Sand blasting cleaning platform for jig used for sputtering equipment

Abstract

The utility model relates to the technical field of sand blasting platforms, in particular to a sand blasting cleaning platform for a jig used by sputtering equipment, which comprises a sand blasting mechanism and a positioning mechanism, the positioning mechanism comprises a rotating disc, the rotating disc is provided with a plurality of positioning discs, the positioning discs can rotate on the rotating disc, and the positioning discs are provided with positioning grooves for positioning workpieces; the sand blasting mechanism comprises a sand blasting pipe arranged above the positioning discs, and the sand blasting pipe is connected with a sand blasting head facing one of the positioning discs; articles needing to be subjected to sand blasting cleaning are sequentially placed in the positioning grooves of the positioning discs, the rotating disc rotates by the angle of one positioning disc, one positioning disc is aligned with the sand blasting head, the sand blasting head sprays spraying materials to clean the articles in the positioning grooves, and when the spraying materials are sprayed, the positioning disc rotates by one circle, so that most areas of the articles can be covered by the spraying materials; the cleaning comprehensiveness is improved, and the cleanliness is improved; and automatic sand blasting cleaning treatment is achieved, and a large amount of spraying materials can be saved.

Description

Technical Field

[0001] The utility model relates to the technical field of sandblasting platforms, and particularly relates to a sandblasting and cleaning platform for a jig used in a sputtering device. Background Art

[0002] With the continuous improvement of the performance of thin-film devices, the line width is getting smaller and smaller, and the requirements for magnetron sputtering film layers are also getting higher and higher. Especially in the manufacturing process of large-scale integrated circuit chips, there are strict requirements for the mechanical particle contamination of wafers inside the equipment and the purity of film layer materials, which are directly related to the yield of products. The magnetron sputtering equipment in the integrated circuit process line generally has a cluster structure, with a polygonal transfer chamber in the middle, an external preloading chamber and multiple process chambers. The preloading chamber is used for loading and unloading wafers. After pumping to vacuum, the wafers are transferred between the preloading chamber and the process chambers through a vacuum manipulator arranged in the transfer chamber. The process chamber adopts a single-target and single-wafer mode, and different film layers are coated in different process chambers to avoid cross-contamination between targets.

[0003] In a sputtering machine, its common consumable is the MASK jig. After the MASK jig is used for a period of time, it needs to be aligned and cleaned. Most of the existing cleaning methods are fixed in a positioning fixture, and a sandblasting head is held by hand to perform multi-directional sandblasting and cleaning on the MASK jig in the positioning fixture. This sandblasting effect will consume a relatively high cost. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a sandblasting and cleaning platform for a jig used in a sputtering device in view of the deficiencies of the prior art.

[0005] To achieve the above purpose, the technical solution of the utility model is as follows:

[0006] A sandblasting and cleaning platform for a jig used in a sputtering device includes a sandblasting mechanism and a positioning mechanism. The positioning mechanism includes a rotating disk, the rotating disk is provided with a plurality of positioning disks, the positioning disks can rotate on the rotating disk, and the positioning disks are provided with positioning grooves for positioning workpieces; the sandblasting mechanism includes a sandblasting pipe arranged above the positioning disk, and the sandblasting pipe is connected with a sandblasting head facing one of the positioning disks.

[0007] Further: A transmission mechanism for driving the rotation of the rotating disk is arranged at the bottom of the rotating disk. The transmission mechanism includes a support shaft for rotatably supporting the rotating disk, and the rotating disk is provided with a rotating hole rotatably matched with the support shaft.

[0008] Further: The transmission mechanism further includes a plurality of transmission shafts installed at the bottom of the rotating disk, and a belt transmission member matched with the transmission shafts. The belt transmission member is respectively in transmission cooperation with the plurality of transmission shafts.

[0009] Further: The transmission shaft is formed with meshing grooves, the belt transmission member includes a toothed belt that meshes and drives with the meshing grooves of the transmission shaft, and further includes a plurality of synchronous pulleys that are in transmission cooperation with the toothed belt. The toothed belt moves around the plurality of synchronous pulleys and simultaneously meshes and drives with the transmission shaft to drive the transmission shaft to revolve around the support shaft.

[0010] Further: The number of transmission shafts is four, and the toothed belt is always in transmission connection with three adjacent transmission shafts among them.

