Quartz furnace tube with high stability

Abstract

The utility model relates to the technical field of crystal growth, and discloses a high-stability quartz furnace tube which comprises a furnace tube body, a furnace door is arranged on the rear side of the furnace tube body, a fixing block is fixedly connected to the front side of the furnace tube body, and a limiting ring groove is formed in the outer surface of the fixing block. Limiting blocks are fixedly connected to the left side and the right side of the outer surface of the limiting ring groove, an air inlet pipe and an exhaust pipe are arranged on the front side of the fixing block, the rear side of the air inlet pipe and the rear side of the exhaust pipe extend into the furnace tube body, switch valves are arranged on the air inlet pipe and the exhaust pipe, and two protective shells are arranged on the front side of the furnace tube body; the gas inlet pipe and the gas outlet pipe extend out of two protective shells, clamping mechanisms are arranged on the two protective shells, and the two protective shells are matched with the fixing blocks through the clamping mechanisms, so that the gas inlet pipe and the gas outlet pipe of the quartz furnace tube can be protected in the manner, and the gas inlet pipe and the gas outlet pipe are not easy to collide and damage; and the safety and the stability of the quartz furnace tube in use are ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal growth, in particular to a quartz furnace tube with high stability. Background Art

[0002] Quartz is one of the main rock-forming minerals. Generally, it refers to low-temperature quartz, which is the most widely distributed mineral in the quartz family. Due to a series of excellent physical and chemical properties, quartz is often made into quartz furnace tubes, etc. Quartz furnace tubes are usually used in conjunction with diffusion furnaces and are commonly used for high-temperature diffusion of silicon wafers in semiconductor processing. During the high-temperature diffusion process, the silicon wafers together with the silicon wafer brackets are placed in the quartz furnace tube for the process.

[0003] An air inlet pipe and an exhaust pipe are provided on the quartz furnace tube. In the prior art, the air inlet pipe and the exhaust pipe are relatively slender and are easily damaged by bumps during transportation and storage, which results in easy damage to the quartz furnace tube and affects the safety and stability of the use of the quartz furnace tube. Content of the Utility Model

[0004] Aiming at the deficiencies of the prior art, the utility model provides a quartz furnace tube with high stability, which has the function of being able to protect the air inlet pipe and the exhaust pipe of the quartz furnace tube, thereby making it not easy to be damaged by bumps and ensuring the safety and stability of the quartz furnace tube during use.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A quartz furnace tube with high stability, including a furnace tube body, a furnace door is arranged at the rear side of the furnace tube body, a fixing block is fixedly connected to the front side of the furnace tube body, and a limiting ring groove is opened on the outer surface of the fixing block;

[0006] Limiting blocks are fixedly connected to both the left side and the right side of the outer surface of the limiting ring groove, and an air inlet pipe and an exhaust pipe are arranged at the front side of the fixing block;

[0007] The rear sides of the air inlet pipe and the exhaust pipe extend into the interior of the furnace tube body, and switch valves are arranged on both the air inlet pipe and the exhaust pipe. Two protective shells are arranged on the front side of the furnace tube body, and the air inlet pipe and the exhaust pipe extend out of the two protective shells;

[0008] A clamping mechanism is arranged on the two protective shells, and the two protective shells are adapted to the fixing block through the clamping mechanism;

[0009] The clamping mechanism includes two limiting rings, two limiting grooves, a rotating groove, a rotating clamping block, a rotating shaft, a slot, a control groove, a control rod, a clamping groove, a connecting groove, a plug rod groove, a connecting block and a plug rod.

[0010] Preferably, the two limiting rings are fixedly connected to the inner surfaces of the two protective shells, and the two limiting rings are adapted to the limiting ring groove;

[0011] Two limiting grooves are respectively formed on the sides of the two protective shells away from each other. The two limiting grooves are adapted to the two limiting blocks, and a rotating groove is formed on the right side of the left protective shell.

[0012] Preferably, the rotating clamping block is rotatably connected inside the rotating groove. The rotating clamping block is a sector-shaped block, and the rotating shaft is rotatably connected to the front wall of the rotating groove;

[0013] The rear wall of the rotating shaft extends past the rotating clamping block, and the rotating shaft is fixedly connected to the rotating clamping block. The rear end of the rotating shaft is rotatably connected to the rear wall of the rotating groove.

