Aluminum boat for improving aluminum oxide skip plating on back surface of solar cell

Abstract

The utility model discloses an aluminum boat for improving aluminum oxide plating leakage on the back of a solar cell, which comprises a bottom substrate, edge strips are arranged on two sides of the bottom substrate, and boat tooth components for fixing silicon wafers are arranged at the tops of the edge strips. The boat tooth assembly comprises a plurality of large boat teeth arranged on the side edge of the bottom base plate and a plurality of gap plates used for connecting every two adjacent large boat teeth, at least two protruding small teeth arranged side by side are installed at the top of each gap plate, and two grooves located in the two sides of each protruding small tooth respectively are formed in the top face of each gap plate. According to the utility model, the bulged small teeth are additionally arranged on the platform boat teeth formed by the large boat teeth and the gap plate, so that the two silicon wafers of double insertion are separated, the chip mounting risk is reduced, and the back surfaces of the two silicon wafers of double insertion are uniformly coated without skip coating.

Description

Technical Field

[0001] The utility model relates to the technical field of aluminum boats, in particular to an aluminum boat for improving aluminum oxide leakage plating on the back of a solar cell. Background Art

[0002] The ALD micro-guide machine uses an aluminum boat as a carrier for silicon wafers. On the aluminum boat, the wafers are usually inserted in a way that two silicon wafers are vertically inserted back to back in the same boat teeth. However, since there is no spacer at the bottom of the aluminum boat, the two silicon wafers are easily in contact with each other in the boat teeth when the two silicon wafers are inserted. During the ventilation process, the opposite sides of the two silicon wafers cannot contact the gas, resulting in the failure of coating, and there are aluminum oxide plating marks on the appearance. Utility Model Content

[0003] In view of the deficiencies in the prior art, the purpose of the utility model is to provide an aluminum boat for improving the aluminum oxide leakage plating on the back of solar cells, so as to solve the problem proposed in the above background technology that when two silicon wafers are inserted into the aluminum boat, the two silicon wafers are easily in contact with each other in the boat teeth, thus affecting the coating.

[0004] To achieve the above object, the utility model provides the following technical solutions: an aluminum boat for improving aluminum oxide leakage plating on the back of a solar cell, comprising a bottom substrate, edge strips are installed on both sides of the bottom substrate, and a boat tooth assembly for fixing a silicon wafer is installed on the top of the edge strip;

[0005] The boat tooth assembly includes a plurality of large boat teeth arranged on the side of the bottom base plate and a plurality of gap plates for connecting two adjacent large boat teeth. At least two raised small teeth arranged side by side are installed on the top of the gap plate, and two grooves are opened on the top surface of the gap plate, which are respectively located on both sides of the raised small teeth.

[0006] Preferably, the large boat tooth is hollow, and the height of the large boat tooth is at least twice the height of the protruding small tooth.

[0007] Preferably, the cross-sectional shape of the raised small teeth is any one of a triangular shape and an arc raised shape.

[0008] Preferably, a plurality of circular hole grooves are provided on both sides of the bottom substrate;

[0009] A plug-in rod matched with the circular hole groove is installed on one side of the edge strip close to the bottom substrate.

[0010] Preferably, a rubber sleeve is glued to the inner wall of the circular hole groove to tightly connect the plug rod with the inner wall of the circular hole groove;

[0011] The diameter of the plug-in rod at one end close to the bottom substrate is smaller than the diameter of the middle portion and the other end.

[0012] Preferably, a plurality of evenly arranged strip-shaped protrusions are provided on the top of the bottom substrate, and the height of the top of the strip-shaped protrusions is equal to the height of the bottom wall of the groove.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] 1. The utility model adds raised small teeth on the platform boat teeth composed of the large boat teeth and the gap plates, thereby separating the two double-inserted silicon wafers, effectively avoiding the risk of patching, so that during the subsequent gas introduction process, the sides of the two double-inserted silicon wafers can contact the gas, so that the back side is evenly coated without missing plating.

[0015] 2. The bottom substrate and the edge strips on both sides of the utility model are in a detachable assembly state, so that it is convenient to replace boat tooth components of different sizes without replacing the entire aluminum boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the split structure of the bottom substrate and the edge strip of the utility model;

[0018] Figure 3 It is a structural schematic diagram of the boat tooth assembly of the utility model;

[0019] Figure 4 It is a schematic diagram of the planar structure of the raised small teeth of the large boat tooth of the utility model.

[0020] In the figure: 1, bottom substrate; 101, round hole groove; 102, strip-shaped pattern protrusion; 2, edge strip; 201, plug-in rod; 3, boat tooth assembly; 301, large boat tooth; 302, gap plate; 303, protruding small tooth; 304, groove. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] To solve the problem that when two silicon wafers are inserted into the aluminum boat, the two silicon wafers are easily in contact with each other in the boat teeth, thus affecting the coating, please refer to Figure 1-Figure 4The utility model provides an aluminum boat for improving aluminum oxide leakage on the back side of a solar cell, comprising a bottom substrate 1, edge strips 2 are installed on both sides of the bottom substrate 1, a boat tooth assembly 3 for fixing a silicon wafer is installed on the top of the edge strips 2, the boat tooth assembly 3 comprises a plurality of large boat teeth 301 arranged on the side of the bottom substrate 1 and a plurality of gap plates 302 for connecting two adjacent large boat teeth 301, at least two raised small teeth 303 arranged side by side are installed on the top of the gap plate 302, and two grooves 304 are provided on the top surface of the gap plate 302, which are respectively located on both sides of the raised small teeth 303. By adding raised small teeth 303 on the platform boat teeth formed by the large boat teeth 301 and the gap plates 302, when the silicon wafer is placed on the aluminum boat, the bottom falls on both sides of the raised small teeth 303, thereby separating the two double-inserted silicon wafers so that the back sides do not touch each other. Later, during the process of introducing gas, due to the force of the raised small teeth 303, it can be ensured that the opposite sides of the two double-inserted silicon wafers can contact the gas, thereby effectively avoiding the occurrence of plating leakage.

