Mechanical arm

Abstract

The utility model provides a mechanical arm which comprises a driving base, a first arm, a second arm and a carrying table. The first arm is pivoted with the driving base through a first shaft, the first arm is provided with a plurality of first gears which are sequentially connected, and the rotating axis of the first gears is parallel to the first shaft. The second arm is pivoted with the first arm through a second shaft, the second arm is provided with a plurality of second gears which are sequentially connected, and the rotating axis of the second gears is parallel to the second shaft. The first shaft is parallel to the second shaft. The first gear is connected between the driving base and the second gear. The driving base provides power to the first gear and transmits the power to the second gear so as to drive the first arm and the second arm to pivot relative to the driving base. The carrying platform is pivoted with the second arm through a third shaft, the carrying platform is provided with a bearing plane for bearing an object, and the first shaft, the second shaft and the third shaft are parallel to each other and parallel to the bearing plane. The mechanical arm provided by the utility model has the advantages of space saving, high bearing capacity, high transmission efficiency, high transmission precision and the like.

Description

Technical Field

[0001] The utility model relates to a robotic arm. Background Art

[0002] In semiconductor manufacturing processes or related substrate processing processes, it is necessary to move wafers or substrates between different processing equipment or storage areas. To cope with these situations, robotic arms have become one of the commonly used handling devices.

[0003] Generally speaking, existing robotic arms mostly have a horizontal movement mechanism, that is, the movement mode of their arms is rotation in a horizontal plane. However, the above movement mode requires a relatively large planar rotation space for the arm to smoothly store or retrieve wafers or substrates from the accommodating device. In addition, for the overall equipment, the above robotic arms also require a relatively large floor area for sufficient space to operate, so they are not advantageous for the equipment configuration of the production line.

[0004] On the other hand, existing robotic arms are mostly driven by belts. However, belts not only have low transmission and load-bearing efficiency, but also are prone to fatigue due to long-term use, and therefore need to be regularly adjusted in tension or even replaced. Summary of the Utility Model

[0005] The utility model provides a robotic arm, which has the advantages of saving space, high load-bearing capacity, high transmission efficiency, high transmission precision, etc.

[0006] A robotic arm of the utility model includes a driving base, a first arm, a second arm, and a stage. The first arm is pivotally connected to the driving base by a first axis. The first arm has a plurality of first gears connected in sequence, and the rotational axis of the first gears is parallel to the first axis. The second arm is pivotally connected to the first arm by a second axis. The second arm has a plurality of second gears connected in sequence, and the rotational axis of the second gears is parallel to the second axis. The first axis is parallel to the second axis. The first gears are connected between the driving base and the second gears. The driving base provides power to the first gears and transmits it to the second gears to drive the first arm and the second arm to pivot relative to the driving base. The stage is pivotally connected to the second arm by a third axis. The stage has a bearing plane for bearing objects. The first axis, the second axis, and the third axis are parallel to each other and parallel to the bearing plane.

[0007] In an embodiment of the utility model, the above driving base includes a first motor and a plurality of third gears connected in sequence. The first and last of the third gears are coaxially connected to the first motor, the last of the third gears is coaxially connected to the first of the first gears, and the rotational axis of the third gears is parallel to the rotational axis of the first motor.

[0008] In an embodiment of the utility model, the above third gears, second gears, and first gears are respectively helical gears.

[0009] In an embodiment of the present utility model, the end of the above-mentioned first gear is coaxially connected to the beginning of the second gear, and the end of the second gear is pivotally connected to the carrier.

[0010] In an embodiment of the present utility model, the gear ratio of the beginning to the end of the above-mentioned first gear is 2:1.

[0011] In an embodiment of the present utility model, the number of the above-mentioned first gears is odd.

[0012] In an embodiment of the present utility model, the gear ratio of the beginning to the end of the above-mentioned second gear is 1:2.

[0013] In an embodiment of the present utility model, the number of the above-mentioned second gears is odd.

[0014] In an embodiment of the present utility model, the above-mentioned first gear and the second gear are respectively helical gears.

[0015] In an embodiment of the present utility model, the above-mentioned robotic arm further includes a lateral transmission module. The lateral transmission module includes a second motor and a lateral mechanism connected to each other. The driving base is disposed on the lateral mechanism. The second motor drives the lateral mechanism and the driving base to move laterally. The lateral is parallel to the rotation axis of the first gear and parallel to the rotation axis of the second gear.

[0016] In an embodiment of the present utility model, the above-mentioned robotic arm further includes a lifting transmission module. The lifting transmission module includes a third motor and a lifting mechanism connected to each other. The lateral transmission module is disposed on the lifting mechanism. The third motor drives the lifting mechanism to rise or fall, and the lifting axis is perpendicular to the lateral.

