Multi-specification tool for monocrystalline silicon graphite heater
By designing a multi-specified single-crystal silicon graphite heater tooling, the problems of material waste and non-universal in the prior art are solved, and efficient and universal tooling design is achieved, which significantly improves work efficiency and inner diameter coverage.
Patent Information
- Application Number
- CN202422088232.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-27
- Publication Date
- 2025-06-06
- Estimated Expiration
- 2034-08-27
AI Technical Summary
In the existing single crystal silicon production, the annular heater design of graphite main heater leads to serious waste of materials and tooling auxiliary materials, and the tooling fixtures are long and not universal, which cannot meet the needs of heaters of different sizes.
A single crystal silicon graphite heater multi-spec tooling is designed, with a base in an annular step shape, equipped with multiple graphite patches and compression components, and rapid mold change and versatility are achieved through threaded connections and hollow aluminum alloy press plates.
The tooling significantly reduces the waste of graphite tooling materials and auxiliary materials, improves work efficiency and versatility, can cover more than 80% of the heater inner diameter, and reduces the time cost of clamping and rectifying.
Smart Images
Figure CN222948512U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of single crystal silicon production, in particular to a multi-specification tooling for a single crystal silicon graphite heater. Background Art
[0002] In the production of monocrystalline silicon, graphite main heaters are required. However, the current mainstream ring heaters are the most wasteful of materials and tooling auxiliary materials. The tooling fixtures used in the past require two pieces of graphite ring materials to make the tooling, and then the workpiece is fixed by a wooden pressure plate. This method takes too long to operate manually, and the inner diameters of the products are different and cannot be used universally. It also wastes too much graphite material and the cost of making tooling is too high. Utility Model Content
[0003] The utility model aims to provide a multi-specification tooling for a single crystal silicon graphite heater, which has a simple, reasonable and compact structure and strong versatility, can greatly reduce the waste of graphite tooling materials and auxiliary materials and realize rapid mold change.
[0004] The technical solution adopted by the utility model to solve its technical problems is: a multi-specification tooling for a single crystal silicon graphite heater, whose structure includes a base, a plurality of graphite patches, a pressure ring and a clamping assembly, the base is in the shape of an annular step, each step of the base is provided with a plurality of graphite patches, and the clamping assembly is arranged on the upper part of the pressure ring.
[0005] Furthermore, each step surface of the base and the graphite patch are respectively provided with a plurality of threaded holes, and the fastening bolts pass through the threaded holes of the graphite patch and are threadedly connected with the threaded holes of the base.
[0006] Furthermore, the clamping assembly includes a first pressing plate, a second pressing plate and a fastener, wherein the first pressing plate and the second pressing plate are cross-arranged, and the fastener passes through the center of the intersection of the first pressing plate and the second pressing plate to be fastened.
[0007] Furthermore, the lower ends of both sides of the pressing plate are respectively provided with card slots that cooperate with the heater body.
[0008] Furthermore, the pressing plate 1 and the pressing plate 2 are both made of hollow aluminum alloy.
[0009] Beneficial effects of the utility model:
[0010] The tooling of the utility model designs the base into a stepped tower shape, and a number of arc-shaped graphite patches are arranged on each step surface, which can meet the use of heaters of different sizes and has strong versatility. Among them, the graphite patches and the base are made of cast iron, which is stable in processing, cost-effective, and reduces the deformation of the tooling. Discarded edge materials and special materials can be used to make patches for installation and use, saving large-sized annular materials and reducing the space for tooling placement by more than 90%. When the graphite patch has no interference processing or the thickness has not reached the end of its life, there is no need to perform installation actions. It only needs to be polished and adjusted to the corresponding size. It can be installed and used repeatedly for more than seventeen times, and the time cost of clamping and alignment is reduced. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] Figure 1 This is a schematic diagram of the structure of the utility model in use state;
[0012] Figure 2 This is a schematic diagram of the graphite patch and base installation structure;
[0013] Figure 3 for Figure 2 Schematic diagram of the structure after removing some graphite patches;
[0014] Figure 4 is a schematic diagram of the structure of the base;
[0015] Figure 5 It is a structural schematic diagram of the clamping component.
