Silane gas filling system

Abstract

The utility model provides a silane gas filling system, and relates to the field of silane gas filling. The silane gas filling system comprises: a storage unit, which is at least provided with a silane storage device; the conveying unit is communicated with the storage unit and is provided with at least two filling compressors; the filling unit is at least provided with three filling panels, and each filling panel is provided with a panel air inlet, a panel pressure equalizing opening and a panel filling pipe; the silane gas filling system further comprises a filling connecting pipe, the gas outlet ends of the filling compressors are communicated with the panel gas inlets, a switching assembly is arranged on the filling connecting pipe, and the gas outlet ends of the filling compressors and the panel gas inlets can be switched to be communicated or disconnected. And the pressure-equalizing connecting pipe is communicated with the silane storage equipment and the plurality of panel pressure-equalizing ports, and pressure-equalizing valves are arranged on the panel pressure-equalizing ports. According to the utility model, continuous filling can be realized, and the safety and the efficiency of the filling system are improved.

Description

Technical Field

[0001] The utility model relates to the field of silane gas filling, in particular to a silane gas filling system. Background Art

[0002] Silane (SiH4) is an important silicon source material and is widely used in semiconductor microelectronics IC, photovoltaic solar cells PV, liquid crystal display LCD and other industries. The filling and transportation of high-purity silane at home and abroad were initially carried out in Y bottles. Later, with the increasing downstream usage, tube bundle containers (2.5 tons, 4.5 tons, 6 tons and other models) were generally used for filling and transportation. Silane has a low boiling point (normal pressure boiling point -112℃), and unlike natural gas and petroleum gas, even a small amount of leakage will not cause serious consequences in an open environment. Silane gas will explode and self-ignite in the air regardless of the amount. Its danger is much higher than that of natural gas and petroleum gas. The filling and unloading process of silane gas must strictly prevent contact with air and no leakage, so there are strict requirements for the filling process and equipment of tube bundle containers.

[0003] At present, the working process of the filling system adopted by most domestic enterprises is as follows: after the inspection of the arrival tail material truck is completed, the operator connects the tube bundle container with the filling panel, replaces and vacuumizes the tube bundle container panel through the PLC process, and after completion, the operator takes samples for analysis and testing. After passing the test, the inlet and outlet pipelines of the compressor of the tube bundle container and the silane gas storage tank are first pressure-equalized, and the tube bundle container is pressure-equalized with the pressure in the silane storage tank. The time required for pressure equalization is 3-5 hours. After the pressure equalization is completed, the operator starts the compressor to start filling the tube bundle container. After the filling quality is reached, the compressor is stopped on site to send the silane gas in the tube bundle container to the laboratory for online testing. After passing the test, the tube bundle container panel and the filling panel are replaced and vacuumized. After completion, the on-site operator disconnects the vehicle and sends the vehicle. Since pressure equalization, testing, vacuumization, vacuum replacement and other steps are required before and after filling to ensure safety, the filling system can only work intermittently. On the one hand, the intermittent working mode causes repeated startup of the compressor, which brings fluctuations in the pipeline and equipment, as well as large changes in temperature differences between the pipeline and equipment, increasing the risk of silane leakage in the pipeline and equipment, and increasing the maintenance cost of the compressor; on the other hand, the traditional silane gas filling system needs to equalize the pressure of the tube bundle container and the silane storage tank before each filling, and each equalization time takes 3-5 hours. In addition, the silane product inspection of the traditional silane gas filling system takes 3.5 hours each time, and the entire filling process of a 4.5-ton tube bundle container takes 45-50 hours. The intermittent working mode makes the filling process of the traditional silane gas filling system long and inefficient. Utility Model Content

[0004] The present utility model provides a silane gas filling system that can continuously fill with low cost, high safety, and fast filling speed to solve the problems in the prior art that the intermittent working mode of the silane gas filling system causes fluctuations in pipelines and equipment, large temperature difference changes, high risk of silane leakage, increased maintenance costs of compressors, as well as long filling processes and low efficiency.