[0011] Further: The positioning disk is provided with a positioning shaft for rotatably supporting the positioning disk and a positioning hole for installing the positioning shaft, and the rotating disk is further provided with a driving motor for driving the positioning shaft to rotate.

[0012] Further: A positioning sleeve is arranged at the top of the positioning hole. The positioning sleeve is fixedly installed at the top of the rotating disk. The positioning sleeve is in rotational cooperation with the positioning shaft, and the driving motor is installed at the bottom of the rotating disk.

[0013] Further: The sandblasting mechanism further includes an adjusting rod and an adjusting component slidably installed on the adjusting rod. The adjusting component includes an adjusting seat that is loosely connected to the adjusting rod. The adjusting seat is installed with a first connecting rod, and the first connecting rod is movably connected to the sandblasting head.

[0014] Further: A second connecting rod capable of swinging longitudinally is installed at the end of the first connecting rod, and the second connecting rod is connected to the sandblasting head.

[0015] Further: The number of sandblasting heads is two, and the number of adjusting components is two.

[0016] The beneficial effects of the present utility model: The articles to be sandblasted and cleaned are sequentially placed into the positioning grooves of the positioning disk. The rotating disk rotates by an angle of one positioning disk, so that one of the positioning disks is aligned with the sandblasting head. The sandblasting head sprays the spraying material to clean the articles in the positioning grooves. When spraying the spraying material, the positioning disk rotates one week, so that most areas of the articles can be covered by the spraying material, improving the comprehensiveness of cleaning and increasing the cleanliness; Subsequently, the positioning disk continues to rotate by an angle of one positioning disk, and the second positioning disk is aligned with the sandblasting head. The sandblasting head sprays the spraying material to clean the positioning disk, realizing automatic sandblasting and cleaning treatment and saving a large amount of spraying material. Description of the Drawings

[0017] Figure 1 It is a schematic structural diagram of the sandblasting and cleaning platform.

[0018] Figure 2 It is a schematic structural diagram of the positioning mechanism.

[0019] Figure 3 It is a schematic structural diagram of the sandblasting mechanism.

[0020] The reference numerals include:

[0021] 1 - Positioning mechanism,

[0022] 11 - Rotating disk, 12 - Support shaft, 13 - Rotating hole, 14 - Transmission shaft, 15 - Engaging groove,

[0023] 16 - Toothed belt, 17 - Synchronous pulley, 18 - Driving pulley,

[0024] 2 - Positioning disk,

[0025] 21 - Positioning groove, 22 - Positioning shaft, 23 - Positioning hole, 24 - Driving motor, 25 - Positioning sleeve,

[0026] 3 - Sandblasting mechanism,

[0027] 31 - Adjusting rod, 32 - Adjusting seat, 33 - First connecting rod, 34 - Second connecting rod, 35 - Sandblasting head,

[0028] 36 - Sandblasting pipe. Detailed implementation manner

[0029] The present utility model will be described in detail below with reference to the accompanying drawings.

[0030] As Figures 1 - 3 shown, a sandblasting and cleaning platform for a jig used in a sputtering device includes a sandblasting mechanism 3 and a positioning mechanism 1. The positioning mechanism 1 includes a rotating disk 11. The rotating disk 11 is provided with a plurality of positioning disks 2. The positioning disks 2 can rotate on the rotating disk 11. The positioning disks 2 are provided with positioning grooves 21 for positioning workpieces. The sandblasting mechanism 3 includes a sandblasting pipe 36 arranged above the positioning disk 2. The sandblasting pipe 36 is connected with a sandblasting head 35 facing one of the positioning disks 2.

[0031] The items to be sandblasted and cleaned are sequentially placed into the positioning grooves 21 of the positioning disks 2. The rotating disk 11 rotates by an angle of one positioning disk 2, so that one of the positioning disks 2 is aligned with the sandblasting head 35. The sandblasting head 35 sprays the spraying material to clean the items in the positioning groove 21. When spraying the spraying material, the positioning disk 2 rotates one week, so that most areas of the items can be covered by the spraying material, improving the comprehensiveness of cleaning and increasing the cleanliness. Subsequently, the positioning disk 2 continues to rotate by an angle of one positioning disk 2, and the second positioning disk 2 is aligned with the sandblasting head 35. The sandblasting head 35 sprays the spraying material to clean this positioning disk 2, realizing automatic sandblasting and cleaning treatment and saving a large amount of spraying material.