[0016] In the figure:
[0017] 1 base, 2 graphite patch, 3 pressure ring, 4 clamping assembly, 41 pressure plate 1, 42 pressure plate 2, 43 fastener, 5 heater body, 6 mounting hole 1, 7 mounting hole 2, DETAILED DESCRIPTION
[0018] The following is a detailed description of a multi-specification tooling for a single crystal silicon graphite heater of the utility model with reference to the accompanying drawings of the specification.
[0019] like Figures 1 to 4As shown, the utility model proposes a multi-specification tooling for a single crystal silicon graphite heater, including a base 1, a plurality of graphite patches 2, a pressure ring 3 and a clamping assembly 4, wherein the base 1 is in the shape of an annular step, and each step of the base 1 is provided with a plurality of graphite patches 2, and the clamping assembly 4 is arranged on the upper part of the pressure ring 3. Each step surface of the base 1 and the graphite patch 2 are respectively provided with a plurality of threaded holes, and the fastening bolts pass through the threaded holes of the graphite patches and are threadedly connected with the threaded holes of the base. The diameter of each layer of the base is different. According to the MES system query, the details of the horizontal round parts products in 2023 total 5961 pieces, and the tower patch tooling size (D664-D1070) can cover 4867 pieces, accounting for as high as 81.6%, and is divided into 4 size intervals according to the specific sizes of the commonly processed products. D660-D756 D756-D872 D870-D1000D1000-1106 are designed as the specific sizes of each layer. According to the specifications of the heater, a layer of corresponding size can be selected for installation and fixation. It is easy to use, short installation time, and eliminates alignment time, which greatly improves work efficiency, versatility, and high matching degree. It covers cylinder products with inner diameters of D664-D1070, accounting for more than 80% of the product quantity.
[0020] like Figure 5 As shown, the clamping assembly 4 includes a clamping plate 1 41, a clamping plate 2 42 and a fastener 43. The clamping plate 1 41 and the clamping plate 2 42 are arranged crosswise. The lower ends of the two sides of the clamping plate 2 42 are respectively provided with a clamping groove that cooperates with the heater body 5. The fastener 43 is a long rod bolt. The free end of the long rod screw passes through the center of the intersection of the clamping plate 1 41 and the clamping plate 2 42 and is fastened. The clamping plate 1 41 and the clamping plate 2 42 are both made of hollow aluminum alloy to eliminate clamping deformation. The sizes of the clamping plates 1 and 2 can be selected according to the different specifications of the heater.
[0021] Use discarded edge materials and special materials to make graphite patches for installation, saving large-sized ring materials and reducing the space for tooling by more than 90%. When the graphite patch has no interference processing or the thickness has not reached the end of its life, there is no need to install it. Just grind the patch and adjust it to the corresponding size. It can be installed and reused more than 17 times, and the time cost of clamping and alignment is reduced.
[0022] The above description is only used to illustrate some principles of the utility model. This specification is not intended to limit the utility model to the specific structure and application scope shown and described. Therefore, all corresponding modifications and equivalents that may be used belong to the patent scope applied for the utility model.
[0023] Except for the technical features described in the specification, the other technical features are known technologies to those skilled in the art.
Claims
1. A multi-specification tooling for a single crystal silicon graphite heater, characterized in that: It comprises a base, a plurality of graphite patches, a pressure ring and a clamping assembly. The base is in the shape of an annular step, each step of the base is provided with a plurality of graphite patches, and the clamping assembly is arranged on the upper part of the pressure ring.
2. The multi-specification tooling for a single crystal silicon graphite heater according to claim 1 is characterized in that: Each step surface of the base and the graphite patch are respectively provided with a plurality of threaded holes, and the fastening bolts pass through the threaded holes of the graphite patch and are threadedly connected with the threaded holes of the base.
3. The multi-specification tooling for a single crystal silicon graphite heater according to claim 1 is characterized in that: The clamping assembly includes a first pressing plate, a second pressing plate and a fastener. The first pressing plate and the second pressing plate are cross-arranged, and the fastener passes through the center of the intersection of the first pressing plate and the second pressing plate to fasten them.
4. The multi-specification tooling for a single crystal silicon graphite heater according to claim 3 is characterized in that: The lower ends of both sides of the pressing plate are respectively provided with clamping grooves which are matched with the heater body.
5. The multi-specification tooling for single crystal silicon graphite heater according to claim 3 is characterized in that: The first pressing plate and the second pressing plate are both made of hollow aluminum alloy.