Maintenance device of detection equipment

Abstract

The utility model discloses a maintenance device for detection equipment, and the device comprises a cleaning assembly which comprises a cleaning plate and a cleaning material; the replacing assembly comprises a flattening roller and a removing roller; wherein the cleaning material is rolled and flattened by the flattening roller so as to be flatly attached to the upper surface of the cleaning plate, and the cleaning material is removed from the cleaning plate by the removing roller after cleaning is completed. From the above, the cleaning material is flatly and fixedly attached to the cleaning plate by using the flattening roller, so that a probe card in the detection equipment is prevented from being damaged due to unevenness of the cleaning material; and the used cleaning material can be automatically and quickly removed by using the removing roller, so that the execution speed of the maintenance work is accelerated, and the working efficiency of the maintenance device is improved.

Description

Technical Field

[0001] The present application relates to a maintenance device, and in particular to a maintenance device for semiconductor testing equipment. Background Art

[0002] With the booming development of portable electronic products in recent years, the development of various related products is also moving towards high density, high performance, and light, thin, short, and small trends. For this reason, the semiconductor industry has also developed various integrated multifunctional packaging forms in order to meet the requirements of light, thin, short, and high density of electronic products. Under the influence of this trend, the width of the circuits on the semiconductor components and the substrates used to carry the semiconductor components is also shrinking day by day, so that the same area of ​​semiconductor components and substrates can accommodate more circuits and components. For this reason, the industry has also developed various detection equipment to detect these semiconductor components and / or substrates, among which the probe card, which is often used in the semiconductor process to match the various circuits on the surface of the wafer for testing, is particularly important.

[0003] However, during the test process, the probe card may be attached with some foreign matter such as residues, so it must be cleaned and maintained with cleaning materials such as cleaning paper to remove the sticky foreign matter. However, the existing cleaning and maintenance method requires manual replacement of the cleaning paper, which is not only slow, but also easily generates bubbles when sticking the cleaning paper, making the cleaning paper uneven and affecting the cleaning effect. In severe cases, it may even cause damage to the probe card.

[0004] Therefore, how to overcome the above-mentioned problems of the prior art has become a difficult problem that needs to be overcome urgently in the industry. Utility Model Content

[0005] In view of the various deficiencies of the above-mentioned prior art, the present application provides a maintenance device for a detection equipment, the detection equipment includes a probe card, the maintenance device includes: a cleaning component, which includes a cleaning plate and a cleaning material for cleaning the probe card; and a replacement component, which includes a flattening roller and a removal roller; wherein the cleaning material is flattened by rolling on the flattening roller so as to be flat against the upper surface of the cleaning plate, and the cleaning component cleans the surface of the probe card by making the cleaning material contact it, and removes the cleaning material from the cleaning plate via the removal roller after cleaning is completed.

[0006] The present application also provides an application method of a maintenance device for a detection equipment, wherein the detection equipment includes a probe card, and the method includes: providing a cleaning component, placing a cleaning material on the upper surface of a cleaning plate, and rolling and flattening the cleaning material by a flattening roller in a replacement component so that it is flat against the cleaning plate; cleaning the detection equipment, so that the cleaning material of the cleaning component contacts the surface of the probe card to clean it; and removing the cleaning material, including removing the cleaning material from the cleaning plate of the cleaning component via a removal roller in the replacement component after completing the cleaning of the probe card surface.

[0007] In the aforementioned maintenance device for the detection equipment and the application method thereof, the replacement component also includes a placement structure for placing and taking the cleaning material.

[0008] In the aforementioned maintenance device for the detection equipment and the application method thereof, the surface of the removal roller is provided with a plurality of protrusions for grabbing the cleaning material.

[0009] In the aforementioned maintenance device for the detection equipment and the application method thereof, the cleaning plate is attached with unused cleaning material after the used cleaning material is removed.

[0010] In the aforementioned maintenance device for the detection equipment and the application method thereof, the cleaning assembly can be moved vertically so that the cleaning plate drives the cleaning material to contact the bottom side of the probe card from bottom to top for cleaning.

[0011] From the above, it can be seen that the present application utilizes a flattening roller to fix the cleaning material evenly onto the cleaning plate, thereby avoiding damage to the probe card in the detection equipment due to the unevenness of the cleaning material; and the removal roller can be used to automatically and quickly remove the used cleaning material, so as to speed up the execution of maintenance work and improve the working efficiency of the maintenance device. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figures 1A to 1E A partial side view schematic diagram of an embodiment of a maintenance device for a detection device and an application method thereof of the present application;

[0013] Figure 2 The present invention is a flowchart of an application method embodiment of the present invention.