[0032] Specifically, a transmission mechanism for driving the rotating disk 11 to rotate is provided at the bottom of the rotating disk 11. The transmission mechanism includes a support shaft 12 for rotatably supporting the rotating disk 11. The rotating disk 11 is provided with a rotating hole 13 that rotates in cooperation with the support shaft 12. The rotating disk 11 can rotate around the support shaft 12 through the cooperation of the support shaft 12 and the rotating hole 13.

[0033] Preferably, a bearing seat is installed in the rotation hole 13, and the bearing seat is rotatably connected to the support shaft 12, which can improve the rotation stability of the rotating disc 11.

[0034] The transmission mechanism further includes a plurality of transmission shafts 14 installed at the bottom of the rotating disc 11, and a belt transmission member that cooperates with the transmission shafts 14. The belt transmission member is respectively in transmission cooperation with the plurality of transmission shafts 14. When the belt transmission member moves, it will be in transmission cooperation with the transmission shafts 14, and the transmission shafts 14 will be toggled and rotate around the support shaft 12 in a revolution, so that the positioning disc 2 of the rotating disc 11 can sequentially pass through the sandblasting head 35 and be aligned with the sandblasting head 35.

[0035] Specifically, the transmission shaft 14 is formed with a meshing groove 15. The belt transmission member includes a toothed belt 16 that meshes and transmits with the meshing groove 15 of the transmission shaft 14, and also includes a plurality of synchronous pulleys 17 that are in transmission cooperation with the toothed belt 16. The toothed belt 16 moves around the plurality of synchronous pulleys 17 and is simultaneously in meshing transmission with the transmission shaft 14. The transmission shaft 14 is in transmission cooperation with the toothed belt 16 through the meshing groove 15, thereby toggling the transmission shaft 14 to revolve around the support shaft 12.

[0036] Specifically, the number of the transmission shafts 14 is four, and the number of the positioning discs 2 is four. The transmission shafts 14 and the positioning discs 2 are both arranged in an annular and equidistant manner on the rotating disc 11. The toothed belt 16 always maintains a transmission connection with three adjacent transmission shafts 14 among them. After the rotating disc 11 rotates by an angle of one positioning disc 2, the toothed belt 16 always maintains a transmission connection with three other adjacent transmission shafts 14.

[0037] One of the synchronous pulleys 17 is a driving pulley 18, and the driving pulley 18 rotates intermittently under the drive of a servo motor to ensure that the positioning disc 2 can sequentially pass through the sandblasting head 35.

[0038] The positioning disc 2 is provided with a positioning shaft 22 for rotatably supporting the positioning disc 2 and a positioning hole 23 for installing the positioning shaft 22. The rotating disc 11 is also provided with a driving motor 24 for driving the positioning shaft 22 to rotate. The sandblasting head 35 sprays on the positioning disc 2. After the positioning disc 2 is aligned with the sandblasting head 35, when the sandblasting head 35 sprays the spraying material, the driving motor 24 can drive the positioning shaft 22 to rotate one week, so that the positioning disc 2 rotates in the positioning hole 23, and the sprayed spraying material can cover most areas of the positioning disc 2, realizing efficient sandblasting and cleaning.

[0039] Preferably, a positioning sleeve 25 is provided at the top of the positioning hole 23. The positioning sleeve 25 is fixedly installed at the top of the rotating disc 11. The positioning sleeve 25 is rotatably matched with the positioning shaft 22, which can further improve the rotation stability of the positioning shaft 22, thereby improving the rotation stability of the positioning disc 2. The driving motor 24 is installed at the bottom of the rotating disc 11.

[0040] The sandblasting mechanism 3 further includes an adjusting rod 31 and an adjusting component slidably mounted on the adjusting rod 31. The adjusting component includes an adjusting seat 32 that is loosely connected to the adjusting rod 31. The adjusting seat 32 is provided with a first connecting rod 33. The first connecting rod 33 is movably connected to the sandblasting head 35. The end of the first connecting rod 33 is provided with a second connecting rod 34 that can swing longitudinally. The second connecting rod 34 is connected to the sandblasting head 35. By the rotational cooperation between the second connecting rod 34 and the first connecting rod 33, the angle of the second connecting rod 34 can be adjusted, so that the sandblasting head 35 mounted on the second connecting rod 34 can adjust the angle. Moreover, according to the size of the article, the position of the adjusting seat 32 can be adjusted, so that the sandblasting head 35 can accurately correspond to the article.

