Loading platform for fixing mask box

Abstract

The utility model relates to the technical field of semiconductor photoetching mask plate fixing, and discloses a loading platform for fixing a mask plate box, which comprises a platform for loading the mask plate box, the platform can be overturned from a state of forming an included angle of 0 degree with the horizontal plane to a state of 90 degrees, four extension beams are arranged on the platform in a cross shape, and the extension beams are arranged on the platform. A first clamping block, a second clamping block and a movable air cylinder are arranged on the extending beam, and the mask box is clamped and fixed to the extending beam through the first clamping block, the second clamping block and the movable air cylinder in the overturning process of the platform. According to the utility model, the function of placing plates with different sizes into the mask box can be realized, the loading platform can be overturned by 90 degrees, the mask box can be automatically erected, the plates in the box body can be conveniently and quickly loaded and unloaded by personnel, the risk of damage to the mask is reduced, and the efficiency and the quality of placing the mask are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor lithography mask fixing, in particular to a loading platform for fixing a mask box. Background Art

[0002] Most of the existing photomask production lines are non - automated production, with a large proportion of manual participation. During the production process, many plates need to be loaded into the mask box for anti - pollution and scheduling transfer. If all rely on manual loading and transfer, it will greatly affect the operation efficiency of the workshop. With human participation, the uncertainty factors increase, and various influences may lead to a decline in product quality.

[0003] When the existing mask production line unloads and loads the plates in the mask box, it mainly uses the method of fixture plus manual loading, which greatly affects the operation efficiency of the workshop. With human participation, the uncertainty factors increase, there is a risk of polluting the plates and causing secondary pollution to the plates. A large amount of energy needs to be invested in personnel training, resulting in greater risks and waste of human resources. Summary of the Utility Model

[0004] (1) Technical Problems to be Solved

[0005] Aiming at the deficiencies of the prior art, the utility model provides a loading platform for fixing a mask box, which solves the problems that the existing mask production line lacks an automated flipping loading platform matching the mask box during the process of loading and transporting the plates, is not convenient for personnel to load and unload the plates in the box daily, and is likely to affect the subsequent mask production quality.

[0006] (2) Technical Solutions

[0007] To achieve the above objectives, the utility model is realized through the following technical solutions:

[0008] A loading platform for fixing a mask box includes a platform for loading the mask box. The platform can be flipped from a state with an angle of 0° with the horizontal plane to a state with an angle of 90°. Four extension beams are arranged in a cross on the platform. First clamping blocks, second clamping blocks and movable cylinders are respectively arranged on the extension beams. The mask box is clamped and fixed on the extension beams by the first clamping blocks, second clamping blocks and movable cylinders during the flipping process of the platform.

[0009] Preferably, when the angle between the platform and the horizontal plane is 0°, the mask box on it is in the feeding station, and when the angle between the platform and the horizontal plane is 90°, the mask box on it is in the unloading station.

[0010] Preferably, a bottom frame is provided below the platform. A flipping frame is rotatably connected to the bottom frame through a mounting base. The platform is arranged on the flipping frame. A driving component is rotatably arranged on the bottom frame. The movable end of the driving component is rotatably connected to the flipping frame. Driven by the driving component, the flipping frame can be flipped from a state with an angle of 0° with the horizontal plane to a state with an angle of 90°.

[0011] Preferably, a support frame is provided on the bottom frame. When the flipping frame is in a state with an angle of 0° with the horizontal plane, the upper end surface of the support frame abuts against the lower end surface of the frame.

[0012] Preferably, a lead screw is rotatably arranged in the inner cavity of the extension beam. Both the first clamping block and the second clamping block are threadedly connected to the lead screw. A chute for sliding connection with the first clamping block and the second clamping block is arranged on the extension beam.

[0013] Preferably, a lead screw is rotatably arranged on the second clamping block in the vertical direction. An adjusting block is threadedly connected to the vertically arranged lead screw. The adjusting block is slidably arranged above the second clamping block through a vertical guiding column. A pressing component is arranged on the adjusting block. The pressing component is used to squeeze the side wall of the mask plate box placed on the extension beam.

[0014] Preferably, an adjusting crank is fixedly connected to one end of each lead screw.