[0014] Main component symbols

[0015] 10. Cleaning components

[0016] 11. Cleaning board

[0017] 12. Cleaning Materials

[0018] 20 Replacement components

[0019] 21 Flattening roller

[0020] 22 Remove the scroll wheel

[0021] 22k Protrusion

[0022] 23 Pick and place structure

[0023] T Testing Equipment

[0024] T h Detection head

[0025] T cd Probe Card

[0026] Steps S0, S11~S12, S21~S24. DETAILED DESCRIPTION

[0027] The following describes the implementation methods of the present application through specific embodiments. Those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification.

[0028] It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings attached to this specification are only used to match the contents disclosed in the specification for the understanding and reading of those skilled in the art, and are not used to limit the limiting conditions for the implementation of this application, so they have no substantial technical significance. Any structural modification, change in proportional relationship, or adjustment of size, without affecting the effects and purposes that can be achieved by this application, should still fall within the scope of the technical content disclosed in this application. At the same time, the terms such as "upper", "lower", "one", "first", and "second" cited in this specification are only for the convenience of description, and are not used to limit the scope of the implementation of this application. The change or adjustment of their relative relationship should also be regarded as the scope of the implementation of this application without substantially changing the technical content.

[0029] Figures 1A to 1E A partial side view schematic diagram of an embodiment of a maintenance device for a detection device and an application method thereof of the present application; Figure 2 The present invention is a flowchart of an application method embodiment of the present invention.

[0030] like Figure 1A As shown, the application method of the maintenance device of the detection equipment provided in this embodiment includes: providing a cleaning component 10, which includes a cleaning material 12 and a cleaning plate 11. The cleaning material 12 is used to clean a probe card T cd (probe card, see Figure 1C and Figure 1D ) of needle cleaning paper or needle cleaning film. Figure 1C and Figure 1D) must be targeted at a specific object under test (not shown), such as a wafer with a specific circuit structure formed on the surface, and a different probe card T corresponding to the object under test must be selected. cd Therefore, the cleaning material 12 must also be selected to match the probe card T to be cleaned. cd The corresponding form or model is avoided because the surface of the cleaning material 12 is close to the probe card T cd The probe card T cd damage.

[0031] Next, the cleaning material 12 is placed on the cleaning plate 11 by means of a replacement component 20. The replacement component 20 may include a placement structure 23 for placing and taking the cleaning material 12, such as a Bernoulli vacuum pad that uses vacuum suction to absorb and fix the cleaning material 12. The cleaning plate 11 may be, for example, a wide area polishing plate (WAPP), which is used to carry and fix the cleaning material 12 and drive the cleaning material 12 to move so that the cleaning material 12 contacts and cleans the probe card T. cd After cleaning, the cleaning material 12 is moved away from the probe card T. cd .

[0032] like Figure 1B As shown, after the cleaning material 12 is placed on the upper surface of the cleaning plate 11, a flattening roller 21 in the replacement component 20 can be rolled on the surface of the cleaning material 12 to flatten it, thereby avoiding bubbles between the cleaning material 12 and the cleaning plate 11, so that the cleaning material 12 can be flatly attached to the surface of the cleaning plate 11.

[0033] See also Figure 1C and Figure 1D Then clean the testing device T, mainly the probe card T therein. cd The testing device T includes a probe card T for fixing cd A detector head T h The cleaning plate 11 in the cleaning assembly 10 drives the cleaning material 12 to move until the cleaning material 12 contacts the probe card T. cd surface to place the probe card T cd Foreign matter (not shown) on the surface, such as wafer residues attached during previous testing, is transferred to the surface of the cleaning material 12 to clean the probe card T. cd When the cleaning is completed, the cleaning plate 11 in the cleaning assembly 10 drives the cleaning material 12 to move away from the probe card T. cd In one embodiment, the cleaning assembly 10 can be moved vertically so that the cleaning plate 11 therein drives the cleaning material 12 to move upward from bottom to contact the probe card T.cd After cleaning is completed, the cleaning material 12 is driven by the cleaning plate 11 to move toward the bottom side of the probe card T cd The bottom side moves downward from the probe card T cd .

[0034] like Figure 1E As shown, the cleaning material 12 is finally removed. cd After the surface cleaning process is completed, a removal roller 22 in the replacement component 20 is moved to a side adjacent to the edge of the surface of the cleaning material 12 in the cleaning component 10. The surface of the removal roller 22 may be provided with a plurality of protrusions 22k (e.g., spikes) for grabbing the cleaning material 12, so that the protrusions 22k on the surface of the removal roller 22 penetrate into the cleaning material 12 so that the cleaning material 12 adheres to the surface of the removal roller 22 from its edge, and then the removal roller 22 is rolled along the surface of the cleaning material 12 toward the other side edge of the cleaning material 12, so that the cleaning material 12 is rolled up and wrapped on the surface of the removal roller 22, thereby removing the cleaning material 12 from the cleaning plate 11.