[0041] Preferably, the number of sandblasting heads 35 is two, and the number of adjusting components is two. By using two sandblasting heads 35, the spraying areas of the two sandblasting heads 35 are different, which can increase the spraying area, further increase the area covered by the spraying material of the positioning disk 2, and further improve the sandblasting and cleaning effect.

[0042] In summary, it can be seen that the present utility model has the excellent characteristics described above, so that it can enhance the efficiency that has never existed in the prior art during use and has practicability, becoming a product with extremely high practical value.

[0043] The above content is only the preferred embodiment of the present utility model. For those of ordinary skill in the art, according to the idea of the present utility model, there will be changes in the specific implementation manner and application scope. The content of this specification should not be construed as a limitation to the present utility model.

Claims

1. A sandblasting cleaning platform for a sputtering device using a jig, comprising a sandblasting mechanism and a positioning mechanism, characterized in that: The positioning mechanism includes a rotating disk, which is provided with a plurality of positioning disks. The positioning disks can rotate on the rotating disk, and the positioning disks are provided with positioning grooves for positioning the workpiece; the sandblasting mechanism includes a sandblasting tube arranged above the positioning disk, and the sandblasting tube is connected to a sandblasting head facing one of the positioning disks.

2. A sandblasting cleaning platform for a jig used in sputtering equipment according to claim 1, characterized in that: A transmission mechanism for driving the rotating disk to rotate is arranged at the bottom of the rotating disk. The transmission mechanism comprises a support shaft for rotatably supporting the rotating disk. The rotating disk is provided with a rotating hole rotatably matched with the support shaft.

3. A sandblasting cleaning platform for a jig used in sputtering equipment according to claim 2, characterized in that: The transmission mechanism also includes a plurality of transmission shafts installed at the bottom of the rotating disk, and belt transmission members matched with the transmission shafts, and the belt transmission members are respectively matched with the plurality of transmission shafts for transmission.

4. A sandblasting cleaning platform for a jig used in sputtering equipment according to claim 3, characterized in that: The transmission shaft is formed with an engagement groove, and the belt transmission member includes a toothed belt that engages with the engagement groove of the transmission shaft for transmission, and also includes multiple synchronous wheels that cooperate with the toothed belt transmission. The toothed belt moves around the multiple synchronous wheels and engages with the transmission shaft for transmission, so as to drive the transmission shaft to revolve around the support shaft.

5. A sandblasting cleaning platform for a jig used in sputtering equipment according to claim 4, characterized in that: There are four transmission shafts, and the toothed belt is always in transmission connection with three adjacent transmission shafts.

6. The sandblasting cleaning platform for a jig used in sputtering equipment according to claim 1, characterized in that: The positioning plate is provided with a positioning shaft for rotatably supporting the positioning plate and a positioning hole for installing the positioning shaft. The rotating plate is also provided with a driving motor for driving the positioning shaft to rotate.

7. A sandblasting cleaning platform for a jig used in sputtering equipment according to claim 6, characterized in that: A positioning sleeve is arranged on the top of the positioning hole. The positioning sleeve is fixedly mounted on the top of the rotating disk. The positioning sleeve is rotationally matched with the positioning shaft. The driving motor is mounted on the bottom of the rotating disk.

8. The sandblasting cleaning platform for a jig used in sputtering equipment according to claim 1, characterized in that: The sandblasting mechanism also includes an adjusting rod and an adjusting assembly slidably mounted on the adjusting rod. The adjusting assembly includes an adjusting seat loosely connected to the adjusting rod. The adjusting seat is equipped with a first connecting rod, and the first connecting rod is movably connected to the sandblasting head.

9. A sandblasting cleaning platform for a jig used in sputtering equipment according to claim 8, characterized in that: A second connecting rod capable of longitudinal swinging is installed at the end of the first connecting rod, and the second connecting rod is connected to the sandblasting head.

10. A sandblasting cleaning platform for a jig used in sputtering equipment according to claim 9, characterized in that: The number of the sandblasting heads is two, and the number of the adjusting components is two.

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