[0015] (III) Beneficial effects

[0016] The present utility model has the following beneficial effects:

[0017] For the loading platform for fixing the mask plate box, by providing a platform that can be flipped from 0° to 90°, and clamping and fixing the mask plate box through the first clamping block, the second clamping block and the movable cylinder, it can cooperate with an automatic driving device to drive the flipping of the entire flipping platform, so as to perform plate loading or unloading operations at the positions of 0° and 90°. The loading platform can achieve a 90° flip of the mask plate box and automatically erect the mask plate box, which is convenient for personnel to push the entire mask plate box together with the plates inside the box away from the entire loading platform, greatly saving human resources, reducing the risk of damage to the mask template, and improving the efficiency and quality of plate placement. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is the overall front view structural schematic diagram of the present utility model;

[0019] Figure 2 is the overall bottom view structural schematic diagram of the present utility model;

[0020] Figure 3 is the structural installation layout schematic diagram on the platform of the present utility model;

[0021] Figure 4 This is a schematic diagram of the structural installation layout on the bottom frame of the present utility model.

[0022] In the figure: 1. Bottom frame; 2. Flip frame; 3. Platform; 4. Extension beam; 5. First clamping block; 6. Moving cylinder; 7. Second clamping block; 8. Adjusting block; 9. Pressing assembly; 10. Driving assembly; 11. Support frame; 12. Installation base; 13. Chute; 14. Lead screw; 15. Adjusting crank. Specific embodiments

[0023] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0024] Please refer to Figure 1 , the present utility model provides a technical solution: A loading platform 3 for fixing a mask box includes a platform 3 for loading the mask box. The platform 3 can be flipped from a state with an angle of 0° with the horizontal plane to a state of 90°. Four extension beams 4 are arranged in a cross shape on the platform 3. The first clamping block 5, the second clamping block 7 and the moving cylinder 6 are respectively arranged on the extension beams 4. The mask box is clamped and fixed on the extension beams 4 by the first clamping block 5, the second clamping block 7 and the moving cylinder 6 during the flipping process of the platform 3. In the present utility model, by setting the platform 3 that can be flipped from 0° to 90°, and clamping and fixing the mask box by the first clamping block 5, the second clamping block 7 and the moving cylinder 6, it can cooperate with the automatic driving device to drive the flipping of the entire flipping platform 3, so as to perform plate loading or unloading operations at the positions of 0° and 90°. The loading platform 3 can realize a 90° flip of the mask box, automatically erect the mask box, which is convenient for personnel to push the entire mask box together with the plates inside the box away from the entire loading platform 3, greatly saving human resources, reducing the risk of damage to the mask template, and improving the efficiency and quality of plate loading.

[0025] In this embodiment, when the angle between the platform 3 and the horizontal plane is 0°, the mask box on it is at the feeding station. When the angle between the platform 3 and the horizontal plane is 90°, the mask box on it is at the unloading station. The loading platform 3 can realize a 90° flip of the mask box, automatically erect the mask box, which is convenient for personnel to push the entire mask box together with the plates inside the box away from the entire loading platform 3, greatly saving human resources, reducing the risk of damage to the mask template, and improving the efficiency and quality of plate loading.

[0026] Refer to Figure 2With 4 As shown, in this embodiment, a bottom frame 1 is provided below the platform 3. A flipping frame 2 is rotatably connected to the bottom frame 1 through a mounting base 12. The platform 3 is arranged on the flipping frame 2. A driving component 10 is rotatably arranged on the bottom frame 1. The movable end of the driving component 10 is rotatably connected to the flipping frame 2. Driven by the driving component 10, the flipping frame 2 can be flipped from a state with an angle of 0° with the horizontal plane to a state of 90°. When it is necessary to flip the entire platform 3, only by starting the driving component 10, the movable end of the driving component 10 can drive the flipping frame 2 to rotate, and the driving component 10 rotates synchronously, finally realizing the adjustment of the inclination state of the flipping frame 2 with the horizontal plane. Usually, the driving component 10 can adopt a servo motor that outputs linear motion, as well as driving components 10 such as cylinders and hydraulic cylinders that output linear motion.

[0027] Refer to Figure 1 With 4 As shown, in this embodiment, a support frame 11 is provided on the bottom frame 1. When the flipping frame 2 is in a state with an angle of 0° with the horizontal plane, the upper end surface of the support frame 11 abuts against the lower end surface of the frame. By providing the support frame 11, the flipping frame 2 and the platform 3 in a horizontal state can be stably supported, facilitating the subsequent stable support of the mask box with the board placed on it.

[0028] In this embodiment, a lead screw 14 is rotatably arranged in the inner cavity of the extension beam 4. Both the first clamping block 5 and the second clamping block are threadedly connected to the lead screw 14. A chute 13 that is slidably connected to the first clamping block 5 and the second clamping block 7 is arranged on the extension beam 4.