[0014] Preferably, the slot is formed on the front side of the rotating clamping block, and the control groove is formed on the front side of the protective shell. The control groove is communicated with the rotating groove;

[0015] The control rod is fixedly connected to the front side of the rotating clamping block, and the front side of the control rod extends out of the protective shell through the control groove.

[0016] Preferably, the clamping groove is formed on the left side of the right protective shell. The clamping groove is adapted to the rotating clamping block, and the connecting groove is formed on the front side of the protective shell;

[0017] The inserting rod groove is formed on the rear wall of the connecting groove. The rear wall of the inserting rod groove extends into the interior of the protective shell, and the rear wall of the inserting rod groove extends past the clamping groove.

[0018] Preferably, the connecting block is slidably connected inside the connecting groove. The inserting rod is fixedly connected to the rear side of the connecting block. The rear side of the inserting rod extends into the interior of the inserting rod groove, and the inserting rod is adapted to the slot;

[0019] A spring is fixedly connected to the rear side of the connecting block. The spring is sleeved on the outer surface of the inserting rod, and the rear side of the spring is fixedly connected to the rear wall of the connecting groove.

[0020] Compared with the prior art, the present utility model provides a quartz furnace tube with high stability, having the following beneficial effects:

[0021] (1). For the quartz furnace tube with high stability, when the control rod is rotated clockwise, the control rod drives the rotating clamping block to rotate synchronously. Then, a part of the rotating clamping block will move into the clamping groove. At the same time, the connecting block is moved. After transmission, the inserting rod will move into the slot to form a clamping connection. Thus, the two protective shells can be fixed. The two protective shells will protect the air inlet pipe and the exhaust pipe. In this way, the air inlet pipe and the exhaust pipe of the quartz furnace tube can be protected, making it not easy to be knocked and damaged, and ensuring the safety and stability during the use of the quartz furnace tube.

[0022] (2) For the quartz furnace tube with high stability, the way that two limiting blocks extend into the interiors of two limiting grooves to form a limit makes it impossible for the two to rotate due to external forces after the two protective shells are fixedly clamped, further improving the protection function for the air inlet pipe and the exhaust pipe. Description of the Drawings

[0023] Figure 1 Schematic structural diagram of a quartz furnace tube with high stability of the present utility model;

[0024] Figure 2 Schematic front - side connection structural diagram of the furnace tube body of the present utility model;

[0025] Figure 3 Schematic cross - section connection structural diagram of the left protective shell of the present utility model;

[0026] Figure 4 Schematic cross - section connection structural diagram of the right protective shell of the present utility model.

[0027] In the figure: 1, furnace tube body; 2, furnace door; 3, fixing block; 4, limiting ring groove; 5, limiting block; 6, air inlet pipe; 7, exhaust pipe; 8, protective shell; 9, limiting ring; 10, limiting groove; 11, rotating groove; 12, rotating clamping block; 13, rotating shaft; 14, slot; 15, control groove; 16, control rod; 17, clamping groove; 18, connecting groove; 19, inserting rod groove; 20, connecting block; 21, inserting rod; 22, spring. Detailed Embodiment

[0028] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present utility model.

[0029] Please refer to Figures 1 to 4, the present utility model provides a new technical solution: a quartz furnace tube with high stability, including a furnace tube body 1, a furnace door 2 is arranged at the rear side of the furnace tube body 1, a fixing block 3 is fixedly connected to the front side of the furnace tube body 1, a limiting ring groove 4 is formed on the outer surface of the fixing block 3, limiting blocks 5 are fixedly connected to both the left and right sides of the outer surface of the limiting ring groove 4, an air inlet pipe 6 and an exhaust pipe 7 are arranged at the front side of the fixing block 3, the rear sides of the air inlet pipe 6 and the exhaust pipe 7 extend into the interior of the furnace tube body 1, and switching valves are arranged on both the air inlet pipe 6 and the exhaust pipe 7. Two protective shells 8 are arranged at the front side of the furnace tube body 1, the air inlet pipe 6 and the exhaust pipe 7 extend out of the two protective shells 8, and a clamping mechanism is arranged on the two protective shells 8. The two protective shells 8 are adapted to the fixing block 3 through the clamping mechanism. The clamping mechanism includes two limiting rings 9, two limiting grooves 10, a rotating groove 11, a rotating clamping block 12, a rotating shaft 13, a slot 14, a control groove 15, a control rod 16, a clamping groove 17, a connecting groove 18, a plug rod groove 19, a connecting block 20 and a plug rod 21.

