Grinding device for quartz substrate processing

Abstract

The utility model discloses a grinding device for quartz substrate processing, which comprises a rack, a clamping part and an adjusting part, the clamping part is arranged in the rack in a sliding manner, the clamping part comprises a transmission bevel gear rotationally arranged in the clamping part, a first screw rod is rotationally arranged in the clamping part, the first screw rod is in meshed connection with the transmission bevel gear, and the adjusting part is in meshed connection with the transmission bevel gear. A clamping block is arranged in the clamping part in a sliding mode, the clamping block is in threaded connection with the first lead screw, a second lead screw is arranged at the bottom of the clamping part, and the adjusting part is fixedly arranged in the rack and comprises a driven bevel gear rotationally arranged in the adjusting part. By arranging the clamping part and the adjusting part, the first screw rod can be driven to rotate through transmission of the transmission bevel gear, so that the clamping block moves to clamp and fix the quartz substrate, and the clamping part can be driven to move up and down through rotation of the driven bevel gear, so that the exposed thickness of the clamping block is controlled to adapt to the quartz substrates with different thicknesses.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz substrate processing, in particular to a grinding device for quartz substrate processing. Background Technique

[0002] Quartz is a kind of glass, but it is different from other glasses. Other glasses are usually made by mixing various components and melting them together; while quartz glass is an amorphous material composed of a single component of silicon dioxide, and its microscopic structure is a simple network composed of silicon dioxide tetrahedral structure units. Quartz substrate is a high-purity and high-temperature stable glass substrate, which has good transparency to ultraviolet light, so it is widely used in the fields of laser, nano-processing, biochips, etc. Quartz substrate is made of high-purity quartz glass and has excellent physical, chemical and electrical properties, making it an ideal choice in specific application fields. In addition, quartz substrate also has important applications in the fields of chip manufacturing, circuit boards, etc., showing its versatility and importance.

[0003] The existing grinding devices usually need to grind the quartz substrate fixed on the workbench by means of a rotating grinding head. When the grinding device grinds the quartz substrate, it is necessary to clamp and fix the quartz substrate. However, the thickness of the quartz substrate to be ground varies, and the thickness of the clamping block is a fixed structure. When the quartz substrate is relatively thin, the thick clamping block contacts the grinding head and affects the grinding. When the quartz substrate is relatively thick, the thin clamping block reduces the clamping force on the quartz substrate. Content of the Utility Model

[0004] The purpose of the utility model is to provide a grinding device for quartz substrate processing, so as to solve the problem proposed in the above background technique that when the grinding device grinds the quartz substrate, it is necessary to clamp and fix the quartz substrate, but the thickness of the quartz substrate to be ground varies, and the thickness of the clamping block is a fixed structure, resulting in that when the quartz substrate is relatively thin, the thick clamping block contacts the grinding head and affects the grinding, and when the quartz substrate is relatively thick, the thin clamping block reduces the clamping force on the quartz substrate.

[0005] To achieve the above purpose, the utility model provides the following technical scheme: A grinding device for quartz substrate processing, comprising a frame, a clamping part and an adjusting part:

[0006] The clamping part is slidably arranged inside the frame. The clamping part includes a transmission bevel gear rotatably arranged inside the clamping part. A plurality of first lead screws are rotatably arranged inside the clamping part, and all the first lead screws are meshed and connected with the transmission bevel gear. A clamping block is slidably arranged inside the clamping part, and the clamping block is in threaded connection with the first lead screw. A second lead screw is arranged at the bottom of the clamping part. The transmission bevel gear drives to drive all the first lead screws to rotate to control the displacement of the chuck to clamp the quartz substrate. The adjustment part is fixedly arranged inside the frame. The adjustment part includes a driven bevel gear rotatably arranged inside the adjustment part. The driven bevel gear is in threaded connection with the second lead screw, and the driven bevel gear rotates to control the second lead screw to drive the clamping part to move up and down.

[0007] By adopting the above technical solution, the rotation of the first lead screw can be driven by the transmission of the transmission bevel gear, so that the clamping block is displaced to clamp and fix the quartz substrate. The rotation of the driven bevel gear can drive the clamping part to move up and down, so as to control the exposed thickness of the clamping block to adapt to quartz substrates of different thicknesses.