[0005] The technical solution adopted by the present utility model is as follows:

[0006] A silane gas filling system, comprising:

[0007] A storage unit, having at least one silane storage device;

[0008] A conveying unit, communicating with the storage unit, having at least two filling compressors; and

[0009] A filling unit, having at least three filling panels, on which a panel air inlet, a panel pressure equalizing port, and a panel filling pipe are provided, and the panel filling pipe is used for silane filling;

[0010] Wherein, the silane gas filling system further comprises:

[0011] A filling connection pipe, connecting the outlet ends of multiple filling compressors with multiple panel air inlets, and a switching component is provided on the filling connection pipe to switch and connect or disconnect the outlet ends of multiple filling compressors with multiple panel air inlets; and

[0012] A pressure equalizing connection pipe, connecting the silane storage device with multiple panel pressure equalizing ports, and a pressure equalizing valve is provided on the panel pressure equalizing port.

[0013] Furthermore, the conveying unit further has a compressor inlet buffer tank, whose inlet is connected to the silane storage device, and whose outlet is connected to the inlet ends of multiple filling compressors.

[0014] Furthermore, the compressor inlet buffer tank has multiple outlets, respectively connected to the inlet ends of multiple filling compressors.

[0015] Furthermore, the conveying unit further has multiple compressor inlet buffer tanks, whose inlets are connected to the silane storage device, and whose outlets are respectively connected to the inlet ends of multiple filling compressors.

[0016] Furthermore, the conveying unit further has at least one silane vaporizer, and the silane vaporizer is arranged on the pipeline connecting the compressor inlet buffer tank and the silane storage device.

[0017] Furthermore, a sampling and analysis pipe is also connected to the filling panel.

[0018] Further, the switching component includes a pipeline isolation conversion device, which is arranged at the diversion point of the filling manifold.

[0019] Further, the switching component includes a pneumatic switching valve, which is arranged at the interface of the filling manifold.

[0020] Further, the number of filling compressors is two, and the number of filling panels is three.

[0021] Further, the number of filling compressors is four, and the number of filling panels is five.

[0022] The beneficial effects of the present utility model are as follows:

[0023] 1. In the present embodiment of the present utility model, the silane gas filling system provides a function of cyclic switching for the filling system in this embodiment by arranging a filling unit with three filling panels, a conveying unit with two filling compressors, as well as a filling manifold and a switching component. Coupled with the equalizing manifold connecting the filling unit and the storage unit to provide another equalizing method, it realizes that each filling panel cyclically fills and equalizes pressure, and multiple filling compressors can continuously operate, thereby improving the service life of the compressors and reducing the maintenance cost;

[0024] 2. In the present utility model, the filling compressors can continuously operate, which also reduces the fluctuations of pipelines and equipment caused by repeated starting of the compressors. Similarly, it avoids the temperature difference changes of pipelines and equipment caused by repeated starting, reduces the leakage risk of pipelines and equipment, and reduces potential safety hazards and safety risks;

[0025] 3. The new filling scheme of the filling system of the present utility model saves the operation process of traditional pressure equalization by using the equalizing manifold, thereby saving the filling time. The on-line continuous detection adopted by the new process effectively saves the filling time. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0027] Figure 1 It is a schematic structural diagram of the filling system according to the first embodiment of the present utility model;

[0028] Figure 2 It is a schematic structural diagram of the filling system according to the second embodiment of the present utility model;

[0029] Reference numerals: 100 - silane storage device;

[0030] 200 - silane vaporizer;

[0031] 300 - compressor inlet buffer tank;

[0032] 400 - first filling compressor, 450 - filling manifold;

[0033] 500 - second filling compressor;

[0034] 600 - first filling panel, 610 - first panel air inlet, 620 - first panel pressure equalizing port, 625 - first pressure equalizing valve, 630 - first panel filling pipe, 640 - first sampling and analysis pipe;

[0035] 700 - second filling panel, 710 - second panel air inlet, 720 - second panel pressure equalizing port, 725 - second pressure equalizing valve, 730 - second panel filling pipe, 740 - second sampling and analysis pipe;

[0036] 800 - third filling panel, 810 - third panel air inlet, 820 - third panel pressure equalizing port, 825 - third pressure equalizing valve, 830 - third panel filling pipe, 840 - third sampling and analysis pipe;

[0037] 900 - pressure equalizing manifold. Detailed implementation mode

[0038] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0039] The following disclosure provides many different implementation modes or examples for implementing different structures of the present invention. To simplify the disclosure of the present invention, the components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present invention.

