic member is compressed by the compressive stress, and the positioning rod rotates to the outside of the latch tongue access port; when the knob cover is rotated until the positioning rod is engaged and locked in the latch tongue access port, the pressing rod does not press down the supporting platform, and the compressive stress of the elastic member is released.

8. The reticle box carrier unit according to claim 7, characterized in that: The two side panels of the support frame close to the drawer panel are each provided with a latch tongue access port, and a control switch is respectively provided near the two latch tongue access ports, and the positioning rod of each control switch can be engaged and locked with the corresponding latch tongue access port.

9. A mask box carrier cabinet, characterized in that: The mask box carrying cabinet includes more than two mask box carrying units described in any one of claims 1 to 8, and each of the mask box carrying units is stacked in sequence; the support frame of each of the mask boxes is integrally formed to form a cubic shell including a top surface, a bottom surface and four side surfaces, one of which is a frame on which a drawer panel is placed.

10. The reticle box carrier cabinet according to claim 9, characterized in that: A limiter and a shoulder strap are respectively arranged on two opposite sides of the cube shell where no drawer panel is placed, and the shoulder strap passes through the limiter; and / or a hand-held handle is respectively fixed on two opposite sides of the cube shell where no drawer panel is placed.

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