ALD (atomic layer deposition) rotary charging basket

Abstract

The utility model provides an ALD (atomic layer deposition) rotary material barrel which comprises a barrel body, the upper end face and the lower end face of the barrel body are communicated through a cavity, an end cover and an end seat are detachably mounted at the upper end and the lower end of the barrel body respectively, a through hole and a connecting shaft hole are formed in the center of the end cover and the center of the end seat respectively, one side, facing the barrel body, of the end cover is connected with a filter capable of being contained in the barrel body, and a filter plate is clamped between the end seat and the barrel body. Threads are arranged in the connecting shaft holes and used for being detachably connected with a rotatable gas conveying pipe, the gas conveying pipe is used for inputting reaction gas and driving the barrel body to rotate, and protruding edges evenly distributed around the inner wall of the barrel body are arranged in the cavity. Gas can be uniformly distributed, and the problem that coating uniformity is affected due to the fact that powder is hung on the wall is solved.

Description

Technical Field

[0001] The present invention relates to the field of vacuum atomic deposition coating, and particularly to an ALD rotating barrel. Background Art

[0002] Atomic layer deposition, as a special chemical vapor deposition technology, has a reaction principle as follows: Two gaseous precursors are pulsed and alternately introduced into a reaction chamber, and thin film deposition is completed by means of gas-solid chemisorption reaction occurring on the surface of a substrate. From its deposition principle, it has the characteristics of self-saturated surface adsorption and self-limiting growth, can perform self-limiting modification on all surface active sites exposed to the gaseous environment, and can achieve coating of individual micro-nano particles. After more than forty years of development, ALD technology has now been widely applied in the fields of microelectronics, optoelectronics, nanotechnology, optics, microelectromechanical systems, catalysis, energy, displays, biology, separation membranes, corrosion resistance, and sealing coatings.

[0003] In the past few decades, due to the increasingly wide application of micro-nano powder particles, their surface modification methods have become crucial. As a surface modification method that can deposit ultra-thin nano-scale films and has good conformality, more researchers have studied the development of powder atomic layer deposition equipment with strong scalability and easy operation. Due to the characteristics of large specific surface area and high specific surface energy of micro-nano powder particles themselves, they are prone to agglomeration during the coating process, and it is difficult for the precursor to be completely saturated adsorbed on the surface of micro-nano powder particles, resulting in uneven coating of the nano-film or even the phenomenon of agglomerate coating. This is a key issue that needs to be considered in the development and innovation of atomic layer deposition equipment for micro-nano powder particles.

[0004] In practical applications, as a typical two-dimensional film-forming vacuum technology, traditional ALD coating means mainly rely on static coating methods, that is, particles are stacked in a sample fixing net, and the entire surface is saturated adsorbed by relying on the diffusion of precursor molecules. This method has no external force field to overcome the agglomeration force, and is only applicable to a small number of particles with good monodispersity, and is not applicable to systems prone to secondary particle agglomeration; at the same time, the particle gap is small, the diffusion in the gap is limited, which easily leads to problems such as uneven adsorption and long reaction cycle. Summary of the Invention

[0005] In view of the above existing problems, the present invention provides an ALD rotating barrel, which can achieve uniform gas distribution and solve problems such as affecting coating uniformity caused by powder wall sticking; the device provided by this utility model can not only save the disassembly and assembly time, and the disassembly and assembly process is simple and easy to operate, but also the convex rib structure inside the barrel greatly improves the coating efficiency of the entire equipment. Currently, in the field of atomic deposition coating equipment, this device is applicable to working environments that require frequent disassembly and assembly, simplifies the time and process, and reduces the consumption of human and material resources.

[0006] To achieve the above object, the utility model adopts the following technical solutions:

[0007] An ALD rotating barrel, which is detachably installed on the gas delivery pipe, includes a barrel body with its upper and lower end faces penetrated by a chamber. The chamber is provided with convex ridges uniformly arranged around the inner wall of the barrel body. End caps and end seats are respectively detachably installed on the upper and lower ends of the barrel body. Through holes and coupling holes are respectively centered on the end caps and end seats. A filter that can be accommodated within the barrel body is connected to the side of the end cap facing the barrel body. A filter plate is clamped between the end seat and the barrel body. Threads are provided in the coupling hole, and it is detachably connected to a rotatable sleeve on the outer periphery of the gas delivery pipe. The gas delivery pipe is used to input reaction gas and drive the barrel body to rotate.

[0008] The end cap, barrel body and end seat are tightly connected in sequence, and all are made of high-quality metal materials such as stainless steel to ensure the stability and corrosion resistance during long-term use. The convex ridge structure inside the barrel body bears the powder samples to be coated and drives the powder movement when the barrel body rotates. The filter plate equipped on the end seat provides a channel for the smooth entry of reaction gas. These gases carry the coating materials and directly act on the surface of the powder samples.