[0040] The embodiments of the present invention will be described in detail below with reference to the drawings.

[0041] Embodiment 1

[0042] Please refer toFigure 1 The present embodiment provides a silane gas filling system for filling silane gas in a tube bundle container, and can continuously perform the filling process to improve the safety and efficiency of the filling system. The silane gas filling system mainly includes: a storage unit, a conveying unit, a filling unit, a filling connecting pipe 450, a pressure equalizing connecting pipe 900, etc.

[0043] The storage unit has at least one silane storage device 100. In this embodiment, the silane storage device 100 is a silane storage tank for storing silane. The silane gas in the silane storage device 100 comes from the distillation tower of the production system, and the produced silane gas is stored in the silane storage device 100 in liquid phase buffer.

[0044] The conveying unit is connected to the storage unit and has at least two filling compressors. Among them, the first filling compressor 400 is used to extract silane gas in the silane storage device 100, and its first air inlet end is connected to the silane storage device 100, and the first filling compressor 400 also has a first air outlet end, which is used to connect to the filling panel. At the same time, the second filling compressor 500 is also used to extract silane gas in the silane storage device 100, and its second air inlet end is connected to the silane storage device 100, and the second filling compressor 500 also has a second air outlet end, which is also used to connect to the filling panel. By setting up two filling compressors, the filling system of this embodiment has the ability to fill two tube bundle containers at the same time.

[0045] The filling unit has at least three filling panels, and the filling panel is a filling access device with a PLC control system, which is used to dock with a tube bundle container. In this embodiment, there are three filling panels, including a first filling panel 600, a second filling panel 700 and a third filling panel 800, and each filling panel has a panel air inlet, a panel pressure equalizing port and a panel filling pipe. Among them, the panel air inlet includes a first panel air inlet 610, a second panel air inlet 710 and a third panel air inlet 810, which are used to connect the filling compressor to introduce silane gas. The panel pressure equalizing port includes a first panel pressure equalizing port 620, a second panel pressure equalizing port 720 and a third panel pressure equalizing port 820, which are used to connect a separately set pressure equalizing joint pipe 900. The panel filling pipe includes a first panel filling pipe 630, a second panel filling pipe 730; and a third panel filling pipe 830, which is used to connect the tube bundle container for silane filling. The three filling panels correspond to two filling compressors, which provide a switching option for the filling system of this embodiment.

[0046] The filling connection pipe 450 connects the outlet ends of multiple filling compressors to multiple panel inlet ports, and a switching component is provided on the filling connection pipe 450 to switch the connection or disconnection between the outlet ends of multiple filling compressors and multiple panel inlet ports, thereby realizing the function of cyclic switching of each filling panel. The switching component can be a pipeline isolation conversion device or a pneumatic switching valve, which is arranged at each shunt or interface of the filling connection pipe 450 to ensure the safe switching of the pipeline.

[0047] The pressure equalizing connection pipe 900 connects the storage unit to multiple panel pressure equalizing ports, providing another way for the pressure equalizing process of the bundle container and the filling system by setting the pressure equalizing connection pipe 900, so that the pressure equalizing no longer needs to occupy the pipeline of the filling compressor, and the pressure equalizing and filling can be carried out simultaneously. Moreover, pressure equalizing valves are provided at each panel pressure equalizing port, including the first pressure equalizing valve 625, the second pressure equalizing valve 725, and the third pressure equalizing valve 825, for connecting or disconnecting the pressure equalizing connection pipe 900.