[0029] Refer to Figure 3 As shown, in this embodiment, a lead screw 14 is rotatably arranged on the second clamping block 7 in the vertical direction. An adjusting block 8 is threadedly connected to the vertically arranged lead screw 14. The adjusting block 8 is slidably arranged above the second clamping block 7 through a vertical guide post. A pressing component 9 is arranged on the adjusting block 9. The pressing component 9 is used to squeeze the side wall of the mask box placed on the extension beam 4. By rotating the lead screw 14, the distance between the first clamping block 5, the movable cylinder 6, and the two second clamping blocks 7 can be adjusted, so as to be able to adapt to the loading and clamping of mask boxes of different sizes.

[0030] Refer to Figure 1 With 3As shown, in this embodiment, one end of each lead screw 14 is fixedly connected with an adjusting crank 15. Loading process of the mask plate cassette: First, by shaking the adjusting crank 15, the first clamping block 5 is adjusted to the specified position. The movable cylinder 6 is adjusted to the 0 position through an externally connected control panel, and the driving assembly 10 is controlled to rotate the platform 3 by 90°. The operator pushes the box body of the mask plate cassette onto the platform 3. By shaking the adjusting crank 15, the adjusting block 8 drives the pressing assembly 9 thereon to move to a suitable position, so that the pressing assembly 9 presses and fixes the side of the mask plate cassette to prevent it from tipping over. The movable cylinder 6 is controlled to move upward through the control panel to squeeze and fix the mask plate cassette. After the position of the mask plate cassette is fixed, the driving assembly 10 is controlled through the control panel to rotate the platform 3 to 0°, and wait for the sheet to be placed in the mask plate cassette in a horizontal state;

[0031] Unloading process of the mask plate cassette: After the sheet is placed in the mask plate cassette, the lid of the mask plate cassette is covered and fixed to the box body. The driving assembly 10 is controlled through the control panel to rotate the platform 3 by 90°. The movable cylinder 6 is adjusted to the 0 position, and the mask plate cassette is released. At this time, the movable wheels on the mask plate cassette contact the ground, and the pressing assembly 9 is released. The mask plate cassette can then be detached from this device, and the operator can push it away.

[0032] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device. Without more limitations. An element defined by the statement "comprising a..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the element.

Claims

1. A platform for fixing a mask box loading platform, comprising a platform for loading a mask box, characterized in that: The platform can flip from a state where the angle with the horizontal plane is 0° to a state where the angle is 90°. Four extension beams are arranged in a cross shape on the platform. The extension beams are respectively provided with a first clamping block, a second clamping block and a movable cylinder. The mask box is clamped and fixed on the extension beams by the first clamping block, the second clamping block and the movable cylinder during the flipping process of the platform.

2. The loading platform for fixing a mask box according to claim 1, characterized in that: When the angle between the platform and the horizontal plane is 0°, the mask box thereon is at a material unloading station, and when the angle between the platform and the horizontal plane is 90°, the mask box thereon is at a material unloading station.

3. The loading platform for fixing a mask box according to claim 1, characterized in that: A bottom frame is arranged below the platform, and a flip frame is rotatably connected to the bottom frame via a mounting base. The platform is arranged on the flip frame, and a driving assembly is rotatably arranged on the bottom frame. The movable end of the driving assembly is rotatably connected to the flip frame, and driven by the driving assembly, the flip frame can flip from an angle of 0° to a state of 90° with the horizontal plane.

4. The loading platform for fixing a mask box according to claim 3, characterized in that: A support frame is arranged on the bottom frame, and when the flip frame is in a state where the angle between the flip frame and the horizontal plane is 0°, the upper end surface of the support frame abuts against the lower end surface of the frame.

5. A loading platform for fixing a mask box according to claim 2 or 3, characterized in that: A lead screw is rotatably arranged in the inner cavity of the extension beam, the first clamping block and the second clamping block are both threadedly connected to the lead screw, and a sliding groove slidably connected to the first clamping block and the second clamping block is arranged on the extension beam.

6. The loading platform for fixing a mask box according to claim 5, characterized in that: A lead screw is arranged on the second clamping block to rotate in the vertical direction, and an adjusting block is threadedly connected to the vertically arranged lead screw. The adjusting block is slidably arranged above the second clamping block through a vertical guide column. A clamping assembly is provided on the adjusting block, and the clamping assembly is used to squeeze the side wall of the mask box placed on the extension beam.

7. The loading platform for fixing a mask box according to claim 6, characterized in that: One end of the lead screw is fixedly connected with an adjusting crank.

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