[0009] The upper end face of the end cap and the barrel body are connected by fasteners, and the lower end face of the end seat and the barrel body are connected by fasteners.

[0010] A tight seal is achieved between the end cap, barrel body and end seat, ensuring the closure of the system and the safety of operation.

[0011] The surface of the convex platform structure inside the barrel is processed into a polished surface. It drives the powder movement during the rotational movement of the barrel body, reducing the adhesion probability of the powder samples to the barrel wall.

[0012] An additional smooth coating is given to the inner surface of the barrel body. This coating can be coated alone inside the barrel body or can be superposed on the polished barrel wall. With double guarantees, the phenomenon of powder sticking to the wall is further reduced. The coating selected is Teflon or ceramic material. Due to their low friction coefficients and excellent chemical inertness, these two materials can significantly improve the anti-adhesion performance of the barrel wall.

[0013] The side of the end seat facing away from the barrel body has a convex platform structure. The coupling hole in the convex platform structure adopts a hollow cylinder design with internal threads and is firmly combined with the external rotating shaft through a threaded connection method, ensuring the reliable fixation and operation stability of the rotating shaft during rotation.

[0014] A handle is connected to the side of the end cap facing away from the barrel body.

[0015] Annular grooves are respectively provided on the upper and lower end faces of the barrel body, and O-ring A and O-ring B are respectively embedded in the annular grooves. It effectively prevents gas leakage and at the same time maintains the overall sealing of the system.

[0016] The filter is configured in a cap shape. This concave porous design not only increases the gas flow interface but also achieves a higher gas flux under the same gas supply conditions, thereby significantly improving the efficiency and speed of film coating.

[0017] The filter plate is configured in a porous disc structure. Such a design not only ensures the uniform distribution of gas but also further optimizes the contact efficiency between the gas and the sample material, thereby improving the uniformity and quality of the film coating.

[0018] To further optimize the gas flow efficiency, the filter plate adopts a cylindrical porous column structure that is recessed into the barrel body.

[0019] Regarding the material selection of the described porous structure, it is preferably made of 304 stainless steel or 316L stainless steel. These materials both have good corrosion resistance and durability and are suitable for use under different working conditions.

[0020] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0021] The device provided by this utility model can save the disassembly and assembly time. The disassembly and assembly process is simple and easy to operate, and the convex rib structure inside the barrel greatly improves the coating efficiency of the entire device. Currently, in the field of atomic deposition coating equipment, this device is suitable for working environments that require frequent disassembly and assembly, simplifies the time and process, and reduces the consumption of human and material resources. Brief Description of the Drawings

[0022] Figure 1 It is a schematic structural diagram of the present utility model;

[0023] Figure 2 It is a top view structure diagram of the barrel body;

[0024] Figure 3 It is a schematic structural diagram of the gas pipeline in the ALD reaction chamber.

[0025] Among them, the markings in the figures are explained as follows:

[0026] Handle (1), end cap (2), O-ring A (3), countersunk head bolt A (4), filter (5), barrel body (6), convex platform inside the barrel (7), filter plate (8), countersunk head bolt B (9), O-ring B (10), end seat (11), convex platform (12), internal thread (13), through hole (14), coupling hole (15), gas pipeline (16), sleeve (17). Detailed Description of the Embodiments

[0027] In order to more clearly illustrate the invention purpose, technical solution, and advantages of the present utility model, the following will further elaborate on the present utility model in conjunction with the drawings of the specification.

[0028] As shown Figure 1 in the figure, an ALD rotating drum includes an end cover 2, a drum body 6, an end seat 11, and a filter plate 8. The upper and lower end faces of the drum body 6 are penetrated by a chamber. Annular grooves are respectively provided on the upper and lower end faces of the drum body, and an O-ring A and an O-ring B are respectively embedded in the annular grooves. Through holes 14 and coupling holes 15 are respectively provided in the center of the end cover 2 and the end seat 11. A handle 1 is connected to the side of the end cover 2 facing away from the drum body 6. Threads 13 are provided in the coupling holes 15 for detachably connecting a sleeve 17 rotatably provided on the outer periphery of a gas delivery pipe 16 in an ALD reaction chamber. The gas delivery pipe 16 is used for inputting reaction gases and driving the drum body 6 to rotate.

[0029] The end cover 2 is connected to the upper end of the drum body 6 by a countersunk head bolt A4;

[0030] The end seat 11 is connected to the lower end of the drum body 6 by a countersunk head bolt B9;

[0031] Through the fastening connection of the end cover 2, the end seat 11 and the drum body 6, gas leakage is effectively prevented, and at the same time, the overall sealing performance of the system is maintained.