[0048] One working mode of the filling system in this embodiment is as follows:

[0049] Silane gas is extracted from the rectification tower of the production system, and the extracted silane gas is subjected to liquid phase buffering in the silane storage tank; when the bundle container of the 1# silane filling vehicle arrives, it is first connected to the first filling panel 600 for replacement, vacuum pumping and tailing sample detection; after the detection is completed, the liquid silane gas in the silane storage tank is connected to the 1# silane filling vehicle through the pressure equalizing connection pipe 900 or the pipeline of the first filling compressor 400 for pressure equalizing; after the pressure equalizing is completed, the pressure equalizing connection pipe 900 is disconnected, and the first outlet end on the first filling compressor 400 and the first panel inlet port 610 on the first filling panel 600 are connected through the filling connection pipe 450 and the switching component, and the first filling compressor 400 is started to fill the bundle container of the 1# silane filling vehicle; then the above operations are repeated to fill the bundle container of the 2# silane filling vehicle through the second filling compressor 500 and the second filling panel 700; during the filling process of the bundle containers of the 1# and 2# silane filling vehicles, the 3# silane filling vehicle is connected to the third filling panel 800 on site for replacement, vacuum pumping and tailing sample detection, and pressure equalizing is carried out through the pressure equalizing connection pipe 900; after the pressure equalizing of the 3# silane filling vehicle is completed, the pressure equalizing connection pipe 900 is disconnected; when the filling of the 1# silane filling vehicle is completed, the first outlet end on the first filling compressor 400 and the third panel inlet port 810 on the third filling panel 800 are connected through the filling connection pipe 450 and the switching component, and the first panel inlet port 610 is disconnected; after the 1# silane filling vehicle is detected, it is disconnected and shipped, and then the first panel inlet port 610 is connected to the 4# silane filling vehicle for replacement, vacuum pumping and tailing sample detection, and pressure equalizing is carried out through the pressure equalizing connection pipe 900, and then multiple compressors sequentially repeat the above filling process to realize continuous cyclic operation.

[0050] In this embodiment, the silane gas filling system provides a function of cyclic switching for the filling system of this embodiment by setting a filling unit with three filling panels, a conveying unit with two filling compressors, as well as a filling manifold 450 and a switching component. Cooperating with the pressure equalizing manifold 900 to connect the filling unit and the storage unit to provide another pressure equalizing method, it realizes that each filling panel cyclically fills and equalizes pressure. Multiple filling compressors can continuously operate, solving the problems in the prior art that the intermittent working mode of the silane gas filling system causes large fluctuations in pipelines and equipment, large temperature difference changes, high risk of silane leakage, increased maintenance costs of compressors, and long filling process and low efficiency.

[0051] Meanwhile, in this embodiment, the operation process of traditional pressure equalization is saved by setting the pressure equalizing manifold, thus saving the filling time. The on-line continuous detection adopted by the new process effectively saves the filling time.

[0052] In this embodiment, as Figure 1 shown, the storage unit also has a compressor inlet buffer tank 300. Its inlet is connected to the silane storage device 100, and its outlet is connected to the intake ends of multiple filling compressors and the intake end of the pressure equalizing manifold 900. The silane gas enters the compressor inlet buffer tank 300 for gas-phase buffering, reducing the non-uniformity of the flow rate in the pipeline and improving the suction performance of the pump to meet the needs of the filling system. Further, the compressor inlet buffer tank 300 has multiple outlets, which are respectively connected to the intake ends of multiple filling compressors and the intake end of the pressure equalizing manifold 900, reducing the phenomenon of flow snatching generated by the first filling compressor 400, the second filling compressor 500 and the pressure equalizing manifold 900 during the filling process.

[0053] In this embodiment, the conveying unit also has at least one silane vaporizer 200, which is arranged on the pipeline connecting the compressor inlet buffer tank 300 and the silane storage device 100. Since the silane gas drawn from the silane storage device 100 still carries liquid-phase SiH4, it is heated and vaporized by the silane vaporizer 200 to prevent the carried liquid phase from entering the first filling compressor 400 and the second filling compressor 500 and damaging the compressors.