[0008] Preferably, it includes a support frame arranged at the top of the frame. A cylinder is arranged at the top of the support frame. A grinding head is arranged at the bottom of the cylinder. A tabletop is arranged directly below the grinding head.

[0009] By adopting the above technical solution, the cylinder can be used to control the up and down movement of the grinding head, so as to grind the quartz substrate fixed on the tabletop.

[0010] Preferably, the frame includes a limiting groove opened inside the frame. A sliding block is arranged on the side of the clamping part, and the sliding block is embedded in the limiting groove and is slidably connected with it.

[0011] By adopting the above technical solution, the clamping part can move up and down along the limiting groove.

[0012] Preferably, the clamping part includes a chuck arranged at the top of the clamping block. A plurality of sliding grooves are opened at the top of the tabletop, and the chuck passes through the sliding grooves and is slidably connected with the tabletop.

[0013] By adopting the above technical solution, the chuck can clamp and fix the quartz substrate by the displacement of the clamping block.

[0014] Preferably, there are six first lead screws. One end of each of the six first lead screws is provided with a bevel gear and is meshed and connected with the same transmission bevel gear. One end of one of the first lead screws extends to the outside of the clamping part and is provided with a turning handle.

[0015] By adopting the above technical solution, the rotation of one first lead screw can be driven by rotating the turning handle exposed outside the clamping part. Through the transmission of the transmission bevel gear, all the first lead screws are driven to rotate.

[0016] Preferably, the clamping part includes a first threaded groove formed inside the clamping block. There are six clamping blocks, and the six clamping blocks are penetrated by six first lead screws through the first threaded grooves and are threadedly connected thereto.

[0017] By adopting the above technical solution, the displacement of the clamping block can be driven by the rotation of the first lead screw.

[0018] Preferably, the adjusting part includes a control rod rotatably arranged inside the adjusting part. One end of the control rod is provided with a bevel gear and is meshed and connected with a driven bevel gear. One end of the control rod extends to the outside of the adjusting part and is provided with a turning handle.

[0019] By adopting the above technical solution, the rotation of a control rod can be driven by turning the turning handle exposed outside the adjusting part, and then the driven bevel gear can be driven to rotate inside the adjusting part.

[0020] Preferably, the adjusting part includes a second threaded groove formed inside the driven bevel gear, and the second threaded groove is threadedly connected with a second lead screw

[0021] By adopting the above technical solution, the up and down movement of the second lead screw can be driven by the rotation of the driven bevel gear, and then the up and down movement of the clamping part can be controlled.

[0022] Compared with the prior art, the beneficial effects of the present utility model are as follows: By providing a clamping part and an adjusting part, the rotation of the first lead screw can be driven through the transmission of the transmission bevel gear, so that the clamping block is displaced to clamp and fix the quartz substrate. The up and down movement of the clamping part can be driven by the rotation of the driven bevel gear, so as to control the exposed thickness of the clamping block to adapt to quartz substrates of different thicknesses, and the range of clamping and fixing the quartz substrate by the device is improved. Brief Description of the Drawings

[0023] Figure 1 is a schematic diagram of the overall structure of the present application;

[0024] Figure 2 is a schematic diagram of the overall structure of the present application;

[0025] Figure 3 is a schematic diagram of the overall sectional structure of the present application;

[0026] Figure 4 is a schematic diagram of the sectional structure of the clamping part of the present application;

[0027] Figure 5 is a schematic diagram of the structure of the clamping block of the present application;

[0028] Figure 6 is a schematic diagram of the structure of the driven bevel gear of the present application.