[0032] The filter plate 8 is pressed between the end seat 11 and the lower end of the drum body 6. The filter plate 8 adopts a cylindrical porous column structure recessed into the drum body 6. Such a design not only ensures the uniform distribution of gases, but also further optimizes the contact efficiency between the gases and the sample material, thereby improving the uniformity and quality of the coating;

[0033] Through holes 14 and coupling holes 15 are respectively provided in the center of the end cover 2 and the end seat 11. A filter 5 that can be accommodated in the drum body 6 is connected to the side of the end cover 2 facing the drum body 6. The filter is configured in a cap shape. Such an inner concave porous design not only increases the gas flow interface, but also achieves a higher gas flux under the same gas supply conditions, thereby significantly improving the coating efficiency and speed.

[0034] Convex ribs 7 are provided on the inner wall of the chamber and are evenly arranged around the inner wall of the drum body 6. The inner wall of the drum body 6 is subjected to surface polishing treatment, or the inner wall of the drum body 6 is coated with Teflon or ceramic material, or the inner wall of the drum body 6 is subjected to surface polishing treatment and coated with Teflon or ceramic material. The convex rib structure inside the drum body bears the powder sample to be coated and drives the powder to move when the drum body rotates. The polishing treatment or coating with Teflon or ceramic material further reduces the phenomenon of powder sticking to the wall, enables the powder to move when the drum body rotates, and reduces the adhesion probability between the powder sample and the drum wall. Teflon or ceramic material, due to their low friction coefficients and excellent chemical inertness, can significantly improve the anti-adhesion performance of the drum wall.

[0035] The barrel body 6 of the present utility model is communicated with the ALD reaction chamber through the through hole of the end cover 2. During the reaction process, the ALD reaction chamber periodically pumps the reaction gas to monitor the reaction process. The gas delivery pipe 16 of the ALD reaction chamber is pivotally connected to the end seat 11. The rotatable sleeve 17 on the outer periphery of the gas delivery pipe 16 is connected and fixed to the coupling hole 15 of the end seat 11. The driving mechanism in the ALD reaction chamber drives the rotatable sleeve 17 on the outer periphery of the gas delivery pipe 16 to rotate, so that the barrel body 6 rotates. The gas delivery pipe 16 is used to pulse the precursor gas into the barrel body 6. Compared with the ALD fluidized bed magnetic coupling stirring device of ZL2023224981899, since there is no stirring shaft passing through the end cover, the gas flow interface of the barrel body is increased, and the fluidization effect of the powder in the barrel body is enhanced.

[0036] The above description illustrates a preferred embodiment of the present utility model and should not be regarded as a limitation on the protection scope of the claims of the present utility model. Without departing from the principle and spirit of the present utility model, any modification, equivalent replacement, and improvement should be regarded as being within the protection scope of the claims of the present utility model.

Claims

1. An ALD rotary barrel, detachably mounted on a gas pipe (16), characterized in that: The invention comprises a barrel body (6) whose upper and lower end surfaces are penetrated by a cavity, wherein the cavity is provided with convex ridges (7) evenly arranged around the inner wall of the barrel body (6), an end cover (2) and an end seat (11) are respectively detachably mounted on the upper and lower ends of the barrel body (6), a through hole (14) and a coupling hole (15) are respectively centrally arranged on the end cover (2) and the end seat (11), a filter (5) which can be accommodated in the barrel body (6) is connected to the side of the end cover (2) facing the barrel body (6), a filter plate (8) is sandwiched between the end seat (11) and the barrel body (6), and a thread is arranged in the coupling hole (15).

2. The ALD rotary barrel according to claim 1, characterized in that: The end cover (2) is connected to the upper end surface of the barrel body (6) via a fastener, and the end seat (11) is connected to the lower end surface of the barrel body (6) via a fastener.

3. The ALD rotary barrel according to claim 1, characterized in that: The inner wall of the barrel body (6) is subjected to surface polishing treatment.

4. The ALD rotary barrel according to claim 1, characterized in that: The inner wall of the barrel body (6) is coated with Teflon or ceramic material, or the inner wall of the barrel body (6) is surface polished and coated with Teflon or ceramic material.

5. The ALD rotary barrel according to claim 1, characterized in that: The end seat (11) has a boss structure (12) on the side facing away from the barrel body (6).

6. The ALD rotary barrel according to claim 1, characterized in that: The end cover (2) is connected to a handle (1) on the side facing away from the barrel body (6).

7. The ALD rotary barrel according to claim 1, characterized in that: The upper and lower end surfaces of the barrel body (6) are respectively provided with annular grooves, and an O-ring A (3) and an O-ring B (10) are respectively embedded in the annular grooves.

8. The ALD rotary barrel according to claim 1, characterized in that: The filter (5) is configured in a cap shape.

9. The ALD rotary barrel according to claim 1, characterized in that: The filter plate (8) adopts a cylindrical porous column structure that is recessed into the barrel body (6).

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