[0030] Further, the two limiting rings 9 are fixedly connected to the inner surfaces of the two protective shells 8, the two limiting rings 9 are adapted to the limiting ring groove 4, the two limiting grooves 10 are respectively formed on the sides of the two protective shells 8 away from each other, the two limiting grooves 10 are adapted to the two limiting blocks 5, the rotating groove 11 is formed on the right side of the left protective shell 8, the rotating clamping block 12 is rotatably connected to the interior of the rotating groove 11, the rotating clamping block 12 is a sector block, the rotating shaft 13 is rotatably connected to the front wall of the rotating groove 11, the rear wall of the rotating shaft 13 extends past the rotating clamping block 12, the rotating shaft 13 is fixedly connected to the rotating clamping block 12, the rear end of the rotating shaft 13 is rotatably connected to the rear wall of the rotating groove 11, the slot 14 is formed on the front side of the rotating clamping block 12, the control groove 15 is formed on the front side of the protective shell 8, the control groove 15 is communicated with the rotating groove 11, the control rod 16 is fixedly connected to the front side of the rotating clamping block 12, and the front side of the control rod 16 extends out of the protective shell 8 through the control groove 15. The clamping groove 17 is formed on the left side of the right protective shell 8, the clamping groove 17 is adapted to the rotating clamping block 12, the connecting groove 18 is formed on the front side of the protective shell 8, the plug rod groove 19 is formed on the rear wall of the connecting groove 18, the rear wall of the plug rod groove 19 extends into the interior of the protective shell 8, the rear wall of the plug rod groove 19 extends past the clamping groove 17, the connecting block 20 is slidably connected to the interior of the connecting groove 18, the plug rod 21 is fixedly connected to the rear side of the connecting block 20, the rear side of the plug rod 21 extends into the interior of the plug rod groove 19, the plug rod 21 is adapted to the slot 14, a spring 22 is fixedly connected to the rear side of the connecting block 20, the spring 22 is sleeved on the outer surface of the plug rod 21, and the rear side of the spring 22 is fixedly connected to the rear wall of the connecting groove 18.

[0031] Further, the staff puts two protective cases 8 on the fixing block 3, so that the two limiting rings 9 are inside the limiting ring grooves 4. At the same time, the two limiting blocks 5 extend into the two limiting grooves 10 to form a limit. Then, the staff rotates the control rod 16 clockwise, and the control rod 16 drives the rotating block 12 to rotate synchronously. As a result, a part of the rotating block 12 will move into the clamping groove 17. At the same time, the connecting block 20 is pulled forward, and the connecting block 20 will drive the inserting rod 21 to move forward. At the same time, the spring 22 begins to be in a stretched state, and the inserting rod 21 will move out of the clamping groove 17. When the rotating block 12 moves into the clamping groove 17 and the slot 14 moves to the position of the inserting rod 21, the connecting block 20 is released. Then, the spring 22 begins to reset from the stretched state. The spring 22 drives the connecting block 20 to reset synchronously. The connecting block 20 drives the inserting rod 21 to move backward. As a result, the inserting rod 21 will move into the clamping groove 17, and at the same time, the inserting rod 21 will move into the slot 14 to form a clamping connection. Thus, the two protective cases 8 can be fixed. The two protective cases 8 will protect the intake pipe 6 and the exhaust pipe 7. In this way, the intake pipe 6 and the exhaust pipe 7 of the quartz furnace tube can be protected, so that it is not easy to be knocked and damaged, ensuring the safety and stability of the quartz furnace tube during use.

[0032] Working principle: The staff puts two protective cases 8 on the fixing block 3, so that the two limiting rings 9 are inside the limiting ring grooves 4. At the same time, the two limiting blocks 5 extend into the two limiting grooves 10 to form a limit. Then, the staff rotates the control rod 16 clockwise, and the control rod 16 drives the rotating block 12 to rotate synchronously. As a result, a part of the rotating block 12 will move into the clamping groove 17. At the same time, the connecting block 20 is pulled forward, and the connecting block 20 will drive the inserting rod 21 to move forward. At the same time, the spring 22 begins to be in a stretched state, and the inserting rod 21 will move out of the clamping groove 17. When the rotating block 12 moves into the clamping groove 17 and the slot 14 moves to the position of the inserting rod 21, the connecting block 20 is released. Then, the spring 22 begins to reset from the stretched state. The spring 22 drives the connecting block 20 to reset synchronously. The connecting block 20 drives the inserting rod 21 to move backward. As a result, the inserting rod 21 will move into the clamping groove 17, and at the same time, the inserting rod 21 will move into the slot 14 to form a clamping connection. Thus, the two protective cases 8 can be fixed. The two protective cases 8 will protect the intake pipe 6 and the exhaust pipe 7.