[0035] After the used cleaning material 12 is removed from the cleaning plate 11, the above steps are repeated to attach new unused cleaning material 12 to the cleaning plate 11, and the probe card T in the testing device T is tested again. cd Carry out the next cleaning operation.

[0036] The above-described process is the basic operation of using the maintenance device. The maintenance device provided in this embodiment can be further used according to, for example, Figure 2The process shown in is used to control its work. For example, before the maintenance work is to be carried out, the first step is to take out / store the cleaning board and the cleaning material (step S0); then the cleaning board and the cleaning material are selected by manual selection or automatic selection by automated equipment (step S11), which mainly selects the cleaning material corresponding to the probe card to be cleaned and maintained and the cleaning board with the cleaning material attached; then the cleaning board and the cleaning material are transported (step S12) to transport the selected cleaning board and cleaning material to the detection equipment to be maintained and maintain it. As for the cleaning plates and cleaning materials in the maintenance equipment after use, it can also be started by taking out / storing the cleaning plates and cleaning materials (step S0); then removing the cleaning materials (step S21) to remove the old cleaning materials with foreign matter or residue from the cleaning plates; then selecting the cleaning materials (step S22) to select the form or model of the new cleaning materials to be attached. This step can also be selected by manual input of data, or automatically performed by the automated equipment according to the pre-set procedures and options. This embodiment has no special restrictions on this; then attaching the cleaning materials (step S23) to attach the selected cleaning materials to the surface of the cleaning plates; finally, storing the cleaning plates and cleaning materials (step S24) to store the cleaning plates with the attached cleaning materials together for the next maintenance work. The specific methods used to execute the relevant steps in this process example have been described above, so they will not be repeated here.

[0037] This embodiment also provides a maintenance device for a testing device T, wherein the testing device T includes a probe card T cd The maintenance device includes: a cleaning assembly 10, which includes a cleaning plate 11 and a cleaning plate 12 for cleaning the probe card T cd A cleaning material 12; and a replacement assembly 20, which includes a flattening roller 21 and a removal roller 22; wherein the cleaning material 12 is rolled and flattened by the flattening roller 21 to be flatly attached to the upper surface of the cleaning plate 11, and the cleaning assembly 10 is made to contact the cleaning material 12 with the probe card T cd The cleaning material 12 is removed from the cleaning plate 11 by the removal roller 22 after the cleaning is completed.

[0038] In some preferred embodiments, the replacement component 20 further includes a placement structure 23 for placing and taking the cleaning material 12 .

[0039] In some preferred embodiments, a plurality of protrusions 22 k for grabbing the cleaning material 12 are disposed on the surface of the removal roller 22 .

[0040] In some preferred embodiments, the cleaning plate 11 is reattached with unused cleaning material 12 after the used cleaning material 12 is removed.

[0041] In some preferred embodiments, the cleaning assembly 10 can be moved vertically so that the cleaning plate 11 drives the cleaning material 12 to contact the probe card T from bottom to top. cd to clean the underside of the

[0042] In summary, the present application utilizes a flattening roller to evenly fix the cleaning material onto the cleaning plate, thereby avoiding damage to the probe card in the detection equipment due to the unevenness of the cleaning material; and a removal roller can be used to automatically and quickly remove the used cleaning material, thereby speeding up the execution of maintenance work and improving the working efficiency of the maintenance device.

[0043] The above embodiments are only used to illustrate the principles and effects of the present application, and are not used to limit the present application. Any person skilled in the art may modify the above embodiments without violating the spirit and scope of the present application. Therefore, the scope of protection of the present application shall be as listed in the attached claims.

Claims

1. A maintenance device for a detection device, characterized in that: The detection device includes a probe card, and the maintenance device includes: a cleaning assembly comprising a cleaning plate and a cleaning material for cleaning the probe card; and A replacement assembly including a flattening roller and a removal roller; The cleaning material is rolled and flattened by the flattening roller to be flat on the surface of the cleaning plate, and the cleaning component cleans the probe card surface by making the cleaning material contact it, and removes the cleaning material from the cleaning plate by the removing roller after cleaning.

2. The maintenance device according to claim 1, characterized in that: The replacement component also includes a placement structure for placing and taking the cleaning material.

3. The maintenance device according to claim 1, characterized in that: The surface of the removal roller is provided with a plurality of protrusions for grabbing the cleaning material.

4. The maintenance device according to claim 1, characterized in that: The cleaning plate is reattached with unused cleaning material after the used cleaning material is removed.

5. The maintenance device according to claim 1, characterized in that: The cleaning assembly can be moved vertically so that the cleaning plate drives the cleaning material to contact the bottom side of the probe card from bottom to top for cleaning.

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