[0023] Specifically, the large boat teeth 301 are hollowed out, and the height of the large boat teeth 301 is at least twice the height of the protruding small teeth 303. The hollowed-out arrangement of the large boat teeth 301 can generate gaps that allow gas to flow between adjacent silicon wafers, thereby increasing the fluidity of the gas flow.

[0024] More specifically, the cross-sectional shape of the protruding small teeth 303 is any one of a triangular shape and a circular arc protrusion shape. The triangular shape and the circular arc protrusion shape of the protruding small teeth 303 play the same spacing role, aiming to improve the aluminum boat insert effect, so that the spacing between the silicon wafers in the boat teeth is increased, and the risk of patching is reduced.

[0025] like Figure 2 and Figure 3 As shown, a plurality of circular hole grooves 101 are provided on both sides of the bottom substrate 1, and a plug-in rod 201 matching the circular hole groove 101 is installed on the side of the edge strip 2 close to the bottom substrate 1, and a rubber sleeve is glued to the inner wall of the circular hole groove 101 to tightly connect the plug-in rod 201 with the inner wall of the circular hole groove 101, and the diameter of the plug-in rod 201 close to one end of the bottom substrate 1 is smaller than the diameter of the middle part and the other end. The bottom substrate 1 and the edge strips 2 on both sides are in a detachable combination state, so that it is convenient to replace the boat tooth components 3 of different sizes. In actual assembly, the assembly operation can be completed by matching the plurality of plug-in rods 201 installed on the edge strip 2 with the plurality of circular hole grooves 101 opened on the side of the bottom substrate 1 one by one, and applying extrusion force in cooperation. In the process, the elastic effect of the rubber sleeve itself can be used to increase the firmness of the plug-in rod 201 in the circular hole groove 101.

[0026] Specifically, a plurality of evenly arranged strip-shaped protrusions 102 are provided on the top of the bottom substrate 1, and the height of the top of the strip-shaped protrusions 102 is equal to the height of the bottom wall of the groove 304. The plurality of strip-shaped protrusions 102 are used to support the middle of the silicon wafer fixed between the two boat tooth assemblies 3, thereby improving the stability of the silicon wafer fixation and increasing the gap at the bottom of the silicon wafer to allow airflow.

[0027] It should be noted that the terms "comprises", "includes" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or apparatus that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or apparatus.

[0028] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An aluminum boat for improving aluminum oxide leakage on the back of a solar cell, comprising a bottom substrate (1), characterized in that: Edge strips (2) are installed on both sides of the bottom substrate (1), and a boat tooth assembly (3) for fixing the silicon wafer is installed on the top of the edge strip (2); The boat tooth assembly (3) comprises a plurality of large boat teeth (301) arranged on the side of the bottom substrate (1) and a plurality of gap plates (302) for connecting two adjacent large boat teeth (301), at least two protruding small teeth (303) arranged side by side are installed on the top of the gap plate (302), and two grooves (304) are respectively located on both sides of the protruding small teeth (303) on the top surface of the gap plate (302).

2. The aluminum boat for improving aluminum oxide leakage on the back of solar cells according to claim 1, characterized in that: The large boat tooth (301) is hollow, and the height of the large boat tooth (301) is at least twice the height of the protruding small tooth (303).

3. The aluminum boat for improving aluminum oxide leakage on the back of solar cells according to claim 2, characterized in that: The cross-sectional shape of the protruding small teeth (303) is any one of a triangular shape and a circular arc protrusion shape.

4. The aluminum boat for improving aluminum oxide leakage on the back of solar cells according to claim 1, characterized in that: A plurality of circular hole grooves (101) are provided on both sides of the bottom substrate (1); A plug-in rod (201) adapted to the circular hole groove (101) is installed on one side of the edge strip (2) close to the bottom substrate (1).

5. The aluminum boat for improving aluminum oxide leakage on the back of solar cells according to claim 4, characterized in that: The inner wall of the circular hole groove (101) is glued with a rubber sleeve for tightly connecting the plug rod (201) and the inner wall of the circular hole groove (101); The diameter of the plug-in rod (201) at one end close to the bottom substrate (1) is smaller than the diameter of the middle portion and the other end.

6. The aluminum boat for improving aluminum oxide leakage on the back of solar cells according to claim 1, characterized in that: The top of the bottom substrate (1) is provided with a plurality of evenly arranged stripe-shaped protrusions (102), and the height of the top of the stripe-shaped protrusions (102) is equal to the height of the bottom wall of the groove (304).

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