[0017] In an embodiment of the present utility model, the above-mentioned object is a wafer cassette. The bottom of the wafer cassette has a plurality of openings, and the carrier has a plurality of fixing columns located on the bearing plane. The fixing columns are correspondingly inserted into the openings so that the wafer cassette is fixed on the bearing plane.

[0018] Based on the above, since the robotic arm uses gears as the transmission components of the arm, and the rotation axis of the gear is parallel to the pivot axis of the arm, and at the same time the pivot axis is parallel to the bearing plane of the carrier, it results in the movement mode of the arm being upright, that is, it is equivalent to making the plane where the arm is located, including its movement plane, be orthogonal to the bearing plane (or the ground where the device is installed).

[0019] Accordingly, the robotic arm can achieve a better configuration area utilization rate due to its smaller occupied configuration area (footprint), and still maintain the same operating stroke as the existing planar robotic arm. Furthermore, through gear transmission, the operating precision can be effectively improved, and it has a higher load-bearing capacity and a higher transmission efficiency.

[0020] In order to make the above - mentioned features and advantages of the present utility model more obvious and understandable, specific embodiments are given below and detailed descriptions are provided in conjunction with the accompanying drawings as follows. Description of the Drawings

[0021] Figure 1 is a schematic diagram of a robotic arm according to an embodiment of the present utility model;

[0022] Figure 2 shows a partial view of the robotic arm Figure 1 from another perspective;

[0023] Figure 3 is Figure 1 an exploded view of the robotic arm and an object;

[0024] Figure 4 is Figure 1 an electrical connection diagram of the components of the robotic arm;

[0025] Figure 5A and Figure 5B show exploded views of some components of the robotic arm from different perspectives;

[0026] Figure 6 is a schematic diagram of the movement of the robotic arm. Detailed Embodiment

[0027] Figure 1 is a schematic diagram of a robotic arm according to an embodiment of the present utility model. Figure 2 shows a partial view of the robotic arm Figure 1 from another perspective. Figure 3 is Figure 1 an exploded view of the robotic arm and an object. Please also refer to Figures 1 to 3 , in this embodiment, the robotic arm 10 includes a handling module 100, a lateral transmission module 300 and a lifting transmission module 200. Among them, the handling module 100 includes a driving base 140, a first arm 110, a second arm 120 and a carrier 130. One end of the first arm 110 is pivotally connected to the driving base 140, the other end of the first arm 110 is pivotally connected to the second arm 120, and the other end of the second arm 120 is pivotally connected to the carrier 130. The carrier 130 is used to carry the object 20. Here, the object 20 is taken as a wafer cassette as an example, but not limited thereto.

[0028] The lateral transmission module 300 includes a second motor 310 and a lateral mechanism. In this embodiment, the lateral mechanism includes a moving base 320 and a track assembly 330. The moving base 320 is movably assembled to the track assembly 330. The second motor 310 is connected to and drives the moving base 320 to move along the track assembly 330, and the driving base 140 is disposed on the moving base 320. Therefore, the handling module 100 can be driven by the lateral mechanism. The type of the lateral mechanism is not limited herein. Furthermore, the lifting transmission module 200 includes a third motor 210 and a lifting mechanism. The lifting mechanism includes a moving base 220 and a track assembly 230, and the moving base 220 is movably assembled to the track assembly 230. The aforementioned lateral transmission module 300 is disposed on the moving base 220. Accordingly, while the third motor 210 drives the moving base 220 to lift and lower along the track assembly 230, it also drives the lateral transmission module 300 and the handling module 100 thereon to achieve the lifting and lowering effect.

[0029] Another example is Figure 3 As shown, the bottom of the object 20 (wafer cassette) has a plurality of openings 21, and the carrier 130 has a plurality of fixing posts 131 located on the bearing plane S1. The fixing posts 131 are correspondingly inserted into the openings 21 to position the wafer cassette on the bearing plane S1. Furthermore, the carrier 130 also has a fastening portion 132 for fastening to the fastening recess 22 of the wafer cassette to improve the stability of the object 20 on the carrier 130.

[0030] Figure 4 is Figure 1 the electrical connection diagram of the components of the robotic arm. Please refer to Figure 4 and compare with Figures 1 to 3 In this embodiment, the robotic arm 10 further includes a control module CM, which is electrically connected to the aforementioned second motor 310 and third motor 210, so as to drive the second motor 310 of the lateral transmission module 300 and the third motor 210 of the lifting transmission module 200 respectively to achieve the required transmission purpose.

[0031] Based on the above, the robotic arm 10 can complete the actuation requirements in three-dimensional space by the mutual cooperation of the handling module 100, the lateral transmission module 300, and the lifting transmission module 200. From Figures 1 to 3 the actuation (including the moving axes shown by the double arrows in the figure), it can be understood that the lateral movement generated by the lateral transmission module 300 is substantially orthogonal to the axial direction of the lifting and lowering generated by the lifting transmission module 200, and each pivoting axis of the handling module 100 is substantially parallel to the aforementioned lateral direction, which will be further described later.