[0054] In this embodiment, a sampling and analysis pipe is also connected to the filling panel, including: a first sampling and analysis pipe 640 on the first filling panel 600, a second sampling and analysis pipe 740 on the second filling panel 700, and a third sampling and analysis pipe 840 on the third filling panel 800. Each sampling and analysis pipe is connected to the sampling and analysis equipment. By setting the sampling and analysis pipe on the filling panel, it can be used for sampling and analysis detection of the vacuuming effect before filling, and also for sampling and analysis detection of the silane gas composition in the container with tube bundles after filling.

[0055] Embodiment 2

[0056] Please refer to Figure 2 , the second embodiment provides another silane gas filling system. As shown in the figure, the silane gas filling system of the second embodiment has improved the storage unit.

[0057] In the second embodiment, the storage unit has multiple compressor inlet buffer tanks 300. The inlets of multiple buffer tanks are all connected to the silane storage device 100, and the outlets of multiple buffer tanks are respectively connected to the intake ends of multiple filling compressors and the intake end of the pressure equalizing manifold 900. By setting multiple buffer tanks to shunt the silane gas, the mutual flow snatching between multiple compressors and the pressure equalizing manifold 900 is avoided, thereby improving the filling and pressure equalizing efficiency.

[0058] Preferably, in one or more embodiments, the conveying unit can also be provided with N filling compressors and configured with (N + 1) filling panels. For example, by setting four filling compressors and configuring five filling panels, the number of simultaneously filled tubular containers can be increased to meet the need for a larger filling volume.

[0059] The foregoing has shown and described the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and the descriptions in the specification are only preferred examples of the present invention and are not used to limit the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and all these changes and improvements fall within the scope of the present invention claimed. The scope of the present invention claimed is defined by the appended claims and their equivalents.

Claims

1. A silane gas filling system, characterized in that: Include: A storage unit having at least one silane storage device; a delivery unit, connected to the storage unit, having at least two charging compressors; and The filling unit has at least three filling panels, each of which is provided with a panel air inlet, a panel pressure equalizing port and a panel filling pipe, and the panel filling pipe is used for silane filling; Wherein, the silane gas filling system further comprises: A charging connecting pipe, connecting the air outlet ends of the plurality of charging compressors with the plurality of air inlets of the panel, and a switching component is provided on the charging connecting pipe, which can switch to connect or disconnect the air outlet ends of the plurality of charging compressors with the plurality of air inlets of the panel; and A pressure equalizing connecting pipe connects the silane storage device with the plurality of panel pressure equalizing ports, and a pressure equalizing valve is provided on the panel pressure equalizing port.

2. The silane gas filling system according to claim 1, characterized in that: The delivery unit also has a compressor inlet buffer tank, whose inlet is connected to the silane storage device and whose outlet is connected to the air inlet ends of the plurality of charging compressors.

3. The silane gas filling system according to claim 2, characterized in that: The compressor inlet buffer tank has multiple outlets, which are respectively connected to the air inlet ends of multiple charging compressors.

4. The silane gas filling system according to claim 1, characterized in that: The delivery unit also has a plurality of compressor inlet buffer tanks, the inlets of which are connected to the silane storage device, and the outlets of which are respectively connected to the air inlet ends of the plurality of charging compressors.

5. The silane gas filling system according to claim 2, 3 or 4, characterized in that: The delivery unit further comprises at least one silane vaporizer, and the silane vaporizer is arranged on a pipeline connecting the compressor inlet buffer tank and the silane storage device.

6. The silane gas filling system according to claim 1, characterized in that: The filling panel is also connected with a sampling and analysis tube.

7. The silane gas filling system according to claim 1, characterized in that: The switching assembly comprises a pipeline isolation conversion device, and the pipeline isolation conversion device is arranged at the diversion position of the filling joint pipe.

8. The silane gas filling system according to claim 1, characterized in that: The switching assembly includes a pneumatic switching valve, and the pneumatic switching valve is arranged on the interface of the filling connecting pipe.

9. The silane gas filling system according to any one of claims 1 to 4, characterized in that: The number of the filling compressors is two, and the number of the filling panels is three.

10. The silane gas filling system according to any one of claims 1 to 4, characterized in that: The number of the filling compressors is four, and the number of the filling panels is five.

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