[0029] In the figure: 1. Frame; 101. Support frame; 102. Cylinder; 103. Grinding head; 104. Table; 105. Limit groove; 2. Clamping part; 201. Slide block; 202. Driving bevel gear; 203. First lead screw; 204. Clamping block; 205. First thread groove; 206. Chuck; 207. Second lead screw; 3. Adjusting part; 301. Control rod; 302. Driven bevel gear; 303. Second thread groove. Detailed implementation mode

[0030] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0031] Embodiment 1

[0032] Please refer to Figure 1 、 Figure 2 and Figure 3 This embodiment provides a technical solution: a grinding device for quartz substrate processing, including a frame 1, a clamping part 2 and an adjusting part 3:

[0033] A support frame 101 is arranged on the top of the frame 1. A cylinder 102 is arranged on the top of the support frame 101. A grinding head 103 is arranged at the bottom of the cylinder 102. A table 104 is arranged directly below the grinding head 103, which can allow the cylinder 102 to control the up and down movement of the grinding head 103, so as to grind the quartz substrate fixed on the table 104. The clamping part 2 is slidably arranged inside the frame 1. A driving bevel gear 202 is rotatably arranged inside the clamping part 2. A plurality of first lead screws 203 are rotated inside the clamping part 2. All the plurality of first lead screws 203 are meshed and connected with the driving bevel gear 202. A clamping block 204 is slidably arranged inside the clamping part 2. The clamping block 204 is threadedly connected with the first lead screw 203. A second lead screw 207 is arranged at the bottom of the clamping part 2. The driving bevel gear 202 drives to drive all the first lead screws 203 to rotate to control the displacement of the chuck 206 to clamp the quartz substrate. The adjusting part 3 is fixed inside the frame 1 by bolts. A driven bevel gear 302 is rotatably arranged inside the adjusting part 3. The driven bevel gear 302 is threadedly connected with the second lead screw 207. The driven bevel gear 302 rotates to control the second lead screw 207 to drive the clamping part 2 to move up and down. The driving bevel gear 202 can drive the first lead screw 203 to rotate, so that the clamping block 204 displaces to clamp and fix the quartz substrate. The rotation of the driven bevel gear 302 can drive the clamping part 2 to move up and down, so as to control the exposed thickness of the clamping block 204 to adapt to quartz substrates of different thicknesses.

[0034] Example Two

[0035] Please refer to Figure 4 、 Figure 5 and Figure 6 This embodiment provides a technical solution: a grinding device for quartz substrate processing, including a clamping part 2, a transmission bevel gear 202 and a clamping block 204:

[0036] A limiting groove 105 is opened inside the frame 1. A slider 201 is arranged on the side of the clamping part 2. The slider 201 is embedded in the limiting groove 105 and is slidably connected therewith, allowing the clamping part 2 to move up and down along the limiting groove 105. A chuck 206 is arranged on the top of the clamping block 204. A plurality of chutes are opened on the top of the table 104. The chuck 206 passes through the chute and is slidably connected with the table 104. The quartz substrate can be clamped and fixed by the chuck 206 through the displacement of the clamping block 204. Six first lead screws 203 are provided. One end of each of the six first lead screws 203 is provided with a bevel gear and is meshed and connected with the same transmission bevel gear 202. One end of one of the first lead screws 203 extends to the outside of the clamping part 2 and is provided with a turning handle. By rotating the turning handle exposed outside the clamping part 2, one first lead screw 203 can be driven to rotate. Through the transmission of the transmission bevel gear 202, all the first lead screws 203 are driven to rotate. A first thread groove 205 is opened inside the clamping block 204. Six clamping blocks 204 are provided. The six clamping blocks 204 are penetrated by the six first lead screws 203 and are threadedly connected therewith. The displacement of the clamping block 204 can be driven by the rotation of the first lead screw 203.

[0037] Example Three

[0038] Please refer to Figure 4 、 Figure 5 and Figure 6 This embodiment provides a technical solution: a grinding device for quartz substrate processing, including an adjustment part 3, a control rod 301 and a driven bevel gear 302 meshing:

[0039] A control rod 301 is rotatably arranged inside the adjustment part 3. One end of the control rod 301 is provided with a bevel gear and is meshed and connected with the driven bevel gear 302. One end of the control rod 301 extends to the outside of the adjustment part 3 and is provided with a turning handle. By rotating the turning handle exposed outside the adjustment part 3, one control rod 301 can be driven to rotate, thereby driving the driven bevel gear 302 to rotate inside the adjustment part 3. A second thread groove 303 is opened inside the driven bevel gear 302. The second thread groove 303 is threadedly connected with the second lead screw 207. Through the rotation of the driven bevel gear 302, the second lead screw 207 can be driven to move up and down, thereby controlling the up and down movement of the clamping part 2.