[0033] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A quartz furnace tube with high stability, comprising a furnace tube body (1), a furnace door (2) being arranged at the rear side of the furnace tube body (1), a fixing block (3) being fixedly connected to the front side of the furnace tube body (1), and a limiting ring groove (4) being arranged on the outer surface of the fixing block (3); The left and right sides of the outer surface of the limiting ring groove (4) are fixedly connected to the limiting block (5), and the front side of the fixed block (3) is provided with an air intake pipe (6) and an exhaust pipe (7); The rear sides of the air inlet pipe (6) and the exhaust pipe (7) extend into the interior of the furnace tube body (1), and the air inlet pipe (6) and the exhaust pipe (7) are both provided with an on-off valve, characterized in that: Two protective shells (8) are arranged on the front side of the furnace tube body (1), and the air inlet pipe (6) and the exhaust pipe (7) extend out of the two protective shells (8); The two protective shells (8) are provided with a clamping mechanism, and the two protective shells (8) are adapted to the fixing block (3) through the clamping mechanism; The clamping mechanism comprises two limiting rings (9), two limiting grooves (10), a rotating groove (11), a rotating clamping block (12), a rotating shaft (13), a slot (14), a control slot (15), a control rod (16), a clamping slot (17), a connecting slot (18), a rod insertion slot (19), a connecting block (20) and a rod insertion rod (21).

2. A quartz furnace tube with high stability according to claim 1, characterized in that: The two limiting rings (9) are both fixedly connected to the inner surfaces of the two protective shells (8), and the two limiting rings (9) are both matched with the limiting ring grooves (4); The two limit grooves (10) are respectively formed on the sides of the two protective shells (8) that are away from each other. The two limit grooves (10) are matched with the two limit blocks (5). The rotation groove (11) is formed on the right side of the left protective shell (8).

3. A quartz furnace tube with high stability according to claim 1, characterized in that: The rotating block (12) is rotatably connected to the inside of the rotating groove (11); the rotating block (12) is a fan-shaped block; and the rotating shaft (13) is rotatably connected to the front wall of the rotating groove (11); The rear wall of the rotating shaft (13) extends through the rotating block (12), the rotating shaft (13) is fixedly connected to the rotating block (12), and the rear end of the rotating shaft (13) is rotatably connected to the rear wall of the rotating groove (11).

4. A quartz furnace tube with high stability according to claim 1, characterized in that: The slot (14) is provided on the front side of the rotating block (12), the control slot (15) is provided on the front side of the protective shell (8), and the control slot (15) is connected to the rotating slot (11); The control rod (16) is fixedly connected to the front side of the rotating block (12), and the front side of the control rod (16) extends out of the protective shell (8) through the control slot (15).

5. The quartz furnace tube with high stability according to claim 1, characterized in that: The clamping groove (17) is provided on the left side of the right protective shell (8), the clamping groove (17) is adapted to the rotating clamping block (12), and the connecting groove (18) is provided on the front side of the protective shell (8); The rod insertion groove (19) is formed on the rear wall of the connection groove (18), the rear wall of the rod insertion groove (19) extends into the interior of the protective shell (8), and the rear wall of the rod insertion groove (19) extends over the clamping groove (17).

6. A quartz furnace tube with high stability according to claim 1, characterized in that: The connecting block (20) is slidably connected to the inside of the connecting groove (18), the insertion rod (21) is fixedly connected to the rear side of the connecting block (20), the rear side of the insertion rod (21) extends into the inside of the insertion rod groove (19), and the insertion rod (21) is adapted to the slot (14); A spring (22) is fixedly connected to the rear side of the connection block (20). The spring (22) is sleeved on the outer surface of the insertion rod (21). The rear side of the spring (22) is fixedly connected to the rear wall of the connection groove (18).

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