[0032] Figure 5A and Figure 5B show exploded views of some components of the robotic arm from different perspectives. Please refer to Figure 5A and Figure 5B, in this embodiment, the first arm 110 is pivotally connected to the drive base 140 by the first axis AX1. The first arm 110 has a plurality of first gears G1 - G5 connected in sequence, and the rotational axes of the first gears G1 - G5 are parallel to the first axis AX1. Among them, the first gears G1 - G5 form a gear transmission group 112 and are carried on the arm body 111. The second arm 120 is pivotally connected to the first arm 110 by the second axis AX2. The second arm 120 has a plurality of second gears G6 - G12 connected in sequence, and the rotational axes of the second gears G6 - G12 are parallel to the second axis AX2. Among them, the second gears G6 - G12 form a gear transmission group 122 and are carried on the arm body 121.

[0033] Furthermore, the first axis AX1 is parallel to the second axis AX2. The first gears G1 - G5 are connected between the drive base 140 and the second gears G6 - G12. The drive base 140 has a first motor 142 (electrically connected to the control module CM, such as Figure 4 ) to provide power to the first gears G1 - G5 and transmit it to the second gears G6 - G12, so as to drive the first arm 110 and the second arm 120 to pivot relative to the drive base 140. The carrier 130 is pivotally connected to the second arm 120 by the third axis AX3. The carrier 130 has a bearing plane S1 to carry the object 20, where the first axis AX1, the second axis AX2, and the third axis AX3 are parallel to each other and parallel to the bearing plane S1.

[0034] Accordingly, the first arm 110 and the second arm 120 of the robotic arm 10 form an upright motion mode, that is, it is equivalent to making the plane (including its motion plane) where the first arm 110 and the second arm 120 are located orthogonal to the bearing plane S1.

[0035] Furthermore, the drive base 140 includes a base body 141, a transmission pulley group 143, and the aforementioned first motor 142. Among them, the base body 141 is divided into components 141a and 141b. The component 141a is horizontally configured to facilitate the installation of the first motor 142 therein. The component 141b is vertically configured to facilitate the installation of the transmission pulley group 143 therein. As Figure 5A and Figure 5B shown, the transmission pulley group 143 includes a plurality of third gears G13 - G15. The first motor 142 is coaxially connected to the gear G13, and the first gear G1 (the first one among the first gears G1 - G5) of the first arm 110 is coaxially (the first axis AX1) connected to the third gear G15. At the same time, comparing Figure 5A and Figure 5B it can also be understood that the first arm 110 is coaxially connected to the second gear G6 (the first one among the second gears G6 - G12) of the second arm 120 along the second axis AX2 by the first gear G5 (the last one among the first gears G1 - G5), and the second gear G12 (the last one among the second gears G6 - G12) of the second arm 120 is pivotally connected to the carrier 130 along the third axis AX3.

[0036] To ensure a smooth transmission process, the first gears G1 - G5, the second gears G6 - G12, and the third gears G13 - G15 in this embodiment are respectively optimized to use helical gears. Since their tooth surfaces gradually engage and disengage during operation, they can disperse the transmission load, reduce impact and vibration, and thus operate more smoothly and quietly. At the same time, the engaging (contact) tooth area of the helical gears is relatively large, so they can withstand a larger load. Also, due to the aforementioned characteristic of load dispersion, their tolerance and service life are better. In addition, to ensure the same rotation direction, the number of the first gears G1 - G5 and the number of the second gears G6 - G12 are both odd numbers (moreover, the number of the third gears G13 - G15 is also odd). To enable the stage 130 to perform a linear motion, the gear ratio of the first gear G1 (the first gear of G1 - G5) to the last gear G5 (the last gear of G1 - G5) is 2:1, and the gear ratio of the first gear G6 (the first gear of G6 - G12) to the last gear G12 (the last gear of G6 - G12) is 1:2.

[0037] Figure 6 Schematic diagram of the movement of the robotic arm. Please refer to Figure 6 and respectively compare with Figure 5A and Figure 5B where the dashed outline with the solid outline represents the different positions of the first arm 110, the second arm 120, and the stage 130 before and after movement. From this, it can be clearly seen that since the first arm 110 and the second arm 120 pivot in an upright manner, in addition to being parallel to each other, the first axis AX1, the second axis AX2, and the third axis AX3 are also parallel to the ground 30 where the robotic arm 10 is configured. At the same time, due to the optimized settings of the aforementioned first gears G1 - G5 and the second gears G6 - G12, the stage 130 performs a linear motion during the movement process, and the bearing plane S1 always faces upward, thereby maintaining the stability of the object 20 thereon. Here, the plane where the first arm 110 and the second arm 120 are located or the movement plane is parallel to the paper surface.