[0040] Working principle: First, power on the device. Then, place the quartz substrate to be ground in the center of the table 104. Next, by rotating the exposed turning handle of the adjustment part 3, a control rod 301 can be driven to rotate, and then drive the driven bevel gear 302 to rotate within the adjustment part 3. While the driven bevel gear 302 is rotating, the second lead screw 207 can be driven to move up and down, thereby controlling the up and down movement of the clamping part 2, enabling the operator to control the device to clamp and fix quartz substrates of different thicknesses. Then, by rotating the exposed turning handle of the clamping part 2, a first lead screw 203 can be driven to rotate. Through the transmission of the transmission bevel gear 202, all the first lead screws 203 are driven to rotate and drive the clamping blocks 204 to displace, so that the six chucks 206 fix the quartz substrate on the table 104. Next, let the cylinder 102 control the up and down movement of the grinding head 103, thereby grinding the quartz substrate fixed on the table 104.

[0041] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A grinding device for quartz substrate processing, characterized in that: include: Rack (1); A clamping part (2), wherein the clamping part (2) is slidably arranged inside the frame (1), the clamping part (2) comprises a transmission bevel gear (202) rotatably arranged inside the clamping part (2), a plurality of first screw rods (203) are rotatably arranged inside the clamping part (2), the plurality of first screw rods (203) are all meshedly connected with the transmission bevel gear (202), a clamping block (204) is arranged inside the clamping part (2), the clamping block (204) is threadedly connected with the first screw rod (203), a second screw rod (207) is arranged at the bottom of the clamping part (2), and the transmission bevel gear (202) is driven to drive all the first screw rods (203) to rotate and control the displacement of the clamping head (206) to clamp the quartz substrate; The adjusting part (3) is fixedly arranged inside the frame (1), and the adjusting part (3) comprises a driven bevel gear (302) rotatably arranged inside the adjusting part (3), the driven bevel gear (302) is threadedly connected to the second screw rod (207), and the driven bevel gear 302 rotates to control the second screw rod (207) to drive the clamping part (2) to move up and down.

2. A grinding device for quartz substrate processing according to claim 1, characterized in that: The invention comprises a support frame (101) arranged on the top of a frame (1); a cylinder (102) is arranged on the top of the support frame (101); a grinding head (103) is arranged on the bottom of the cylinder (102); and a table (104) is arranged directly below the grinding head (103).

3. A grinding device for quartz substrate processing according to claim 1, characterized in that: The frame (1) comprises a limiting groove (105) provided inside the frame (1), and a sliding block (201) is provided on the side of the clamping portion (2), and the sliding block (201) is embedded in the limiting groove (105) and slidably connected thereto.

4. A grinding device for quartz substrate processing according to claim 2, characterized in that: The clamping portion (2) comprises a clamping head (206) arranged on the top of the clamping block (204); a plurality of sliding grooves are provided on the top of the table top (104); and the clamping head (206) passes through the sliding grooves and is slidably connected to the table top (104).

5. The grinding device for quartz substrate processing according to claim 1, characterized in that: Six first screw rods (203) are provided, one end of each of the six first screw rods (203) is provided with a bevel tooth and meshes with the same transmission bevel tooth (202), one end of one of the first screw rods (203) extends to the outside of the clamping portion (2) and is provided with a rotating handle.

6. A grinding device for quartz substrate processing according to claim 1, characterized in that: The clamping portion (2) comprises a first thread groove (205) formed inside a clamping block (204), six clamping blocks (204) are provided, and the six clamping blocks (204) are threadedly connected to the six first screw rods (203) passing through the first thread grooves (205).

7. A grinding device for quartz substrate processing according to claim 1, characterized in that: The adjustment part (3) comprises a control rod (301) rotatably arranged inside the adjustment part (3), one end of the control rod (301) is provided with a bevel gear and meshes with a driven bevel gear (302), and one end of the control rod (301) extends to the outside of the adjustment part (3) and is provided with a rotating handle.

8. A grinding device for quartz substrate processing according to claim 7, characterized in that: The adjusting portion (3) comprises a second thread groove (303) formed inside the driven bevel gear (302), and the second thread groove (303) is threadedly connected to the second screw rod (207).

Images