[0038] In summary, in the above - mentioned embodiment of the present utility model, the robotic arm uses gears as the transmission components of the arm, and the rotation axis of the gears is parallel to the pivot axis of the arm. At the same time, the pivot axis is parallel to the bearing plane of the stage, thereby causing the movement mode of the arm to be upright, that is, it is equivalent to making the plane where the arm is located, including its movement plane, be orthogonal to the bearing plane (or the ground where the device is installed).

[0039] Accordingly, the robotic arm can achieve a better utilization rate of the configured area due to its relatively small occupied area, and still retain the same operating stroke as the existing planar robotic arm. Moreover, through gear transmission, the operating precision can be effectively improved, and it has a higher load - bearing capacity and higher transmission efficiency.

[0040] In addition, the gears of the first arm and the second arm are optimized to use helical gears to disperse the transmission load, reduce impact and vibration, so that the transmission process of the robotic arm can be more stable and quiet, and thereby improve the tolerance and service life. In addition, the number and gear ratio of the gears of the first arm and the second arm are further optimized so that the stage can perform linear motion and keep the rotation directions of the gears consistent to meet the requirements.

[0041] In other words, the robotic arm of the present utility model can be combined with a lateral transmission module and a lifting transmission module with a relatively small floor area to achieve the effect of a compact configuration. At the same time, it also has a relatively small movement rotation space and can still maintain the operating stroke required for carrying objects.

[0042] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present utility model and are not intended to limit them. Although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some or all of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present utility model.

Claims

1. A robotic arm, characterized in that: include: Drive base; A first arm, pivotally connected to the driving base via a first axis, the first arm having a plurality of first gears connected in sequence, and the rotation axes of the plurality of first gears are parallel to the first axis; A second arm is pivotally connected to the first arm via a second axis, the second arm has a plurality of second gears connected in sequence, and the rotation axes of the plurality of second gears are parallel to the second axis, wherein the first axis is parallel to the second axis, wherein the plurality of first gears are connected between the driving base and the plurality of second gears, and the driving base provides power to the plurality of first gears and transmits it to the plurality of second gears to drive the first arm and the second arm to pivot relative to the driving base; as well as The carrier is pivotally connected to the second arm via a third axis. The carrier has a carrying plane for carrying objects, wherein the first axis, the second axis and the third axis are parallel to each other and to the carrying plane.

2. The robotic arm according to claim 1, characterized in that: The driving base includes a first motor and a plurality of third gears connected in sequence, wherein the first gear of the plurality of third gears is coaxially connected to the first motor, the last gear of the plurality of third gears is coaxially connected to the first gear of the plurality of first gears, and the rotation axis of the plurality of third gears is parallel to the rotation axis of the first motor.

3. The robotic arm according to claim 2, characterized in that: The plurality of third gears, the plurality of second gears, and the plurality of first gears are helical gears respectively.

4. The robotic arm according to claim 1, characterized in that: The last positions of the first gears are coaxially connected to the first positions of the second gears, and the last positions of the second gears are pivotally connected to the carrier.

5. The robotic arm according to claim 1, characterized in that: The gear ratio between the first gear and the last gear of the plurality of first gears is 2:

1.

6. The robotic arm according to claim 1, characterized in that: The number of the plurality of first gears is an odd number.

7. The robotic arm according to claim 1, characterized in that: The gear ratio between the first gear and the last gear of the plurality of second gears is 1:

2.

8. The robotic arm according to claim 1, characterized in that: The number of the plurality of second gears is an odd number.

9. The robotic arm according to claim 1, characterized in that: The plurality of first gears and the plurality of second gears are helical gears respectively.

10. The robotic arm according to claim 1, characterized in that: It also includes a transverse transmission module, which includes a second motor and a transverse mechanism connected to each other, and the driving base is arranged on the transverse mechanism. The second motor drives the transverse mechanism and the driving base to move in a transverse direction, and the transverse direction is parallel to the rotation axis of the multiple first gears and the rotation axis of the multiple second gears.

11. The robotic arm according to claim 10, characterized in that: It also includes a lifting transmission module, which includes a third motor and a lifting mechanism connected to each other. The transverse transmission module is arranged on the lifting mechanism. The third motor drives the lifting mechanism to rise or fall, and the lifting axis is perpendicular to the transverse direction.

12. The robotic arm according to claim 1, characterized in that: The object is a wafer box having a plurality of openings at the bottom thereof, and the carrier having a plurality of fixing posts located on the carrying plane, wherein the plurality of openings are correspondingly inserted through the plurality of fixing posts so that the wafer box is fixed on the carrying plane.

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